US5792592A
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Photosensitive liquid precursor solutions and use thereof in making thin films
Assignee: Mitsubishi Materials Corp
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Filing: 1996-05-24
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Granted: 1998-08-11
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Expires: 2016-05-24
Abstract
Abstract A photosensitive liquid solution is used to make thin films for use in integrated circuits. The photosensitive liquid solution contains a photo initiator, and solvent, and a mixture of metals bonded to free-radical-susceptible monomers. The metals are mixed in amounts corresponding to the desired stoichiometry of a metal oxide thin film that derives from the. The photosensitive liquid solution is applied to a substrate, soft baked, and exposed to ultraviolet radiation under a photo mask. The ultraviolet radiation patterns the soft-baked film through a free radical polymerization chain reaction. A solvent etch is used to remove the unpolymerized portion of the polymerized film. The remaining thin film pattern is annealed to provide a patterned metal oxide film.
Inventors
- 👤 Hiroto Uchida
- 👤 Nobuyuki Soyama
- 👤 Kensuke Kageyama
- 👤 Katsumi Ogi
- 👤 Michael C. Scott
- 👤 Larry D. McMillan
- 👤 Carlos A. Paz de Araujo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 12:26
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/027; G03F7/028; H; H10; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/692; H10P14/6938; H10P14/69398; G03F7/0005; G03F7/0007; G03F7/0042; G03F7/0047; G03F7/029; G03F7/032; G03F7/033; H10P14/63; H10P14/6326; H10P14/6342; H10P14/65; H10P14/6516; H10P14/6536; H10P14/6538; H10P14/66; H10P14/662; H10P14/668; H10P14/6939; H10P14/69397; H10D; H10D1/00; H10D1/60; H10D1/68; H10D1/682
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
221 words
A method of making a thin film layer for use in integrated circuit devices and optics, said method comprising the steps of: providing a substrate; preparing a photosensitive liquid solution including a free radical photo initiator and at least one polymerizable composition having a metal bonded to a free radical-susceptible monomer; applying said photosensitive liquid solution to said substrate to form a film of said photosensitive liquid solution on said substrate; polymerizing a portion of said film via a photo-initiated free radical polymerization reaction in said composition; and developing a pattern in said film to leave said portion of said film on said substrate, wherein said step of preparing a photosensitive liquid solution includes mixing said photosensitive liquid solution to include a plurality of metals capable of yielding a solid ferroelectric metal oxide layered superlattice material compound during an anneal of said pattern in said film wherein said layered superlattice material compound has a plurality of metals in proportion of metals according to a formulae selected from the group consisting of A m-1 S 2 B m O 3m+3 ; A m+1 B m O 3m+1 ; and A m B m O 3m+2 , wherein A is an A-site metal, B is a B-site metal, S is bismuth, and m is a number sufficient to balance the overall formula charge.
Claim 2
Independent Claim
221 words
A method of making a thin film layer for use in integrated circuit devices and optics, said method comprising the steps of: providing a substrate; preparing a photosensitive liquid solution including a free radical photo initiator and at least one polymerizable composition having a metal bonded to a free radical-susceptible monomer; applying said photosensitive liquid solution to said substrate to form a film of said photosensitive liquid solution on said substrate; polymerizing a portion of said film via a photo-initiated free radical polymerization reaction in said composition; and developing a pattern in said film to leave said portion of said film on said substrate, wherein said step of preparing a photosensitive liquid solution includes mixing said photosensitive liquid solution to include a plurality of metals capable of yielding a solid ferroelectric metal oxide layered superlattice material compound during an anneal of said pattern in said film wherein said layered superlattice material compound has a plurality of metals in proportion of metals according to a formulae selected from the group consisting of A m-1 S 2 B m O 3m+3 ; A m+1 B m O 3m+1 ; and A m B m O 3m+2 , wherein A is an A-site metal, B is a B-site metal, S is bismuth, and m is a number sufficient to balance the overall formula charge.
Claim 3
Dependent Claim
45 words
The method as set forth in claim 1 wherein said step of preparing said photosensitive liquid solution includes mixing said polymerizable composition to yield said layered superlattice material selected from the group consisting of strontium bismuth tantalate, strontium bismuth niobate, and strontium bismuth niobium tantalate.
Claim 4
Dependent Claim
68 words
The method as set forth in claim 1 wherein said step of preparing said photosensitive liquid solution includes use of said polymerizable composition selected from the group consisting of metal acrylates and their substituted derivatives; metal polyethyleneglycol(meth)acrylates and their substituted derivatives; metal phthalic acid polyethyleneglycol acrylates and their substituted derivatives; metal unsaturated carboxylic acids and their derivatives; ethyl acrylates; metal alkoxy acrylates; vinylic metal complexes; and mixtures thereof.
