Dynamic RAM

Claim 2

A dynamic RAM comprising: a main word line; a plurality of bit lines which are perpendicular to said main word line; a plurality of dynamic memory cells which are connected to said plurality of bit lines; a plurality of subsidiary word lines which are parallel to said main word line; a plurality of subsidiary word selection lines which are extended so as to perpendicularly intersect said main word line and through which a selection signal for selecting one of said plurality of subsidiary word lines is transmitted; and a logic circuit for receiving a selection signal from said main word line and a selection signal from each of said subsidiary word selection lines to thereby form a selection signal for selecting one of said subsidiary word lines; wherein a voltage level of each of said main word line and said subsidiary word selection lines is set to be equal to a ground potential when the line is not selected.

Claim 3

A dynamic RAM according to claim 1, wherein said logic circuit includes: a first CMOS inverter circuit which receives a signal on said main word line and which uses, as its operating voltage, a boosted voltage corresponding to a subsidiary word line selection signal in a memory cell; a second CMOS inverter circuit which uses, as its operating voltage, an output signal of said first CMOS inverter circuit and a selection signal transmitted to said subsidiary word selection line to thereby form a drive signal to be transmitted to said subsidiary word line; and an N-channel type MOSFET provided between said subsidiary word line and said subsidiary word selection line and having its gate connected to said main word line.

Claim 4

A dynamic RAM according to claim 1, wherein said logic circuit includes: an N-channel type drive MOSFET which transmits a selection signal on each of said subsidiary word selection lines to each of said subsidiary word lines; an N-channel type cutting MOSFET which is provided between a gate of said drive MOSFET and said main word line and which has its gate supplied with a source voltage stationarily; a CMOS inverter circuit which receives a signal from said main word line and which uses the source voltage as its operating voltage; and an N-channel type switch MOSFET which has its gate supplied with an output signal of said CMOS inverter circuit and which is provided between said subsidiary word line and a ground potential of said logic circuit.

Claim 5

A dynamic RAM according to claim 1, wherein: said main word line is constituted by a second metal wiring layer; and said subsidiary word selection lines are constituted by a third metal wiring layer, said second metal wiring layer and a first metal wiring layer, said third metal wiring layer being used in portions where said subsidiary word selection lines cross said main word line, and said first metal wiring layer being used in portions where said subsidiary word selection lines are connected to circuit elements constituting said logic circuit.

Claim 6

A dynamic RAM according to claim 4, wherein said main word line and said subsidiary word lines are provided with a redundant main word line and redundant subsidiary word lines for repairing defects.

Claim 7

A semiconductor memory device comprising: a main word line extended in a first direction; a plurality of first subsidiary word lines each extended in said first direction, said first subsidiary word lines being arranged side by side; a plurality of second subsidiary word lines each extended in said first direction, said second subsidiary word lines being arranged side by side; a plurality of first memory cells connected to said plurality of first subsidiary word lines; a plurality of second memory cells connected to said plurality of second subsidiary word lines; a plurality of first selection lines each extended in a second direction said first selection lines being arranged side by side; a plurality of second selection lines each extending in said second direction, said second selection lines being arranged side by side; a first selection circuit connected to said main word line, said plurality of first selection lines and said plurality of first subsidiary word lines, and for turning a state of selected one of said plurality of first subsidiary word lines into a selected state in accordance with signals on said main word line and said plurality of first selection lines; and a second selection circuit connected to said main word line, said plurality of second selection lines and said plurality of second subsidiary word lines, and for turning a state of selected one of said plurality of second subsidiary word lines into a selected state in accordance with signals on said main word line and on said plurality of second selection lines; wherein said main word line and said plurality of first selection lines are arranged on a semiconductor substrate so as to cross each other through an isolating layer, wherein said main word line and said plurality of second selection lines are arranged on said semiconductor substrate so as to cross each other through said isolating layer, and wherein a not-selected level of each of said main word line, said plurality of first selection lines and said plurality of second selection lines is set to be equal to a ground potential.

