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US5736267A
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Transparent conductive film and method for its production, and sputtering target
Assignee: AGC Inc
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Filing: 1995-08-16
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Granted: 1998-04-07
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Expires: 2015-08-16
Abstract
Abstract A transparent conductive film of a zinc oxide type containing gallium and silicon, which contains silicon in an amount of from 0.01 to 1.5 mol % in terms of SiO2.
Inventors
- 👤 Akira Mitsui
- 👤 Kazuo Sato
- 👤 Masami Miyazaki
- 👤 Junichi Ebisawa
- 👤 Yasuo Hayashi
- 👤 Masao Higeta
- 👤 Katsuaki Aikawa
- 👤 Atsushi Hayashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 01:21
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/06; C23C14/08; C23C14/0641; C23C14/0676; C23C14/086; C23C14/22; C23C14/34; C23C14/3407; C23C14/3414; Y; Y10; Y10S; Y10S428/00; Y10S428/91; Y10T; Y10T428/00; Y10T428/31504; Y10T428/31652; Y10T428/31667
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
50 words
A transparent conductive film, comprising zinc oxide containing gallium and silicon, said silicon in an amount of from 0.01 to 1.5 mol % in terms of SiO 2 , and said gallium in an amount of from 0.2 to 8.0 mol % in terms of Ga 2 O 3 .
Claim 2
Dependent Claim
50 words
A transparent conductive film, comprising zinc oxide containing gallium and silicon, said silicon in an amount of from 0.01 to 1.5 mol % in terms of SiO 2 , and said gallium in an amount of from 0.2 to 8.0 mol % in terms of Ga 2 O 3 .
Claim 3
Dependent Claim
22 words
The conductive film of claim 1, wherein said transparent conductive film has a specific resistance of at most 10 -2 Ω cm.
References Cited (Backward Citations)
US4142124A
Cited
US4336120A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-04-06 | 2001-10-06 | 2002-04-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-04-06 | 2005-10-06 | 2006-04-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-04-06 | 2009-10-06 | 2010-04-07 | $7700.00 | Window Closed / Lapsed |