Patent US5772736A successfully refreshed from Google Patents.
US5772736A
Expired / Lapsed
US
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Device for removing dissolved gas from a liquid
Assignee: Novellus Systems Inc
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Filing: 1997-02-28
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Granted: 1998-06-30
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Expires: 2017-02-28
Abstract
Abstract An apparatus and a method for delivering a liquid are disclosed. The liquid contained in a vessel is subjected to a pressurized gas. Any pressurized gas dissolved in the liquid is removed in a degas module by passing the liquid through a gas permeable tube subjected to a pressure differential. Then the liquid is dispensed by a liquid mass flow controller.
Inventors
- 👤 Bart J. van Schravendijk
- 👤 Christopher W. Burkhart
- 👤 Tito H. Santiago
- 👤 Charles E. Pomeroy
- 👤 Jeffrey W. Lind
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:47
CPC Classifications
B; B01; B01D; B01D19/00; B01D19/0031; B67; B67D; B67D99/00; C; C23; C23C; C23C16/00; C23C16/44; C23C16/4401; C23C16/4402; C23C16/448
Claims Analysis
Total Claims: 38
Claim 1
Independent Claim
67 words
A method for removing a gas from a liquid comprising: passing said liquid through a structure permeable to said gas, said structure being subjected to a pressure differential across the walls of said structure; and passing said liquid through a liquid mass flow controller, said passage through said structure inhibiting formation of bubbles of said gas and thereby improving the accuracy of said liquid mass flow controller.
Claim 2
Independent Claim
67 words
A method for removing a gas from a liquid comprising: passing said liquid through a structure permeable to said gas, said structure being subjected to a pressure differential across the walls of said structure; and passing said liquid through a liquid mass flow controller, said passage through said structure inhibiting formation of bubbles of said gas and thereby improving the accuracy of said liquid mass flow controller.
Claim 3
Dependent Claim
12 words
The method of claim 1 wherein said structure comprises a fluoro-polymer resin.
Claim 4
Dependent Claim
12 words
The method of claim 1 wherein said liquid comprises an organometallic liquid.
Claim 5
Dependent Claim
22 words
The method of claim 1 wherein said liquid is selected from the group consisting of tetra-ethyl-ortho-silicate, tri-methyl-phosphite, tri-methyl-borate, tri-ethyl-phosphite, tri-ethyl-borate, and tetrakis(diethyl)aminotitanium.
Claim 6
Dependent Claim
12 words
The method of claim 1 wherein said gas comprises an inert gas.
Claim 7
Dependent Claim
22 words
The method of claim 1 wherein said gas is selected from the group consisting of helium, nitrogen, neon, argon, carbon-dioxide and oxygen.
Claim 8
Dependent Claim
10 words
The method of claim 1 wherein said gas comprises helium.
Claim 9
Independent Claim
110 words
An apparatus for removing dissolved gas from a liquid comprising: a vessel comprising a low pressure connection, an inlet and an outlet; a structure comprising a material impermeable to said liquid and permeable to said gas, said structure being resident inside said vessel, said structure being connected to said inlet of said vessel and to said outlet of said vessel, said structure removing at least some of said dissolved gas from said liquid during passage of said liquid from said inlet to said outlet; and a liquid mass flow controller connected to said outlet, said liquid mass flow controller dispensing said liquid after removal of dissolved gas by said structure.
Claim 10
Independent Claim
110 words
An apparatus for removing dissolved gas from a liquid comprising: a vessel comprising a low pressure connection, an inlet and an outlet; a structure comprising a material impermeable to said liquid and permeable to said gas, said structure being resident inside said vessel, said structure being connected to said inlet of said vessel and to said outlet of said vessel, said structure removing at least some of said dissolved gas from said liquid during passage of said liquid from said inlet to said outlet; and a liquid mass flow controller connected to said outlet, said liquid mass flow controller dispensing said liquid after removal of dissolved gas by said structure.
Claim 11
Dependent Claim
11 words
The apparatus of claim 8 wherein said structure is a tube.
Claim 12
Dependent Claim
10 words
The apparatus of claim 9 wherein said tube is coiled.
Claim 13
Dependent Claim
12 words
The apparatus of claim 8 wherein said structure comprises a fluoro-polymer resin.
Claim 14
Dependent Claim
12 words
The apparatus of claim 8 wherein said liquid comprises an organometallic liquid.
Claim 15
Dependent Claim
22 words
The apparatus of claim 8 wherein said liquid is selected from the group consisting of tetra-ethyl-ortho-silicate, tri-methyl-phosphite, tri-methyl-borate, tri-ethyl-phosphite, tri-ethyl-borate, and tetrakis(diethyl)aminotitanium.
Claim 16
Dependent Claim
12 words
The apparatus of claim 8 wherein said gas comprises an inert gas.
Claim 17
Dependent Claim
22 words
The apparatus of claim 8 wherein said gas is selected from the group consisting of helium, nitrogen, neon, argon, carbon-dioxide and oxygen.
Claim 18
Dependent Claim
39 words
The apparatus of claim 8, wherein: said structure has two ends, one end of said structure being connected to said inlet of said vessel and the other end of said structure being connected to said outlet of said vessel.
