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US5741724A
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Method of growing gallium nitride on a spinel substrate
Assignee: NXP USA Inc
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Filing: 1996-12-27
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Granted: 1998-04-21
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Expires: 2016-12-27
Abstract
Abstract A method of growing gallium nitride on a spinel substrate by providing a supporting substrate having a surface, and disposing a plurality of buffer layers on the surface of the supporting substrate. The plurality of buffer layers including a first buffer layer of aluminum oxynitride having a low percentage of mismatch to the spinel substrate. The second buffer layer is disposed on the first buffer layer and includes a plurality of layers of a graded aluminum oxynitride having a low dislocation density. A third buffer layer of aluminum nitride is disposed on the second buffer layer. A fourth buffer layer of gallium nitride is disposed on the third buffer layer. Subsequently, a photonic device structure, such as a laser, LED or detector, an electronic device structure, such as a field effect transistor or modulation doped field effect transistor, or an optical waveguide is fabricated on the fourth buffer layer.
Inventors
- 👤 Jamal Ramdani
- 👤 Michael S. Lebby
- 👤 Paige M. Holm
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 10:39
CPC Classifications
H; H10; H10H; H10H20/00; H10H20/01; H10H20/011; H10H20/013; H10H20/0133; H10H20/01335; H10P; H10P14/00; H10P14/20; H10P14/29; H10P14/2901; H10P14/2921; H10P14/32; H10P14/3202; H10P14/3214; H10P14/3216; H10P14/3238; H10P14/3242; H10P14/3244; H10P14/3251; H10P14/34; H10P14/3402; H10P14/3414; H10P14/3416; Y; Y10; Y10S; Y10S438/00; Y10S438/967
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
77 words
A method of growing gallium nitride on a substrate comprising the steps of: providing a supporting substrate having a surface; disposing a plurality of buffer layers on the surface of the supporting substrate, the plurality of buffer layers including an aluminum oxynitride material, graded aluminum oxynitride, aluminum nitride and gallium nitride; and fabricating one of a photonic device structure, an electronic device structure and an optical waveguide structure on a surface of the plurality of buffer layers.
Claim 2
Independent Claim
77 words
A method of growing gallium nitride on a substrate comprising the steps of: providing a supporting substrate having a surface; disposing a plurality of buffer layers on the surface of the supporting substrate, the plurality of buffer layers including an aluminum oxynitride material, graded aluminum oxynitride, aluminum nitride and gallium nitride; and fabricating one of a photonic device structure, an electronic device structure and an optical waveguide structure on a surface of the plurality of buffer layers.
Claim 3
Dependent Claim
25 words
A method of growing gallium nitride on a substrate as claimed in claim 1 wherein the supporting substrate includes a magnesium aluminum oxide spinel substrate.
Claim 4
Dependent Claim
38 words
A method of growing gallium nitride on a substrate as claimed in claim 2 wherein the plurality of buffer layers includes a first buffer layer, a second buffer layer, a third buffer layer and a fourth buffer layer.
Claim 5
Dependent Claim
33 words
A method of growing gallium nitride on a substrate as claimed in claim 3 wherein the first buffer layer is a layer of aluminum oxynitride disposed on the surface of the supporting substrate.
Claim 6
Dependent Claim
34 words
A method of growing gallium nitride on a substrate as claimed in claim 4 wherein the second buffer layer is a plurality of layers of graded aluminum oxynitride disposed on the first buffer layer.
Claim 7
Dependent Claim
32 words
A method of growing gallium nitride on a substrate as claimed in claim 5 wherein the plurality of layers of graded aluminum oxynitride decrease in oxygen content across the plurality of layers.
Claim 8
Dependent Claim
28 words
A method of growing gallium nitride on a substrate as claimed in claim 5 wherein the third buffer layer is aluminum nitride disposed on the second buffer layer.
Claim 9
Dependent Claim
28 words
A method of growing gallium nitride on a substrate as claimed in claim 7 wherein the fourth buffer layer is gallium nitride disposed on the third buffer layer.
Claim 10
Dependent Claim
33 words
A method of growing gallium nitride on a substrate as claimed in claim 8 wherein the photonic device structure includes a laser device structure, a light emitting device structure, and a detector structure.
Claim 11
Dependent Claim
41 words
A method of growing gallium nitride on a substrate as claimed in claim 9 wherein the electronic device structure includes one of a field effect transistor structure, a modulation doped field effect transistor structure and a heterojunction field effect transistor structure.
Claim 12
Independent Claim
112 words
A method of growing gallium nitride on a substrate comprising the steps of: providing a magnesium aluminum oxide supporting substrate having a surface; disposing a first buffer layer on the surface of the magnesium aluminum oxide supporting substrate; disposing a second buffer layer on the first buffer layer, forming the second buffer layer to include a plurality of layers and disposing the plurality of layers adjacent the first buffer layer; disposing a third buffer layer on the second buffer layer; disposing a fourth buffer layer on the third buffer layer; and fabricating one of a photonic device structure, an electronic device structure, and an optical waveguide structure on the fourth buffer layer.
