Patent US5767628A successfully refreshed from Google Patents.
US5767628A
Expired / Lapsed
US
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Helicon plasma processing tool utilizing a ferromagnetic induction coil with an internal cooling channel
Assignee: International Business Machines Corp
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Filing: 1995-12-20
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Granted: 1998-06-16
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Expires: 2015-12-20
Abstract
Abstract Disclosed is a plasma dry processing apparatus for producing a plasma with a resonance zone including a chamber for plasma processing at least one workpiece, the workpiece situated at a first end of the chamber; an induction coil at a second end of the chamber, spaced from the workpiece, for providing a radio frequency induced electromagnetic magnetic field to generate a helicon plasma within the chamber; a plurality of magnetic dipoles contained within the material of the induction coil, the magnetic dipoles having their fields directed towards the interior of, and producing a well-confined plasma within, the chamber, wherein the fields are adjacent to the second end of the chamber and keep the plasma spaced from the second end of the chamber.
Inventors
- 👤 John Howard Keller
- 👤 Dennis Keith Coultas
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 21:14
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32082; H01J37/321; H01J37/3211
Claims Analysis
Total Claims: 41
Claim 1
Independent Claim
120 words
A plasma dry processing apparatus for producing a plasma with a resonance zone comprising: a chamber for plasma processing at least one workpiece, said workpiece situated at a first end of said chamber; an induction coil at a second end of said chamber, spaced from said workpiece, for providing a radio frequency induced electromagnetic field to generate a helicon plasma within said chamber; a plurality of magnetic dipoles contained within the material of said induction coil, said magnetic dipoles having their fields directed towards the interior of, and producing a well-confined plasma within, said chamber, wherein said fields are confined adjacent to said second end of said chamber and keep said plasma spaced from said second end of said chamber.
Claim 2
Dependent Claim
120 words
A plasma dry processing apparatus for producing a plasma with a resonance zone comprising: a chamber for plasma processing at least one workpiece, said workpiece situated at a first end of said chamber; an induction coil at a second end of said chamber, spaced from said workpiece, for providing a radio frequency induced electromagnetic field to generate a helicon plasma within said chamber; a plurality of magnetic dipoles contained within the material of said induction coil, said magnetic dipoles having their fields directed towards the interior of, and producing a well-confined plasma within, said chamber, wherein said fields are confined adjacent to said second end of said chamber and keep said plasma spaced from said second end of said chamber.
Claim 3
Dependent Claim
26 words
The apparatus of claim 1 wherein each of said magnetic dipoles varies in its orientation of the north and south poles from its adjacent magnetic dipole.
Claim 4
Dependent Claim
32 words
The apparatus of claim 1 wherein said magnetic dipoles vary around the induction coil such that the north and south poles of said plurality of magnetic dipoles point parallel to the plasma.
Claim 5
Dependent Claim
35 words
The apparatus of claim 1 wherein said magnetic dipoles vary around the induction coil such that the north and south poles of every other of said plurality of magnetic dipoles point parallel to the plasma.
Claim 6
Dependent Claim
17 words
The apparatus of claim 1 wherein said induction coil is located on the exterior of said chamber.
Claim 7
Dependent Claim
12 words
The apparatus of claim 1 wherein said chamber comprises a dielectric material.
Claim 8
Dependent Claim
12 words
The apparatus of claim 1 wherein said chamber is circular in cross-section.
Claim 9
Dependent Claim
12 words
The apparatus of claim 1 wherein said chamber is rectangular in cross-section.
Claim 10
Dependent Claim
46 words
The apparatus of claim 1 wherein said induction coil comprises a base portion having recesses for receiving said plurality of magnetic dipoles and a cover portion congruent in configuration with said base portion for covering said base portion, said recesses and said plurality of magnetic dipoles.
Claim 11
Dependent Claim
14 words
The apparatus of claim 1 wherein said plasma processing comprises etching of the workpiece.
Claim 12
Dependent Claim
15 words
The apparatus of claim 1 wherein said plasma processing comprises selected deposition on the workpiece.
Claim 13
Dependent Claim
67 words
The apparatus of claim 1 further comprising a plurality of magnetic dipoles situated around the periphery of said chamber and proximate to said second end of said chamber, said magnetic dipoles having their fields directed towards the interior of said chamber for confining said plasma, wherein said fields are adjacent to the periphery of said chamber and keep said plasma spaced from said periphery of said chamber.
Claim 14
Dependent Claim
39 words
The apparatus of claim 1 further comprising at least one antenna encircling said chamber, and proximate to said second end of said chamber, for providing a radio frequency induced electromagnetic field to generate a helicon plasma within said chamber.
Claim 15
Dependent Claim
55 words
The apparatus of claim 13 further comprising a plurality of magnetic dipoles situated against said antenna, said magnetic dipoles having their fields directed towards the interior of said chamber for confining said plasma, wherein said fields are adjacent to the periphery of said chamber and keep said plasma spaced from said periphery of said chamber.
Claim 16
Dependent Claim
19 words
The apparatus of claim 14 wherein the portion of said chamber adjacent to said antenna comprises a dielectric material.
Claim 17
Dependent Claim
33 words
The apparatus of claim 14 wherein said at least one antenna further comprises an internal cooling channel and at least some of said plurality of magnetic dipoles are located within said cooling channel.
