US5814150A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of and apparatus for forming single-crystalline thin film, beam irradiator, beam irradiating method and beam reflecting device
Assignee: MegaChips Corp
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Filing: 1996-02-07
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Granted: 1998-09-29
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Expires: 2016-02-07
Abstract
Abstract In order to form a single-crystalline thin film on a polycrystalline substrate using plasma CVD, a downwardly directed mainly neutral Ne atom current is formed by an ECR ion generator (2). A reaction gas such as silane gas which is supplied from a reaction gas inlet pipe (13) is sprayed onto an SiO2 substrate (11) by an action of the Ne atom current, so that an amorphous Si thin film is grown on the substrate (11) by a plasma CVD reaction. At the same time, a part of the Ne atom current having high directivity is directly incident upon the substrate (11), while another part thereof is incident upon the substrate (11) after its course is bent by a reflector (12). The reflector (12) is so set that all directions of the parts of the Ne atom current which are incident upon the substrate (11) are perpendicular to densest planes of single-crystalline Si. Therefore, the as-grown amorphous Si is sequentially converted to a single-crystalline Si thin film having crystal axes which are so regulated that the densest planes are oriented perpendicularly to the respective directions of incidence, by an action of the law of Bravais. Thus, a single-crystalline thin film is formed on a polycrystalline substrate.
Inventors
- 👤 Toshifumi Asakawa
- 👤 Masahiro Shindo
- 👤 Toshikazu Yoshimizu
- 👤 Sumiyoshi Ueyama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 21:03
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/20; H10P14/34; H10P14/3402; H10P14/3414; H10P14/3421; C; C23; C23C; C23C16/00; C23C16/44; C23C16/48; C23C16/486; C23C16/50; C23C16/511; C23C16/56; C30; C30B; C30B23/00; C30B23/02; C30B25/00; C30B25/02; C30B25/10; C30B25/105; C30B29/00; C30B29/02; C30B29/06; H10P14/24; H10P14/29; H10P14/2901; H10P14/2902; H10P14/2905; H10P14/2921; H10P14/32; H10P14/3202; H10P14/3204; H10P14/3211; H10P14/3404; H10P14/3411; H10P14/3416; H10P14/3438; H10P14/3441; H10P14/3442; H10P14/3444; H10P14/3466; H10P14/38; H10P14/3802; H10P14/3818; Y; Y10; Y10S; Y10S117/00; Y10S117/905; Y10T; Y10T117/00; Y10T117/10; Y10T117/1004; Y10T117/1008
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
93 words
A beam reflecting device for reflecting a gas beam being supplied from a single beam source thereby enabling irradiation of a target surface of a sample with said gas in a plurality of prescribed directions of incidence, said beam reflecting device comprising: a reflector having a plurality of reflecting surfaces for reflecting said beam in a plurality of directions; and a screen being interposed in a path of said beam between said beam source and said reflecting surfaces for selectively passing said beam thereby preventing multiple reflection by said plurality of reflecting surfaces.
Claim 2
Dependent Claim
93 words
A beam reflecting device for reflecting a gas beam being supplied from a single beam source thereby enabling irradiation of a target surface of a sample with said gas in a plurality of prescribed directions of incidence, said beam reflecting device comprising: a reflector having a plurality of reflecting surfaces for reflecting said beam in a plurality of directions; and a screen being interposed in a path of said beam between said beam source and said reflecting surfaces for selectively passing said beam thereby preventing multiple reflection by said plurality of reflecting surfaces.
Claim 3
Dependent Claim
26 words
A beam reflecting device in accordance with claim 1, wherein said screen further selectively passes said beam to uniformly irradiate said target surface with said beam.
Claim 4
Dependent Claim
105 words
A beam reflecting device for reflecting a gas beam being supplied from a single beam source thereby enabling irradiation of a target surface of a sample with said gas in a plurality of prescribed directions of incidence, said beam reflecting device comprising: a first reflector for reflecting said beam in a plurality of directions thereby generating a plurality of divergent beams having beam sections being two-dimensionally enlarged with progress of said beams; and a second reflector having a concave reflecting surface for further reflecting said plurality of divergent beams to be incident upon said target surface substantially as parallel beams from a plurality of directions.
Claim 5
Dependent Claim
105 words
A beam reflecting device for reflecting a gas beam being supplied from a single beam source thereby enabling irradiation of a target surface of a sample with said gas in a plurality of prescribed directions of incidence, said beam reflecting device comprising: a first reflector for reflecting said beam in a plurality of directions thereby generating a plurality of divergent beams having beam sections being two-dimensionally enlarged with progress of said beams; and a second reflector having a concave reflecting surface for further reflecting said plurality of divergent beams to be incident upon said target surface substantially as parallel beams from a plurality of directions.
Claim 6
Dependent Claim
96 words
A beam reflecting device for reflecting a gas beam being supplied from a beam source thereby enabling irradiation of a target surface of a sample with said gas in a prescribed direction of incidence, said beam reflecting device comprising: a first reflector for reflecting said beam thereby generating a divergent beam having a beam section being two-dimensionally enlarged with progress of said beam; and a second reflector having a concave reflecting surface for further reflecting said divergent beam to be incident upon a linear or strip-shaped region of said target surface substantially as a parallel beam.
Claim 7
Dependent Claim
96 words
A beam reflecting device for reflecting a gas beam being supplied from a beam source thereby enabling irradiation of a target surface of a sample with said gas in a prescribed direction of incidence, said beam reflecting device comprising: a first reflector for reflecting said beam thereby generating a divergent beam having a beam section being two-dimensionally enlarged with progress of said beam; and a second reflector having a concave reflecting surface for further reflecting said divergent beam to be incident upon a linear or strip-shaped region of said target surface substantially as a parallel beam.
References Cited (Backward Citations)
US4095004A
Cited
US4343829A
Cited
US4406709A
Cited
JPS61222943A
Cited
US4915772A
Cited
JPH02184596A
Cited
JPH02187017A
Cited
JPH02196086A
Cited
EP0382648A1
Cited
JPH02229792A
Cited
JPH03188618A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-09-28 | 2002-03-30 | 2002-09-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-09-28 | 2006-03-30 | 2006-09-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-09-28 | 2010-03-30 | 2010-09-29 | $7700.00 | Window Closed / Lapsed |