US5793073A
Expired / Lapsed
US
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Semiconductor thin film sensor device with (110) plane
Assignee: Ricoh Co Ltd
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Filing: 1996-03-01
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Granted: 1998-08-11
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Expires: 2016-03-01
Abstract
Abstract A semiconductor thin film sensor device including a semiconductor body formed of silicon having a (110) plane; a depression formed by an anisotropic etch applied to a first surface of the semiconductor body, wherein the first surface is substantially parallel to the (110) plane; and a thin film insulation member having a predetermined configuration suspended over the depression, and having substantially opposing ends connected to the first surface of the semiconductor body so that the thin film insulation member is bridged across the depression. Preferably, the depth of the depression is over 200 μm. In one embodiment, the predetermined configuration of the thin film insulation member is oriented substantially parallel to a <100> direction of the semiconductor body.
Inventors
- 👤 Morimasa Kaminishi
- 👤 Takayuki Yamaguchi
- 👤 Yukito Satoh
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 21:21
CPC Classifications
G; G01; G01N; G01N27/00; G01N27/02; G01N27/04; G01N27/14; G01N27/18; G01F; G01F1/00; G01F1/68; G01F1/684; G01F1/6845
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
80 words
A semiconductor device comprising: a semiconductor body comprising silicon having a (110) plane; a depression formed by an anisotropic etch applied to a first surface of the semiconductor body, wherein the first surface is substantially parallel to the (110) plane; and a thin film insulation member having a predetermined configuration suspended over the depression, and having substantially opposing ends connected to the first surface of the semiconductor body so that said thin film insulation member is bridged across the depression.
Claim 2
Dependent Claim
80 words
A semiconductor device comprising: a semiconductor body comprising silicon having a (110) plane; a depression formed by an anisotropic etch applied to a first surface of the semiconductor body, wherein the first surface is substantially parallel to the (110) plane; and a thin film insulation member having a predetermined configuration suspended over the depression, and having substantially opposing ends connected to the first surface of the semiconductor body so that said thin film insulation member is bridged across the depression.
Claim 3
Dependent Claim
17 words
A semiconductor device according to claim 1, wherein a depth of the depression is over 200 μm.
Claim 4
Dependent Claim
29 words
A semiconductor device according to claim 1, wherein the predetermined configuration of the thin film insulation member is oriented substantially parallel to a <100> direction of the semiconductor body.
Claim 5
Dependent Claim
17 words
A semiconductor device according to claim 3, wherein a depth of the depression is over 200 μm.
Claim 6
Dependent Claim
29 words
A semiconductor device according to claim 1, wherein the predetermined configuration of the thin film insulation member is oriented substantially parallel to a <111> direction of the semiconductor body.
Claim 7
Dependent Claim
17 words
A semiconductor device according to claim 5, wherein a depth of the depression is over 200 μm.
Claim 8
Dependent Claim
25 words
A semiconductor device according to claim 1, wherein the predetermined configuration is oriented at an angle to a <100> direction, the angle being under 35.26°.
Claim 9
Dependent Claim
17 words
A semiconductor device according to claim 7, wherein a depth of the depression is over 200 μm.
Claim 10
Dependent Claim
31 words
A semiconductor device according to claim 1, wherein the predetermined configuration of the thin film insulation member is oriented at an angle to a <111> direction, the angle being under 19.47°.
Claim 11
Dependent Claim
17 words
A semiconductor device according to claim 9, wherein a depth of the depression is over 200 μm.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-08-10 | 2002-02-09 | 2002-08-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-08-10 | 2006-02-09 | 2006-08-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-08-10 | 2010-02-09 | 2010-08-11 | $7700.00 | Window Closed / Lapsed |