Process for manufacturing CMOS device

Claim 2

A process for manufacturing a CMOS device on a silicon substrate, said CMOS device having at least a p-type and an n-type MOS region therein, comprising: (a) forming an isolation layer to isolate and define a pair of exposed active areas and forming the n-type and p-type MOS regions each under one of the pair of exposed active areas; (b) forming a gate oxide on said active areas; (c) forming a gate conducting layer over said gate oxide; (d) forming a photoresist layer on said gate conducting layer; (e) removing a portion of said photoresist layer located over one of said p-type and said n-type MOS regions and executing a first ion implantation in order to form a first channel stop in said one of said p-type and said n-type MOS regions and to regulate a first threshold voltage of said one of said p-type and said n-type MOS regions; (f) selectively forming an oxide layer over said one of said p-type and said n-type MOS regions; (g) eliminating a remaining portion of said photoresist layer and executing a second ion implantation in order to form a second channel stop on said other one of said p-type and said n-type MOS regions and to regulate a second threshold voltage of said other one of said p-type and said n-type MOS regions; and (h) eliminating said oxide layer on said one of said p-type and said n-type MOS regions and forming gates, sources, and drains in said CMOS device, including patterning and etching said gate conducting layer.

Claim 3

A process for manufacturing a CMOS device as claimed in claim 1, wherein said CMOS device has at least one twin well therein, said twin well including an n well and a p well.

Claim 4

A process for manufacturing a CMOS device as claimed in claim 2, wherein step (a) includes the following steps: (a1) forming a pad oxide over said silicon substrate; (a2) forming a dielectric layer on said pad oxide; (a3) eliminating a portion of said dielectric layer for defining said active areas; and (a4) forming said n well and said p well on said silicon substrate, each located substantially under one of said active areas.

Claim 5

A process for manufacturing a CMOS device as claimed in claim 3, wherein said pad oxide is formed by a heat oxidation.

Claim 6

A process for manufacturing a CMOS device as claimed in claim 4, wherein said heat oxidation is one of a dry oxidation and a wet oxidation.

Claim 7

A process for manufacturing a CMOS device as claimed in claim 3, wherein a thickness of said pad oxide is in a range from about one hundred Å to about one thousand Å.

Claim 8

A process for manufacturing a CMOS device as claimed in claim 3, wherein said dielectric layer is formed by a Low Pressure Chemical Vapor Deposition (LPCVD).

Claim 9

A process for manufacturing a CMOS device as claimed in claim 3, wherein said dielectric layer is Si 3 N 4 .

Claim 10

A process for manufacturing a CMOS device as claimed in claim 3, wherein a thickness of said dielectric layer in said step (a2) is about 1000-2000 Å.

Claim 11

A process for manufacturing a CMOS device as claimed in claim 3, wherein said portion of said dielectric layer in step (a3) is eliminated by a photolithography and an etching technique.

Claim 12

A process for manufacturing a CMOS device as claimed in claim 3, wherein said step (a4) further includes the following steps: (a41) forming a first photoresist mask layer on a first portion of said silicon substrate; (a42) utilizing an ion implantation for pre-depositing p-type ions in a second portion on said silicon substrate; (a43) eliminating said first photoresist mask layer and forming a second photoresist mask layer on the second portion of said silicon substrate; (a44) utilizing an ion implantation for pre-depositing p-type ions in a second portion of said silicon substrate; and (a45) removing said second photoresist mask layer and utilizing a heat diffusion to execute a drive-in process in order that said n-type ions and said p-type ions in said silicon substrate respectively form said n well and said p well by diffusion, defining thereby said p-type and said n-type MOS regions.

Claim 13

A process for manufacturing a CMOS device as claimed in claim 3, wherein said field oxide in said step (a) is formed by utilizing a residual portion of said dielectric layer as a mask layer in order that an exposed portion of said pad oxide becomes said field oxide by oxidation.

Claim 14

A process for manufacturing a CMOS device as claimed in claim 3, wherein said field oxide in said step (a) is formed by a wet oxidation.

Claim 15

A process for manufacturing a CMOS device as claimed in claim 3, wherein before said step (b) said process further includes following steps: (ba1) forming a sacrificial oxide over said field oxide and a residual portion of said dielectric layer in order to eliminate a white ribbon effect resulting from forming said field oxide; and (ba2) removing said sacrificial oxide.

Claim 16

A process for manufacturing a CMOS device as claimed in claim 3, wherein said step (b) further includes the following steps: (b1) removing the remaining portion of said dielectric layer on said active areas and eliminating said pad oxide under said remaining portion of said dielectric layer; and (b2) growing said gate oxide on said active areas.

