Patent US5780204A successfully refreshed from Google Patents.
US5780204A
Expired / Lapsed
US
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Backside wafer polishing for improved photolithography
Assignee: GlobalFoundries Inc
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Filing: 1997-02-03
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Granted: 1998-07-14
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Expires: 2017-02-03
Abstract
Abstract The accuracy of photolithographic processing, particularly in forming small diameter through holes and/or trenches in a dielectric layer, is improved by polishing the wafer backside prior to photolithography. It was found that particles adhering to and/or scratches on the wafer backside resulting from prior processing steps cause inaccurate photolithographic processing, particularly at a submicron level. Backside polishing, as by chemical-/mechanical polishing, removes such adhering particles and/or scratches, thereby improving photolithographic accuracy.
Inventors
- 👤 Tho Le La
- 👤 Subramanian Venkatkrishnan
- 👤 Mark T. Ramsbey
- 👤 Jack F. Thomas
- 👤 Kathleen Early
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 18:14
CPC Classifications
H; H10; H10P; H10P52/00; G; G03; G03F; G03F7/00; G03F7/004; G03F7/09
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
46 words
A method of manufacturing a semiconductor device, which method comprises sequentially: depositing at least one dielectric layer on a frontside of a wafer, which wafer has a backside opposite the frontside; polishing the backside of the wafer; and performing a photolithographic technique on the dielectric layer.
Claim 2
Independent Claim
46 words
A method of manufacturing a semiconductor device, which method comprises sequentially: depositing at least one dielectric layer on a frontside of a wafer, which wafer has a backside opposite the frontside; polishing the backside of the wafer; and performing a photolithographic technique on the dielectric layer.
Claim 3
Dependent Claim
34 words
The method according to claim 1, wherein: said photolithographic technique on the dielectric layer comprises forming a hole and/or trench; and said polishing the backside of the wafer is performed before said photolithographic technique.
Claim 4
Dependent Claim
16 words
The method according to claim 2, comprising polishing the backside of the wafer by chemical-mechanical polishing.
Claim 5
Dependent Claim
50 words
The method according to claim 2, wherein said photolithographic technique on the dielectric layer comprises: forming a photoresist mask on the dielectric layer subsequent to said backside polishing; and etching the dielectric layer through the photoresist mask to form at least one through hole and/or trench in the dielectric layer.
Claim 6
Dependent Claim
45 words
The method according to claim 4, wherein said etching comprises: etching the dielectric layer to form a contact hole exposing an active region on the frontside of the wafer; said method further comprising filling the contact hole with conductive material after performing said photolithographic technique.
Claim 7
Dependent Claim
18 words
The method according to claim 5, wherein the contact hole has a diameter less than about 0.30 μm.
Claim 8
Dependent Claim
20 words
The method according to claim 4, further comprising forming a conductive pattern on the dielectric layer subsequent to said etching.
Claim 9
Dependent Claim
56 words
The method according to claim 7, further comprising sequentially: depositing a second dielectric layer on the conductive pattern; polishing the backside of the wafer; depositing a photoresist layer on the second dielectric layer; forming a photoresist mask by a photolithographic technique; etching the second dielectric layer to form at least one through hole and/or trench therein.
Claim 10
Dependent Claim
39 words
The method according to claim 8, comprising: etching the second dielectric layer to form a through hole therein; and filling the through hole with conductive material to form a conductive via in electrically contact with the underlying conductive pattern.
Claim 11
Dependent Claim
18 words
The method according to claim 9, wherein the through hole has a diameter less than about 0.30 μm.
Claim 12
Dependent Claim
51 words
The method according to claim 8, comprising backside wafer polishing after depositing the second dielectric layer to a wafer flatness wherein the maximum distance between a high and low region within a stepper field used during the photolithographic technique is no greater than the minimum feature size within the stepper field.
Claim 13
Dependent Claim
61 words
The method according to claim 2, wherein said photolithographic technique on said dielectric layer comprises etching the dielectric layer to form a plurality of trenches extending in a substantially horizontal direction; said method further comprising: filling the trenches with conductive material to form a plurality of conductive lines of a conductive pattern separated by an interwiring spacing after said photolithographic technique.
Claim 14
Dependent Claim
13 words
The method according to claim 12, wherein the conductive material is a metal.
Claim 15
Dependent Claim
21 words
The method according to claim 12, wherein the width of the trenches and/or interwiring spacing is less than about 0.30 microns.
Claim 16
Dependent Claim
43 words
The method according to claim 2, wherein said polishing comprises chemical-mechanical polishing the wafer backside to a wafer flatness wherein the maximum distance between a high and low region within a stepper field of 2×2 cm 2 is less than about 0.30 μm.
Claim 17
Dependent Claim
63 words
The method according to claim 2, further comprising sequentially: depositing a metal layer on the dielectric layer; polishing the backside of the wafer; depositing a layer of photoresist material on the metal layer; forming a photoresist mask by a photolithographic technique; and etching the underlying metal layer to form a conductive pattern comprising the plurality of conductive lines with an interwiring spacing therebetween.
Claim 18
Dependent Claim
45 words
The method according to claim 16, comprising backside wafer polishing to a wafer flatness wherein the maximum distance between a high and low region within a stepper field used during the photolithographic technique is no greater than the minimum feature size within the stepper field.
Claim 19
Dependent Claim
45 words
The method according to claim 2, comprising backside wafer polishing to a wafer flatness wherein the maximum distance between a high and low region within a stepper field used during the photolithographic technique is no greater than the minimum feature size within the stepper field.
Claim 20
Dependent Claim
16 words
The method according to claim 1, comprising polishing the backside of the wafer by chemical-mechanical polishing.
Claim 21
Dependent Claim
58 words
The method according to claim 1, wherein: said polishing the backside comprises chemical-mechanical polishing; and said photolithographic technique comprises: depositing a photoresist material on the dielectric layer; forming a photoresist mask by a photolithographic technique; and etching the underlying dielectric layer through the photoresist mask to form at least one through hole and/or trench having a sub-micron dimension.
Claim 22
Dependent Claim
48 words
The method according to claim 20, comprising a chemical-mechanical polishing the wafer backside to a wafer flatness wherein the maximum distance between a high and low region within a stepper field used during the photolithographic technique is no greater than the minimum feature size within the stepper field.
Claim 23
Dependent Claim
20 words
The method according to claim 1, comprising polishing the backside of the wafer to remove any adhering particles and/or scratches.
References Cited (Backward Citations)
US3911562A
Cited
US4944836A
Cited
US5093279A
Cited
US5262354A
Cited
US5245794A
Cited
US5442828A
Cited
JPH06168958A
Cited
US5424224A
Cited
US5552326A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-07-13 | 2002-01-12 | 2002-07-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-07-13 | 2006-01-12 | 2006-07-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-07-13 | 2010-01-12 | 2010-07-14 | $7700.00 | Window Closed / Lapsed |