US5801634A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Signal tower controller
Assignee: Sony Corp
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Filing: 1997-09-08
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Granted: 1998-09-01
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Expires: 2017-09-08
Abstract
Abstract The invention provides an apparatus and method of monitoring a CVD process and providing an alarm signal normally used to terminate the CVD process in response to detecting the simultaneous occurrences of a command to initiate the CVD process, the initiation of the flow of a reactive process gas into the process chamber and the motion of a turret supporting the workpiece.
Inventors
- 👤 Joseph R. Young
- 👤 Benjamin Garcia Rodriguez
- 👤 James R. Barry
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:02
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/52
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
131 words
An apparatus for monitoring a deposition process in which a workpiece is supported on a movable chuck within a deposition chamber, the apparatus comprising: a first state switch operating in response to an initiation of the deposition process within the deposition chamber; a second state switch operating in response an initiation of a flow of a reactive process gas into the deposition chamber; a third state switch operating in response to detecting motion of the chuck; and providing an alarm signal in response to the operation of the first, second and third state switches, whereby the alarm signal is produced upon detecting the simultaneous occurrences of the initiation of the deposition process, the initiation of the flow of the reactive process gas into the deposition chamber and, motion of the chuck.
Claim 2
Independent Claim
131 words
An apparatus for monitoring a deposition process in which a workpiece is supported on a movable chuck within a deposition chamber, the apparatus comprising: a first state switch operating in response to an initiation of the deposition process within the deposition chamber; a second state switch operating in response an initiation of a flow of a reactive process gas into the deposition chamber; a third state switch operating in response to detecting motion of the chuck; and providing an alarm signal in response to the operation of the first, second and third state switches, whereby the alarm signal is produced upon detecting the simultaneous occurrences of the initiation of the deposition process, the initiation of the flow of the reactive process gas into the deposition chamber and, motion of the chuck.
Claim 3
Dependent Claim
27 words
The apparatus of claim 1 wherein the second state switch operates in response to the flow of one of silane and tungsten hexaflouride into the deposition chamber.
Claim 4
Dependent Claim
33 words
The apparatus of claim 1 wherein the chuck is movable to a processing position and the third state switch operates in response to detecting motion of the chuck away from the processing position.
Claim 5
Dependent Claim
22 words
The apparatus of claim 1 wherein the alarm signal is produced in response to the first, second and third state switches closing.
Claim 6
Independent Claim
136 words
An apparatus for monitoring a deposition process in which a workpiece is supported on a movable chuck within a deposition chamber, the apparatus comprising an AND gate providing an output having a first state in response to a first input having the first state in response to an initiation of the deposition process within the deposition chamber; a second input having the first state in response to an initiation of a flow of a reactive process gas into the deposition chamber; a third input having the first state in response to detecting motion of the chuck, whereby the first state of the output is produced upon detecting the simultaneous occurrences of the initiation of the deposition process, the initiation of the flow of the reactive process gas into the deposition chamber and, motion of the chuck.
Claim 7
Independent Claim
136 words
An apparatus for monitoring a deposition process in which a workpiece is supported on a movable chuck within a deposition chamber, the apparatus comprising an AND gate providing an output having a first state in response to a first input having the first state in response to an initiation of the deposition process within the deposition chamber; a second input having the first state in response to an initiation of a flow of a reactive process gas into the deposition chamber; a third input having the first state in response to detecting motion of the chuck, whereby the first state of the output is produced upon detecting the simultaneous occurrences of the initiation of the deposition process, the initiation of the flow of the reactive process gas into the deposition chamber and, motion of the chuck.
Claim 8
Independent Claim
99 words
A method for monitoring a deposition process in which a workpiece is supported on a movable chuck within a deposition chamber, the method comprising the steps of: detecting a command to initiate a deposition process within the deposition chamber; detecting the initiation of the flow of a reactive process gas into the deposition chamber; detecting motion of the chuck away from the processing position; and providing an alarm signal in response to detecting the simultaneous occurrences of the command to initiate the process, the initiation of the flow of the reactive process gas and, the motion of the chuck.
Claim 9
Independent Claim
99 words
A method for monitoring a deposition process in which a workpiece is supported on a movable chuck within a deposition chamber, the method comprising the steps of: detecting a command to initiate a deposition process within the deposition chamber; detecting the initiation of the flow of a reactive process gas into the deposition chamber; detecting motion of the chuck away from the processing position; and providing an alarm signal in response to detecting the simultaneous occurrences of the command to initiate the process, the initiation of the flow of the reactive process gas and, the motion of the chuck.
Claim 10
Dependent Claim
29 words
The method of claim 6 further comprising the step of producing in response to the alarm signal a visual indicator representing motion of the chuck during the deposition process.
