US5792704A
Expired / Lapsed
US
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Method for fabricating wiring in semiconductor device
Assignee: SK Hynix Inc
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Filing: 1996-01-04
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Granted: 1998-08-11
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Expires: 2016-01-04
Abstract
Abstract A method for fabricating wiring in a semiconductor device in which a conductor line and a contact hole are formed by self-alignment, includes the steps of: forming an insulating layer on a substrate; forming an etch-step layer on the insulating layer; etching the etch-stop layer of a wiring region connected to a window and the insulating layer to a predetermined thickness; forming a mask layer on the etch-stop layer and the insulating layer; etching the mask layer to remove the mask layer at the central part of the window; and etching the insulating layer of the central part of the window so as to form a contact hole. By applying such a method, a highly improved reliability can be obtained, and a process thereof is simplified by a single photolithography. Also, the contact hole is formed by self-alignment in the lengthwise direction and in the vertical direction of the conductor line.
Inventors
- 👤 Young Kwon Jun
- 👤 Yong Kwon Kim
- 👤 Jin-Won Park
- 👤 Nae-Hak Park
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 08:45
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/071; H10W20/081; H10W20/084; H10W20/085
Claims Analysis
Total Claims: 43
Claim 1
Independent Claim
141 words
A method for fabricating wiring in a semiconductor device comprising the steps of: forming an insulating layer on a substrate; forming an etch-stop layer on the insulating layer; etching the etch-stop layer at areas corresponding to a wiring region and a window region, wherein a width of the window region is larger than a width of the wiring region; etching exposed portions of the insulating layer to form the wiring region and the window region in the insulating layer; forming a mask layer on remaining portions of the etch-stop layer and the etched portions of the insulating layer; etching the mask layer until the mask layer at a central portion of the window region has been removed; and etching an exposed portion of the insulating layer at the central part of the window region so as to form a contact hole.
Claim 2
Independent Claim
141 words
A method for fabricating wiring in a semiconductor device comprising the steps of: forming an insulating layer on a substrate; forming an etch-stop layer on the insulating layer; etching the etch-stop layer at areas corresponding to a wiring region and a window region, wherein a width of the window region is larger than a width of the wiring region; etching exposed portions of the insulating layer to form the wiring region and the window region in the insulating layer; forming a mask layer on remaining portions of the etch-stop layer and the etched portions of the insulating layer; etching the mask layer until the mask layer at a central portion of the window region has been removed; and etching an exposed portion of the insulating layer at the central part of the window region so as to form a contact hole.
Claim 3
Dependent Claim
22 words
The method according to claim 1, wherein the insulating layer is one selected from O 3 /TEOS SiO 2 , and BPSG.
Claim 4
Dependent Claim
24 words
The method according to claim 1, wherein the width of the window region is more than two times the width of the wiring region.
Claim 5
Dependent Claim
26 words
The method according to claim 1, wherein a thickness of the mask layer is more than at least one-half of the width of the wiring region.
Claim 6
Dependent Claim
17 words
The method according to claim 1, wherein the mask layer is anisotropically etched without a masking step.
Claim 7
Dependent Claim
38 words
The method according to claim 5, wherein the mask layer in both the wiring region and a side wall of the window region remain, whereas the mask layer in the central part of the window region is removed.
Claim 8
Dependent Claim
29 words
The method according to claim 1, wherein the contact hole is formed by anisotropically etching the exposed portion of the insulating layer using the mask layer as a mask.
Claim 9
Dependent Claim
17 words
The method according to claim 1, wherein the etch-stop layer has an etch-selectivity with the mask layer.
Claim 10
Dependent Claim
21 words
The method according to claim 1, wherein the etch-stop layer is one selected from a nitride layer and an oxide layer.
Claim 11
Dependent Claim
14 words
The method according to claim 1, wherein the mask layer is a nitride layer.
Claim 12
Dependent Claim
17 words
The method according to claim 1, wherein the insulating layer and the mask layer are selectively etched.
Claim 13
Independent Claim
162 words
A method for fabricating wiring in a semiconductor device comprising the steps of: forming an insulating layer on a substrate having a conductive layer thereon; forming an etch-stop layer on an upper part of the insulating layer; etching the etch-stop layer at areas corresponding to a wiring region and a window region, wherein a width of the window region is larger that a width of the wiring region; etching exposed portions of the insulating layer to form the wiring region and the window region in the insulating layer; forming a mask layer on remaining portions of the etch-stop layer and the etched portions of the insulating layer; etching the mask layer until the mask layer at a central portion of the window region has been removed; etching an exposed portion of the insulating layer at the central part of the window region so as to form a contact hole; and forming a wiring layer on the insulating layer having the contact hole.
Claim 14
Independent Claim
162 words
A method for fabricating wiring in a semiconductor device comprising the steps of: forming an insulating layer on a substrate having a conductive layer thereon; forming an etch-stop layer on an upper part of the insulating layer; etching the etch-stop layer at areas corresponding to a wiring region and a window region, wherein a width of the window region is larger that a width of the wiring region; etching exposed portions of the insulating layer to form the wiring region and the window region in the insulating layer; forming a mask layer on remaining portions of the etch-stop layer and the etched portions of the insulating layer; etching the mask layer until the mask layer at a central portion of the window region has been removed; etching an exposed portion of the insulating layer at the central part of the window region so as to form a contact hole; and forming a wiring layer on the insulating layer having the contact hole.
