US5308793A
Expired / Lapsed
US
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Method for forming interconnector
Assignee: Sony Corp
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Filing: 1992-07-22
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Granted: 1994-05-03
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Expires: 2012-07-22
Abstract
Abstract A method of forming an interconnector configuration includes an arrangement for preventing a Ti type barrier metal associated with an silicone oxide type interlayer insulation membrane, from becoming oxidized and therefore facilitating the burial of high aspect ratio connection holes in a Al layer. The connection holes which are opened in the silicon oxide type interlayer insulation membrane are coated inside with a Ti type barrier metal are apt to be oxidized by oxygen which is released from the interlayer insulating membrane. This oxidation produces a reaction which deteriorates the reaction characteristics with a Al material layer during the burial of the connection holes and produces problems. Accordingly, in order to prevent the oxidation of the barrier metal, a SiNx side wall layer is formed on the sides of the connection hole. The provision of this layer is not limited to the side walls of the connection holes and can be also provided on the upper surface of the interlayer insulation membrane with the same effect. Alternatively, the interlayer insulation membrane per se can be formed of SiNx. In either case, the reaction between the barrier metal and the Al material layer is desirably prevented and highly uniform filling of the through holes with Al can be achieved during the burial process.
Inventors
- 👤 Mitsuru Taguchi
- 👤 Hirofumi Sumi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 23:22
CPC Classifications
H; H10; H10D; H10D64/00; H10D64/01; H10D64/011; H10D64/0111; H10D64/0112; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/032; H10W20/033; H10W20/056; H10W20/071; H10W20/074; H10W20/076
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
99 words
A method of forming an interconnector configuration comprising: forming a through hole in a silicon oxide insulation membrane formed on a substratum interconnector layer, said substratum interconnector layer being formed on a base plate, so that said through hole extends to said substratum interconnector layer; forming a silicon nitride layer on at least the wall surface of said through hole; forming a second substratum layer on at least the side and bottom walls of said through hole; forming an aluminum material layer on the second substratum layer to fill at least said through hole while heating the base plate.
Claim 2
Independent Claim
99 words
A method of forming an interconnector configuration comprising: forming a through hole in a silicon oxide insulation membrane formed on a substratum interconnector layer, said substratum interconnector layer being formed on a base plate, so that said through hole extends to said substratum interconnector layer; forming a silicon nitride layer on at least the wall surface of said through hole; forming a second substratum layer on at least the side and bottom walls of said through hole; forming an aluminum material layer on the second substratum layer to fill at least said through hole while heating the base plate.
Claim 3
Dependent Claim
30 words
A method as set forth in claim 1 wherein said silicon oxide insulation membrane is formed of at least one of SiO2, SOG, PSG, BSG, BPSG, AsSG, AsPSG and AsBSG.
Claim 4
Dependent Claim
42 words
A method as set forth in claim 1 wherein said substratum interconnector layer is formed of at least one of an Aluminium material layer, a polycrystalline silicon layer, a high melting point metallic silicide layer, a polycide layer, and a doped zone.
Claim 5
Dependent Claim
33 words
A method as set forth in claim 1 wherein said silicon nitride layer which is coated over said through hole, is etched so as to leave said through hole wall selectively covered therewith.
Claim 6
Dependent Claim
27 words
A method as set forth in claim 1 wherein said second substratum layer is formed of one of at least one of Ti, TiNx, WSix, polycrystalline silicon.
Claim 7
Independent Claim
118 words
A method of forming an interconnector configuration comprising: forming a contact hole in a PSG interlayer insulation membrane which is formed on a Si base plate, said Si base plate having doped regions and said contact hole extending to said regions; using a CVD plasma technique to form a silicon nitride layer over the entire surface of the arrangement; using ion etching to etch said silicon nitride layer so that only the wall of said contact hole is covered with said silicon nitride layer and thus define side wall layers thereon; forming a Ti layer over the entire surface of the arrangement; and forming a Al-1%Si layer over the entire surface of the arrangement while heating the same.
Claim 8
Independent Claim
118 words
A method of forming an interconnector configuration comprising: forming a contact hole in a PSG interlayer insulation membrane which is formed on a Si base plate, said Si base plate having doped regions and said contact hole extending to said regions; using a CVD plasma technique to form a silicon nitride layer over the entire surface of the arrangement; using ion etching to etch said silicon nitride layer so that only the wall of said contact hole is covered with said silicon nitride layer and thus define side wall layers thereon; forming a Ti layer over the entire surface of the arrangement; and forming a Al-1%Si layer over the entire surface of the arrangement while heating the same.
Claim 9
Dependent Claim
32 words
A method as set forth in claim 6 wherein a surface layer section of said doped region is a self-adjustingly formed silicide layer and which is induced to have a low resistance.
Claim 10
Dependent Claim
20 words
A method as set forth in claim 6 wherein said contact hole has an aspect ratio of 1 or more.
Claim 11
Independent Claim
115 words
A method of forming an interconnector configuration comprising: forming a silicon oxide interlayer insulation membrane and a first silicon nitride layer on a base plate which has a substratum interconnector layer; etching said silicon oxide interlayer insulation membrane and first silicon nitride layer to form a connection hole which extends to said substratum interconnector layer; forming a second silicon nitride layer over at least the wall of said connection hole; forming a second substratum layer on at least the interior side and bottom walls of said connection hole; forming an aluminum material layer on the second substratum layer while heating the base plate so as to induce the aluminum layer to fill said connection hole.
