Patent US4459223A successfully refreshed from Google Patents.
Patent US5728495A successfully refreshed from Google Patents.
US5728495A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Scanning exposure method and apparatus
Assignee: Nikon Corp
•
Filing: 1995-12-01
•
Granted: 1998-03-17
•
Expires: 2015-12-01
Abstract
Abstract A scanning exposure method is arranged to illuminate a mask with light pulses and to synchronously scan the mask and a photosensitive substrate so as to effect scanning exposure of a pattern image of the mask on the photosensitive substrate, and comprises detecting energy amounts of light pulses illuminating the mask during the scanning exposure, successively calculating an integrated amount of light of the last N pulses (N is an integer more than one) for every unit pulse number, based on the energy amounts thus detected and adjusting an exposure dose on the photosensitive substrate in accordance with a sequence of integrated amounts of light thus calculated.
Inventors
- 👤 Ken Ozawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 10:12
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70216; G03F7/70358; G03F7/20; G03F7/70058; G03F7/70133; G03F7/70483; G03F7/7055; G03F7/70558
Claims Analysis
Total Claims: 35
Claim 1
Independent Claim
88 words
A scanning exposure method comprising the steps of: synchronously moving a mask and a substrate while illuminating the mask with pulsed light so that each of a plurality of points on said substrate is irradiated with N (N being an integer) light pulses; obtaining an integrated light amount of successive N light pulses plural times during the synchronous movement of said mask and said substrate; and performing an adjustment of an exposure operation which is to be subsequently effected, based on a plurality of obtained integrated light amounts.
Claim 2
Dependent Claim
88 words
A scanning exposure method comprising the steps of: synchronously moving a mask and a substrate while illuminating the mask with pulsed light so that each of a plurality of points on said substrate is irradiated with N (N being an integer) light pulses; obtaining an integrated light amount of successive N light pulses plural times during the synchronous movement of said mask and said substrate; and performing an adjustment of an exposure operation which is to be subsequently effected, based on a plurality of obtained integrated light amounts.
Claim 3
Dependent Claim
51 words
A scanning exposure method according to claim 1, wherein said adjustment of the exposure operation comprises at least one of an adjustment of the energy of said pulsed light and an adjustment of the number of light pulses with which each of said plurality of points on said substrate is irradiated.
Claim 4
Dependent Claim
31 words
A scanning exposure method according to claim 2, wherein said adjustment of the energy of said pulsed light comprises changing voltage applied to a light source which emits said pulsed light.
Claim 5
Dependent Claim
43 words
A scanning exposure method according to claim 2, wherein said adjustment of the number of light pulses with which each of said plurality of points on said substrate is irradiated comprises changing a speed of synchronous movement of said mask and said substrate.
Claim 6
Dependent Claim
51 words
A scanning exposure method according to claim 1, wherein said integrated light amount of successive N light pulses is obtained plural times during scanning exposure of one shot area on said substrate, and said adjustment of the exposure operation is effected for another shot area that follows said one shot area.
Claim 7
Dependent Claim
48 words
A scanning exposure method according to claim 1, wherein both of said steps of obtaining an integrated light amount of successive N light pulses plural times and of performing an adjustment of an exposure operation are effected during scanning exposure of a same shot area on said substrate.
Claim 8
Dependent Claim
39 words
A scanning exposure method according to claim 1, wherein the number N of light pulses with which each of said plurality of points on said substrate is irradiated is determined based on variation of energy of the light pulses.
Claim 9
Dependent Claim
51 words
A scanning exposure method according to claim 1, wherein the number N of light pulses with which each of said plurality of points on said substrate is irradiated is determined based on a dosage repeatability of an integrated exposure dose required for each of said plurality of points on said substrate.
Claim 10
Dependent Claim
123 words
A scanning exposure method comprising the steps of: synchronously moving a mask and a substrate while illuminating the mask with pulsed light so that each of a plurality of points on said substrate is irradiated with N (N being an integer) light pulses; obtaining integrated light amounts of N light pulses for each of a plurality of positions on said substrate which are spaced apart from each other in a substrate movement direction, during the synchronous movement of said mask and said substrate, wherein the integrated light amounts of N light pulses are not uniform throughout said plurality of positions; and performing an adjustment of an exposure operation which is to be subsequently effected, based on a plurality of obtained integrated light amounts.
