Process for forming a self-aligned raised source/drain MOS device and device therefrom

Claim 2

A process for forming a self-aligned raised source/drain MOS device comprising: on a semiconductor substrate forming spaced apart field oxide regions, a gate disposed between the opposite field oxide regions, said gate having a gate dielectric on the substrate and a gate electrode on the gate dielectric; forming a source in the substrate between one side of the gate and one field oxide region and forming a drain between the other side of the gate and the other field oxide region; forming a dielectric sidewall on both sides of the gate; depositing a uniform layer of metal over the substrate to contact the source, the drain and the gate electrode; planarizing the layer of metal to expose the dielectric sidewall, to isolate the metal contacting the gate from the metal contacting the source and the drain, and to provide ohmic contacts to the source, gate and drain, each ohmic contact being at substantially the same level as the other ohmic contacts.

Claim 3

The process of claim 1 wherein said metal is tungsten.

Claim 4

The process of claim 1 wherein the source and drain ohmic contacts extend laterally over a portion of the field oxide regions.

Claim 5

The process of claim 1 comprising: depositing a dielectric layer over said ohmic contacts.

Claim 6

The process of claim 4 further comprising: forming an external metal connection through said dielectric layer to the source and drain ohmic contacts.

Claim 7

The process of claim 4 wherein said gate dielectric, said dielectric sidewalls, and said dielectric layer comprise silicon dioxide.

Claim 8

The process of claim 1 wherein said depositing the layer of metal is carried out by chemical vapor deposition.

Claim 9

The process of claim 7 wherein said layer of metal has a thickness of about 2500 to 3500 angstroms.

Claim 10

The process of claim 1 wherein said planarizing the metal layer is carried out by chemimechanical processing.

Claim 11

The process of claim 9 wherein said metal layer after said planarizing has a thickness of about 1000 to 2000 angstroms.

Claim 12

The process of claim 1 wherein said gate electrode comprises polysilicon.

Claim 13

The process of claim 11 wherein said polysilicon gate electrode has a thickness of about 800 to 1200 angstroms.

Claim 14

The process of claim 1 wherein said source and drain are of P conductivity type.

Claim 15

The process of claim 1 wherein said source and drain are of N conductivity type.

Claim 16

A process for forming a self-aligned raised source/drain MOS device comprising: providing a semiconductor substrate that comprises an active region disposed between spaced apart field oxide regions and comprising a gate channel region that includes a gate dielectric surface on the substrate and source and drain regions disposed on either side of said gate channel region; forming a polysilicon layer on said gate dielectric surface; implanting a first impurity into the polysilicon layer and through said polysilicon layer into said substrate, thereby forming a shallow buried channel disposed between said source and drain regions; depositing a silicon nitride layer over said polysilicon layer; selectively removing the portion of the silicon nitride and polysilicon layers overlying the source and drain regions, thereby defining a gate stack structure of silicon nitride and polysilicon layers over the gate channel region; implanting a second impurity into said source and drain regions, thereby forming a source and a drain; depositing a first insulating layer overlying said source and drain and said gate channel region; selectively removing portions of said first insulating layer overlying the source and drain and the gate region silicon nitride layer, leaving an insulating sidewall spacer on both sides of said polysilicon layer, thereby forming a sidewall sealed gate; removing the silicon nitride layer overlying the gate polysilicon layer; depositing a tungsten layer overlying the source, drain, gate polysilicon layer, and insulating sidewall spacers; planarizing the tungsten layer, thereby exposing the sidewall insulating spacers and forming a planarized tungsten layer having a substantially planar upper surface, said layer comprising a first portion having a lower surface in contact with said gate polysilicon layer, said first portion of the planarized tungsten layer being electrically isolated by said exposed insulating sidewall spacers from adjacent portions of said planarized tungsten layer; selectively removing a portion of the planarized tungsten layer overlying said field oxide region, thereby forming a second portion and a third portion of said planarized tungsten layer, each said second and third portion being electrically isolated from said first portion and each having a lower surface in contact with said source and said drain, respectively, the upper surface of said first, second, and third portions of said planarized tungsten layer comprising a substantially coplanar surface.

