US5854302A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Partially polymerized divinylsiloxane linked bisbenzocyclobutene resins and methods for making said resins
Assignee: Dow Chemical Co
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Filing: 1994-04-14
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Granted: 1998-12-29
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Expires: 2014-04-14
Abstract
Abstract A process for forming a partially polymerized DVS resin comprising heating DVS monomer (1,3-bis(2-bicyclo 4.2.0!octa-1,3,5-trien-3-ylethenyl)-1,1,3,3-tetramethyldisiloxane) in a solvent at a concentration of DVS monomer in the solvent such that: (a) the DVS resin, when applied and polymerized in a thin layer on a solid substrate does not craze; and (b) the DVS resin, is rendered photocurable by the addition of at least one photosensitive agent in an amount sufficient to convert the mixture to an organic-insoluble solid upon exposing the mixture to photon radiation and the film retention upon development with a solvent is at least 50 percent. The DVS resin may be used as an interlayer dielectric to fabricate thin film multichip modules.
Inventors
- 👤 Pamela S. Foster
- 👤 Ernest L. Ecker
- 👤 Edward W. Rutter, Jr.
- 👤 Eric S. Moyer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 15:20
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/038; G03F7/075; G03F7/0757; C; C09; C09D; C09D4/00
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
167 words
A DVS resin formed by a process comprising heating DVS monomer in a solvent at an initial concentration of DVS monomer in the solvent of from about 12 to about 32 weight percent such that: (a) the DVS resin, when applied and polymerized in a thin layer on a solid substrate does not craze; and (b) the DVS resin, when formulated by adding three weight percent 2,6-bis(4-azidobenzylidene)-4-methylcyclohexanone, spun coated onto a substrate, exposed to a photon source to cure at least a portion of the resin formulation beyond its gel point, any unexposed portions of the formulation are removed with a solvent and the photocured resin is finally cured with heat, one obtains a film retention of at least 75 percent, which DVS resin (1) has a weight average molecular weight of greater than 90,000 g/mole as determined by size exclusion chromatography using narrow molecular weight range linear atactic polystyrene polymers as standards; (2) is soluble in mesitylene; and (3) is not polymerized beyond its gel point.
Claim 2
Dependent Claim
167 words
A DVS resin formed by a process comprising heating DVS monomer in a solvent at an initial concentration of DVS monomer in the solvent of from about 12 to about 32 weight percent such that: (a) the DVS resin, when applied and polymerized in a thin layer on a solid substrate does not craze; and (b) the DVS resin, when formulated by adding three weight percent 2,6-bis(4-azidobenzylidene)-4-methylcyclohexanone, spun coated onto a substrate, exposed to a photon source to cure at least a portion of the resin formulation beyond its gel point, any unexposed portions of the formulation are removed with a solvent and the photocured resin is finally cured with heat, one obtains a film retention of at least 75 percent, which DVS resin (1) has a weight average molecular weight of greater than 90,000 g/mole as determined by size exclusion chromatography using narrow molecular weight range linear atactic polystyrene polymers as standards; (2) is soluble in mesitylene; and (3) is not polymerized beyond its gel point.
Claim 3
Dependent Claim
68 words
A DVS resin wherein the radius of gyration at an absolute molecular weight of 160,000 is less than 90 Angstroms using SEC/LALLS, which DVS resin (1) has a weight average molecular weight of greater than 90,000 g/mole as determined by size exclusion chromatography using narrow molecular weight range linear atactic polystyrene polymers as standards; (2) is soluble in mesitylene; and (3) is not polymerized beyond its gel point.
Claim 4
Dependent Claim
68 words
A DVS resin wherein the radius of gyration at an absolute molecular weight of 160,000 is less than 90 Angstroms using SEC/LALLS, which DVS resin (1) has a weight average molecular weight of greater than 90,000 g/mole as determined by size exclusion chromatography using narrow molecular weight range linear atactic polystyrene polymers as standards; (2) is soluble in mesitylene; and (3) is not polymerized beyond its gel point.
Claim 5
Dependent Claim
103 words
A DVS resin wherein if the DVS resin is solvent stripped and subsequently further cured at 190° C., and the rate of increase of the shear storage modulus G' from just beyond gelation is measured, then the exponent describing this rate of increase of G' as a function of change in fractional conversion is 400 or less, which DVS resin (1) has a weight average molecular weight of greater than 90,000 g/mole as determined by size exclusion chromatography using narrow molecular weight range linear atactic polystyrene polymers as standards; (2) is soluble in mesitylene; and (3) is not polymerized beyond its gel point.
Claim 6
Dependent Claim
103 words
A DVS resin wherein if the DVS resin is solvent stripped and subsequently further cured at 190° C., and the rate of increase of the shear storage modulus G' from just beyond gelation is measured, then the exponent describing this rate of increase of G' as a function of change in fractional conversion is 400 or less, which DVS resin (1) has a weight average molecular weight of greater than 90,000 g/mole as determined by size exclusion chromatography using narrow molecular weight range linear atactic polystyrene polymers as standards; (2) is soluble in mesitylene; and (3) is not polymerized beyond its gel point.
Claim 7
Dependent Claim
82 words
A DVS resin formed by a process which consists essentially of heating DVS monomer in a solvent at an initial concentration of DVS monomer in the solvent of from about 12 to about 32 weight percent, which DVS resin (1) has a weight average molecular weight of greater than 90,000 g/mole as determined by size exclusion chromatography using narrow molecular weight range linear atactic polystyrene polymers as standards; (2) is soluble in mesitylene; and (3) is not polymerized beyond its gel point.
Claim 8
Dependent Claim
82 words
A DVS resin formed by a process which consists essentially of heating DVS monomer in a solvent at an initial concentration of DVS monomer in the solvent of from about 12 to about 32 weight percent, which DVS resin (1) has a weight average molecular weight of greater than 90,000 g/mole as determined by size exclusion chromatography using narrow molecular weight range linear atactic polystyrene polymers as standards; (2) is soluble in mesitylene; and (3) is not polymerized beyond its gel point.
Claim 9
Dependent Claim
24 words
The DVS resin of claim 4 wherein the initial concentration of monomer in the solvent is from about 20 to about 30 weight percent.
Claim 10
Dependent Claim
23 words
The DVS resin of claim 4 wherein the initial concentration of monomer in the solvent is 25 percent plus or minus 1 percent.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-12-28 | 2002-06-29 | 2002-12-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-12-28 | 2006-06-29 | 2006-12-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-12-28 | 2010-06-29 | 2010-12-29 | $7700.00 | Window Closed / Lapsed |