US5690744A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Wafer orientation alignment system
Assignee: Varian Semiconductor Equipment Associates Inc
•
Filing: 1996-10-10
•
Granted: 1997-11-25
•
Expires: 2016-10-10
Abstract
Abstract An apparatus and method for precisely calibrating the transfer arm of a multiple station wafer processing system without breaking vacuum and with a minimum of system downtime is provided. A system of determining and properly aligning the crystallographic orientation of the wafers before processing as well as monitoring the orientation of individual wafers during wafer transfer between processing stations is also provided.
Inventors
- 👤 Richard F. Landau
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:05
CPC Classifications
H; H10; H10P; H10P74/00; H10P72/00; H10P72/50; H10P72/53
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
72 words
A method of aligning a crystallographic orientation of a wafer in a sealable semiconductor processing system, said method comprising the steps of: defining a desired wafer orientation; remotely imaging said wafer with a video camera, said wafer coupled to a rotation stage; determining said crystallographic orientation of said wafer while said system is sealed; and rotating said stage until said crystallographic orientation of said wafer is aligned with said desired wafer orientation.
Claim 2
Independent Claim
72 words
A method of aligning a crystallographic orientation of a wafer in a sealable semiconductor processing system, said method comprising the steps of: defining a desired wafer orientation; remotely imaging said wafer with a video camera, said wafer coupled to a rotation stage; determining said crystallographic orientation of said wafer while said system is sealed; and rotating said stage until said crystallographic orientation of said wafer is aligned with said desired wafer orientation.
Claim 3
Dependent Claim
21 words
The method of claim 1, further comprising the step of communicating said video camera image of said wafer to a display.
Claim 4
Dependent Claim
29 words
The method of claim 1, further comprising the step of communicating said determined crystallographic orientation of said wafer to a computer, said computer controlling said rotation of said stage.
Claim 5
Dependent Claim
95 words
An orientation alignment system for aligning a crystallographic orientation of a wafer, said wafer within a sealable semiconductor processing system, said alignment system comprising: a wafer rotation stage within said sealable semiconductor processing system, said wafer coupled to said rotation stage; a video camera mounted in a location adjacent to said rotation stage, said location of said camera allowing said camera to observe said crystallographic orientation of said wafer while said sealable semiconductor processing system is sealed; and a controller for remotely rotating said wafer rotation stage while said sealable semiconductor processing system is sealed.
Claim 6
Dependent Claim
95 words
An orientation alignment system for aligning a crystallographic orientation of a wafer, said wafer within a sealable semiconductor processing system, said alignment system comprising: a wafer rotation stage within said sealable semiconductor processing system, said wafer coupled to said rotation stage; a video camera mounted in a location adjacent to said rotation stage, said location of said camera allowing said camera to observe said crystallographic orientation of said wafer while said sealable semiconductor processing system is sealed; and a controller for remotely rotating said wafer rotation stage while said sealable semiconductor processing system is sealed.
Claim 7
Dependent Claim
26 words
The wafer orientation alignment system of claim 4, further comprising a display coupled to said video camera, said display communicating said crystallographic orientation of said wafer.
Claim 8
Dependent Claim
19 words
The wafer orientation alignment system of claim 4, further comprising a wide angle lens coupled to said video camera.
Claim 9
Dependent Claim
18 words
The wafer orientation alignment system of claim 4, wherein said sealable semiconductor processing system is a sputtering system.
Claim 10
Dependent Claim
48 words
The wafer orientation alignment system of claim 4, further comprising a computer coupled to said camera and coupled to said controller, wherein said computer manages said controller causing said controller to rotate said stage until said crystallographic orientation of said wafer is aligned with a desired wafer orientation.
References Cited (Backward Citations)
US3838028A
Cited
US5281320A
Cited
US4819167A
Cited
US4833790A
Cited
US4816133A
Cited
US5102280A
Cited
US5483138A
Cited
US5511005A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-11-24 | 2001-05-26 | 2001-11-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-11-24 | 2005-05-26 | 2005-11-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-11-24 | 2009-05-26 | 2009-11-25 | $7700.00 | Window Closed / Lapsed |