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US5833888A Expired / Lapsed US ⏱️ 0.0 years remaining

Weeping weir gas/liquid interface structure

Assignee: Applied Materials Inc
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Filing: 1996-12-31
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Granted: 1998-11-10
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Expires: 2016-12-31
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Abstract

Abstract A gas/liquid interface structure for transport of a gas stream from an upstream source of same to a downstream processing unit, comprising first and second flow passage members defining an annular volume therebetween, with the second flow passage member extending downwardly to a lower elevation than the lower end of the first flow passage member, with an outer wall member enclosingly circumscribing the second flow passage member and defining therewith an enclosed interior annular volume, and with a liquid flow port in the outer wall member for introducing liquid into the enclosed interior annular volume. The second flow passage member includes an upper liquid-permeable portion in liquid flow communication with the enclosed interior annular volume, whereby liquid from such volume can "weep" through the permeable portion and form a falling liquid film on interior surface portions of the second flow passage member, as a protective liquid interface for the second flow passage member.

Inventors

  • 👤 Prakash V. Arya
  • 👤 Mark Holst
  • 👤 Kent Carpenter
  • 👤 Scott Lane

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-08 20:21
CPC Classifications
C; C30; C30B; C30B25/00; C30B25/02; C30B25/14; B; B01; B01D; B01D45/00; B01D53/00; B01D53/14; B01J; B01J19/00; B01J19/0006; B01J19/002; B01J19/26; B01J8/00; B01J8/0015; B01J8/003; B01J8/18; B01J8/20; B01J8/22; C23; C23C; C23C16/00; C23C16/44; C23C16/4412; B01J2219/00; B01J2219/00049; B01J2219/00051; B01J2219/00132; B01J2219/00135; B01J2219/00164; B01J2219/00245; B01J2219/00252; B01J2219/00268