Claim 18
Dependent Claim
27 words
The apparatus of claim 14 further comprising a ferrite material interposed between said at least one antenna and at least one of said plurality of magnetic dipoles.
Claim 19
Dependent Claim
18 words
The apparatus of claim 1 wherein said induction coil comprises turns and said turns are equally spaced apart.
Claim 20
Dependent Claim
18 words
The apparatus of claim 1 wherein said induction coil comprises turns and said turns are unequally spaced apart.
Claim 21
Dependent Claim
25 words
The apparatus of claim 1 wherein portions of said induction coil are devoid of magnetic dipoles. comprises turns and said turns are equally spaced apart.
Claim 22
Dependent Claim
38 words
The apparatus of claim 1 wherein said chamber comprises, at said second end, an end portion for closing said second end of said chamber and a dielectric window, spaced from said end portion, for supporting said induction coil.
Claim 23
Dependent Claim
15 words
The apparatus of claim 21 wherein said dielectric window is thinner than said end portion.
Claim 24
Dependent Claim
14 words
The apparatus of claim 21 wherein said dielectric window has at least one perforation.
Claim 25
Dependent Claim
30 words
The apparatus of claim 1 wherein said chamber comprises, at said second end, an end portion for closing said second end of said chamber and for supporting said induction coil.
Claim 26
Dependent Claim
14 words
The apparatus of claim 24 wherein said end portion is dome-shaped in cross section.
Claim 27
Dependent Claim
39 words
An induction coil for providing a radio frequency induced electromagnetic field comprising: a coil shaped body for providing a radio frequency induced electromagnetic field; and a plurality of magnetic dipoles contained within the material of said coil shaped body.
Claim 28
Dependent Claim
39 words
An induction coil for providing a radio frequency induced electromagnetic field comprising: a coil shaped body for providing a radio frequency induced electromagnetic field; and a plurality of magnetic dipoles contained within the material of said coil shaped body.
Claim 29
Dependent Claim
48 words
The induction coil of claim 26 wherein said coil shaped body comprises a base portion having recesses for receiving said plurality of magnetic dipoles and a cover portion congruent in configuration with said base portion for covering said base portion, said recesses and said plurality of magnetic dipoles.
Claim 30
Dependent Claim
27 words
The induction coil of claim 26 wherein each of said magnetic dipoles varies in its orientation of the north and south poles from its adjacent magnetic dipole.
Claim 31
Dependent Claim
38 words
A magnetic field apparatus used in a plasma source comprising: a plasma source; a ferromagnetic material having an internal cooling channel proximate to said plasma source; and at least one magnetic dipole adhered directly to said ferromagnetic material.
Claim 32
Dependent Claim
38 words
A magnetic field apparatus used in a plasma source comprising: a plasma source; a ferromagnetic material having an internal cooling channel proximate to said plasma source; and at least one magnetic dipole adhered directly to said ferromagnetic material.
Claim 33
Dependent Claim
20 words
The magnetic field apparatus of claim 29 wherein said ferromagnetic material is an antenna capable of generating an electromagnetic field.
Claim 34
Dependent Claim
16 words
The magnetic field apparatus of claim 29 wherein there are a plurality of said magnetic dipoles.
Claim 35
Dependent Claim
16 words
The magnetic field apparatus of claim 29 wherein the plasma source is an ion implantation source.
Claim 36
Dependent Claim
18 words
The magnetic field apparatus of claim 29 wherein the ferromagnetic material is coated with an electrically conductive material.
Claim 37
Dependent Claim
28 words
The magnetic field apparatus of claim 33 wherein said electrically conductive material is selected from the group consisting of copper, silver, gold, platinum and alloys and mixtures thereof.
Claim 38
Dependent Claim
51 words
A magnetic field apparatus used in a plasma source comprising: a plasma source; a ferromagnetic material having an internal cooling channel proximate to said plasma source, wherein said ferromagnetic material is an antenna capable of generating an electromagnetic field; and at least one magnetic dipole adhered directly to said ferromagnetic material.
Claim 39
Dependent Claim
51 words
A magnetic field apparatus used in a plasma source comprising: a plasma source; a ferromagnetic material having an internal cooling channel proximate to said plasma source, wherein said ferromagnetic material is an antenna capable of generating an electromagnetic field; and at least one magnetic dipole adhered directly to said ferromagnetic material.
Claim 40
Dependent Claim
60 words
A magnetic field apparatus used in a plasma source comprising: a plasma source; a ferromagnetic material having an internal cooling channel proximate to said plasma source wherein said ferromagnetic material is an antenna capable of generating an electromagnetic field; a ferrite material adhered directly to said ferromagnetic material; and at least one magnetic dipole adhered directly to said ferrite material.
Claim 41
Dependent Claim
60 words
A magnetic field apparatus used in a plasma source comprising: a plasma source; a ferromagnetic material having an internal cooling channel proximate to said plasma source wherein said ferromagnetic material is an antenna capable of generating an electromagnetic field; a ferrite material adhered directly to said ferromagnetic material; and at least one magnetic dipole adhered directly to said ferrite material.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-06-15 | 2001-12-15 | 2002-06-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-06-15 | 2005-12-15 | 2006-06-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-06-15 | 2009-12-15 | 2010-06-16 | $7700.00 | Window Closed / Lapsed |