Patent US5856674A successfully refreshed from Google Patents.
US5856674A
Expired / Lapsed
US
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Filament for ion implanter plasma shower
Assignee: Axcelis Technologies Inc
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Filing: 1997-09-16
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Granted: 1999-01-05
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Expires: 2017-09-16
Abstract
Abstract A ribbon filament (86) is provided for a thermionic emission device. The filament comprises an elongated body having a configuration defined by a length, a width, and a thickness. The length comprises a central portion (96) and first and second end portions (98) on either side of the central portion. The width of the central portion is greater than that of the first and second end portions. In addition, the thickness of the filament is substantially less than the width along its entire length. The ribbon filament (86) may be configured as a single helical coil having its first and second end portions (98) mounted to first and second legs (85), respectively, at locations of slots therein. Preferably, the filament (86) is comprised of tungsten and the first and second legs (85) are also comprised of tungsten.
Inventors
- 👤 Peter L. Kellerman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:14
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/026; H01J1/00; H01J1/02; H01J1/13; H01J1/15; H01J1/16; H01J37/30; H01J37/317; H01J37/3171; H01J2237/00; H01J2237/004; H01J2237/0041; H01J2237/30; H01J2237/317; H01J2237/31701
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
83 words
A ribbon filament (86) for a thermionic emission device, said filament comprising an elongated body having a configuration defined by a length, a width, and a thickness, said length comprising a central portion (96) and first and second end portions (98) on either side of said central portion, said width of said central portion being greater than that of said first and second end portions, said thickness of said filament being substantially less than said width along the entire length of said filament.
Claim 2
Dependent Claim
83 words
A ribbon filament (86) for a thermionic emission device, said filament comprising an elongated body having a configuration defined by a length, a width, and a thickness, said length comprising a central portion (96) and first and second end portions (98) on either side of said central portion, said width of said central portion being greater than that of said first and second end portions, said thickness of said filament being substantially less than said width along the entire length of said filament.
Claim 3
Dependent Claim
17 words
The ribbon filament (86) of claim 1, wherein said filament is configured as a single helical coil.
Claim 4
Dependent Claim
14 words
The ribbon filament (86) of claim 1, wherein said filament is comprised of tungsten.
Claim 5
Dependent Claim
36 words
The ribbon filament (86) of claim 1, wherein said length is approximately within the range of 5.0-6.0 centimeters (cm), said width is approximately within the range of 2.0-3.0 cm, and said thickness is approximately 0.5 cm.
Claim 6
Dependent Claim
106 words
A filament assembly (76) comprising: (i) a ribbon filament (86) for a thermionic emission device, said filament comprising an elongated body having a configuration defined by a length, a width, and a thickness, said length comprising a central portion (96) and first and second end portions (98) on either side of said central portion, said width of said central portion being greater than that of said first and second end portions, said thickness of said filament being substantially less than said width along the entire length of said filament; and (ii) first and second legs (85) attached, respectively, to the first and second end portions (98).
Claim 7
Dependent Claim
106 words
A filament assembly (76) comprising: (i) a ribbon filament (86) for a thermionic emission device, said filament comprising an elongated body having a configuration defined by a length, a width, and a thickness, said length comprising a central portion (96) and first and second end portions (98) on either side of said central portion, said width of said central portion being greater than that of said first and second end portions, said thickness of said filament being substantially less than said width along the entire length of said filament; and (ii) first and second legs (85) attached, respectively, to the first and second end portions (98).
Claim 8
Dependent Claim
18 words
The filament assembly (76) of claim 5, wherein said filament (86) is configured as a single helical coil.
Claim 9
Dependent Claim
26 words
The filament assembly (76) of claim 5, wherein said filament (86) is comprised of tungsten and said first and second legs (85) are comprised of tungsten.
Claim 10
Dependent Claim
29 words
The filament assembly (76) of claim 5, wherein said first and second legs are provided with slots (94) into which said first and second end portions (98) are inserted.
Claim 11
Dependent Claim
29 words
The filament assembly (76) of claim 5, wherein each of said legs (85) is provided with a shaft (88) and a distal portion (90) separated by a shoulder (92).
Claim 12
Dependent Claim
18 words
The filament assembly (76) of claim 9, wherein said distal portion (90) is thicker than said shaft (88).
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-01-04 | 2002-07-06 | 2003-01-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-01-04 | 2006-07-06 | 2007-01-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-01-04 | 2010-07-06 | 2011-01-05 | $7700.00 | Window Closed / Lapsed |