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US5834795A
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Test pattern for measuring line width of electrode and method for measuring the same
Assignee: SK Hynix Inc
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Filing: 1997-01-02
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Granted: 1998-11-10
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Expires: 2017-01-02
Abstract
Abstract A test pattern for measuring a line width of an electrode includes a substrate; an electrode having a predetermined line width and length formed on the substrate; and, a plurality of lines extended from both ends of the electrode, whereby, first, a line width of a gate electrode in a transistor is measured accurately; second, a change in electrical characteristics of a transistor with respect to the change of the line width of a gate electrode during a fabrication process can be accurately revealed; third, comparison of changes in the line widths of a gate electrode during fabrication measured through an SEM and after completion of fabrication can be done easily; and fourth, a reliability of a completed device is easily assessable.
Inventors
- 👤 Hyok Jae Lee
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 12:15
CPC Classifications
H; H10; H10P; H10P74/00; H10P74/27; H10P74/277; H10P74/20; H10P74/203
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
62 words
A test pattern for measuring a line width of an electrode comprising: a substrate having an active region; a gate electrode having a first line width and across the active region; source and drain regions in the active region at sides of the gate electrode; and a plurality of lines having a second width extending from end portions of the gate electrode.
Claim 2
Dependent Claim
62 words
A test pattern for measuring a line width of an electrode comprising: a substrate having an active region; a gate electrode having a first line width and across the active region; source and drain regions in the active region at sides of the gate electrode; and a plurality of lines having a second width extending from end portions of the gate electrode.
Claim 3
Dependent Claim
44 words
A test pattern for measuring a line width of an electrode according to claim 1, wherein the first line width of the electrode is different from the second line width of the plurality of lines extending from the end portions of the gate electrode.
Claim 4
Dependent Claim
44 words
A test pattern for measuring a line width of an electrode according to claim 1, wherein the first line width of the gate electrode is narrower than the second line width of the plurality of lines extending from end portions of the gate electrode.
Claim 5
Dependent Claim
37 words
A test pattern for measuring a line width of an electrode according to claim 1, wherein the source and drain regions do not contact the plurality of lines extending from the end portions of the gate electrode.
Claim 6
Dependent Claim
80 words
A test pattern for measuring a line width of an electrode comprising: a substrate having an active region; a gate electrode having a first line width over and across the active region; source and drain regions in the active region at sides of the gate electrode; a plurality of lines having a second line width extending from each end portion of the gate electrode; and a plurality of pads each connected to a corresponding one of the plurality of lines.
Claim 7
Dependent Claim
80 words
A test pattern for measuring a line width of an electrode comprising: a substrate having an active region; a gate electrode having a first line width over and across the active region; source and drain regions in the active region at sides of the gate electrode; a plurality of lines having a second line width extending from each end portion of the gate electrode; and a plurality of pads each connected to a corresponding one of the plurality of lines.
Claim 8
Dependent Claim
36 words
A test pattern for measuring a line width of an electrode according to claim 5, wherein the first line width of the gate electrode is different from the second line width of the plurality of lines.
Claim 9
Dependent Claim
36 words
A test pattern for measuring a line width of an electrode according to claim 5, wherein the first line width of the gate electrode is narrower than the second line width of the plurality of lines.
Claim 10
Dependent Claim
28 words
A test pattern for measuring a line width of an electrode according to claim 5, wherein the source and drain regions do not contact the plurality of lines.
Claim 11
Dependent Claim
31 words
A test pattern for measuring a line width of an electrode according to claim 5, wherein the plurality of lines includes four lines and the plurality of pads includes four pads.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-11-09 | 2002-05-11 | 2002-11-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-11-09 | 2006-05-11 | 2006-11-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-11-09 | 2010-05-11 | 2010-11-10 | $7700.00 | Window Closed / Lapsed |