Claim 8

A semiconductor memory device comprising: a main word line extended in a first direction; a plurality of first subsidiary word lines each extended in said first direction, said first subsidiary word lines being arranged side by side; a plurality of second subsidiary word lines each extended in said first direction, said second subsidiary word lines being arranged side by side; a plurality of first memory cells connected to said plurality of first subsidiary word lines; a plurality of second memory cells connected to said plurality of second subsidiary word lines; a plurality of first selection lines each extended in a second direction said first selection lines being arranged side by side; a plurality of second selection lines each extending in said second direction, said second selection lines being arranged side by side; a first selection circuit connected to said main word line, said plurality of first selection lines and said plurality of first subsidiary word lines, and for turning a state of selected one of said plurality of first subsidiary word lines into a selected state in accordance with signals on said main word line and said plurality of first selection lines; and a second selection circuit connected to said main word line, said plurality of second selection lines and said plurality of second subsidiary word lines, and for turning a state of selected one of said plurality of second subsidiary word lines into a selected state in accordance with signals on said main word line and on said plurality of second selection lines; wherein said main word line and said plurality of first selection lines are arranged on a semiconductor substrate so as to cross each other through an isolating layer, wherein said main word line and said plurality of second selection lines are arranged on said semiconductor substrate so as to cross each other through said isolating layer, and wherein a not-selected level of each of said main word line, said plurality of first selection lines and said plurality of second selection lines is set to be equal to a ground potential.

Claim 9

A semiconductor memory device according to claim 6, wherein said plurality of first memory cells and said plurality of second memory cells are of a dynamic type.

Claim 10

A semiconductor memory device according to claim 6, wherein each of said first selection circuit and said second selection circuit has a decoding function.

Claim 11

A semiconductor memory device comprising: a first word line extended in a first direction; a plurality of second word lines each extended in said first direction, said second word lines being arranged side by side; a plurality of third word lines each extended in said first direction, said third word lines being arranged side by side; a plurality of first memory cells connected to said plurality of second word lines; a plurality of second memory cells connected to said plurality of third word lines; a plurality of first selection lines extended in a second direction, substantially perpendicular to a first direction, said first selection lines being arranged side by side; a plurality of second selection lines each extended in said second direction, said second selection lines being arranged side by side; a first selection circuit connected to said first word line, said plurality of first selection lines and said plurality of second word lines, and for selecting one of said plurality of second word lines in accordance with signals on said first word line and said plurality of first selection lines; and a second selection circuit connected to said first word line, said plurality of second selection lines and said plurality of third word lines, and for selecting one of said plurality of third word lines in accordance with signals on said first word line and said plurality of second selection lines; wherein said first word line and said plurality of first selection lines are arranged on a semiconductor substrate so as to cross each other through an isolating layer, wherein said first word line and said plurality of second selection lines are arranged on said semiconductor substrate so as to cross each other through said isolating layer, wherein a not-selected level in each of said plurality of first selection lines is substantially the same as a not-selected level of said first word line, and wherein a not-selected level of each of said plurality of second selection lines is substantially the same as a not-selected level of said first word line.

Claim 12

A semiconductor memory device comprising: a first word line extended in a first direction; a plurality of second word lines each extended in said first direction, said second word lines being arranged side by side; a plurality of third word lines each extended in said first direction, said third word lines being arranged side by side; a plurality of first memory cells connected to said plurality of second word lines; a plurality of second memory cells connected to said plurality of third word lines; a plurality of first selection lines extended in a second direction, substantially perpendicular to a first direction, said first selection lines being arranged side by side; a plurality of second selection lines each extended in said second direction, said second selection lines being arranged side by side; a first selection circuit connected to said first word line, said plurality of first selection lines and said plurality of second word lines, and for selecting one of said plurality of second word lines in accordance with signals on said first word line and said plurality of first selection lines; and a second selection circuit connected to said first word line, said plurality of second selection lines and said plurality of third word lines, and for selecting one of said plurality of third word lines in accordance with signals on said first word line and said plurality of second selection lines; wherein said first word line and said plurality of first selection lines are arranged on a semiconductor substrate so as to cross each other through an isolating layer, wherein said first word line and said plurality of second selection lines are arranged on said semiconductor substrate so as to cross each other through said isolating layer, wherein a not-selected level in each of said plurality of first selection lines is substantially the same as a not-selected level of said first word line, and wherein a not-selected level of each of said plurality of second selection lines is substantially the same as a not-selected level of said first word line.

