US5845662A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Device for treatment of wafer-shaped articles, especially silicon wafers
Assignee: Lam Research AG
•
Filing: 1996-02-28
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Granted: 1998-12-08
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Expires: 2016-02-28
Abstract
Abstract In chamber (1) a basket which is formed by ring (3) and retaining fingers (4) is pivotally mounted. By turning the basket, wafer-shaped article (7) which is held by retaining fingers (4) at an axial distance from ring (3) is caused to rotate. Nozzle (10 and 11) from which a treatment fluid can be applied to article (7) is assigned both to upper and lower large surface (9) of article (7).
Inventors
- 👤 Franz Sumnitsch
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:24
CPC Classifications
H; H10; H10P; H10P95/00; H10P72/00; H10P72/70; H10P72/76; H10P72/7604; H10P72/7608; Y; Y10; Y10S; Y10S134/00; Y10S134/902
Claims Analysis
Total Claims: 34
Claim 1
Independent Claim
168 words
Device for treatment of wafer-shaped articles having opposite planar surfaces, located in a chamber, with treatment fluid, comprising: a rotary mounting attached to said chamber interior for supporting a said wafer-shaped article; a first nozzle positioned in proximity to said rotary mounting to permit unobstructed application of said treatment fluid to said wafer-shaped article; and a second nozzle positioned in proximity to said rotary mounting to permit unobstructed application of said treatment fluid to said wafer-shaped article and positioned generally opposing said first nozzle, wherein said first nozzle unobstructedly applies said treatment fluid to a first surface of said wafer-shaped article and said second nozzle unobstructedly applies treatment fluid to a second surface of said wafer-shaped article; said rotary mounting comprising a ring pivotally mounted in said chamber to permit rotational displacement in a plane of said wafer-shaped article, and plural retaining fingers operatively attached to said ring, said fingers adjoining an outer periphery of said wafer-shaped article in a plane distant from a plane of said ring.
Claim 2
Dependent Claim
168 words
Device for treatment of wafer-shaped articles having opposite planar surfaces, located in a chamber, with treatment fluid, comprising: a rotary mounting attached to said chamber interior for supporting a said wafer-shaped article; a first nozzle positioned in proximity to said rotary mounting to permit unobstructed application of said treatment fluid to said wafer-shaped article; and a second nozzle positioned in proximity to said rotary mounting to permit unobstructed application of said treatment fluid to said wafer-shaped article and positioned generally opposing said first nozzle, wherein said first nozzle unobstructedly applies said treatment fluid to a first surface of said wafer-shaped article and said second nozzle unobstructedly applies treatment fluid to a second surface of said wafer-shaped article; said rotary mounting comprising a ring pivotally mounted in said chamber to permit rotational displacement in a plane of said wafer-shaped article, and plural retaining fingers operatively attached to said ring, said fingers adjoining an outer periphery of said wafer-shaped article in a plane distant from a plane of said ring.
Claim 3
Dependent Claim
18 words
Device according to claim 1, wherein said retaining fingers elastically adjoin said outer periphery of said wafer-shaped article.
Claim 4
Dependent Claim
11 words
Device according to claim 2, wherein said retaining fingers are spring-elastic.
Claim 5
Dependent Claim
35 words
Device according to claim 2, wherein one of said retaining fingers is swivel-mounted in said ring and is under the action of a tension spring which radially loads an end of said one retaining finger.
Claim 6
Dependent Claim
45 words
Device according to claim 4, wherein said tension spring comprises a first spring end attached to an end of said one retaining finger opposite a free end of said one retaining finger adjoining said wafer-shaped article and a second spring end attached to said ring.
Claim 7
Dependent Claim
26 words
Device according to claim 1, wherein said retaining fingers further comprise ends which engage the outer periphery of wafer-shaped article, and said retaining fingers are angled.
Claim 8
Dependent Claim
30 words
Device according to claim 1, wherein ends of said retaining fingers adjoin said wafer-shaped article and comprise a recess into which the outer peripheral edge of said wafer-shaped article fits.
Claim 9
Dependent Claim
14 words
Device according to claim 1, wherein said retaining fingers project downward from said ring.
Claim 10
Dependent Claim
13 words
Device according to claim 1, wherein said retaining fingers project upward from ring.
Claim 11
Dependent Claim
55 words
Device according to claim 1, wherein said rotational displacement of said ring describes an axis of ring rotation, and wherein said first nozzle further comprises a swivel mounting wherein said first nozzle is adjustable in a manner describing an arc from said axis of ring rotation extending to opposing peripheral edges of said wafer-shaped article.
Claim 12
Dependent Claim
24 words
Device according to claim 10, wherein said swivel mounting further comprises a swivel axis aligned parallel and distant to said axis of ring rotation.
