US5812361A — Dynamic feedback electrostatic wafer chuck

Claim 1

Independent Claim 157 words

An electrostatic chuck system having an electrostatic chuck for securely holding a wafer on a surface of said electrostatic chuck, comprising: a wafer bias sensor coupled to a first portion of said electrostatic chuck for dynamically sensing an alternating current signal at said first portion, said wafer bias sensor outputting, responsive to said alternating current signal, a direct current voltage level representative of a direct current bias level of said wafer; and a variable electrostatic chuck power supply coupled to said wafer bias sensor, said variable electrostatic chuck power supply providing a first potential level to said first portion of said electrostatic chuck, said first potential level being dynamically modified, responsive to said direct current voltage level, to substantially maintain a first predefined potential difference between said first portion of said electrostatic chuck and a first region of said wafer overlaying said first portion irrespective of a magnitude of said direct current bias level of said wafer.

Claim 2

Dependent Claim 157 words

An electrostatic chuck system having an electrostatic chuck for securely holding a wafer on a surface of said electrostatic chuck, comprising: a wafer bias sensor coupled to a first portion of said electrostatic chuck for dynamically sensing an alternating current signal at said first portion, said wafer bias sensor outputting, responsive to said alternating current signal, a direct current voltage level representative of a direct current bias level of said wafer; and a variable electrostatic chuck power supply coupled to said wafer bias sensor, said variable electrostatic chuck power supply providing a first potential level to said first portion of said electrostatic chuck, said first potential level being dynamically modified, responsive to said direct current voltage level, to substantially maintain a first predefined potential difference between said first portion of said electrostatic chuck and a first region of said wafer overlaying said first portion irrespective of a magnitude of said direct current bias level of said wafer.

Claim 3

Dependent Claim 103 words

The electrostatic chuck system of claim 1 wherein said electrostatic chuck further comprises a second portion electrically insulated from said first portion, said second portion being coupled to said variable electrostatic chuck power for receiving a second potential level different from said first potential level, said second potential level being adjusted, responsive to said direct current voltage level from said wafer bias sensor, to substantially maintain a second predefined potential difference between said second portion of said electrostatic chuck and a second region of said wafer overlaying said second portion irrespective of said magnitude of said direct current bias level of said wafer.

Claim 4

Dependent Claim 49 words

The electrostatic chuck system of claim 2 wherein said variable electrostatic chuck power supply comprises a balanced bridge for receiving said direct current voltage level, said balanced bridge being coupled in parallel with a direct current power supply and including a first resistor in series with a second resistor.

Claim 5

Dependent Claim 26 words

The electrostatic chuck system of claim 3 wherein said first resistor and said second resistor of said balanced bridge are chosen to be unequal in value.

Claim 6

Dependent Claim 26 words

The electrostatic chuck system of claim 1 wherein said direct current voltage level is a dynamic approximation of said direct current bias level of said wafer.

Claim 7

Dependent Claim 61 words

The electrostatic chuck system of claim 5 wherein said variable electrostatic chuck power supply represents a d.c. voltage source having a first supply node and a second supply node, said first supply node being coupled to said wafer bias sensor for receiving said direct current voltage level, said second supply node being coupled to said first portion of said electrostatic chuck.

Claim 8

Dependent Claim 40 words

The electrostatic chuck system of claim 5 wherein said wafer bias sensor is disposed at a position that does not expose said wafer bias sensor to plasma of a plasma processing chamber within which said electrostatic chuck system is employed.

Claim 9

Dependent Claim 40 words

The electrostatic chuck system of claim 1 wherein said wafer bias sensor is disposed at a position that does not expose said wafer bias sensor to plasma of a plasma processing chamber within which said electrostatic chuck system is employed.

Claim 10

Independent Claim 124 words

A method for clamping a wafer on a surface of an electrostatic chuck, comprising: sensing dynamically a first alternating current signal at a first portion of said electrostatic chuck; deriving, responsive to said first alternating current signal, a direct current voltage level representative of a direct current bias level of said wafer; and modifying, in a dynamic manner and responsive to said direct current voltage level, a first potential level supplied by a direct current power supply to said first portion of said electrostatic chuck to substantially maintain a predefined potential difference between said first portion of said electrostatic chuck and a first region of said wafer overlaying said first portion irrespective of a magnitude of said direct current bias level of said wafer.

Claim 11

Independent Claim 124 words

A method for clamping a wafer on a surface of an electrostatic chuck, comprising: sensing dynamically a first alternating current signal at a first portion of said electrostatic chuck; deriving, responsive to said first alternating current signal, a direct current voltage level representative of a direct current bias level of said wafer; and modifying, in a dynamic manner and responsive to said direct current voltage level, a first potential level supplied by a direct current power supply to said first portion of said electrostatic chuck to substantially maintain a predefined potential difference between said first portion of said electrostatic chuck and a first region of said wafer overlaying said first portion irrespective of a magnitude of said direct current bias level of said wafer.

Claim 12

Dependent Claim 99 words

The method of claim 9 further comprising the step of: modifying, responsive to said direct current voltage level, a second potential level supplied by said direct current power supply to a second portion of said electrostatic chuck, said second portion being electrically isolated from said first portion and said second potential level being different from said first potential level, to substantially maintain a predefined second potential difference between said second portion of said electrostatic chuck and a second region of said wafer overlaying said second portion irrespective of a magnitude of said direct current bias level of said wafer.