Claim 13

A semiconductor memory device according to claim 9, wherein said plurality of first memory cells and said plurality of second memory cells are of a dynamic type.

Claim 14

A semiconductor memory device according to claim 9, wherein each of said first selection circuit and said second selection circuit has a decoding function.

Claim 15

A semiconductor memory device comprising: (1) a first main word line extended in a first direction; (2) a second main word line extended in said first direction; (3) a plurality of first sub-word lines each extended in said first direction, said first sub-word lines being arranged side by side; (4) a plurality of second sub-word lines each extended in said first direction, said plurality of second sub-word lines being arranged side by side; (5) a plurality of third sub-word lines each extended in said first direction, said third sub-word lines being arranged side by side; (6) a plurality of fourth sub-word lines each extended in said first direction, said fourth sub-word lines being arranged side by side; (7) a plurality of first memory cells connected to said plurality of first sub-word lines; (8) a plurality of second memory cells connected to said plurality of second sub-word lines; (9) a plurality of third memory cells connected to said plurality of third sub-word lines; (10) a plurality of fourth memory cells connected to said plurality of fourth sub-word lines; (11) a plurality of first selection lines each extended in a second direction, substantially perpendicular to the first direction, said first selection lines being arranged side by side; (12) a plurality of second selection lines each extended in said second direction, said second selection lines being arranged side by side; (13) a first selection circuit connected to said first main word line, said plurality of first selection lines and said plurality of first sub-word lines, and for changing a level of one of said plurality of first sub-word lines from a not-selected level to a selected level in accordance with signals on said first main word line and said plurality of first selection lines; (14) a second selection circuit connected to said first main word line, said plurality of second selection lines and said plurality of second sub-word lines, and for changing a level of one of said plurality of second sub-word lines from a not-selected level to a selected level in accordance with signals on said first main word line and said plurality of second selection lines; (15) a third selection circuit connected to said second main word line, said plurality of first selection lines and said plurality of third sub-word lines, and for changing a level of one of said plurality of third sub-word lines from a not-selected level to a selected level in accordance with signals on said second main word line and said plurality of first selection lines; and (16) a fourth selection circuit connected to said second main word line, said plurality of second selection lines and said plurality of fourth sub-word lines, and for changing a level of one of said plurality of fourth sub-word lines from a not-selected level to a selected level in accordance with signals on said second main word line and said plurality of second selection lines; wherein said first main word line and said plurality of first selection lines are arranged on a semiconductor substrate so as to cross each other through a semiconductor layer, wherein said first main word line and said plurality of second selection lines are arranged on said semiconductor substrate so as to cross each other through said predetermined layer, said second main word line and said plurality of first selection lines are arranged on said semiconductor substrate so as to cross each other through said predetermined layer, wherein said second main word line and said plurality of second selection lines are arranged on said semiconductor substrate so as to cross each other through said predetermined layer, wherein a not-selected level of each of said plurality of first selection lines is substantially the same as a not-selected level of said first main word line, wherein a not-selected level of each of said plurality of second selection lines is substantially the same as said not-selected level of said first main word line, wherein said not-selected level of each of said plurality of first selection lines is substantially the same as a not-selected level of said second main word line, and wherein said not-selected level of each of said plurality of second selection lines is substantially the same as said not-selected level of said second main word line.

