US5770519A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Copper reservoir for reducing electromigration effects associated with a conductive via in a semiconductor device
Assignee: GlobalFoundries Inc
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Filing: 1995-06-05
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Granted: 1998-06-23
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Expires: 2015-06-05
Abstract
Abstract A multilayer semiconductor structure includes a conductive via. The conductive via includes a reservoir of metal having a high resistance to electromigration. The reservoir is made from a conformal layer of copper, or gold deposited over the via to form a copper, or gold plug located in the via. A barrier layer is provided between the reservoir and an insulating layer to prevent the reservoir from diffusing into the insulating layer. The barrier layer and reservoir may be deposited by sputtering, collimated sputtering, chemical vapor deposition (CVD), dipping, evaporating, or by other means. The barrier layer and reservoir may be etched by anisotropic dry etching, plasma-assisted etching, or other layer removal techniques.
Inventors
- 👤 Richard K. Klein
- 👤 Darrell Erb
- 👤 Steven Avanzino
- 👤 Robin Cheung
- 👤 Scott Luning
- 👤 Bryan Tracy
- 👤 Subhash Gupta
- 👤 Ming-Ren Lin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 22:11
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/071; H10W20/074; H10W20/076; H10W20/031; H10W20/032; H10W20/033; H10W20/034; H10W20/056; H10W20/081; H10W20/083; H10W20/40; H10W20/41; H10W20/42; H10W20/425
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
125 words
A method of fabricating a semiconductor structure including a conductive line formed over an insulating layer, the insulating layer having a top side and a via extending from the top side of the insulating layer to a bottom, the semiconductor structure being less susceptible to electromigration failures associated with the via, the method comprising steps of: depositing a conformal barrier layer over the via; removing the conformal barrier layer from the top side of the insulating layer and the bottom of the via, thereby leaving a barrier sidewall in the via; depositing a first metal, wherein the first metal includes copper, within the via; and forming a plug by depositing a second metal above the first metal, thereby reducing electromigration failures on the conductive line.
Claim 2
Independent Claim
125 words
A method of fabricating a semiconductor structure including a conductive line formed over an insulating layer, the insulating layer having a top side and a via extending from the top side of the insulating layer to a bottom, the semiconductor structure being less susceptible to electromigration failures associated with the via, the method comprising steps of: depositing a conformal barrier layer over the via; removing the conformal barrier layer from the top side of the insulating layer and the bottom of the via, thereby leaving a barrier sidewall in the via; depositing a first metal, wherein the first metal includes copper, within the via; and forming a plug by depositing a second metal above the first metal, thereby reducing electromigration failures on the conductive line.
Claim 3
Dependent Claim
11 words
The method of claim 1 wherein the second metal is tungsten.
Claim 4
Dependent Claim
18 words
The method of claim 1 wherein the copper is combined with other elements to form a copper compound.
Claim 5
Independent Claim
162 words
A method of fabricating a semiconductor structure including a conductive line, a first barrier layer formed over the conductive line, the first barrier layer having a bottom side, an insulating layer formed over the first barrier layer, the insulating layer having a top side, the semiconductor structure being less susceptible to electromigration failures associated with the via, the method comprising steps of: etching a hole from the top side of the insulating layer through the bottom side of the first barrier layer to form a via, the via having a bottom; depositing a conformal barrier layer over the via; removing the conformal barrier layer from the top side of the insulating layer and the bottom of the via, thereby leaving a barrier sidewall in the via; and depositing a metal, wherein the metal is deposited as a copper material, the copper material filling the via and being in direct contact with the conductive line, thereby reducing electromigration failures on the conductive line.