Claim 17

A process for forming a self-aligned raised source/drain MOS device comprising: providing a semiconductor substrate that comprises an active region disposed between spaced apart field oxide regions and comprising a gate channel region that includes a gate dielectric surface on the substrate and source and drain regions disposed on either side of said gate channel region; forming a polysilicon layer on said gate dielectric surface; implanting a first impurity into the polysilicon layer and through said polysilicon layer into said substrate, thereby forming a shallow buried channel disposed between said source and drain regions; depositing a silicon nitride layer over said polysilicon layer; selectively removing the portion of the silicon nitride and polysilicon layers overlying the source and drain regions, thereby defining a gate stack structure of silicon nitride and polysilicon layers over the gate channel region; implanting a second impurity into said source and drain regions, thereby forming a source and a drain; depositing a first insulating layer overlying said source and drain and said gate channel region; selectively removing portions of said first insulating layer overlying the source and drain and the gate region silicon nitride layer, leaving an insulating sidewall spacer on both sides of said polysilicon layer, thereby forming a sidewall sealed gate; removing the silicon nitride layer overlying the gate polysilicon layer; depositing a tungsten layer overlying the source, drain, gate polysilicon layer, and insulating sidewall spacers; planarizing the tungsten layer, thereby exposing the sidewall insulating spacers and forming a planarized tungsten layer having a substantially planar upper surface, said layer comprising a first portion having a lower surface in contact with said gate polysilicon layer, said first portion of the planarized tungsten layer being electrically isolated by said exposed insulating sidewall spacers from adjacent portions of said planarized tungsten layer; selectively removing a portion of the planarized tungsten layer overlying said field oxide region, thereby forming a second portion and a third portion of said planarized tungsten layer, each said second and third portion being electrically isolated from said first portion and each having a lower surface in contact with said source and said drain, respectively, the upper surface of said first, second, and third portions of said planarized tungsten layer comprising a substantially coplanar surface.

Claim 18

The process of claim 15 wherein the second and third portions of the planarized tungsten layer extend laterally over a portion of the field oxide region.

Claim 19

The process of claim 15 further comprising: depositing a second insulating layer overlying the first, second, and third portions of the planarized tungsten layer.

Claim 20

The process of claim 15 further comprising: following selectively removing the insulating layer from the source, drain, and silicon nitride layer overlying the gate region, implanting a third impurity into said source and said drain.

Claim 21

The process of claim 17 further comprising: forming an external metal connection through the second insulating layer to the upper surface of the second and third portions of said planarized tungsten layer.

Claim 22

The process of claim 15 wherein said dielectric surface comprises silicon dioxide.

Claim 23

The process of claim 15 wherein said first and second insulating layers comprise silicon dioxide.

Claim 24

The process of claim 15 wherein said removing the portion of the silicon nitride layers exposed by the photoresist gate pattern is carried out by reactive ion etching.

Claim 25

The process of claim 15 wherein said selectively removing the insulating layer from the source, drain, and silicon nitride layer overlying the gate region is carried out by reactive ion etching.

Claim 26

The process of claim 18 wherein said impurities each comprises a p-type dopant.

Claim 27

The process of claim 18 wherein said impurities each comprises an n-type dopant.

Claim 28

The process of claim 15 wherein the gate polysilicon layer has a thickness of about 800 to 1200 angstroms.

Claim 29

The process of claim 15 wherein said removing the silicon nitride layer overlying the gate polysilicon layer is carried out by reacting the silicon nitride with phosphoric acid.

Claim 30

The process of claim 15 wherein said depositing the tungsten layer is carried out by chemical vapor deposition.

Claim 31

The process of claim 28 wherein the deposited tungsten layer has a thickness of about 2500 to 3500 angstroms.

Claim 32

The process of claim 15 wherein said planarizing the deposited tungsten layer is carried out by chemimechanical processing.

Claim 33

The process of claim 30 wherein the first portion of the planarized tungsten layer has a thickness of about 1000 to 2000 angstroms.