Claim 5
Dependent Claim
48 words
The method as set forth in claim 1 wherein said step of preparing said photosensitive liquid solution includes use of said composition selected from the group consisting of metal glydicidyl methacrylates; metal succinic acid monohydroxyethyl acrylates; metal salts of sorbic acid, metal 2-ethyl-2-hexenoates; and mixtures of these compositions.
Claim 6
Dependent Claim
16 words
The method as set forth in claim 4 wherein said composition is a metal N-2-vinylpyrrolidone compound.
Claim 7
Dependent Claim
85 words
The method as set forth in claim 1 wherein said step of preparing said photosensitive liquid solution includes use of said monomer selected from the group consisting of (2-methacryloxy)-ethoxytriisopropoxides; trimethacrylatemethoxyethoxyethoxides; tetrakis(bis 2,2(allyoxymethyl)butoxides; methacrylate triisopropoxides; methacryloxyethylacetoacetates; phthalic acid acrylates; phthalic acid methacrylates; polyethyleneglycol methacrylates; polyethyleneglycol/polybutyleneglycol methacrylates; succinic acid acrylates; polyethyleneglycol methacrylates; polypropyleneglycol methacrylates; glycerol methacrylates; glycidyl acrylates; glycidyl methacrylates; 2-hydroxyethyl acrylates; 2-hydroxyethyl methacrylates; 2-hydroxypropyl acrylates; 2-hydroxypropyl methacrylates; 1,6 hexanediol diacrylates; pentaerythriol triacetates; triglycerol diacrylates; ethyleneglycol diacrylates; ethylene glycol dimethacrylates; glycerol acrylate/methacrylates; glycerol dimethacrylates; and glycerol triacrylates.
Claim 8
Dependent Claim
36 words
The method as set forth in claim 1 wherein said step of preparing a photosensitive liquid solution includes reacting a metal alkoxide with an acrylate to yield said polymerizable composition as a metal alkoxy acrylate solution.
Claim 9
Dependent Claim
22 words
The method as set forth in claim 7 wherein said reacting step includes distilling said metal alkoxy acrylate solution to eliminate alcohol.
Claim 10
Dependent Claim
25 words
The method as set forth in claim 8 including a step of adding a bismuth acrylate to said metal acrylate solution after said distilling step.
Claim 11
Dependent Claim
37 words
The method as set forth in claim 1 wherein said preparing step includes adding said photo initiator selected from a group consisting of 1-hydroxydimethylmethylphenylketone, 2,2-dimethoxy-2-phenylacetophenone, 1-hydroxycyclohexylphenylketone, 2,2'-azobis(2-methylproionitrile), 2,2-diethoxyacetophenone, 1-phenyl-2-hydroxy-2-methylpropane-1-one, 2-methyl-1(4-methylthiophenyl)-2-molphorino-propane-1-one, 2,4,6-(trimethyl)benzoil diphenylphosphine oxide, benzoin ethers, and hydroxyacetophenones.
Claim 12
Dependent Claim
28 words
The method as set forth in claim 10 wherein said step polymerizing a portion of said film includes use of ultraviolet radiation to initiate said photo-initiated polymerization reaction.
Claim 13
Dependent Claim
40 words
The method as set forth in claim 11 wherein said step polymerizing a portion of said film includes use of said ultraviolet radiation having a wavelength ranging from 250-300 nm to deliver a total energy of at least 500 mJ.
Claim 14
Dependent Claim
40 words
The method as set forth in claim 1 wherein said step polymerizing a portion of developing a pattern in said film includes washing unpolymerized portions of said film away from said substrate to leave a patterned film on said substrate.
Claim 15
Dependent Claim
25 words
The method as set forth in claim 13 wherein said step of washing unpolymerized portions of said film includes use of a polar organic solvent.
Claim 16
Dependent Claim
19 words
The method as set forth in claim 1 including a step of annealing said film after said polymerizing step.
Claim 17
Dependent Claim
27 words
The method as set forth in claim 15 wherein said step of annealing said film includes annealing at a temperature ranging from 450° C. to 850° C.
Claim 18
Dependent Claim
28 words
The method as set forth in claim 1 wherein said step of applying said photosensitive liquid solution includes spin-on deposition of said photosensitive liquid solution to said substrate.
Claim 19
Dependent Claim
12 words
A thin film layer produced according to the method of claim 1.
Claim 20
Dependent Claim
108 words
A photosensitive liquid solution for use in making integrated circuits, comprising: a polymerizable composition including at least one metal bonded to a free radical susceptible monomer; a solvent mixed with a plurality of metal acrylates to a molarity of metals in said metal acrylates ranging from 0.01 mole percent to 0.2 mole percent based upon an empirical formula of a desired metal oxide to be produced from said photosensitive solution; and a photo polymerization initiator, wherein said Plurality of metals of said polymerizable composition include a plurality of metals capable of yielding a solid ferroelectric metal oxide layered superlattice material compound during an anneal of said patterned film.