Claim 6
Independent Claim
162 words
A method of fabricating a semiconductor structure including a conductive line, a first barrier layer formed over the conductive line, the first barrier layer having a bottom side, an insulating layer formed over the first barrier layer, the insulating layer having a top side, the semiconductor structure being less susceptible to electromigration failures associated with the via, the method comprising steps of: etching a hole from the top side of the insulating layer through the bottom side of the first barrier layer to form a via, the via having a bottom; depositing a conformal barrier layer over the via; removing the conformal barrier layer from the top side of the insulating layer and the bottom of the via, thereby leaving a barrier sidewall in the via; and depositing a metal, wherein the metal is deposited as a copper material, the copper material filling the via and being in direct contact with the conductive line, thereby reducing electromigration failures on the conductive line.
Claim 7
Dependent Claim
13 words
The method of claim 4 wherein the first barrier layer includes titanium nitride.
Claim 8
Dependent Claim
15 words
The method of claim 4, further comprising: depositing tungsten above the metal in the via.
Claim 9
Dependent Claim
13 words
The method of claim 4 wherein the copper material forms a copper plug.
Claim 10
Dependent Claim
11 words
The method of claim 4 wherein the conductive line includes aluminum.
Claim 11
Dependent Claim
14 words
The method of claim 4 wherein the metal is deposited as a conformal layer.
Claim 12
Independent Claim
129 words
A method of fabricating a semiconductor structure including a conductive line formed over an insulating layer, the insulating layer having a top side and a via extending from the top side of the insulating layer to a bottom, the semiconductor structure being less susceptible to electromigration failures associated with the via, the method comprising steps of: depositing a conformal barrier layer over the via; removing the conformal barrier layer from the top side of the insulating layer and the bottom of the via, thereby leaving a barrier sidewall in the via; depositing a first metal within the via, wherein the first metal is a conformal copper alloy layer, and forming a plug by depositing a second metal above the first metal, thereby reducing electromigration failures on the conductive line.
Claim 13
Independent Claim
129 words
A method of fabricating a semiconductor structure including a conductive line formed over an insulating layer, the insulating layer having a top side and a via extending from the top side of the insulating layer to a bottom, the semiconductor structure being less susceptible to electromigration failures associated with the via, the method comprising steps of: depositing a conformal barrier layer over the via; removing the conformal barrier layer from the top side of the insulating layer and the bottom of the via, thereby leaving a barrier sidewall in the via; depositing a first metal within the via, wherein the first metal is a conformal copper alloy layer, and forming a plug by depositing a second metal above the first metal, thereby reducing electromigration failures on the conductive line.
Claim 14
Dependent Claim
11 words
The method of claim 10 wherein the second metal is tungsten.
Claim 15
Dependent Claim
19 words
The method of claim 10 wherein the first metal is etched to leave copper alloy sidewalls in the via.
Claim 16
Dependent Claim
17 words
The method of claim 10 wherein the conformal copper alloy layer is deposited by chemical vapor deposition.
Claim 17
Dependent Claim
36 words
The method of claim 10 further comprising: removing the copper alloy layer from the top side of the insulating layer and the bottom of the via, thereby leaving a copper alloy sidewall adjacent the barrier sidewall.
Claim 18
Dependent Claim
24 words
The method of claim 14 wherein said forming includes depositing tungsten in the via to form a tungsten plug adjacent the copper alloy sidewall.
Claim 19
Dependent Claim
32 words
The method of claim 15 wherein the steps of removing are performed by anisotropic etching with a single chamber reactive ion etching apparatus or with a dual chamber electron cyclotron resonance apparatus.
Claim 20
Dependent Claim
26 words
The method of claim 10 wherein the copper alloy is deposited by a chemical vapor deposition technique, a plasma assisted deposition technique or a sputter technique.
Claim 21
Dependent Claim
11 words
The method of claim 10 wherein the copper alloy includes gold.
Claim 22
Dependent Claim
11 words
The method of claim 18 wherein the copper alloy includes tungsten.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-06-22 | 2001-12-22 | 2002-06-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-06-22 | 2005-12-22 | 2006-06-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-06-22 | 2009-12-22 | 2010-06-23 | $7700.00 | Window Closed / Lapsed |