US4819167A
Expired / Lapsed
US
⏱️ 0.0 years remaining
System and method for detecting the center of an integrated circuit wafer
Assignee: Applied Materials Inc
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Filing: 1987-04-20
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Granted: 1989-04-04
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Expires: 2007-04-20
Abstract
Abstract A system and method for determining the precise location of a moving object such as a semiconductor wafer relative to a destination position, using an array of optical sensors positioned along an axis generally transverse to the path of movement of the wafer. The sensor trigger points along the path of movement are used to calculate the center position of the wafer relative to the destination position.
Inventors
- 👤 David Cheng
- 👤 Wesley W. Zhang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 20:22
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/50; H10P72/53; H10W; H10W46/00; H10W46/501; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/137
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
146 words
A system for detecting the locus relative to a selected point of an object having leading and trailing edges, such as a semiconductor wafer, positioned on a support movable along a selected path, and for moving the support and object to the selected point, comprising: a sensor array comprising a plurality of sensors adapted for providing an output signal, said sensors being mounted along an axis generally traverse to the path of movement of said object, said sensors being triggered by the leading and trailing edges of the moving object for supplying output signals representing the wafer position associated with the sensor trigger point; means responsive to the output signals for calculating the location of the wafer relative to the selected point; and means responsive to the computed relative location of the object for moving the support and the object positioned thereon to the selected point.
Claim 2
Independent Claim
146 words
A system for detecting the locus relative to a selected point of an object having leading and trailing edges, such as a semiconductor wafer, positioned on a support movable along a selected path, and for moving the support and object to the selected point, comprising: a sensor array comprising a plurality of sensors adapted for providing an output signal, said sensors being mounted along an axis generally traverse to the path of movement of said object, said sensors being triggered by the leading and trailing edges of the moving object for supplying output signals representing the wafer position associated with the sensor trigger point; means responsive to the output signals for calculating the location of the wafer relative to the selected point; and means responsive to the computed relative location of the object for moving the support and the object positioned thereon to the selected point.
Claim 3
Dependent Claim
39 words
The system of claim 1, wherein the object is a generally circular semiconductor wafer; the calculating means is adapted for calculating the center of said wafer; and the sensor array comprises three sensors for providing six wafer position points.
Claim 4
Dependent Claim
90 words
The system of claim 2, wherein the object is a generally circular semiconductor wafer; the calculating means is adapted for calculating the center of said wafer; the sensor array comprises three sensors; the movable support means comprises a robot arm adapted for supporting the wafer horizontally thereon and having an orifice at a selected location a known distance from the selected point, the path of movement of said orifice being coincident with one of said sensors for triggering said sensor to provide a reference position for said wafer position points.
Claim 5
Dependent Claim
154 words
The system of claim 2, wherein the object is a generally circular semiconductor wafer; the calculating means is adapted for calculating the center of said wafer; the sensor array comprises three sensors; the movable support means comprises (1) a robot arm adapted for supporting the wafer horizontally thereon and having an orifice at a selected location a known distance from the selected point, the path of movement of said orifice being coincident with one of said sensors for triggering said sensor to provide a reference position for said wafer position points and (2) a dual four-bar link mechanism operatively connected to the robot arm; and said responsive moving means comprises a rotatable shaft connected to a selected drive arm of the four-bar link mechanism for reciprocally pivoting the drive arm to extend and retract the robot support arm along the path of movement, and means responsive to said location information for rotating said shaft.
Claim 6
Dependent Claim
31 words
The system of claim 4, said responsive moving means further comprising a second rotatable shaft mounting the dual four-bar link mechanism for rotation therewith; and means for rotating the second shaft.
Claim 7
Independent Claim
139 words
A method for detecting the locus relative to a selected point of an object having leading and trailing edges, such as a semiconductor wafer, positioned on a movable support, and for moving the support and object along a preselected path to the selected point, comprising: providing an array of sensors arranged along an axis generally transverse to the path of movement of the object; moving the object along the path such that the leading and trailing edges thereof trigger the sensors to thereby generate associated output signals representing the wafer positions associated with the sensor trigger points along the path of movement; responsive to said output signals, calculating the location of said object relative to said reference position and selected point; and responsive to the calculation of said relative location, stopping movement of the object at said selected point.
Claim 8
Independent Claim
139 words
A method for detecting the locus relative to a selected point of an object having leading and trailing edges, such as a semiconductor wafer, positioned on a movable support, and for moving the support and object along a preselected path to the selected point, comprising: providing an array of sensors arranged along an axis generally transverse to the path of movement of the object; moving the object along the path such that the leading and trailing edges thereof trigger the sensors to thereby generate associated output signals representing the wafer positions associated with the sensor trigger points along the path of movement; responsive to said output signals, calculating the location of said object relative to said reference position and selected point; and responsive to the calculation of said relative location, stopping movement of the object at said selected point.
Claim 9
Dependent Claim
50 words
The method of claim 6, further comprising providing an orifice support at a selected location a known distance from the selected point, the path of movement of said orifice being coincident with one of said sensors for triggering said sensor to provide a reference position for said wafer position points.
Claim 10
Dependent Claim
57 words
The method of claim 7, the step of calculating the center of said wafer comprising, first, determining the center of the wafer along a coordinate axis generally parallel to the path of movement and, secondly, using the first center coordinate to determine the center of the wafer along a coordinate axis generally perpendicular to the first axis.
Claim 11
Independent Claim
169 words
A method for detecting the locus relative to a selected point of a semiconductor wafer having leading and trailing edges, positioned on a movable support, and for moving the support and semiconductor wafer along a preselected path to the selected point, comprising: providing an array of three sensors arranged along an axis generally transverse to the path of movement of said semiconductor wafer; providing an orifice on the support at a selected location a known distance from the selected point, the path of movement of said orifice being coincident with one of said sensors for triggering said sensor to provide a reference position; moving the wafer along the preselected path such that the leading and trailing edges thereof trigger the sensors to thereby generate associated output signals representing the wafer positions associated with the sensor trigger points along the path of movement relative to said reference position and said selected point; and responsive to said output signals, calculating the center of the semiconductor wafer relative to the selected point.
Claim 12
Independent Claim
169 words
A method for detecting the locus relative to a selected point of a semiconductor wafer having leading and trailing edges, positioned on a movable support, and for moving the support and semiconductor wafer along a preselected path to the selected point, comprising: providing an array of three sensors arranged along an axis generally transverse to the path of movement of said semiconductor wafer; providing an orifice on the support at a selected location a known distance from the selected point, the path of movement of said orifice being coincident with one of said sensors for triggering said sensor to provide a reference position; moving the wafer along the preselected path such that the leading and trailing edges thereof trigger the sensors to thereby generate associated output signals representing the wafer positions associated with the sensor trigger points along the path of movement relative to said reference position and said selected point; and responsive to said output signals, calculating the center of the semiconductor wafer relative to the selected point.
Claim 13
Dependent Claim
57 words
The method of claim 9, the step of calculating the center of said wafer comprising, first, determining the center of the wafer along a coordinate axis generally parallel to the path of movement and, secondly, using the first center coordinate to determine the center of the wafer along a coordinate axis generally perpendicular to the first axis.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-04-03 | 1992-10-03 | 1993-04-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-04-03 | 1996-10-03 | 1997-04-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-04-03 | 2000-10-03 | 2001-04-04 | $7700.00 | Window Closed / Lapsed |