US5820926A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for forming and using a non-reactive anti-reflection coating
Assignee: Renesas Electronics America Inc
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Filing: 1995-06-07
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Granted: 1998-10-13
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Expires: 2015-06-07
Abstract
Abstract An anti-reflection coating is provided that has a barrier layer and an anti-reflective layer. The barrier layer stops reactions between the anti-reflective layer and underlying layers or substrates, does not make the anti-reflective layer reflective, and preferably does not react with either the reflective layer or the anti-reflective layer. In particular embodiments, the barrier layer is a thin layer of silicon dioxide SiO 2 or silicon nitride Si 3 N 4 , and the anti-reflective layer is titanium-tungsten TiW, titanium nitride TiN, or amorphous silicon.
Inventors
- 👤 Chuen-Der Lien
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 11:10
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/091; H; H10; H10P; H10P50/00; H10P76/00; H10P76/20; H10P76/204; H10P76/2041; H10P76/2043; Y; Y10; Y10T; Y10T428/00; Y10T428/24; Y10T428/24802; Y10T428/24917; Y10T428/24926; Y10T428/31504; Y10T428/31652; Y10T428/31667
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
69 words
A method for forming an anti-reflection coating, comprising the steps of: providing a substrate having a reflective layer thereon; forming a barrier layer on the reflective layer, wherein the barrier layer is formed from a material which does not chemically react with the reflective layer; and forming an anti-reflective layer directly on the barrier layer so that the barrier layer is between the anti-reflective layer and the reflective layer.
Claim 2
Independent Claim
69 words
A method for forming an anti-reflection coating, comprising the steps of: providing a substrate having a reflective layer thereon; forming a barrier layer on the reflective layer, wherein the barrier layer is formed from a material which does not chemically react with the reflective layer; and forming an anti-reflective layer directly on the barrier layer so that the barrier layer is between the anti-reflective layer and the reflective layer.
Claim 3
Independent Claim
115 words
A method for masking a reflective layer, comprising the steps of: forming an anti-reflection coating on the reflective layer, wherein forming the anti-reflection coating comprises the steps of: forming a barrier layer on the reflective layer from a material which does not chemically react with the reflective layer; and forming an anti-reflective layer on the barrier layer, wherein the barrier layer prevents the anti-reflective layer from chemically reacting with the reflective layer; forming a photoresist layer on the anti-reflective layer; and exposing a selected portion of the photoresist layer to light which changes properties of the selected portion of the photoresist layer, wherein the anti-reflective layer prevents reflection of the light from the reflective layer.
Claim 4
Independent Claim
115 words
A method for masking a reflective layer, comprising the steps of: forming an anti-reflection coating on the reflective layer, wherein forming the anti-reflection coating comprises the steps of: forming a barrier layer on the reflective layer from a material which does not chemically react with the reflective layer; and forming an anti-reflective layer on the barrier layer, wherein the barrier layer prevents the anti-reflective layer from chemically reacting with the reflective layer; forming a photoresist layer on the anti-reflective layer; and exposing a selected portion of the photoresist layer to light which changes properties of the selected portion of the photoresist layer, wherein the anti-reflective layer prevents reflection of the light from the reflective layer.
Claim 5
Dependent Claim
19 words
The method of claim 2, wherein the step of forming the barrier layer comprises forming a silicon dioxide layer.
Claim 6
Dependent Claim
18 words
The method of claim 2, wherein the step of forming the anti-reflective layer comprises forming a titanium-tungsten layer.
Claim 7
Dependent Claim
30 words
The method of claim 2, wherein the step of forming the barrier layer comprises forming a silicon dioxide layer that is between about 100 angstroms and about 150 angstroms thick.
Claim 8
Dependent Claim
18 words
The method of claim 5, wherein the step of forming the anti-reflective layer comprises forming a titanium-tungsten layer.
Claim 9
Dependent Claim
29 words
The method of claim 5, wherein the step of forming the anti-reflective layer comprises forming a titanium-tungsten layer that is between about 400 angstroms and about 800 angstroms thick.
Claim 10
Dependent Claim
19 words
The method of claim 2, wherein the step of forming the barrier layer comprises forming a silicon nitride layer.