Claims Analysis

Total Claims: 21
Claim 1
Independent Claim 267 words
A gas/liquid interface structure for transport of a gas stream from an upstream source of same to a downstream processing unit, said gas/liquid interface structure comprising: a first vertically extending inlet flow passage member having an upper entrance for introduction of said gas stream and a lower end for discharge of said gas stream; a second flow passage member circumscribing the first flow passage member and in spaced relationship thereto, to define an annular volume therebetween, said second flow passage member extending downwardly to a lower end below the lower end of the first flow passage member, and said second flow passage member having an upper liquid-permeable portion and a lower liquid-impermeable portion below said upper liquid-permeable portion, the upper liquid-permeable portion of the second flow passage member comprising a porous cylindrical wall that is permeable to flow of liquid therethrough over its entire surface, said porous cylindrical wall comprising an inner wall surface bounding said annular volume, and an opposite outer wall surface; a liquid reservoir jacket enclosingly surrounding the outer wall surface of the porous cylindrical wall and defining therewith an enclosed interior annular volume for holding pressurized liquid; and means for introducing pressurized liquid into the enclosed interior annular volume of the liquid reservoir jacket, for permeation of the pressurized liquid through the porous cylindrical wall from its outer wall surface to its inner wall surface so that liquid permeated through the porous cylindrical wall is coalesced on the inner wall surface to form a liquid film downwardly flowed over an inner surface of the lower liquid-impermeable portion of the second flow passage member.
Claim 2
Dependent Claim 267 words
A gas/liquid interface structure for transport of a gas stream from an upstream source of same to a downstream processing unit, said gas/liquid interface structure comprising: a first vertically extending inlet flow passage member having an upper entrance for introduction of said gas stream and a lower end for discharge of said gas stream; a second flow passage member circumscribing the first flow passage member and in spaced relationship thereto, to define an annular volume therebetween, said second flow passage member extending downwardly to a lower end below the lower end of the first flow passage member, and said second flow passage member having an upper liquid-permeable portion and a lower liquid-impermeable portion below said upper liquid-permeable portion, the upper liquid-permeable portion of the second flow passage member comprising a porous cylindrical wall that is permeable to flow of liquid therethrough over its entire surface, said porous cylindrical wall comprising an inner wall surface bounding said annular volume, and an opposite outer wall surface; a liquid reservoir jacket enclosingly surrounding the outer wall surface of the porous cylindrical wall and defining therewith an enclosed interior annular volume for holding pressurized liquid; and means for introducing pressurized liquid into the enclosed interior annular volume of the liquid reservoir jacket, for permeation of the pressurized liquid through the porous cylindrical wall from its outer wall surface to its inner wall surface so that liquid permeated through the porous cylindrical wall is coalesced on the inner wall surface to form a liquid film downwardly flowed over an inner surface of the lower liquid-impermeable portion of the second flow passage member.
Claim 3
Dependent Claim 100 words
A gas/liquid interface structure according to claim 1, wherein the lower end of the first vertically extending inlet flow passage member terminates below the elevation of the lower end of the porous cylindrical wall member, so that the gas stream discharged from the lower end of the first vertically extending inlet flow passage member is exposed in subsequent downward flow through the second flow passage member to the lower liquid-impermeable portion having said liquid film downwardly flowed over its inner surface, thereby protecting the lower liquid-impermeable portion of the first vertically extending inlet flow passage member from gas stream contact.
Claim 4
Dependent Claim 34 words
A gas/liquid interface structure according to claim 1, wherein the porous cylindrical wall is formed of a material selected from the group consisting of sintered metal materials, porous ceramic materials, and porous plastic materials.
Claim 5
Dependent Claim 27 words
A gas/liquid interface structure according to claim 1, wherein the porous cylindrical wall of the second flow passage member is formed of a porous sintered metal material.
Claim 6
Dependent Claim 31 words
A gas/liquid interface structure according to claim 1, wherein the porous cylindrical wall comprises porosity with an average pore size in the range of from about 0.5 to about 30 microns.
Claim 7
Dependent Claim 26 words
A gas/liquid interface structure according to claim 1, wherein the first and second flow passage members are each cylindrical in character and coaxial with one another.
Claim 8
Dependent Claim 64 words
A gas/liquid interface structure according to claim 1, wherein the liquid reservoir jacket enclosingly circumscribing the second flow passage member comprises a cylindrical side wall in radially spaced relationship to the second flow passage member, a top end wall through which the first liquid flow passage member extends, and a bottom end wall between the second flow passage member and the cylindrical side wall.
Claim 9
Dependent Claim 61 words
A gas/liquid interface structure according to claim 1, wherein the means for introducing pressurized liquid into the enclosed interior annular volume of the liquid reservoir jacket is constructed and arranged for tangential feeding of the pressurized liquid into the enclosed interior annular volume, for circumferential distribution of the introduced liquid around the upper liquid-permeable wall of the second flow passage member.
Claim 10
Dependent Claim 24 words
A gas/liquid interface structure according to claim 1, constructed and arranged so that the weir liquid rate is decoupled from levelness of the structure.
Claim 11
Dependent Claim 23 words
A gas/liquid interface structure according to claim 1, constructed and arranged so that the weir liquid rate is decoupled from minimum wetting rate.
Claim 12
Dependent Claim 312 words