Claim 16

A semiconductor memory device comprising: (1) a first main word line extended in a first direction; (2) a second main word line extended in said first direction; (3) a plurality of first sub-word lines each extended in said first direction, said first sub-word lines being arranged side by side; (4) a plurality of second sub-word lines each extended in said first direction, said plurality of second sub-word lines being arranged side by side; (5) a plurality of third sub-word lines each extended in said first direction, said third sub-word lines being arranged side by side; (6) a plurality of fourth sub-word lines each extended in said first direction, said fourth sub-word lines being arranged side by side; (7) a plurality of first memory cells connected to said plurality of first sub-word lines; (8) a plurality of second memory cells connected to said plurality of second sub-word lines; (9) a plurality of third memory cells connected to said plurality of third sub-word lines; (10) a plurality of fourth memory cells connected to said plurality of fourth sub-word lines; (11) a plurality of first selection lines each extended in a second direction, substantially perpendicular to the first direction, said first selection lines being arranged side by side; (12) a plurality of second selection lines each extended in said second direction, said second selection lines being arranged side by side; (13) a first selection circuit connected to said first main word line, said plurality of first selection lines and said plurality of first sub-word lines, and for changing a level of one of said plurality of first sub-word lines from a not-selected level to a selected level in accordance with signals on said first main word line and said plurality of first selection lines; (14) a second selection circuit connected to said first main word line, said plurality of second selection lines and said plurality of second sub-word lines, and for changing a level of one of said plurality of second sub-word lines from a not-selected level to a selected level in accordance with signals on said first main word line and said plurality of second selection lines; (15) a third selection circuit connected to said second main word line, said plurality of first selection lines and said plurality of third sub-word lines, and for changing a level of one of said plurality of third sub-word lines from a not-selected level to a selected level in accordance with signals on said second main word line and said plurality of first selection lines; and (16) a fourth selection circuit connected to said second main word line, said plurality of second selection lines and said plurality of fourth sub-word lines, and for changing a level of one of said plurality of fourth sub-word lines from a not-selected level to a selected level in accordance with signals on said second main word line and said plurality of second selection lines; wherein said first main word line and said plurality of first selection lines are arranged on a semiconductor substrate so as to cross each other through a semiconductor layer, wherein said first main word line and said plurality of second selection lines are arranged on said semiconductor substrate so as to cross each other through said predetermined layer, said second main word line and said plurality of first selection lines are arranged on said semiconductor substrate so as to cross each other through said predetermined layer, wherein said second main word line and said plurality of second selection lines are arranged on said semiconductor substrate so as to cross each other through said predetermined layer, wherein a not-selected level of each of said plurality of first selection lines is substantially the same as a not-selected level of said first main word line, wherein a not-selected level of each of said plurality of second selection lines is substantially the same as said not-selected level of said first main word line, wherein said not-selected level of each of said plurality of first selection lines is substantially the same as a not-selected level of said second main word line, and wherein said not-selected level of each of said plurality of second selection lines is substantially the same as said not-selected level of said second main word line.

Claim 17

A semiconductor memory device according to claim 12, wherein said not-selected level of each of said first main word line, said second main word line, said plurality of first selection lines and said plurality of second selection lines is set to be equal to a ground potential.

Claim 18

A semiconductor memory device according to claim 12, wherein said first main word line and said plurality of first selection lines are formed on said semiconductor substrate so as to cross each other through an isolating layer, wherein said first main word line and said plurality of second selection lines are formed on said semiconductor substrate so as to cross each other through said isolating layer, wherein said second main word line and said plurality of first selection lines are formed on said semiconductor substrate so as to cross each other through said isolating layer, and wherein said second main word line and said plurality of second selection lines are formed on said semiconductor substrate so as to cross each other through said isolating layer.

Claim 19

A semiconductor memory device according to claim 12, wherein said plurality of first memory cells, said plurality of second memory cells, said plurality of third memory cells and said plurality of fourth memory cells are of a dynamic type.

Claim 20

A semiconductor memory device according to claim 12, wherein each of said first selection circuit, said second selection circuit, said third selection circuit and said fourth selection circuit has a decoding function.

