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US5866942A Expired / Lapsed US ⏱️ 0.0 years remaining

Metal base package for a semiconductor device

Assignee: NEC Corp
•
Filing: 1996-04-26
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Granted: 1999-02-02
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Expires: 2016-04-26
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Abstract

Abstract A laminate package structure for a semiconductor device having a high resistance to humidity, reliability and electrical performance. A polyimide layer and copper foil patterns are formed on a metal base in the form of metal sheet. The metal base comprises a ground pattern maintained at the ground potential, and a plurality of land patterns on which solder balls are formed. The copper foil pattern comprises an island pattern on which an LSI chip is mounted, and an internal wiring patterns connected to electrodes of the LSI chip. The metal base pattern and the internal wiring patterns are electrically interconnected through via-plugs formed in through-holes by an electrolytic plating. A cap is adhesively bonded to the laminated metal base or one of the metal foil patterns.

Inventors

  • 👤 Katsunobu Suzuki
  • 👤 Katsuhiko Suzuki
  • 👤 Akira Haga
  • 👤 Isamu Sorimachi
  • 👤 Hiroyuki Uchida

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-08 19:43
CPC Classifications
H; H10; H10W; H10W70/00; H10W70/60; H10W70/62; H10W70/63; H10W70/635; H10W72/00; H10W90/00; H10W90/701; H05; H05K; H05K3/00; H05K3/44; H05K3/445; H05K3/46; H05K3/4611; H05K3/4641; H05K3/4644; H05K3/4652; H10W72/071; H10W72/075; H10W72/07551; H10W72/07554; H10W72/50; H10W72/531; H10W72/5363; H10W72/541; H10W72/5449; H10W72/547; H10W72/851; H10W72/874; H10W72/877; H10W72/884; H10W72/90; H10W72/951; H10W72/952; H10W74/00; H10W90/721; H10W90/724; H10W90/731; H10W90/734; H10W90/751; H10W90/754