A gas/liquid interface structure for transport of a gas stream from an upstream source of same to a downstream processing unit, comprising first and second flow passage members defining an annular volume therebetween, with the second flow passage member extending downwardly to a lower elevation than the lower end of the first flow passage member, with a liquid reservoir jacket enclosingly circumscribing the second flow passage member and defining therewith an enclosed interior annular volume, and means for introducing pressurized liquid into the enclosed interior annular volume, wherein the second flow passage member includes an upper liquid-permeable wall, and a lower liquid-impermeable wall extending downwardly from the upper liquid-permeable wall, with the upper liquid-permeable wall terminating at a lower end that is joined to an upper end of the lower liquid-impermeable wall, wherein the upper liquid-permeable wall is (i) in liquid flow communication with the enclosed interior annular volume of the liquid reservoir jacket, (ii) formed of a liquid-permeable material and (iii) permeable to flow of the pressurized liquid therethrough over its entire surface, whereby pressurized liquid in the enclosed interior annular volume of the liquid reservoir jacket can weep through the liquid-permeable wall to coalesce on an inner surface thereof and form a falling liquid film for downward flow on an interior surface of the lower liquid-impermeable wall of the second flow passage member, as a protective liquid interface for the second flow passage member so that the gas stream does not contact the interior surface of the lower liquid-impermeable wall, wherein the first flow passage member terminates at a lower end which is below the elevation of the juncture of the upper liquid-permeable wall and lower liquid-impermeable wall of the second flow passage member, and wherein the liquid reservoir jacket enclosingly circumscribes substantially only the upper liquid-permeable wall and not the lower liquid-impermeable wall of the second flow passage member.
Claim 13
Dependent Claim 312 words
A gas/liquid interface structure for transport of a gas stream from an upstream source of same to a downstream processing unit, comprising first and second flow passage members defining an annular volume therebetween, with the second flow passage member extending downwardly to a lower elevation than the lower end of the first flow passage member, with a liquid reservoir jacket enclosingly circumscribing the second flow passage member and defining therewith an enclosed interior annular volume, and means for introducing pressurized liquid into the enclosed interior annular volume, wherein the second flow passage member includes an upper liquid-permeable wall, and a lower liquid-impermeable wall extending downwardly from the upper liquid-permeable wall, with the upper liquid-permeable wall terminating at a lower end that is joined to an upper end of the lower liquid-impermeable wall, wherein the upper liquid-permeable wall is (i) in liquid flow communication with the enclosed interior annular volume of the liquid reservoir jacket, (ii) formed of a liquid-permeable material and (iii) permeable to flow of the pressurized liquid therethrough over its entire surface, whereby pressurized liquid in the enclosed interior annular volume of the liquid reservoir jacket can weep through the liquid-permeable wall to coalesce on an inner surface thereof and form a falling liquid film for downward flow on an interior surface of the lower liquid-impermeable wall of the second flow passage member, as a protective liquid interface for the second flow passage member so that the gas stream does not contact the interior surface of the lower liquid-impermeable wall, wherein the first flow passage member terminates at a lower end which is below the elevation of the juncture of the upper liquid-permeable wall and lower liquid-impermeable wall of the second flow passage member, and wherein the liquid reservoir jacket enclosingly circumscribes substantially only the upper liquid-permeable wall and not the lower liquid-impermeable wall of the second flow passage member.
Claim 14
Dependent Claim 21 words
A gas/liquid interface structure according to claim 11, wherein the upper liquid-permeable wall of the second flow passage member is cylindrical.
Claim 15
Dependent Claim 35 words
A gas/liquid interface structure according to claim 12, wherein the porous cylindrical wall member is formed of a material selected from the group consisting of sintered metal materials, porous ceramic materials, and porous plastic materials.
Claim 16
Dependent Claim 27 words
A gas/liquid interface structure according to claim 11, wherein the upper liquid-permeable wall of the second flow passage member is formed of a porous sintered metal material.
Claim 17
Dependent Claim 31 words
A gas/liquid interface structure according to claim 11, wherein the upper liquid-permeable wall comprises porosity with an average pore size in the range of from about 0.5 to about 30 microns.
Claim 18
Dependent Claim 26 words
A gas/liquid interface structure according to claim 11, wherein the first and second flow passage members are each cylindrical in character and coaxial with one another.
Claim 19
Dependent Claim 64 words
A gas/liquid interface structure according to claim 11, wherein the liquid reservoir jacket enclosingly circumscribing the second flow passage member comprises a cylindrical side wall in radially spaced relationship to the second flow passage member, a top end wall through which the first liquid flow passage member extends, and a bottom end wall between the second flow passage member and the cylindrical side wall.
Claim 20
Dependent Claim 56 words
A gas/liquid interface structure according to claim 11, wherein the means for introducing pressurized liquid into the enclosed interior annular volume is constructed and arranged for tangential feeding of the pressurized liquid into the enclosed interior annular volume, for circumferential distribution of the introduced liquid around the upper liquid-permeable wall of the second flow passage member.
Claim 21
Dependent Claim 28 words
A gas/liquid interface structure according to claim 11, constructed and arranged so that the weir liquid rate is decoupled from levelness of the structure and minimum wetting rate.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2001-11-09 2002-05-11 2002-11-10 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2005-11-09 2006-05-11 2006-11-10 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2009-11-09 2010-05-11 2010-11-10 $7700.00 Window Closed / Lapsed

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