Patent US5862003A successfully refreshed from Google Patents.
US5862003A
Expired / Lapsed
US
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Micromotion amplifier
Assignee: Cornell Research Foundation Inc
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Filing: 1996-06-20
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Granted: 1999-01-19
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Expires: 2016-06-20
Abstract
Abstract A microelectromechanical micromotion amplifier generates a controlled lateral motion in response to a small deformation in the axial direction of a MEM beam or body. Lateral motion is produced by buckling of one or more long slender beams, the buckling motion being relatively large with respect to the axial motion which causes such lateral motion. The beams may be designed with a slight asymmetry to achieve gradual buckling in a desired direction. The device is capable of amplifying a driving motion in the range of 1-5 micrometers to produce a transverse motion in the range of 50-200 micrometers.
Inventors
- 👤 Muhammad T. A. Saif
- 👤 Trent Huang
- 👤 Noel C. MacDonald
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 23:14
CPC Classifications
H; H02; H02N; H02N1/00; H02N1/002; H02N1/006; H02N1/008; B; B81; B81B; B81B3/00; B81B3/0035; B81B3/0037; G; G02; G02B; G02B26/00; G02B26/08; G02B26/0816; G02B26/0833; B81B2201/00; B81B2201/04; B81B2201/045; B81B2203/00; B81B2203/01; B81B2203/0109; B81B2203/03; B81B2203/0315; B81B2203/05; B81B2203/051; B81B2203/053; B81B2203/058; Y; Y10; Y10S; Y10S359/00; Y10S359/904; Y10S977/00; Y10S977/70; Y10S977/724; Y10S977/725
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
106 words
A micromotion amplifier, comprising: an elongated microelectromechanical beam having a first end, a second end, and a longitudinal axis; a reference; said first end of said beam being connected to said reference; an actuator energizable for motion with respect to said reference; and said actuator being connected to said second end of said beam so that energization of said actuator tends to move said actuator along said longitudinal axis to apply an axial force to said beam and to produce resultant transverse buckling of said beam to thereby convert axial motion of said actuator to amplified transverse motion of said beam in a plane of motion.
Claim 2
Dependent Claim
106 words
A micromotion amplifier, comprising: an elongated microelectromechanical beam having a first end, a second end, and a longitudinal axis; a reference; said first end of said beam being connected to said reference; an actuator energizable for motion with respect to said reference; and said actuator being connected to said second end of said beam so that energization of said actuator tends to move said actuator along said longitudinal axis to apply an axial force to said beam and to produce resultant transverse buckling of said beam to thereby convert axial motion of said actuator to amplified transverse motion of said beam in a plane of motion.
Claim 3
Dependent Claim
10 words
The amplifier of claim 1, wherein said beam is flexible.
Claim 4
Dependent Claim
10 words
The amplifier of claim 2, wherein said beam is asymmetric.
Claim 5
Dependent Claim
28 words
The amplifier of claim 1, wherein said beam comprises multiple coaxial rigid segments connected to each other, to said actuator and to said reference by corresponding flexible springs.
Claim 6
Dependent Claim
10 words
The amplifier of claim 4, wherein said segments are asymmetric.
Claim 7
Dependent Claim
23 words
The amplifier of claim 4, wherein said flexible springs comprise folded beams for controlled motion of said beam in said plane of motion.
Claim 8
Dependent Claim
10 words
The amplifier of claim 1, wherein said reference is fixed.
Claim 9
Dependent Claim
16 words
The amplifier of claim 1, wherein said reference is movable axially with respect to said beam.
Claim 10
Dependent Claim
21 words
The amplifier of claim 1, wherein said reference comprises an intermediate stage mounted for motion with respect to a second reference.
Claim 11
Dependent Claim
24 words
The amplifier of claim 1, further including a stage centrally mounted on said beam for controlled transverse motion in response to said axial force.
Claim 12
Dependent Claim
75 words
The amplifier of claim 1, wherein said reference comprises an intermediate stage mounted by buckling beams to a second reference for relative motion with respect to said second reference along an X axis, and further including: a central stage mounted by buckling beams to said intermediate stage for relative motion with respect to said intermediate stage along a Y axis to produce a stage within a stage and controlled motion along X and Y axes.
Claim 13
Dependent Claim
129 words
A micromotion amplifier, comprising: first and second parallel, elongated microelectromechanical beams each having a first end, a second end, and a longitudinal axis; a reference, said first ends of said beams being connected to said reference; a stage supported by said beams; an actuator energizable for motion with respect to said reference, said actuator being connected to said second ends of said beams so that energization of said actuator tends to move said actuator in a direction parallel to the longitudinal axes of said beams to apply an axial force to said beams and to produce resultant transverse buckling of said beam to thereby convert axial motion of said actuator to amplified transverse motion of said beams and controlled transverse motion of said stage in a plane of motion.
Claim 14
Dependent Claim
129 words
A micromotion amplifier, comprising: first and second parallel, elongated microelectromechanical beams each having a first end, a second end, and a longitudinal axis; a reference, said first ends of said beams being connected to said reference; a stage supported by said beams; an actuator energizable for motion with respect to said reference, said actuator being connected to said second ends of said beams so that energization of said actuator tends to move said actuator in a direction parallel to the longitudinal axes of said beams to apply an axial force to said beams and to produce resultant transverse buckling of said beam to thereby convert axial motion of said actuator to amplified transverse motion of said beams and controlled transverse motion of said stage in a plane of motion.
Claim 15
Dependent Claim
10 words
The amplifier of claim 12, wherein said beams are flexible.
Claim 16
Dependent Claim
10 words
The amplifier of claim 13, wherein said beams are asymmetrical.
Claim 17
Dependent Claim
31 words
The amplifier of claim 12, wherein each said beam comprises multiple rigid segments connected between said stage and said actuator and multiple rigid segments connected between said stage and said reference.
Claim 18
Dependent Claim
18 words
The amplifier of claim 15, wherein said beams are asymmetrically mounted to said actuator and to said reference.
Claim 19
Dependent Claim
32 words
The amplifier of claim 16, further including a stop to limit the motion of said actuator to thereby limit the transverse buckling of said beam, and digitizes the tilting of the mirror.
Claim 20
Dependent Claim
25 words
The amplifier of claim 17, further including a stop to limit the motion of said actuator to thereby limit the transverse buckling of said beam.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-01-18 | 2002-07-20 | 2003-01-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-01-18 | 2006-07-20 | 2007-01-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-01-18 | 2010-07-20 | 2011-01-19 | $7700.00 | Window Closed / Lapsed |