Claim 11
Dependent Claim
123 words
A scanning exposure method comprising the steps of: synchronously moving a mask and a substrate while illuminating the mask with pulsed light so that each of a plurality of points on said substrate is irradiated with N (N being an integer) light pulses; obtaining integrated light amounts of N light pulses for each of a plurality of positions on said substrate which are spaced apart from each other in a substrate movement direction, during the synchronous movement of said mask and said substrate, wherein the integrated light amounts of N light pulses are not uniform throughout said plurality of positions; and performing an adjustment of an exposure operation which is to be subsequently effected, based on a plurality of obtained integrated light amounts.
Claim 12
Dependent Claim
51 words
A scanning exposure method according to claim 9, wherein said adjustment of the exposure operation comprises at least one of an adjustment of the energy of said pulsed light and an adjustment of the number of light pulses with which each of said plurality of points on said substrate is irradiated.
Claim 13
Dependent Claim
31 words
A scanning exposure method according to claim 10, wherein said adjustment of the energy of said pulsed light comprises changing voltage applied to a light source which emits said pulsed light.
Claim 14
Dependent Claim
43 words
A scanning exposure method according to claim 10, wherein said adjustment of the number of light pulses with which each of said plurality of points on said substrate is irradiated comprises changing a speed of synchronous movement of said mask and said substrate.
Claim 15
Dependent Claim
58 words
A scanning exposure method according to claim 9, wherein said integrated light amounts of N light pulses for each of the plurality of positions on said substrate are obtained during scanning exposure of one shot area on said substrate, and said adjustment of the exposure operation is effected for another shot area that follows said one shot area.
Claim 16
Dependent Claim
53 words
A scanning exposure method according to claim 9, wherein both of said steps of obtaining integrated light amounts of N light pulses for each of the plurality of positions on said substrate and of performing adjustment of the exposure operation are effected during scanning exposure of a same shot area on said substrate.
Claim 17
Dependent Claim
39 words
A scanning exposure method according to claim 9, wherein the number N of light pulses with which each of said plurality of points on said substrate is irradiated is determined based on variation of energy of the light pulses.
Claim 18
Dependent Claim
51 words
A scanning exposure method according to claim 9, wherein the number N of light pulses with which each of said plurality of points on said substrate is irradiated is determined based on a dosage repeatability of an integrated exposure dose required for each of said plurality of points on said substrate.
Claim 19
Dependent Claim
93 words
A scanning exposure method comprising the steps of: synchronously moving a mask and a substrate while illuminating the mask with pulsed light so that each point in a shot area on said substrate is irradiated with N (N being an integer) light pulses; obtaining an integrated light amount of successive N light pulses during scanning exposure of said shot area by the synchronous movement of said mask and said substrate; and performing an adjustment of an exposure operation based on the obtained integrated light amount, during the scanning exposure of said shot area.
Claim 20
Dependent Claim
93 words
A scanning exposure method comprising the steps of: synchronously moving a mask and a substrate while illuminating the mask with pulsed light so that each point in a shot area on said substrate is irradiated with N (N being an integer) light pulses; obtaining an integrated light amount of successive N light pulses during scanning exposure of said shot area by the synchronous movement of said mask and said substrate; and performing an adjustment of an exposure operation based on the obtained integrated light amount, during the scanning exposure of said shot area.
Claim 21
Dependent Claim
51 words
A scanning exposure method according to claim 17, wherein said adjustment of the exposure operation comprises at least one of an adjustment of the energy of said pulsed light and an adjustment of the number of light pulses with which each of a plurality of points on said substrate is irradiated.
Claim 22
Dependent Claim
31 words
A scanning exposure method according to claim 18, wherein said adjustment of the energy of said pulsed light comprises changing voltage applied to a light source which emits said pulsed light.
Claim 23
Dependent Claim
43 words
A scanning exposure method according to claim 18, wherein said adjustment of the number of light pulses with which each of said plurality of points on said substrate is irradiated includes changing a speed of synchronous movement of said mask and said substrate.
Claim 24
Dependent Claim
38 words
A scanning exposure method according to claim 17, wherein the number of light pulses with which each of a plurality of points on said substrate is irradiated is determined based on variation of energy of the light pulses.
Claim 25
Dependent Claim
50 words
A scanning exposure method according to claim 17, wherein the number of light pulses with which each of a plurality of points on said substrate is irradiated is determined based on a dosage repeatability of an integrated exposure dose required for each of said plurality of points on said substrate.
Claim 26
Dependent Claim
91 words
A scanning exposure method comprising the steps of: synchronously moving a mask and a substrate while illuminating the mask with continuous exposure light so that each of a plurality of points on said substrate is irradiated with the exposure light for a predetermined time; obtaining an integrated light amount with which said substrate is irradiated during said predetermined time plural times while said mask and said substrate are synchronously moved; and performing an adjustment of an exposure operation which is subsequently effected, based on a plurality of obtained integrated light amounts.
