US5800951A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Exposure method and exposure mask with monitoring patterns
Assignee: NEC Electronics Corp
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Filing: 1996-11-22
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Granted: 1998-09-01
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Expires: 2016-11-22
Abstract
Abstract An exposure method which makes it possible to determine the amount of exposure and the placement error with the use of fewer monitoring patterns is provided. A scribing region of an exposure mask includes a first monitoring pattern of geometric shapes and a second monitoring pattern of geometric shapes. The shapes of the first pattern are arranged at a constant pitch and have the same size. The shapes of the second pattern are arranged at the same pitch as that of the shapes of the first pattern and have different sizes from each other. By illuminating the substrate twice using the exposure mask, first and second images of the circuit pattern region and first and second images of the scribing region are formed on the substrate so that the second image of the scribing region is adjacent to the first image of the scribing region. The second image of the shapes of the second pattern is compared with the first image of the shapes of the first pattern. Therefore, the amount of exposure and/or the placement error between the first and second images of the circuit pattern regions can be determined as a result of the comparison.
Inventors
- 👤 Takeo Hashimoto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 00:05
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/7055; G03F7/70558; G03F7/70605; G03F7/70616; G03F7/70633
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
324 words
An exposure method comprising the steps of: (a) preparing an exposure mask having a circuit pattern region and a scribing region formed to surround said circuit pattern region; said scribing region including a first monitoring pattern of geometric shapes and a shape monitoring pattern of geometric shapes; said geometric shapes of said first monitoring pattern being arranged at a substantially constant pitch and having substantially the same size; said geometric shapes of said second monitoring pattern being arranged at substantially the same pitch as that of said geometric shapes of said first monitoring pattern and having different sizes from each other; (b) forming a first image of said circuit pattern region and a first image of said scribing region on said substrate using said exposure mask by illuminating said substrate; said first image of said scribing region including a first image of said geometric shapes of said first monitoring pattern and a first image of said geometric shapes of said second monitoring pattern; (c) forming a second image of said circuit pattern region and a second image of said scribing region on said substrate using said exposure mask by illuminating said substrate so that said second image of said scribing region is adjacent to said first image of said scribing region; said second image of said scribing region including a second image of said geometric shapes of said second monitoring pattern and a second image of said geometric shapes of said second monitoring pattern; said second image of said geometric shapes of said second monitoring pattern being adjacent to said first image of said geometric shapes of said first monitoring pattern; and (d) comparing said second image of said geometric shapes of said second monitoring pattern with said first image of said geometric shapes of said first monitoring pattern to thereby determine at least one of any exposure error and any placement error between said first and second images of said circuit pattern regions.
Claim 2
Dependent Claim
324 words
An exposure method comprising the steps of: (a) preparing an exposure mask having a circuit pattern region and a scribing region formed to surround said circuit pattern region; said scribing region including a first monitoring pattern of geometric shapes and a shape monitoring pattern of geometric shapes; said geometric shapes of said first monitoring pattern being arranged at a substantially constant pitch and having substantially the same size; said geometric shapes of said second monitoring pattern being arranged at substantially the same pitch as that of said geometric shapes of said first monitoring pattern and having different sizes from each other; (b) forming a first image of said circuit pattern region and a first image of said scribing region on said substrate using said exposure mask by illuminating said substrate; said first image of said scribing region including a first image of said geometric shapes of said first monitoring pattern and a first image of said geometric shapes of said second monitoring pattern; (c) forming a second image of said circuit pattern region and a second image of said scribing region on said substrate using said exposure mask by illuminating said substrate so that said second image of said scribing region is adjacent to said first image of said scribing region; said second image of said scribing region including a second image of said geometric shapes of said second monitoring pattern and a second image of said geometric shapes of said second monitoring pattern; said second image of said geometric shapes of said second monitoring pattern being adjacent to said first image of said geometric shapes of said first monitoring pattern; and (d) comparing said second image of said geometric shapes of said second monitoring pattern with said first image of said geometric shapes of said first monitoring pattern to thereby determine at least one of any exposure error and any placement error between said first and second images of said circuit pattern regions.
Claim 3
Dependent Claim
43 words
A method as claimed in claim 1, wherein said geometric shapes of said first monitoring pattern are linear and have substantially the same linewidth; and wherein said geometric shapes of said second monitoring pattern are linear and have different linewidths from each other.
Claim 4
Dependent Claim
22 words
A method as claimed in claim 2, wherein said linewidths of said geometric shapes of said second monitoring pattern are monotonously changed.
Claim 5
Dependent Claim
49 words
A method as claimed in claim 1, wherein said second monitoring pattern includes a geometric shape which is located at the center of said second monitoring pattern and has a size substantially equal to that of a corresponding geometric shape located at the center of said first monitoring pattern.
Claim 6
Dependent Claim
53 words
A method as claimed in claim 4, wherein said geometric shapes of said first and second monitoring patterns are linear, and respective linewidths of said geometric shape located at the center of said second monitoring pattern and said corresponding geometric shape located at the center of said first monitoring pattern are substantially equal.
Claim 7
Dependent Claim
60 words
A method as claimed in claim 1, wherein said geometric shapes of said second monitoring pattern and said geometric shapes of said first monitoring pattern are formed on said exposure mask so that said second image of said geometric shapes of said second monitoring pattern is opposite to said first image of said geometric shapes of said first monitoring pattern.