Claim 12
Independent Claim
115 words
A method of forming an interconnector configuration comprising: forming a silicon oxide interlayer insulation membrane and a first silicon nitride layer on a base plate which has a substratum interconnector layer; etching said silicon oxide interlayer insulation membrane and first silicon nitride layer to form a connection hole which extends to said substratum interconnector layer; forming a second silicon nitride layer over at least the wall of said connection hole; forming a second substratum layer on at least the interior side and bottom walls of said connection hole; forming an aluminum material layer on the second substratum layer while heating the base plate so as to induce the aluminum layer to fill said connection hole.
Claim 13
Dependent Claim
31 words
A method as set forth in claim 9 wherein said silicon oxide interlayer insulation membrane is formed from at least one of SiO2, SOG, PSG, BSG, BPSG, AsSG, AsPSG and AsBSG.
Claim 14
Dependent Claim
42 words
A method as set forth in claim 9 wherein said substratum interconnector layer is formed of at least one of an Aluminium material layer, a polycrystalline silicon layer, a high melting point metallic silicide layer, a polycide layer, and a doped zone.
Claim 15
Dependent Claim
33 words
A method as set forth in claim 9 wherein said silicon nitride layer which is coated over said connection hole, is etched so as to leave said connection hole wall selectively covered therewith.
Claim 16
Dependent Claim
27 words
A method as set forth in claim 9 wherein said second substratum layer is formed of one of at least one of Ti, TiNx, WSix, polycrystalline silicon.
Claim 17
Independent Claim
140 words
A method of forming an interconnector configuration comprising: using a plasma CVD technique to form a first silicon nitride layer on a PSG interlayer insulation membrane which is formed on a Si base plate, said Si base plate having doped regions; opening a contact hole in said first silicon nitride and PSG layers which contact hole extends to said doped regions; using a CVD plasma technique to form a second silicon nitride layer over the entire surface of the arrangement; using ion etching to etch said silicon nitride layer so that only the wall of said contact hole is covered with said silicon nitride layer and thus define side wall layers thereon; forming a Ti layer over the entire surface of the arrangement; and forming a Al-1% Si layer over the entire surface of the arrangement while heating the same.
Claim 18
Independent Claim
140 words
A method of forming an interconnector configuration comprising: using a plasma CVD technique to form a first silicon nitride layer on a PSG interlayer insulation membrane which is formed on a Si base plate, said Si base plate having doped regions; opening a contact hole in said first silicon nitride and PSG layers which contact hole extends to said doped regions; using a CVD plasma technique to form a second silicon nitride layer over the entire surface of the arrangement; using ion etching to etch said silicon nitride layer so that only the wall of said contact hole is covered with said silicon nitride layer and thus define side wall layers thereon; forming a Ti layer over the entire surface of the arrangement; and forming a Al-1% Si layer over the entire surface of the arrangement while heating the same.
Claim 19
Dependent Claim
32 words
A method as set forth in claim 14 wherein a surface layer section of said doped region is a self-adjustingly formed silicide layer and which is induced to have a low resistance.
Claim 20
Dependent Claim
20 words
A method as set forth in claim 9 wherein said contact hole has an aspect ratio of 1 or more.
Claim 21
Independent Claim
76 words
A method of forming an interconnector configuration comprising: opening a contact hole in a silicon nitride interlayer insulation membrane so that the contact hole extends through to a substratum interconnector layer which is formed on a base plate; forming a second layer over at least the side wall and bottom wall of said contact hole; and filling at least the contact hole having the second layer with an aluminium material layer while heating the base plate.
Claim 22
Independent Claim
76 words
A method of forming an interconnector configuration comprising: opening a contact hole in a silicon nitride interlayer insulation membrane so that the contact hole extends through to a substratum interconnector layer which is formed on a base plate; forming a second layer over at least the side wall and bottom wall of said contact hole; and filling at least the contact hole having the second layer with an aluminium material layer while heating the base plate.
Claim 23
Dependent Claim
42 words
A method as set forth in claim 17 wherein said substratum interconnector layer is formed of at least one of an Aluminium material layer, a polycrystalline silicon layer, a high melting point metallic silicide layer, a polyside layer, and a doped zone.
Claim 24
Dependent Claim
26 words
A method as set forth in claim 17 wherein said second layer is formed of one of at least one of Ti, TiNx, WSix, polycrystalline silicon.
Claim 25
Independent Claim
82 words
A method of forming an interconnector configuration comprising: using a CVD plasma technique to form a silicon nitride interlayer insulation membrane on a Si base plate which includes doped regions; using etching to opening contact holes in the silicon nitride interlayer insulation membrane which contact holes extend to said doped regions; forming a Ti layer over the entire surface of the base member; and forming a Al-1% Si layer over the entire surface of the base member while heating the base plate.
Claim 26
Independent Claim
82 words
A method of forming an interconnector configuration comprising: using a CVD plasma technique to form a silicon nitride interlayer insulation membrane on a Si base plate which includes doped regions; using etching to opening contact holes in the silicon nitride interlayer insulation membrane which contact holes extend to said doped regions; forming a Ti layer over the entire surface of the base member; and forming a Al-1% Si layer over the entire surface of the base member while heating the base plate.
Claim 27
Dependent Claim
32 words
A method as set forth in claim 20 wherein a surface layer section of said doped region is a self-adjustingly formed silicide layer and which is induced to have a low resistance.
Claim 28
Dependent Claim
20 words
A method as set forth in claim 20 wherein said contact hole has an aspect ratio of 1 or more.
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| 3.5 Years (Year 4) | 1997-05-02 | 1997-11-01 | 1998-05-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-05-02 | 2001-11-01 | 2002-05-03 | $3760.00 | Window Closed / Lapsed |
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