Claim 13

Dependent Claim 52 words

The method of claim 9 wherein said step of modifying said first potential level comprises the step of: receiving said direct current voltage level using a balanced bridge, said balanced bridge being coupled in parallel with said direct current power supply and including a first resistor in series with a second resistor.

Claim 14

Dependent Claim 24 words

The method of claim 11 wherein said first resistor and said second resistor of said balanced bridge are chosen to be unequal in value.

Claim 15

Dependent Claim 24 words

The method of claim 9 wherein said direct current voltage level is a dynamic approximation of said direct current bias level of said wafer.

Claim 16

Dependent Claim 46 words

The method of claim 13 wherein modifying step comprises the step of supplying said direct current voltage level to a first supply node of said direct current power supply, thereby modifying said first potential level at a second supply node of said direct current power supply.

Claim 17

Dependent Claim 133 words

An electrostatic chuck system having an electrostatic chuck for securely holding a wafer on a surface of said electrostatic chuck, comprising: means for dynamically sensing a first alternating current signal at a first portion of said electrostatic chuck; means for deriving, responsive to said first alternating current signal, a direct current voltage level representative of a direct current bias level of said wafer; and means for dynamically modifying, responsive to said direct current voltage level, a first potential level supplied by a direct current power supply to said first portion of said electrostatic chuck to substantially maintain a predefined potential difference between said first portion of said electrostatic chuck and a first region of said wafer overlaying said first portion irrespective of a magnitude of said direct current bias level of said wafer.

Claim 18

Dependent Claim 133 words

An electrostatic chuck system having an electrostatic chuck for securely holding a wafer on a surface of said electrostatic chuck, comprising: means for dynamically sensing a first alternating current signal at a first portion of said electrostatic chuck; means for deriving, responsive to said first alternating current signal, a direct current voltage level representative of a direct current bias level of said wafer; and means for dynamically modifying, responsive to said direct current voltage level, a first potential level supplied by a direct current power supply to said first portion of said electrostatic chuck to substantially maintain a predefined potential difference between said first portion of said electrostatic chuck and a first region of said wafer overlaying said first portion irrespective of a magnitude of said direct current bias level of said wafer.

Claim 19

Dependent Claim 101 words

The electrostatic chuck system of claim 15 wherein said modifying means further modifies, responsive to said direct current voltage level, a second potential level supplied by said direct current power supply to a second portion of said electrostatic chuck, said second portion being electrically isolated from said first portion and said second potential level being different from said first potential level, to substantially maintain a predefined second potential difference between said second portion of said electrostatic chuck and a second region of said wafer overlaying said second portion irrespective of a magnitude of said direct current bias level of said wafer.

Claim 20

Dependent Claim 51 words

The electrostatic chuck system of claim 15 wherein said modifying means comprises a balanced bridge coupled to said deriving means for receiving said direct current voltage level, said balanced bridge being coupled in parallel with a direct current power supply and including a first resistor in series with a second resistor.

Claim 21

Dependent Claim 26 words

The electrostatic chuck system of claim 17 wherein said first resistor and said second resistor of said balanced bridge are chosen to be unequal in value.

Claim 22

Dependent Claim 26 words

The electrostatic chuck system of claim 15 wherein said direct current voltage level is a dynamic approximation of said direct current bias level of said wafer.

Claim 23

Dependent Claim 46 words

The electrostatic chuck system of claim 19 wherein modifying means comprises a direct connection between said deriving means and a first supply node of said direct current power supply to modify said first potential level at a second supply node of said direct current power supply.

Claim 24

Independent Claim 153 words

A method for clamping a substrate on a surface of an electrostatic chuck in a plasma processing chamber, comprising: dynamically sensing a first ac signal at a first position on said electrostatic chuck, said first position being configured such that a sensor employed for said dynamic sensing is not exposed to plasma of said plasma processing chamber during substrate processing; deriving, responsive to said first ac signal, a dc voltage level approximating a dc bias level of said substrate during said substrate processing; and modifying, in a dynamic manner and responsive to said dc voltage level, a first potential level supplied by a variable dc power supply to said electrostatic chuck to substantially achieve a desired potential difference between a first portion of said electrostatic chuck and a first region of said substrate overlying said first portion irrespective of a magnitude of said dc bias level of said substrate during said substrate processing.

Claim 25

Independent Claim 153 words

A method for clamping a substrate on a surface of an electrostatic chuck in a plasma processing chamber, comprising: dynamically sensing a first ac signal at a first position on said electrostatic chuck, said first position being configured such that a sensor employed for said dynamic sensing is not exposed to plasma of said plasma processing chamber during substrate processing; deriving, responsive to said first ac signal, a dc voltage level approximating a dc bias level of said substrate during said substrate processing; and modifying, in a dynamic manner and responsive to said dc voltage level, a first potential level supplied by a variable dc power supply to said electrostatic chuck to substantially achieve a desired potential difference between a first portion of said electrostatic chuck and a first region of said substrate overlying said first portion irrespective of a magnitude of said dc bias level of said substrate during said substrate processing.

Claim 26

Dependent Claim 14 words

The method of claim 21 wherein said electrostatic chuck represents a bipolar electrostatic chuck.

Claim 27

Dependent Claim 15 words

The method of claim 21 wherein said plasma processing chamber is configured for plasma etching.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	2001-09-21	2002-03-23	2002-09-22	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2005-09-21	2006-03-23	2006-09-22	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2009-09-21	2010-03-23	2010-09-22	$7700.00	Window Closed / Lapsed

Dynamic feedback electrostatic wafer chuck

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