Claim 8
Dependent Claim
44 words
A method as claimed in claim 1, wherein said geometric shapes of said first monitoring pattern are formed near an edge of said scribing region, and said geometric shapes of said second monitoring pattern are formed near an opposite edge of said scribing region.
Claim 9
Dependent Claim
60 words
A method as claimed in claim 1, wherein said geometric shapes of said first monitoring pattern are formed near an edge of said scribing region, and said geometric shapes of said second monitoring pattern are formed near an opposite edge of said scribing region; and wherein said edges are disposed in parallel with a scanning direction of said exposure mask.
Claim 10
Dependent Claim
109 words
A method as claimed in claim 1, wherein said geometric shapes of said first monitoring pattern are formed near an edge of said scribing region, and said geometric shapes of said second monitoring pattern are formed near an opposite edge of said scribing region; and wherein said edges are disposed in parallel with a scanning direction of said exposure mask; and wherein said geometric shapes of said first monitoring pattern are linear and arranged in said scanning direction and have substantially the same linewidth; and wherein said geometric shapes of said second monitoring pattern are linear and arranged in said scanning direction and have different linewidths from each other.
Claim 11
Dependent Claim
17 words
A method as claimed in claim 1, wherein said step of comparing (d) determines any exposure error.
Claim 12
Dependent Claim
35 words
A method as claimed in claim 10, wherein said step of comparing (d) includes comparing respective widths of at least one pair of corresponding images of geometric shapes of said first and second monitoring patterns.
Claim 13
Dependent Claim
28 words
A method as claimed in claim 1, wherein said step of comparing (d) determines any placement error between said first and second images of said circuit pattern regions.
Claim 14
Dependent Claim
20 words
A method as claimed in claim 1, wherein said step of comparing (d) determines both exposure error and placement error.
Claim 15
Dependent Claim
92 words
An exposure mask comprising: a circuit pattern region; a scribing region formed to surround said circuit pattern region; said scribing region including a first monitoring pattern of geometric shapes and a second monitoring pattern of geometric shapes; said geometric shapes of said first monitoring pattern being arranged at a substantially constant pitch and having substantially the same size; and said geometric shapes of said second monitoring pattern being arranged at substantially the same pitch as that of said geometric shapes of said first monitoring pattern and having different sizes from each other.
Claim 16
Dependent Claim
92 words
An exposure mask comprising: a circuit pattern region; a scribing region formed to surround said circuit pattern region; said scribing region including a first monitoring pattern of geometric shapes and a second monitoring pattern of geometric shapes; said geometric shapes of said first monitoring pattern being arranged at a substantially constant pitch and having substantially the same size; and said geometric shapes of said second monitoring pattern being arranged at substantially the same pitch as that of said geometric shapes of said first monitoring pattern and having different sizes from each other.
Claim 17
Dependent Claim
43 words
A mask as claimed in claim 14, wherein said geometric shapes of said first monitoring pattern are linear and have substantially the same linewidth; and wherein said geometric shapes of said second monitoring pattern are linear and have different linewidths from each other.
Claim 18
Dependent Claim
22 words
A mask as claimed in claim 15, wherein said linewidths of said geometric shapes of said second monitoring pattern are monotonously changed.
Claim 19
Dependent Claim
43 words
A mask as claimed in claim 14, wherein said second monitoring pattern includes a geometric shape which is located at the center of said second monitoring pattern and has a size equal to that of said geometric shapes of said first monitoring pattern.
Claim 20
Dependent Claim
53 words
A mask as claimed in claim 17, wherein said geometric shapes of said first and second monitoring patterns are linear, and respective linewidths of said geometric shape located at the center of said second monitoring pattern and said corresponding geometric shape located at the center of said first monitoring pattern are substantially equal.
Claim 21
Dependent Claim
60 words
A mask as claimed in claim 14, wherein said geometric shapes of said second monitoring pattern and said geometric shapes of said first monitoring pattern are formed on said exposure mask so that said second image of said geometric shapes of said second monitoring pattern is opposite to said first image of said geometric shapes of said first monitoring pattern.
Claim 22
Dependent Claim
44 words
A mask as claimed in claim 14, wherein said geometric shapes of said first monitoring pattern are formed near an edge of said scribing region, and said geometric shapes of said second monitoring pattern are formed near an opposite edge of said scribing region.
Claim 23
Dependent Claim
60 words
A mask as claimed in claim 14, wherein said geometric shapes of said first monitoring pattern are formed near an edge of said scribing region, and said geometric shapes of said second monitoring pattern are formed near an opposite edge of said scribing region; and wherein said edges are disposed in parallel with a scanning direction of said exposure mask.
Claim 24
Dependent Claim
108 words
A mask as claimed in claim 14, wherein said geometric shapes of said first monitoring pattern are formed near an edge of said scribing region, and said geometric shapes of said second monitoring pattern are formed near an opposite edge of said scribing region; and wherein said edges are disposed in parallel with a scanning direction of said exposure mask; and wherein said geometric shapes of said first monitoring pattern are linear and arranged in said scanning direction and have the same linewidth; and wherein said geometric shapes of said second monitoring pattern are linear and arranged in said scanning direction and have different linewidths from each other.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-08-31 | 2002-03-02 | 2002-09-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-08-31 | 2006-03-02 | 2006-09-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-08-31 | 2010-03-02 | 2010-09-01 | $7700.00 | Window Closed / Lapsed |