US5772906A
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Mechanism for uniform etching by minimizing effects of etch rate loading
Assignee: Lam Research Corp
•
Filing: 1996-05-30
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Granted: 1998-06-30
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Expires: 2016-05-30
Abstract
Abstract A method for etching a layer stack structure on a substrate is provided. The method includes a step of etching the layer stack to a predefined stopping point using a reverse etch rate loading inducing chemistry. The method also includes a step of etching said layer stack through a target layer in the layer stack structure using a natural etch rate loading chemistry.
Inventors
- 👤 Susan C. Abraham
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 00:41
CPC Classifications
H; H10; H10P; H10P95/00; H10P50/00; H10P50/20; H10P50/26; H10P50/264; H10P50/266; H10P50/267
Claims Analysis
Total Claims: 42
Claim 1
Independent Claim
98 words
A method for etching a layer stack structure on a substrate, said method comprising: etching said layer stack to a stopping point using a reverse etch rate loading inducing chemistry, said reverse etch rate loading inducing chemistry being selected to cause etching to occur faster in a narrow region of said substrate relative to a wide region of said substrate; and etching said layer stack at least partially through a target layer in said layer stack structure using a natural etch rate loading chemistry, said natural etch rate loading inducing relative to said narrow region of said substrate.
Claim 2
Independent Claim
98 words
A method for etching a layer stack structure on a substrate, said method comprising: etching said layer stack to a stopping point using a reverse etch rate loading inducing chemistry, said reverse etch rate loading inducing chemistry being selected to cause etching to occur faster in a narrow region of said substrate relative to a wide region of said substrate; and etching said layer stack at least partially through a target layer in said layer stack structure using a natural etch rate loading chemistry, said natural etch rate loading inducing relative to said narrow region of said substrate.
Claim 3
Dependent Claim
22 words
The method of claim 1, further comprising a step of etching a first layer underling said target layer using a third chemistry.
Claim 4
Dependent Claim
24 words
The method of claim 2, wherein said step of etching said first layer stops before etching through an oxide layer underlying said first layer.
Claim 5
Dependent Claim
35 words
The method of claim 1 wherein said reverse etch rate loading inducing chemistry comprises an etchant chemical and an inhibitor and wherein said inhibitor is present in sufficient amount to induce reverse etch rate loading.
Claim 6
Dependent Claim
44 words
The method of claim 4 wherein said etchant chemical comprises one of Cl 2 and SF 6 and said inhibitor comprises one or more selected from the group consisting essentially of N 2 , BCl 3 , CHF 3 and a compound containing fluorine.
Claim 7
Dependent Claim
20 words
The method of claim 4 wherein said reverse etch rate loading inducing chemistry comprises a chemical for narrowing ion scattering.
Claim 8
Dependent Claim
31 words
The method of claim 6 wherein said chemical for narrowing ion scattering comprises one or more selected from a group consisting of a heavy halogen compound, freon and a noble gas.
Claim 9
Dependent Claim
35 words
The method of claim 1 wherein said natural etch rate loading chemistry comprises an etchant chemical and an inhibitor and wherein said etchant chemical is present in sufficient amount to cause natural etch rate loading.
Claim 10
Dependent Claim
44 words
The method of claim 8 wherein said etchant chemical comprises one of Cl 2 and SF 6 and said inhibitor comprises one or more selected from the group consisting essentially of N 2 , BCl 3 , CHF 3 and a compound containing fluorine.
Claim 11
Dependent Claim
20 words
The method of claim 8 wherein said natural etch rate loading chemistry further comprises a chemical for narrowing ion scattering.
Claim 12
Dependent Claim
31 words
The method of claim 10 wherein said chemical for narrowing ion scattering comprises one or more selected from a group consisting of a heavy halogen compound, freon and a noble gas.
Claim 13
Dependent Claim
30 words
The method of claim 1 wherein said step of etching said layer stack to a stopping point comes before said step of etching said layer stack through a target layer.