Claim 17

A process for manufacturing a CMOS device as claimed in claim 15, wherein said residual portion of said dielectric layer and said pad oxide in said step (b1) is removed by a wet etching.

Claim 18

A process for manufacturing a CMOS device as claimed in claim 15, wherein said gate oxide in said step (b2) is grown by a dry oxidation.

Claim 19

A process for manufacturing a CMOS device as claimed in claim 3, wherein said gate conducting layer in said step (c) is a polysilicon.

Claim 20

A process for manufacturing a CMOS device as claimed in claim 3, wherein said gate conducting layer in said step (c) is a polycide made of a polysilicon and a silicide.

Claim 21

A process for manufacturing a CMOS device as claimed in claim 19, wherein said silicide is WSi X .

Claim 22

A process for manufacturing a CMOS device as claimed in claim 3, wherein said gate conducting layer in said step (c) is formed by a Low Pressure Chemical Vapor Deposition (LPCVD).

Claim 23

A process for manufacturing a CMOS device as claimed in claim 3, wherein said photoresist layer covering said p-type MOS region is removed in said step (e) and said photoresist layer covering said n-type MOS region is removed in said step (g).

Claim 24

A process for manufacturing a CMOS device as claimed in claim 3, wherein said photoresist layer covering said n-type MOS region is removed in said step (e) and said photoresist layer covering said p-type MOS region is removed in said step (g).

Claim 25

A process for manufacturing a CMOS device as claimed in claim 1, wherein as said first ion implantation is being executed in step (e), an ion implantation for preventing punchthrough effects in said one of said p-type and said n-type MOS regions is concurrently accomplished.

Claim 26

A process for manufacturing a CMOS device as claimed in claim 3, wherein said oxide layer selectively formed by utilizing said Liquid Phase Deposition (LPD) is SiO 2 having a thickness of about 500 to about 2500 Å.

Claim 27

A process for manufacturing a CMOS device as claimed in claim 3, wherein an operating temperature for executing said Liquid Phase Deposition (LPD) in said step (f) is below 40° C.

Claim 28

A process for manufacturing a CMOS device as claimed in claim 3, wherein a H 2 SiF 6 solution is utilized for executing said Liquid Phase Deposition (LPD) in said step (f).

Claim 29

A process for manufacturing a CMOS device as claimed in claim 3, wherein as said second ion implantation is being executed, an ion implantation for preventing punchthrough effects in said the other one of said p-type and said n-type MOS regions is concurrently accomplished.

Claim 30

A process for manufacturing a CMOS device as claimed in claim 2, wherein before said step (e) said process further includes: using a photolithography and an etching technique for removing said portion of said photoresist layer covering said one of said p-type and said n-type MOS regions.

Claim 31

A process for manufacturing a CMOS device as claimed in claim 1, a Liquid Phase Deposition (LPD) is used for selectively forming said oxide layer on said conducting layer.

Claim 32

A process for manufacturing a CMOS device as claimed in claim 2, wherein said step (h) further includes the following steps: (h2) using a photolithography and an etching technique to remove a portion of said gate conducting layer in order to define a first gate and a second gate respectively in said p-type and said n-type MOS regions; (h3) forming a first photoresist mask layer on said one of said p-type and said n-type MOS regions and executing a third ion implantation in order to form a first lightly doped drain (LDD) on said other one of said p-type and said n-type MOS regions; (h4) removing said first photoresist mask layer; (h5) forming a second photoresist mask layer on said the other one of said p-type and said n-type MOS regions and executing a fourth ion implantation in order to form a second lightly doped drain (LDD) in said one of said p-type and said n-type MOS regions; (h6) removing said second photoresist layer; (h7) forming a dielectric layer on said p-type and said n-type MOS regions; (h8) removing a portion of said dielectric layer in order to form a first gate sidewall and a second gate sidewall respectively alongside said first gate and said second gates; (h9) forming a third photoresist mask, layer on said one of said p-type and said n-type MOS regions and executing a fifth ion implantation in order to form a first source and a first drain in said other one of said p-type and said n-type MOS regions; (h10) removing said third photoresist mask layer; (h11) forming a fourth photoresist mask layer on said the other one of said p-type and said n-type MOS regions and executing a sixth ion implantation in order to form a second source and a second drain in said one of said -p-type and said n-type MOS regions; and (h12) removing said fourth photoresist mask layer.

Claim 33

A process for manufacturing a CMOS device as claimed in claim 1, wherein said CMOS device is an n well device.

Claim 34

A process for manufacturing a CMOS device as claimed in claim 1, wherein said CMOS device is a p well device.