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US5789330A
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Vapor deposition material
Assignee: Tosoh Corp
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Filing: 1997-06-13
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Granted: 1998-08-04
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Expires: 2017-06-13
Abstract
Abstract A vapor deposition material which is a sintered body of zirconia containing a stabilizer, wherein the content of monoclinic phase is from 25 to 70%, the content of tetragonal phase is at most 3% and the rest is cubic phase, and of which the bulk density is from 3.0 to 5.0 g/cm3, the porosity is from 15 to 50%, the mode size of pores is from 0.5 to 3 mu m, and the volume of pores of from 0.1 to 5 mu m constitutes at least 90% of the total pore volume.
Inventors
- 👤 Satoshi Kondo
- 👤 Yoshitaka Kubota
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:53
CPC Classifications
C; C04; C04B; C04B35/00; C04B35/01; C04B35/48; C04B35/486; C23; C23C; C23C14/00; C23C14/06; C23C14/08; C23C14/083; C23C14/22; C23C14/24; Y; Y02; Y02T; Y02T50/00; Y02T50/60
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
92 words
A vapor deposition material which is a sintered body of zirconia containing a stabilizer, wherein the content of monoclinic phase is from 25 to 70%, the content of tetragonal phase is at most 3% and the rest is cubic phase, and of which the bulk density is from 3.0 to 5.0 g/cm 3 , the porosity is from 15 to 50%, the mode size of pores is from 0.5 to 3 μm, and the volume of pores of from 0.1 to 5 μm constitutes at least 90% of the total pore volume.
Claim 2
Dependent Claim
92 words
A vapor deposition material which is a sintered body of zirconia containing a stabilizer, wherein the content of monoclinic phase is from 25 to 70%, the content of tetragonal phase is at most 3% and the rest is cubic phase, and of which the bulk density is from 3.0 to 5.0 g/cm 3 , the porosity is from 15 to 50%, the mode size of pores is from 0.5 to 3 μm, and the volume of pores of from 0.1 to 5 μm constitutes at least 90% of the total pore volume.
Claim 3
Dependent Claim
28 words
The vapor deposition material according to claim 1, wherein within the half value range of the pore size distribution curve, the maximum value is at least 0.85 μm.
Claim 4
Dependent Claim
17 words
The vapor deposition material according to claim 1, wherein the content of tetragonal phase is substantially 0%.
Claim 5
Dependent Claim
28 words
The vapor deposition material according to claim 1, wherein the particle sizes are at most 10 μm, and aggregated particles of at least 20 μm are not contained.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-08-03 | 2002-02-02 | 2002-08-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-08-03 | 2006-02-02 | 2006-08-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-08-03 | 2010-02-02 | 2010-08-04 | $7700.00 | Window Closed / Lapsed |