Claim 14
Dependent Claim
24 words
The method of claim 1 wherein the target layer comprises a material selected from the group consisting of metal polysilicon and an oxide layer.
Claim 15
Dependent Claim
13 words
The method of claim 13 wherein the target layer comprises a metal layer.
Claim 16
Dependent Claim
24 words
The method of claim 14 wherein the target layer comprises one or more selected from the group consisting of copper, aluminum and aluminum alloy.
Claim 17
Dependent Claim
55 words
The method of claim 1 wherein said layer stack further comprises an anti-reflective coating layer disposed above said target layer and said step of etching said layer stack to a stopping point comprises etching through said anti-reflective coating layer to a point that lies near interface between said target layer and said anti-reflective coating layer.
Claim 18
Dependent Claim
15 words
The method of claim 16 wherein said stopping point lies in said anti-reflective coating layer.
Claim 19
Dependent Claim
14 words
The method of claim 16 wherein said anti-reflective coating layer comprises TiN or TiW.
Claim 20
Dependent Claim
12 words
The method of claim 18 wherein said anti-reflective coating layer comprises TiN.
Claim 21
Dependent Claim
20 words
The method of claim 1 wherein said method of etching is conducted in a high density parallel plate plasma reactor.
Claim 22
Dependent Claim
20 words
The method of claim 1 wherein said method of etching is conducted in a electron capture resonance (ECR) plasma reactor.
Claim 23
Dependent Claim
18 words
The method of claim 1 wherein said method of etching is conducted in a transformer coupled plasma reactor.
Claim 24
Independent Claim
71 words
A method for etching a layer stack structure comprising a TiN anti-reflective coating layer and an aluminum alloy metal layer on a substrate, said method comprising: etching said layer stack through said TiN anti-reflective coating layer to a stopping point in said layer stack structure using reverse etch rate loading inducing chemistry; and etching said layer stack at least partially through said metal layer using a natural etch rate loading chemistry.
Claim 25
Independent Claim
71 words
A method for etching a layer stack structure comprising a TiN anti-reflective coating layer and an aluminum alloy metal layer on a substrate, said method comprising: etching said layer stack through said TiN anti-reflective coating layer to a stopping point in said layer stack structure using reverse etch rate loading inducing chemistry; and etching said layer stack at least partially through said metal layer using a natural etch rate loading chemistry.
Claim 26
Dependent Claim
44 words
The method of claim 23 wherein said reverse etch rate loading inducing chemistry comprises one selected from the group consisting of Cl 2 /N 2 , Cl 2 /CHF 3 , Cl 2 /N 2 /CHF 3 , and Cl 2 /Ar/CHF 3 .
Claim 27
Dependent Claim
48 words
The method of claim 24 wherein said natural etch rate loading chemistry comprises one selected from the group consisting of Cl 2 /BCl 3 , Cl 2 /N 2 , Cl 2 /CHF 3 , Cl 2 /N 2 /CHF 3 , and Cl 2 /Ar/CHF 3 .
Claim 28
Dependent Claim
48 words
The method of claim 23 wherein said natural etch rate loading chemistry comprises one selected from the group consisting of Cl 2 /BCl 3 , Cl 2 /N 2 , Cl 2 /CHF 3 , Cl 2 /N 2 /CHF 3 , and Cl 2 /Ar/CHF 3 .
Claim 29
Independent Claim
96 words
A method for etching a layer stack structure on a substrate, said method comprising: etching said layer stack using a reverse etch loading inducing chemistry, said reverse etch rate loading inducing chemistry being selected to cause etching to occur faster in a narrow region of said substrate relative to a wide region of said substrate; and etching said layer stack using a natural etch rate loading chemistry, said natural etch rate loading inducing chemistry being selected to cause etching to occur in said wide region of said substrate relative to said narrow region of said substrate.
Claim 30
Independent Claim
96 words
A method for etching a layer stack structure on a substrate, said method comprising: etching said layer stack using a reverse etch loading inducing chemistry, said reverse etch rate loading inducing chemistry being selected to cause etching to occur faster in a narrow region of said substrate relative to a wide region of said substrate; and etching said layer stack using a natural etch rate loading chemistry, said natural etch rate loading inducing chemistry being selected to cause etching to occur in said wide region of said substrate relative to said narrow region of said substrate.