Claim 11
Dependent Claim
29 words
The method of claim 7 further comprising the step of producing in response to the alarm signal an aural alarm representing motion of the chuck during the deposition process.
Claim 12
Dependent Claim
21 words
The method of claim 6 further comprising the step of terminating the deposition process in response to detecting the alarm signal.
Claim 13
Independent Claim
132 words
A method for monitoring a deposition process in which a workpiece is supported on a movable chuck within a deposition chamber, the method comprising the steps of: producing a first signal in response to an initiation of the deposition process within the deposition chamber; producing a second signal in response to an initiation of a flow of a reactive process gas into the deposition chamber; producing a third signal in response to detecting motion of the chuck; and providing an alarm signal in response to the simultaneous occurrences of the first, second and third signals, whereby an alarm is produced upon detecting the simultaneous occurrences of the initiation of the deposition process, the initiation of the flow of the reactive process gas into the deposition chamber and, the motion of the chuck.
Claim 14
Independent Claim
132 words
A method for monitoring a deposition process in which a workpiece is supported on a movable chuck within a deposition chamber, the method comprising the steps of: producing a first signal in response to an initiation of the deposition process within the deposition chamber; producing a second signal in response to an initiation of a flow of a reactive process gas into the deposition chamber; producing a third signal in response to detecting motion of the chuck; and providing an alarm signal in response to the simultaneous occurrences of the first, second and third signals, whereby an alarm is produced upon detecting the simultaneous occurrences of the initiation of the deposition process, the initiation of the flow of the reactive process gas into the deposition chamber and, the motion of the chuck.
Claim 15
Independent Claim
96 words
A method for monitoring a deposition process in which a workpiece is supported on a chuck within a deposition chamber, the method comprising the steps of: detecting a command to initiate a deposition process within the deposition chamber; detecting initiation of a flow of a reactive process gas into the deposition chamber; detecting motion of the chuck; and providing a signal to terminate the deposition process in response to detecting the simultaneous occurrences of the command to initiate the process, the initiation of the flow of the reactive process gas and, the motion of the chuck.
Claim 16
Independent Claim
96 words
A method for monitoring a deposition process in which a workpiece is supported on a chuck within a deposition chamber, the method comprising the steps of: detecting a command to initiate a deposition process within the deposition chamber; detecting initiation of a flow of a reactive process gas into the deposition chamber; detecting motion of the chuck; and providing a signal to terminate the deposition process in response to detecting the simultaneous occurrences of the command to initiate the process, the initiation of the flow of the reactive process gas and, the motion of the chuck.
Claim 17
Dependent Claim
21 words
The method of claim 11 wherein the method further comprises detecting a flow of a reactive gas into the deposition chamber.
Claim 18
Dependent Claim
26 words
The method of claim 11 wherein the method further comprises detecting a flow of one of SiH 4 gas and WF 6 into the deposition chamber.
Claim 19
Dependent Claim
29 words
The method of claim 11 wherein the chuck is movable to a processing position and the method further comprises detecting motion of the chuck away from the processing position.
Claim 20
Dependent Claim
32 words
The method of claim 11 wherein a plurality of workpieces are supported on a plurality of chucks attached to a rotatable turret and the method further comprises detecting rotation of the turret.
Claim 21
Dependent Claim
36 words
The method of claim 15 wherein the turret rotates to move the chucks between a handling position and the processing position and wherein the method further comprises detecting rotation of the turret from the processing position.
Claim 22
Independent Claim
134 words
A method for monitoring a deposition process in which workpieces are supported on chucks within a deposition chamber, the chucks being mounted on a turret rotatable to a processing position, the method comprising the steps of: closing first contacts in response to a command to initiate a deposition process within the deposition chamber; closing second contacts in series with the first contacts in response to detecting initiation of a flow of a reactive process gas into the deposition chamber; closing third contacts in series with the first and second contacts in response to the turret being in the processing position; opening the third contacts in response to the turret moving from the processing position; and providing an alarm signal in response to the first and second contacts being closed and the third contacts opening.
Claim 23
Independent Claim
134 words
A method for monitoring a deposition process in which workpieces are supported on chucks within a deposition chamber, the chucks being mounted on a turret rotatable to a processing position, the method comprising the steps of: closing first contacts in response to a command to initiate a deposition process within the deposition chamber; closing second contacts in series with the first contacts in response to detecting initiation of a flow of a reactive process gas into the deposition chamber; closing third contacts in series with the first and second contacts in response to the turret being in the processing position; opening the third contacts in response to the turret moving from the processing position; and providing an alarm signal in response to the first and second contacts being closed and the third contacts opening.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-08-31 | 2002-03-02 | 2002-09-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-08-31 | 2006-03-02 | 2006-09-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-08-31 | 2010-03-02 | 2010-09-01 | $7700.00 | Window Closed / Lapsed |