Claim 11
Dependent Claim
19 words
The method of claim 2, wherein the step of forming the anti-reflective layer comprises forming a titanium nitride layer.
Claim 12
Dependent Claim
19 words
The method of claim 2, wherein the step of forming the anti-reflective layer comprises forming an amorphous silicon layer.
Claim 13
Dependent Claim
58 words
The method of claim 2, further comprising: patterning the reflective layer and anti-reflection coating according to a pattern formed by the selected portions of the photoresist layer; depositing an insulating layer on the anti-reflection coating; and masking the insulating layer, wherein the anti-reflective layer prevents reflection of light from the reflective layer during masking of the insulating layer.
Claim 14
Dependent Claim
11 words
The method of claim 2, wherein the reflective layer contains aluminum.
Claim 15
Dependent Claim
50 words
The method of claim 12, further comprising: forming a bonding pad from a portion of the reflective layer; depositing an insulating layer on the anti-reflection coating; and masking the insulating layer, wherein the anti-reflective layer prevents reflection of the light from the reflective layer during masking of the insulating layer.
Claim 16
Dependent Claim
36 words
The method of claim 13, further comprising: etching a via through the insulating layer and the anti-reflection coating to expose the bonding pad; and bonding a gold wire to the bonding pad exposed by the via.
Claim 17
Independent Claim
131 words
A method comprising: forming an anti-reflection coating on a reflective layer, wherein forming the anti-reflection coating comprises: forming a barrier layer from a material which does not chemically react with the reflective layer; and forming an anti-reflective layer on the barrier layer, wherein the barrier layer prevents the anti-reflective layer from chemically reacting with the reflective layer; forming a bonding pad from a portion of the reflective layer, wherein a portion of the anti-reflection coating is on the bonding pad; depositing an insulating layer on the anti-reflection coating; forming a photoresist layer on the insulating layer; and exposing a selected portion of the photoresist layer to light which changes properties of the selected portion of the photoresist layer, wherein the anti-reflective layer prevents reflection of the light from the reflective layer.
Claim 18
Independent Claim
131 words
A method comprising: forming an anti-reflection coating on a reflective layer, wherein forming the anti-reflection coating comprises: forming a barrier layer from a material which does not chemically react with the reflective layer; and forming an anti-reflective layer on the barrier layer, wherein the barrier layer prevents the anti-reflective layer from chemically reacting with the reflective layer; forming a bonding pad from a portion of the reflective layer, wherein a portion of the anti-reflection coating is on the bonding pad; depositing an insulating layer on the anti-reflection coating; forming a photoresist layer on the insulating layer; and exposing a selected portion of the photoresist layer to light which changes properties of the selected portion of the photoresist layer, wherein the anti-reflective layer prevents reflection of the light from the reflective layer.
Claim 19
Dependent Claim
36 words
The method of claim 15, further comprising: etching a via through the insulating layer and the anti-reflection coating to expose the bonding pad; and bonding a gold wire to the bonding pad exposed by the via.
Claim 20
Dependent Claim
11 words
The method of claim 16, wherein the reflective layer comprises aluminum.
Claim 21
Dependent Claim
25 words
The method of claim 17, wherein the barrier layer comprises a material selected from the group consisting of silicon dioxide, aluminum oxide, and silicon nitride.
Claim 22
Dependent Claim
24 words
The method of claim 18, wherein the anti-reflective layer comprises a material selected from the group consisting of titanium-tungsten, titanium nitride, and amorphous silicon.
Claim 23
Dependent Claim
36 words
The method of claim 17, further comprising: etching a via through the insulating layer and the anti-reflection coating to expose the bonding pad; and bonding a gold wire to the bonding pad exposed by the via.
Claim 24
Dependent Claim
24 words
The method of claim 17, wherein the anti-reflective layer comprises a material selected from the group consisting of titanium-tungsten, titanium nitride, and amorphous silicon.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-10-12 | 2002-04-13 | 2002-10-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-10-12 | 2006-04-13 | 2006-10-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-10-12 | 2010-04-13 | 2010-10-13 | $7700.00 | Window Closed / Lapsed |