Claim 19
Dependent Claim
34 words
The apparatus of claim 8, wherein: said liquid mass flow controller dispenses said liquid in a precisely metered manner at a uniform pressure in response to said removal of dissolved gas by said structure.
Claim 20
Independent Claim
88 words
An apparatus to remove a dissolved gas from a liquid, comprising: a structure comprising a material impermeable to the liquid and permeable to the gas, the material being resident adjacent to the liquid during passage of the liquid through the structure, the structure removing at least some dissolved gas from the liquid during the passage; and a liquid mass flow controller coupled to the structure, the liquid mass flow controller dispensing the liquid in a precisely metered manner at a uniform pressure in response to the gas removal.
Claim 21
Independent Claim
88 words
An apparatus to remove a dissolved gas from a liquid, comprising: a structure comprising a material impermeable to the liquid and permeable to the gas, the material being resident adjacent to the liquid during passage of the liquid through the structure, the structure removing at least some dissolved gas from the liquid during the passage; and a liquid mass flow controller coupled to the structure, the liquid mass flow controller dispensing the liquid in a precisely metered manner at a uniform pressure in response to the gas removal.
Claim 22
Dependent Claim
23 words
An apparatus as in claim 18 wherein the liquid is selected from the group consisting of tetra-ethyl-orthosilicate, tri-methyl-phosphite, tri-methyl-borate, tri-ethyl-phosphite, tri-ethyl-borate, and tetrakis(diethyl-)aminotitanium.
Claim 23
Dependent Claim
24 words
An apparatus as in claim 18 wherein the gas is selected from the group consisting of helium, nitrogen, neon, argon, carbon dioxide, and oxygen.
Claim 24
Dependent Claim
16 words
An apparatus as in claim 18 wherein the liquid is tetra-ethyl-orthosilicate and the gas is helium.
Claim 25
Dependent Claim
11 words
An apparatus of claim 21 wherein the structure includes a polymer.
Claim 26
Dependent Claim
14 words
An apparatus as in claim 18 wherein the structure includes a gas permeable tube.
Claim 27
Dependent Claim
15 words
An apparatus as in claim 23 wherein the gas permeable tube comprises a fluoro-polymer resin.
Claim 28
Dependent Claim
13 words
An apparatus of claim 23 wherein the gas permeable tube includes a polymer.
Claim 29
Dependent Claim
42 words
An apparatus as in claim 18 further comprising: a source of low pressure coupled to the structure to assist in the gas removal; and a source of the gas-containing liquid coupled to the structure to supply the gas-containing liquid to the structure.
Claim 30
Independent Claim
113 words
An apparatus for removing a dissolved inert gas from an organometallic liquid, comprising: a first vessel having a first vessel wall containing an interior volume; a gas outlet traversing the first vessel wall and in communication with the interior volume; a liquid inlet traversing the first vessel wall; a liquid outlet traversing the first vessel wall; and a second vessel coupled between the liquid inlet and the liquid outlet, the second vessel having a vessel wall consisting essentially of a material disposed against the interior volume of the first vessel, the material being chemically inert to the organometallic liquid and further being impermeable to the organometallic liquid and permeable to the inert gas.
Claim 31
Independent Claim
113 words
An apparatus for removing a dissolved inert gas from an organometallic liquid, comprising: a first vessel having a first vessel wall containing an interior volume; a gas outlet traversing the first vessel wall and in communication with the interior volume; a liquid inlet traversing the first vessel wall; a liquid outlet traversing the first vessel wall; and a second vessel coupled between the liquid inlet and the liquid outlet, the second vessel having a vessel wall consisting essentially of a material disposed against the interior volume of the first vessel, the material being chemically inert to the organometallic liquid and further being impermeable to the organometallic liquid and permeable to the inert gas.
Claim 32
Dependent Claim
24 words
An apparatus as in claim 27 wherein the organometallic liquid is selected from the group consisting of tetra-ethyl-orthosilicate, tri-methyl-phosphite, tri-methyl-borate, tri-ethyl-phosphite, tri-ethyl-borate, and tetrakis(diethyl-)aminotitanium.
Claim 33
Dependent Claim
25 words
An apparatus as in claim 27 wherein the inert gas is selected from the group consisting of helium, nitrogen, neon, argon, carbon dioxide, and oxygen.
Claim 34
Dependent Claim
18 words
An apparatus as in claim 27 wherein the organometallic liquid is tetra-ethyl-orthosilicate and the inert gas is helium.
Claim 35
Dependent Claim
14 words
An apparatus of claim 27 wherein the second vessel includes tubing of a polymer.
Claim 36
Dependent Claim
15 words
An apparatus as in claim 27 wherein the second vessel is a gas permeable tube.
Claim 37
Dependent Claim
15 words
An apparatus as in claim 32 wherein the gas permeable tube comprises a fluoro-polymer resin.
Claim 38
Dependent Claim
13 words
An apparatus of claim 32 wherein the gas permeable tube includes a polymer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-06-29 | 2001-12-29 | 2002-06-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-06-29 | 2005-12-29 | 2006-06-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-06-29 | 2009-12-29 | 2010-06-30 | $7700.00 | Window Closed / Lapsed |