Claim 21
Dependent Claim
108 words
A photosensitive liquid solution for use in making integrated circuits, comprising: a polymerizable composition including at least one metal bonded to a free radical susceptible monomer; a solvent mixed with a plurality of metal acrylates to a molarity of metals in said metal acrylates ranging from 0.01 mole percent to 0.2 mole percent based upon an empirical formula of a desired metal oxide to be produced from said photosensitive solution; and a photo polymerization initiator, wherein said Plurality of metals of said polymerizable composition include a plurality of metals capable of yielding a solid ferroelectric metal oxide layered superlattice material compound during an anneal of said patterned film.
Claim 22
Dependent Claim
89 words
The solution as set forth in claim 19 wherein said plurality of metals of said polymerizable composition are present in proportions of A, B, and S according to a formulae selected from the group consisting of: A m-1 S 2 B m O 3m+3 ; A m+1 B m O 3m+1 ; and A m B m O 3m+2 , wherein A is an A-site metal, B is a B-site metal, S is bismuth, O is oxygen, and m is a number sufficient to balance the overall formula charge.
Claim 23
Dependent Claim
27 words
The solution as set forth in claim 20 wherein said metal acrylates include metals selected from the group consisting of strontium, bismuth, tantalum, niobium, and mixtures thereof.
Claim 24
Dependent Claim
58 words
The solution as set forth in claim 19 wherein said polymerizable composition is selected from the group consisting of metal acrylates and their substituted derivatives; metal polyethyleneglycol(meta)acrylates and their substituted derivatives; metal phthalic acid polyethyleneglycol acrylates and their substituted derivatives; metal unsaturated carboxylic acids and their derivatives; ethyl acrylates; metal alkoxy acrylates; vinylic metal complexes; and mixtures thereof.
Claim 25
Dependent Claim
37 words
The solution as set forth in claim 19 wherein said polymerizable composition is selected from the group consisting of metal glycidyl methacrylates; metal succinic acid monohydroxyethyl acrylates; metal salts of sorbic acid, metal 2-ethyl-2-hexenoates; and mixtures thereof.
Claim 26
Dependent Claim
17 words
The solution as set forth in claim 19 wherein said polymerizable composition is a metal N-2-vinylpyrrolidone compound.
Claim 27
Dependent Claim
75 words
The solution as set forth in claim 19 wherein said monomer is selected from the group consisting of (2-methacryloxy)-ethoxytriisopropoxides; trimethacrylatemethoxyethoxyethoxides; tetrakis(bis 2,2(allyoxymethyl)butoxides; methacrylate triisopropoxides; methacryloxyethylacetoacetates; phthalic acid acrylates; phthalic acid methacrylates; polyethyleneglycol methacrylates; polyethyleneglycol/polybutyleneglycol methacrylates; succinic acid acrylates; polyethyleneglycol methacrylates; polypropyleneglycol methacrylates; glycerol methacrylates; glycidyl acrylates; glycidyl methacrylates; 2-hydroxyethyl acrylates; 2-hydroxyethyl methacrylates; 2-hydroxypropyl acrylates; 2-hydroxypropyl methacrylates; 1,6 hexanediol diacrylates; pentaerythriol triacetates; triglycerol diacrylates; ethyleneglycol diacrylates; ethylene glycol dimethacrylates; glycerol acrylate/methacrylates; glycerol dimethacrylates; and glycerol triacrylates.
Claim 28
Dependent Claim
18 words
The solution as set forth in claim 19 wherein said photosensitive liquid solution is essentially free of water.
Claim 29
Dependent Claim
33 words
The solution as set forth in claim 19 wherein said photo initiator is selected from a group consisting of 1-hydroxy-dimethylmethylphenylketone, 2,2-dimethoxy-2-phenylacetophenone, 1-hydroxy-cyclohexylphenylketone, 2,2'-azobis(2-methylproionitrile), 2,2-diethoxyacetophenone, 1-phenyl-2-hydroxy-2-methylpropane-1-ne, 2-methyl-1-(4-methylthiophenyl)-2-molphorino-propane-1-one, 2,4,6-(trimethyl)benzoil diphenylphosphine oxide, benzoin ethers, and hydroxyacetophenones.
Claim 30
Dependent Claim
26 words
The solution as set forth in claim 27 wherein said photo initiator is present in an amount ranging from 0.01 mole percent to 0.2 mole percent.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-08-10 | 2002-02-09 | 2002-08-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-08-10 | 2006-02-09 | 2006-08-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-08-10 | 2010-02-09 | 2010-08-11 | $7700.00 | Window Closed / Lapsed |