Claim 13
Independent Claim
112 words
A method of growing gallium nitride on a substrate comprising the steps of: providing a magnesium aluminum oxide supporting substrate having a surface; disposing a first buffer layer on the surface of the magnesium aluminum oxide supporting substrate; disposing a second buffer layer on the first buffer layer, forming the second buffer layer to include a plurality of layers and disposing the plurality of layers adjacent the first buffer layer; disposing a third buffer layer on the second buffer layer; disposing a fourth buffer layer on the third buffer layer; and fabricating one of a photonic device structure, an electronic device structure, and an optical waveguide structure on the fourth buffer layer.
Claim 14
Dependent Claim
24 words
A method of growing gallium nitride on a substrate as claimed in claim 11 wherein the first buffer layer includes an aluminum oxynitride material.
Claim 15
Dependent Claim
41 words
A method of growing gallium nitride on a substrate as claimed in claim 12 wherein the aluminum oxynitride material includes 30 moles of a single crystal aluminum nitride, and having a lattice mismatch of less than 1.5% to the supporting substrate.
Claim 16
Dependent Claim
25 words
A method of growing gallium nitride on a substrate as claimed in claim 13 wherein the layer of aluminum oxynitride ranges between 100-200 Å thick.
Claim 17
Dependent Claim
46 words
A method of growing gallium nitride on a substrate as claimed in claim 14 wherein the plurality of layers of the second buffer layer include graded aluminum oxynitride, the graded aluminum oxynitride decreasing in oxygen content across the plurality of layers of the second buffer layer.
Claim 18
Dependent Claim
24 words
A method of growing gallium nitride on a substrate as claimed in claim 13 wherein the third buffer layer is an aluminum nitride material.
Claim 19
Dependent Claim
24 words
A method of growing gallium nitride on a substrate as claimed in claim 13 wherein the fourth buffer layer is a gallium nitride material.
Claim 20
Independent Claim
157 words
A method of growing gallium nitride on a substrate comprising the steps of: providing a magnesium aluminum oxide supporting substrate having a surface; disposing a first buffer layer on the surface of the magnesium aluminum oxide supporting substrate, the first buffer layer including an aluminum oxynitride material; disposing a second buffer layer on the first buffer layer, forming the second buffer layer to include a plurality of layers of graded aluminum oxynitride and disposing the plurality of layers of graded aluminum oxynitride adjacent the aluminum oxynitride material of the first buffer layer; disposing a third buffer layer on the second buffer layer, the third buffer layer including an aluminum nitride material; disposing a fourth buffer layer on the third buffer layer, the fourth buffer layer including a gallium nitride material; and fabricating one of a photonic device structure, an electronic device structure, and an optical waveguide structure on the gallium nitride material of the fourth buffer layer.
Claim 21
Independent Claim
157 words
A method of growing gallium nitride on a substrate comprising the steps of: providing a magnesium aluminum oxide supporting substrate having a surface; disposing a first buffer layer on the surface of the magnesium aluminum oxide supporting substrate, the first buffer layer including an aluminum oxynitride material; disposing a second buffer layer on the first buffer layer, forming the second buffer layer to include a plurality of layers of graded aluminum oxynitride and disposing the plurality of layers of graded aluminum oxynitride adjacent the aluminum oxynitride material of the first buffer layer; disposing a third buffer layer on the second buffer layer, the third buffer layer including an aluminum nitride material; disposing a fourth buffer layer on the third buffer layer, the fourth buffer layer including a gallium nitride material; and fabricating one of a photonic device structure, an electronic device structure, and an optical waveguide structure on the gallium nitride material of the fourth buffer layer.
Claim 22
Dependent Claim
37 words
A method of growing gallium nitride on a substrate as claimed in claim 18 wherein the first buffer layer of an aluminum oxynitride material is formed as a single crystal and includes thirty moles of aluminum nitride.
Claim 23
Dependent Claim
33 words
A method of growing gallium nitride on a substrate as claimed in claim 19 wherein the first buffer layer of an aluminum oxynitride material is grown in a range of 100-200 Å thick.
Claim 24
Dependent Claim
38 words
A method of growing gallium nitride on a substrate as claimed in claim 20 wherein the first buffer layer of an aluminum oxynitride material is less than a 1.5% lattice mismatch to the magnesium aluminum oxide supporting substrate.
Claim 25
Dependent Claim
31 words
A method of growing gallium nitride on a substrate as claimed in claim 21 wherein the second buffer layer of graded aluminum oxynitride is fabricated to achieve a low dislocation density.
References Cited (Backward Citations)
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2001-04-20 | 2001-10-20 | 2002-04-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-04-20 | 2005-10-20 | 2006-04-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-04-20 | 2009-10-20 | 2010-04-21 | $7700.00 | Window Closed / Lapsed |