Claim 27
Dependent Claim
91 words
A scanning exposure method comprising the steps of: synchronously moving a mask and a substrate while illuminating the mask with continuous exposure light so that each of a plurality of points on said substrate is irradiated with the exposure light for a predetermined time; obtaining an integrated light amount with which said substrate is irradiated during said predetermined time plural times while said mask and said substrate are synchronously moved; and performing an adjustment of an exposure operation which is subsequently effected, based on a plurality of obtained integrated light amounts.
Claim 28
Dependent Claim
22 words
A scanning exposure method according to claim 23, wherein said integrated light amount is obtained plural times with a predetermined time interval.
Claim 29
Dependent Claim
23 words
A scanning exposure method according to claim 24, wherein said integrated light amount is obtained every time said substrate moves a predetermined distance.
Claim 30
Dependent Claim
102 words
A scanning exposure method comprising the steps of: synchronously moving a mask and a substrate while illuminating the mask with continuous exposure light so that each point in a shot area on said substrate is irradiated with the exposure light for a predetermined time; obtaining an integrated light amount of exposure light with which said substrate is irradiated during said predetermined time while said shot area is scanningly exposed by the synchronous movement of said mask and said substrate; and performing an adjustment of an exposure operation based on the obtained integrated light amount, during the scanning exposure of said shot area.
Claim 31
Dependent Claim
102 words
A scanning exposure method comprising the steps of: synchronously moving a mask and a substrate while illuminating the mask with continuous exposure light so that each point in a shot area on said substrate is irradiated with the exposure light for a predetermined time; obtaining an integrated light amount of exposure light with which said substrate is irradiated during said predetermined time while said shot area is scanningly exposed by the synchronous movement of said mask and said substrate; and performing an adjustment of an exposure operation based on the obtained integrated light amount, during the scanning exposure of said shot area.
Claim 32
Dependent Claim
117 words
A scanning exposure method comprising the steps of synchronously moving a mask and a substrate while illuminating the mask with exposure light so that an image of a pattern of said mask is formed on said substrate; obtaining an integrated light amount of exposure light with which said substrate is irradiated while said substrate is moved by a predetermined distance during the synchronous movement of said mask and said substrate, said predetermined distance being substantially equal to a width in the substrate movement direction, of an exposure area formed on said substrate by said exposure light; and performing an adjustment of an exposure operation which is to be subsequently effected, based on the obtained integrated light amount.
Claim 33
Dependent Claim
117 words
A scanning exposure method comprising the steps of synchronously moving a mask and a substrate while illuminating the mask with exposure light so that an image of a pattern of said mask is formed on said substrate; obtaining an integrated light amount of exposure light with which said substrate is irradiated while said substrate is moved by a predetermined distance during the synchronous movement of said mask and said substrate, said predetermined distance being substantially equal to a width in the substrate movement direction, of an exposure area formed on said substrate by said exposure light; and performing an adjustment of an exposure operation which is to be subsequently effected, based on the obtained integrated light amount.
Claim 34
Dependent Claim
111 words
A scanning exposure method comprising the steps of: synchronously moving a mask and a substrate while illuminating the mask with continuous exposure light so that each of a plurality of points on said substrate is irradiated with the exposure light for a predetermined time; obtaining, for each of irradiated points on said substrate which are spaced apart from each other in the substrate movement direction, an integrated light amount of the exposure light radiated thereon during said predetermined time, while said mask and said substrate are synchronously moved; and performing an adjustment of an exposure operation which is to be subsequently effected, based on a plurality of obtained integrated light amounts.
Claim 35
Dependent Claim
111 words
A scanning exposure method comprising the steps of: synchronously moving a mask and a substrate while illuminating the mask with continuous exposure light so that each of a plurality of points on said substrate is irradiated with the exposure light for a predetermined time; obtaining, for each of irradiated points on said substrate which are spaced apart from each other in the substrate movement direction, an integrated light amount of the exposure light radiated thereon during said predetermined time, while said mask and said substrate are synchronously moved; and performing an adjustment of an exposure operation which is to be subsequently effected, based on a plurality of obtained integrated light amounts.
References Cited (Backward Citations)
US4624551A
Cited
US4712910A
Cited
US4970546A
Cited
US5191374A
Cited
US5194893A
Cited
US5097291A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-03-16 | 2001-09-15 | 2002-03-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-03-16 | 2005-09-15 | 2006-03-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-03-16 | 2009-09-15 | 2010-03-17 | $7700.00 | Window Closed / Lapsed |