Claim 21

A semiconductor memory device formed on a semiconductor substrate on which a first wiring layer, a second wiring layer and an isolating layer disposed between said first and second wiring layers are formed, said semiconductor storage device comprising: (1) a first word line extended in a first direction; (2) a plurality of second word lines each extended in said first direction, said second word lines being arranged side by side, each of said plurality of second word lines being shorter than said first word line; (3) a plurality of third word lines each extended in said first direction, said third word lines being arranged side by side, each of said plurality of third word lines being shorter than said first word line; (4) a plurality of first memory cells connected to said plurality of second word lines; (5) a plurality of second memory cells connected to said plurality of third word lines; (6) a plurality of first selection lines each extended in said second direction, said first selection lines being arranged side by side; (7) a plurality of second selection lines each extended in said second direction, said second selection lines being arranged side by side; (8) a first selection circuit connected to said first word line, said plurality of first selection lines and said plurality of second word lines, and for selecting one of said plurality of second word lines in accordance with signals on said first word line and said plurality of first selection lines; and (9) a second selection circuit connected to said main word line, said plurality of second selection lines and said plurality of third word lines, and for selecting one of said plurality of third word lines in accordance with signals on said first word line and said plurality of second selection lines, wherein said first word line is formed in said first wiring layer, wherein said plurality of first selection lines and said plurality of second selection lines are formed in said second layer, wherein a not-selected level of each of said plurality of first selection lines is substantially equal to a not-selected level of said first word line, and wherein a not-selected level of each of said plurality of second selection lines is substantially equal to said not-selected level of said first word line.

Claim 22

A semiconductor memory device formed on a semiconductor substrate on which a first wiring layer, a second wiring layer and an isolating layer disposed between said first and second wiring layers are formed, said semiconductor storage device comprising: (1) a first word line extended in a first direction; (2) a plurality of second word lines each extended in said first direction, said second word lines being arranged side by side, each of said plurality of second word lines being shorter than said first word line; (3) a plurality of third word lines each extended in said first direction, said third word lines being arranged side by side, each of said plurality of third word lines being shorter than said first word line; (4) a plurality of first memory cells connected to said plurality of second word lines; (5) a plurality of second memory cells connected to said plurality of third word lines; (6) a plurality of first selection lines each extended in said second direction, said first selection lines being arranged side by side; (7) a plurality of second selection lines each extended in said second direction, said second selection lines being arranged side by side; (8) a first selection circuit connected to said first word line, said plurality of first selection lines and said plurality of second word lines, and for selecting one of said plurality of second word lines in accordance with signals on said first word line and said plurality of first selection lines; and (9) a second selection circuit connected to said main word line, said plurality of second selection lines and said plurality of third word lines, and for selecting one of said plurality of third word lines in accordance with signals on said first word line and said plurality of second selection lines, wherein said first word line is formed in said first wiring layer, wherein said plurality of first selection lines and said plurality of second selection lines are formed in said second layer, wherein a not-selected level of each of said plurality of first selection lines is substantially equal to a not-selected level of said first word line, and wherein a not-selected level of each of said plurality of second selection lines is substantially equal to said not-selected level of said first word line.

Claim 23

A semiconductor memory device according to claim 17, wherein said plurality of first memory cells and said plurality of second memory cells are of a dynamic type.

Claim 24

A semiconductor memory device according to claim 17, wherein each of said first selection circuit and said second selection circuit has a decoding function.

Claim 25

A semiconductor memory device according to claim 17, wherein said not-selected level of each of said main word line, said plurality of first selection lines and said plurality of second selection lines is equal to a ground potential.

Claim 26

A semiconductor memory device according to claim 17, wherein said isolating layer is arranged on said first wiring layer, and wherein said second wiring layer is arranged on said isolating layer.

Claim 27

A semiconductor memory device according to claim 17, wherein each of said first wiring layer and said second wiring layer is a metal wiring layer.