Claims Analysis

Total Claims: 22
Claim 1
Independent Claim 150 words
A laminate package structure for a semiconductor device comprising a metal base forming a plurality of base patterns including a plurality of land patterns and at least one ground pattern disposed in spaced relationship with said land patterns, wherein said at least one ground pattern includes a ring pattern disposed around an outer periphery of said package structure and a central pattern surrounded by said ring pattern, at least one of said ring pattern and central pattern being grounded, and insulating layer made of an organic insulator formed on said metal base, said insulating layer having a plurality of through-holes, a plurality of via-plugs each formed in a corresponding one of said through-holes, a metal foil layer forming a plurality of foil patterns formed on said insulating layer and including a plurality of interconnect patterns, said land patterns and ground patterns being connected to said interconnect patterns through said via-plugs.
Claim 2
Dependent Claim 150 words
A laminate package structure for a semiconductor device comprising a metal base forming a plurality of base patterns including a plurality of land patterns and at least one ground pattern disposed in spaced relationship with said land patterns, wherein said at least one ground pattern includes a ring pattern disposed around an outer periphery of said package structure and a central pattern surrounded by said ring pattern, at least one of said ring pattern and central pattern being grounded, and insulating layer made of an organic insulator formed on said metal base, said insulating layer having a plurality of through-holes, a plurality of via-plugs each formed in a corresponding one of said through-holes, a metal foil layer forming a plurality of foil patterns formed on said insulating layer and including a plurality of interconnect patterns, said land patterns and ground patterns being connected to said interconnect patterns through said via-plugs.
Claim 3
Dependent Claim 21 words
A laminate package structure according to claim 1 further comprising a bump formed on a corresponding one of said interconnect patterns.
Claim 4
Dependent Claim 26 words
A laminate package structure according to claim 1 wherein said foil pattern further includes an island pattern on which a semiconductor chip is to be mounted.
Claim 5
Dependent Claim 40 words
A laminate package structure according to claim 1 wherein said base patterns further include an island pattern exposed in a cavity formed in said metal layer and insulating layer, said island pattern constituting a space for mounting a semiconductor chip.
Claim 6
Dependent Claim 28 words
A laminate package structure according to claim 1 wherein said at least one ground pattern includes a ring pattern disposed around an outer periphery of said package structure.
Claim 7
Dependent Claim 27 words
A laminate package structure according to claim 1 wherein said ring pattern and said central pattern define a space therebetween for mounting at least one chip component.
Claim 8
Dependent Claim 25 words
A laminate package structure according to claim 1 further comprising a coating resin layer covering said ground pattern and a space between said base patterns.
Claim 9
Dependent Claim 165 words
A laminate package structure for a semiconductor device comprising a metal base forming a plurality of base patterns including a plurality of land patterns and at least one ground pattern disposed in spaced relationship with said land patterns, an insulating layer made of an organic insulator formed on said metal base, said insulating layer having a plurality of through-holes a plurality of via-plugs each formed in a corresponding one of said through-holes, a metal foil layer forming a plurality of foil patterns formed on said insulating layer and including a plurality of interconnect patterns, said land patterns and ground pattern being connected to said interconnect patterns through said via-plugs, further comprising another insulating layer and another metal foil layer consecutively formed on said metal foil layer, said another insulating layer having at least one via-hole therein, and another via-plug formed in said via-hole, said another metal foil layer including another interconnect pattern connected to a corresponding one of said interconnect patterns through said another via-plug.
Claim 10
Dependent Claim 165 words
A laminate package structure for a semiconductor device comprising a metal base forming a plurality of base patterns including a plurality of land patterns and at least one ground pattern disposed in spaced relationship with said land patterns, an insulating layer made of an organic insulator formed on said metal base, said insulating layer having a plurality of through-holes a plurality of via-plugs each formed in a corresponding one of said through-holes, a metal foil layer forming a plurality of foil patterns formed on said insulating layer and including a plurality of interconnect patterns, said land patterns and ground pattern being connected to said interconnect patterns through said via-plugs, further comprising another insulating layer and another metal foil layer consecutively formed on said metal foil layer, said another insulating layer having at least one via-hole therein, and another via-plug formed in said via-hole, said another metal foil layer including another interconnect pattern connected to a corresponding one of said interconnect patterns through said another via-plug.
Claim 11
Dependent Claim 41 words
A laminate package structure according to claim 8 further comprising a cap, wherein said another metal foil layer further includes a ring pattern disposed around an outer periphery of said package structure, and said cap is bonded to said ring pattern.
Claim 12
Dependent Claim 40 words
A laminate package structure according to claim 1 further comprising a cap, wherein said metal foil pattern further includes a ring pattern disposed around an outer periphery of said package structure, and said cap is bonded to said ring pattern.
Claim 13
Dependent Claim 52 words
A laminate package structure according to claim 1 further including a cap, wherein said metal base is exposed from said metal foil layer and said insulating layer at ring portion of said metal base disposed around an outer periphery of said package structure, and said cap is bonded to said ring portion.
Claim 14
Dependent Claim 17 words
A laminate package structure according to claim 1 wherein said via-plug is formed of a plating layer.
Claim 15
Dependent Claim 210 words
A laminate package structure comprising a first laminate section, a second laminate section, a first insulating layer having a via-hole, and a via-plug formed in said via-hole, each of said first and second section including a metal base forming a plurality of base patterns including a plurality of land patterns and at least one ground pattern disposed in spaced relationship with said land patterns, a second layer made of an organic insulator formed on said metal base, said second insulating layer having a plurality of first through-holes, a plurality of first via-plugs each formed in a corresponding one of said through-holes, a metal foil layer forming a plurality of foil patterns formed on said second insulating layer and including a plurality of interconnect patterns, said land patterns and ground pattern being connected to said interconnect patterns through said first via-plugs, wherein said first laminate section and second laminate section are disposed opposite to each other, said second insulating layers of both said laminate sections being opposed to each other with said first insulating layer disposed therebetween, wherein said metal foil layers of both said laminate sections are connected to each other through said second via-plugs, and wherein said second laminate section further includes flip-flop bumps formed on said land patterns.
Claim 16
Dependent Claim 210 words
A laminate package structure comprising a first laminate section, a second laminate section, a first insulating layer having a via-hole, and a via-plug formed in said via-hole, each of said first and second section including a metal base forming a plurality of base patterns including a plurality of land patterns and at least one ground pattern disposed in spaced relationship with said land patterns, a second layer made of an organic insulator formed on said metal base, said second insulating layer having a plurality of first through-holes, a plurality of first via-plugs each formed in a corresponding one of said through-holes, a metal foil layer forming a plurality of foil patterns formed on said second insulating layer and including a plurality of interconnect patterns, said land patterns and ground pattern being connected to said interconnect patterns through said first via-plugs, wherein said first laminate section and second laminate section are disposed opposite to each other, said second insulating layers of both said laminate sections being opposed to each other with said first insulating layer disposed therebetween, wherein said metal foil layers of both said laminate sections are connected to each other through said second via-plugs, and wherein said second laminate section further includes flip-flop bumps formed on said land patterns.
Claim 17
Dependent Claim 25 words
A laminate package structure according to claim 1 wherein said metal base contains at least one of Cu and Al as a main constituent thereof.
Claim 18
Dependent Claim 35 words
A semiconductor device including the laminate package structure as defined in claim 1 and a semiconductor chip bonded to said laminate package structure by one of organic resin, metal-mixed resin and a low melting metal.
Claim 19
Dependent Claim 29 words
A semiconductor device according to claim 15 further including a cap made of one of a metal and a resin, said cap being bonded to said laminate package structure.
Claim 20
Dependent Claim 24 words
A semiconductor device according to claim 15 further including a plurality of solder balls each formed on a corresponding one of said land patterns.
Claim 21
Dependent Claim 22 words
A semiconductor device according to claim 15 further including a plurality of solder balls formed in spaced relationship with said ground pattern.
Claim 22
Dependent Claim 34 words
A semiconductor device including the laminate package structure as defined in claim 2 and a semiconductor chip connected to said bump by flip chip bonding using one of resin and a low melting metal.

References Cited (Backward Citations)

US4835598A Cited
US5592025A Cited
US5450290A Cited
US5397917A Cited
US5619070A Cited
US5467253A Cited
US5561322A Cited
US5640047A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2002-02-01 2002-08-03 2003-02-02 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2006-02-01 2006-08-03 2007-02-02 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2010-02-01 2010-08-03 2011-02-02 $7700.00 Window Closed / Lapsed

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