Claim 13
Dependent Claim
15 words
Device according to claim 11, wherein said swivel axis is located outside of said ring.
Claim 14
Dependent Claim
22 words
Device according to claim 1, wherein said first nozzle and said second nozzle are adjustable along one diameter of said wafer-shaped article.
Claim 15
Dependent Claim
110 words
Device for treatment of wafer-shaped articles, located in a chamber, with treatment fluid, comprising: a rotary mounting attached to said chamber interior for supporting a said wafer-shaped article; a first nozzle positioned in proximity to said rotary mounting to permit unobstructed application of said treatment fluid to said wafer-shaped article; said rotary mounting comprising a ring pivotally mounted in said chamber to permit rotational displacement in a plane of said wafer-shaped article, plural retaining fingers operatively attached to said ring, said fingers adjoining an outer periphery of said wafer-shaped article at a plane distant from a plane of said ring; and a cover radially surrounding an interior of said ring.
Claim 16
Dependent Claim
110 words
Device for treatment of wafer-shaped articles, located in a chamber, with treatment fluid, comprising: a rotary mounting attached to said chamber interior for supporting a said wafer-shaped article; a first nozzle positioned in proximity to said rotary mounting to permit unobstructed application of said treatment fluid to said wafer-shaped article; said rotary mounting comprising a ring pivotally mounted in said chamber to permit rotational displacement in a plane of said wafer-shaped article, plural retaining fingers operatively attached to said ring, said fingers adjoining an outer periphery of said wafer-shaped article at a plane distant from a plane of said ring; and a cover radially surrounding an interior of said ring.
Claim 17
Dependent Claim
26 words
Device according to claim 14, wherein said cover is a body of revolution which flares both to a top and a bottom from a center area.
Claim 18
Dependent Claim
13 words
Device according to claim 15, further comprising a suction channel penetrating said chamber.
Claim 19
Dependent Claim
13 words
Device according to claim 16, wherein said suction channel leads through said chamber.
Claim 20
Dependent Claim
26 words
Device according to claim 16, wherein said suction channel is higher, when the device is in its position of use, than said bottom of said cover.
Claim 21
Dependent Claim
26 words
Device according to claim 15, wherein said bottom of said cover is higher, when the device is in its position of uses than said wafer-shaped article.
Claim 22
Dependent Claim
24 words
Device according to claim 1, wherein said retaining fingers comprise free ends, each free end having a V-shaped recess for receiving said outer periphery.
Claim 23
Dependent Claim
37 words
Device according to claim 1, wherein said rotational displacement of said ring describes an axis of ring rotation, and wherein a line extending from said retaining fingers forms an acute angle with said axis of ring rotation.
Claim 24
Dependent Claim
42 words
Device according to claim 1, wherein said retaining fingers are swivel supported by said ring around longitudinal axes and wherein said retaining fingers further comprise lower ends arms with free ends, said free ends adjoining said outer periphery of said wafer-shaped article.
Claim 25
Dependent Claim
18 words
Device according to claim 22, wherein said free ends have a recess open to adjoin said outer periphery.
Claim 26
Dependent Claim
18 words
Device according to claim 22, wherein said retaining fingers are guided in a sleeve attached to said ring.
Claim 27
Dependent Claim
33 words
Device according to claim 22, wherein each of said retaining fingers is joined on an upper end to a connecting rod connected to a drive device for swivelling of said each retaining finger.
Claim 28
Dependent Claim
26 words
Device according to claim 22, wherein each of said longitudinal axes of said retaining fingers is aligned parallel to an axis of rotation of said ring.
Claim 29
Dependent Claim
35 words
Device according to claim 1, wherein one of said retaining fingers further comprises a pin contacting the bottom surface of the wafer-shaped article and a swivelling hold-down contacting the top surface of said wafer-shaped article.
Claim 30
Dependent Claim
11 words
Device according to claim 27, wherein said swivelling hold-down is swivel-mounted.
Claim 31
Dependent Claim
21 words
Device according to claim 27, wherein said swivelling hold-down further comprises a weight joined to said swivelling hold-down via a lever.
Claim 32
Dependent Claim
28 words
Device according to claim 1, wherein said retaining finger comprises a movable sleeve contacting said top surface and a support contacting said bottom surface of said wafer-shaped article.
Claim 33
Dependent Claim
11 words
Device according to claim 30, wherein the support is a pin.
Claim 34
Dependent Claim
28 words
Device according to claim 30, wherein said movable sleeve comprises a face adjoining said wafer-shaped article, said face having the shape of the jacket of a truncated cone.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-12-07 | 2002-06-08 | 2002-12-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-12-07 | 2006-06-08 | 2006-12-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-12-07 | 2010-06-08 | 2010-12-08 | $7700.00 | Window Closed / Lapsed |