Claim 34

The process of claim 31 wherein the upper and lower surfaces of the second and third portions of the planarized tungsten layer each have a width dimension, the ratio of the width of the upper surface to the width of the lower surface of said second and third portions being from about 2:1 to 4:1.

Claim 35

The process of claim 31 wherein the upper surface width of each said second and third portion is about 400 to 2000 angstroms and the lower surface width of each said portion is about 200 to 600 angstroms.

Claim 36

The process of claim 21 herein said first insulating layer has a thickness of about 1500 to 3500 angstroms.

Claim 37

The process of claim 21 wherein said second insulating layer has a thickness of about 1500 to 3500 angstroms.

Claim 38

A self-aligned raised source/drain MOS device comprising: a semiconductor substrate having a surface with source and drain diffusion regions and a gate region disposed between the source and drain diffusion regions. said gate region comprising a gate insulating layer in contact with the surface of the substrate and a layer of gate conductive material on the insulating layer; a planarized metal layer forming raised source drain and gate electrodes, the source and drain electrodes each having a lower surface in ohmic contact with the source and the drain regions, respectively; the source, drain and gate electrodes having an upper surface substantially coplanar with one another, the gate electrode being in ohmic contact with the gate conductive material, a pair of insulating sidewall spacers disposed on opposite sides of the gate conductive material and gate electrode for electrically isolating the gate electrode and the gate conductive material from the source and drain electrodes and the source and drain regions.

Claim 39

A self-aligned raised source/drain MOS device comprising: a semiconductor substrate having a surface with source and drain diffusion regions and a gate region disposed between the source and drain diffusion regions. said gate region comprising a gate insulating layer in contact with the surface of the substrate and a layer of gate conductive material on the insulating layer; a planarized metal layer forming raised source drain and gate electrodes, the source and drain electrodes each having a lower surface in ohmic contact with the source and the drain regions, respectively; the source, drain and gate electrodes having an upper surface substantially coplanar with one another, the gate electrode being in ohmic contact with the gate conductive material, a pair of insulating sidewall spacers disposed on opposite sides of the gate conductive material and gate electrode for electrically isolating the gate electrode and the gate conductive material from the source and drain electrodes and the source and drain regions.

Claim 40

The MOS device of claim wherein the raised source and drain electrodes each extends laterally over a portion of a field oxide region adjacent said source and drain diffusion regions.

Claim 41

The MOS device of claim 37 wherein said upper and lower surfaces of said raised source and drain electrodes each have a width dimension, the ratio of the width of the upper surface to the width of the lower surface being from about 2:1 to 4:1.

Claim 42

The MOS device of claim 37 wherein the upper surface width of the raised source and drain electrodes is each about 400 to 2000 angstroms, and the lower surface width of said electrodes is each about 200 to 500 angstroms.

Claim 43

The MOS device of claim 36 wherein the gate electrode has a thickness of about 1000 to 2000 angstroms.

Claim 44

The MOS device of claim 36 wherein the source and drain each comprises an n-type dopant.

Claim 45

The MOS device of claim 36 wherein the source and drain each comprises a p-type dopant.

Claim 46

The MOS device of claim 36 wherein the source and drain each has a width of about 200 to 600 angstroms.

Claim 47

The MOS device of claim 36 wherein the gate has a width of about 200 to 600 angstroms.

Claim 48

The MOS device of claim 36 wherein the gate conductive material is doped polysilicon and has a thickness of about 800 to 1200 angstroms.

Claim 49

The MOS device of claim 36 further comprising: an insulating layer overlying the source, gate and drain electrodes.

Claim 50

The MOS device of claim 36 further comprising: an external metal connection extending through the insulating layer to the upper surface of the source and drain electrodes.

Claim 51

The MOS device of claim 47 wherein said external metal connection comprises aluminum.

Claim 52

The MOS device of claim 36 wherein the metal of the source, gate and drain electrodes comprises one selected from the group consisting of tungsten, titanium, molybdenum, platinum and aluminum.