Claim 31
Dependent Claim
35 words
The method of claim 27 wherein said reverse etch rate loading inducing chemistry comprises an etchant chemical and an inhibitor and wherein said inhibitor is present in sufficient amount to induce reverse etch rate loading.
Claim 32
Dependent Claim
44 words
The method of claim 28 wherein said etchant chemical comprises one of Cl 2 and SF 6 and said inhibitor comprises one or more selected from the group consisting essentially of N 2 , BCl 3 , CHF 3 and a compound containing fluorine.
Claim 33
Dependent Claim
35 words
The method of claim 27 wherein said natural etch rate loading chemistry comprises an etchant chemical and an inhibitor and wherein said etchant chemical is present in sufficient amount to cause natural etch rate loading.
Claim 34
Dependent Claim
44 words
The method of claim 30 wherein said etchant chemical comprises one of Cl 2 and SF 6 and said inhibitor comprises one or more selected from the group consisting essentially of N 2 , BCl 3 , CHF 3 and a compound containing fluorine.
Claim 35
Dependent Claim
37 words
The method of claim 27 wherein said step of etching said layer stack using a reverse etch rate loading inducing chemistry comes before said step of etching said layer stack using a natural etch rate loading chemistry.
Claim 36
Dependent Claim
37 words
The method of claim 27 wherein said step of etching said layer stack using a natural etch rate loading chemistry comes before said step of etching said layer stack using a reverse etch rate loading inducing chemistry.
Claim 37
Independent Claim
114 words
A method for etching a layer stack structure on a substrate, said method comprising: etching said layer stack to a stopping point using a natural etch rate loading inducing chemistry, said natural etch rate loading inducing chemistry being selected to cause etching to occur faster in a wide region of said substrate relative to a narrow region of said substrate; and etching said layer stack at least partially through a target layer in said layer stack structure using a reverse etch rate loading chemistry, said reverse etch rate loading inducing chemistry being selected to cause etching to occur faster in said narrow region of said substrate relative to said wide region of said substrate.
Claim 38
Independent Claim
114 words
A method for etching a layer stack structure on a substrate, said method comprising: etching said layer stack to a stopping point using a natural etch rate loading inducing chemistry, said natural etch rate loading inducing chemistry being selected to cause etching to occur faster in a wide region of said substrate relative to a narrow region of said substrate; and etching said layer stack at least partially through a target layer in said layer stack structure using a reverse etch rate loading chemistry, said reverse etch rate loading inducing chemistry being selected to cause etching to occur faster in said narrow region of said substrate relative to said wide region of said substrate.
Claim 39
Dependent Claim
35 words
The method of claim 34 wherein said reverse etch rate loading inducing chemistry comprises an etchant chemical and an inhibitor and wherein said inhibitor is present in sufficient amount to induce reverse etch rate loading.
Claim 40
Dependent Claim
44 words
The method of claim 35 wherein said etchant chemical comprises one of Cl 2 and SF 6 and said inhibitor comprises one or more selected from the group consisting essentially of N 2 , BCl 3 , CHF 3 and a compound containing fluorine.
Claim 41
Dependent Claim
35 words
The method of claim 34 wherein said natural etch rate loading chemistry comprises an etchant chemical and an inhibitor and wherein said etchant chemical is present in sufficient amount to cause natural etch rate loading.
Claim 42
Dependent Claim
44 words
The method of claim 37 wherein said etchant chemical comprises one of Cl 2 and SF 6 and said inhibitor comprises one or more selected from the group consisting essentially of N 2 , BCl 3 , CHF 3 and a compound containing fluorine.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2001-06-29 | 2001-12-29 | 2002-06-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-06-29 | 2005-12-29 | 2006-06-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-06-29 | 2009-12-29 | 2010-06-30 | $7700.00 | Window Closed / Lapsed |