Claim 15
Dependent Claim
19 words
The method according to claim 12, wherein the conductive layer is one selected from Al, Cu and an alloy.
Claim 16
Dependent Claim
19 words
The method according to claim 12, wherein the conductive layer corresponds to an impurity region formed on the substrate.
Claim 17
Dependent Claim
22 words
The method according to claim 12, wherein the insulating layer is one selected from O 3 /TEOS SiO 2 , and BPSG.
Claim 18
Dependent Claim
25 words
The method according to claim 12, wherein the width of the window region is more than two times of the width of the wiring region.
Claim 19
Dependent Claim
26 words
The method according to claim 12, wherein a thickness of the mask layer is more than at least one-half of the width of the wiring region.
Claim 20
Dependent Claim
16 words
The method according to claim 12, wherein the mask layer is anisotropically etched without masking step.
Claim 21
Dependent Claim
38 words
The method according to claim 18, wherein the mask layer in both the wiring region and a side wall of the window region remain whereas the mask layer in the central portion of the window region is removed.
Claim 22
Dependent Claim
29 words
The method according to claim 12, wherein the contact hole is formed by anisotropically etching the exposed portion of the insulating layer using the mask layer as a mask.
Claim 23
Dependent Claim
17 words
The method according to claim 12, wherein the etch-stop layer has an etch-selectivity with the mask layer.
Claim 24
Dependent Claim
21 words
The method according to claim 12, wherein the etch-stop layer is one selected from a nitride layer and an oxide layer.
Claim 25
Dependent Claim
14 words
The method according to claim 12, wherein the mask layer is a nitride layer.
Claim 26
Dependent Claim
17 words
The method according to claim 12, wherein the insulating layer and the mask layer are selectively etched.
Claim 27
Dependent Claim
21 words
The method according to claim 12, wherein the wiring layer is one selected from one of Al, Cu and an alloy.
Claim 28
Dependent Claim
45 words
The method according to claim 12, wherein the step for forming the wiring layer further includes the steps of: forming a conductive layer on the insulating layer having the contact hole and the etch-stop layer; and selectively removing the conductive layer above the etch-stop layer.
Claim 29
Dependent Claim
20 words
The method according to claim 26, wherein the conductive layer is removed by one of a CMP and an etch-back.
Claim 30
Dependent Claim
31 words
The method according to claim 12, wherein a removal area of the insulating layer at the central part of the window region is dependent upon a thickness of the mask layer.
Claim 31
Independent Claim
98 words
A method for fabricating wiring of a semiconductor device comprising the steps of: forming an insulating layer on a substrate; etching the insulating layer to form a wiring region and a window region connected to the wiring region, wherein a width of the window region is larger than a width of the wiring region; forming a first conductive layer on the insulating layer; etching the first conductive layer until the conductive layer at a central portion of the window region is removed; and etching an exposed portion of the insulating layer so as to form a contact hole.
Claim 32
Independent Claim
98 words
A method for fabricating wiring of a semiconductor device comprising the steps of: forming an insulating layer on a substrate; etching the insulating layer to form a wiring region and a window region connected to the wiring region, wherein a width of the window region is larger than a width of the wiring region; forming a first conductive layer on the insulating layer; etching the first conductive layer until the conductive layer at a central portion of the window region is removed; and etching an exposed portion of the insulating layer so as to form a contact hole.
Claim 33
Dependent Claim
22 words
The method according to claim 29, wherein the insulating layer is one selected from O 3 /TEOS SiO 2 , and BPSG.
Claim 34
Dependent Claim
24 words
The method according to claim 29, wherein the width of the window region is more than two times the width of the wiring region.
Claim 35
Dependent Claim
26 words
The method according to claim 29, wherein a thickness of the mask layer is more than at least one-half of the width of the wiring region.
Claim 36
Dependent Claim
17 words
The method according to claim 29, wherein the mask layer is anisotropically etched without a masking step.
Claim 37
Dependent Claim
37 words
The method according to claim 29, wherein the mask layer in both the wiring region and a sidewall of the window region remain, whereas the mask layer in the central part of the window region is removed.
Claim 38
Dependent Claim
29 words
The method according to claim 29, wherein the contact hole is formed by anistotropically etching the exposed portion of the insulating layer using the mask layer as a mask.
Claim 39
Dependent Claim
17 words
The method according to claim 29, wherein the etch-stop layer has an etch-selectivity with the mask layer.
Claim 40
Dependent Claim
21 words
The method according to claim 29, wherein the etch-stop layer is one selected from a nitride layer and an oxide layer.
Claim 41
Dependent Claim
14 words
The method according to claim 29, wherein the mask layer is a nitride layer.
Claim 42
Dependent Claim
17 words
The method according to claim 29, wherein the insulating layer and the mask layer are selectively etched.
Claim 43
Dependent Claim
20 words
The method according to claim 29, wherein the first conductive layer is one selected from Al, Cu and an alloy.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-08-10 | 2002-02-09 | 2002-08-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-08-10 | 2006-02-09 | 2006-08-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-08-10 | 2010-02-09 | 2010-08-11 | $7700.00 | Window Closed / Lapsed |