Exposure method and apparatus for semiconductor fabrication equipment

Claim 2

An exposure apparatus used in fabrication of semiconductor devices to control a mercury-vapor lamp for projecting light onto a substrate to be exposed, said apparatus comprising: (a) supply means for supplying power to said mercury-vapor lamp whereby said lamp projects light of an intensity corresponding to the power supplied thereto by said supply means; (b) drive means for driving said supply means; and (c) control means for controlling said drive means to cause said supply means to supply a first power and a second power lower than said first power to said lamp, said control means controlling said drive means in such a manner that an average power supplied to said lamp over a whole exposure cycle, including an exposure period in which said first power is supplied to said lamp and an interval between exposure periods in which said second power is supplied to said lamp, attains a predetermined value, said predetermined value being not less than a rated input power and being less than a maximum allowable instantaneous input power and said second power being not less than a minimum instantaneous input power, wherein said control means includes means for computing said second power in dependence on a ratio between said exposure period and said interval and said first power.

Claim 3

In an exposure control apparatus including a light onto an object to be exposed, and shutter means for opening and closing a light path between said light source and said object to control an amount of light to which said object is exposed, the improvement comprising: (a) means for detecting an intensity of the light projected from said light source through said shutter means and generating a light intensity signal indicative of said detected light intensity; (b) supply means for supply power to said light source whereby said light source projects light of an intensity corresponding to the power supplied thereto by said supply means; (c) shutter control means for controlling a closing operation performed by said shutter means whereby said light path is closed in dependence on said light intensity signal signal and for controlling an opening operation performed by said shutter means whereby said light path is opened; and (d) power control means responsive to said shutter control means for causing said supply means to selectively supply a first power or a second power lower than said first power to said light source, said power control means controlling said supply means in such a manner that the power supplied to said light source equals said first power in response to said shutter means opening said light path, and said power control means causing said power supply means to supply said second power to said light source in response to said shutter means closing said light path, wherein said control means controls said supply means in such a manner that an average value of power supplied to said light source over a whole period of time, including a first time period in which said first power is supplied to said light source and a second time period in which said second power is supplied, attains a predetermined value.

Claim 4

In an exposure control apparatus including a light onto an object to be exposed, and shutter means for opening and closing a light path between said light source and said object to control an amount of light to which said object is exposed, the improvement comprising: (a) means for detecting an intensity of the light projected from said light source through said shutter means and generating a light intensity signal indicative of said detected light intensity; (b) supply means for supply power to said light source whereby said light source projects light of an intensity corresponding to the power supplied thereto by said supply means; (c) shutter control means for controlling a closing operation performed by said shutter means whereby said light path is closed in dependence on said light intensity signal signal and for controlling an opening operation performed by said shutter means whereby said light path is opened; and (d) power control means responsive to said shutter control means for causing said supply means to selectively supply a first power or a second power lower than said first power to said light source, said power control means controlling said supply means in such a manner that the power supplied to said light source equals said first power in response to said shutter means opening said light path, and said power control means causing said power supply means to supply said second power to said light source in response to said shutter means closing said light path, wherein said control means controls said supply means in such a manner that an average value of power supplied to said light source over a whole period of time, including a first time period in which said first power is supplied to said light source and a second time period in which said second power is supplied, attains a predetermined value.

Claim 5

An apparatus according to claim 2, wherein said predetermined value is substantially equal to a rated input power of said light source.

Claim 6

An apparatus according to claim 2, wherein said power control means includes means for computing said second power in accordance with a ratio between said first and second time periods and said first power.

Claim 7

An exposure control apparatus provided with a mercury vapor lamp for projecting radiation onto an object to be exposed, and shutter means for opening and closing a radiation path between said mercury-vapor lamp and said object to control an amount of radiation to which said object is exposed, said apparatus comprising: (a) supply means for supplying power to said mercury-vapor lamp, said mercury-vapor lamp projecting radiation of an intensity corresponding to the power supplied thereto by said supply means; (b) shutter control means for generating an opening signal and a closing signal, said shutter means being responsive to said opening signal to perform an opening operation so that said radiation path is opened and being responsive to said closing signal to perform a closing operation so that said radiation path is closed; and (c) power control means for causing said supply means to supply a first power to said mercury-vapor lamp in response to said opening operation and for causing said supply means to supply a second power, which is lower than said first power, to said mercury-vapor lamp in response to said closing operation, said power control means controlling said supply means so that said first power is more than a rated input power of said mercury-vapor lamp.

Claim 8

An exposure control apparatus provided with a mercury vapor lamp for projecting radiation onto an object to be exposed, and shutter means for opening and closing a radiation path between said mercury-vapor lamp and said object to control an amount of radiation to which said object is exposed, said apparatus comprising: (a) supply means for supplying power to said mercury-vapor lamp, said mercury-vapor lamp projecting radiation of an intensity corresponding to the power supplied thereto by said supply means; (b) shutter control means for generating an opening signal and a closing signal, said shutter means being responsive to said opening signal to perform an opening operation so that said radiation path is opened and being responsive to said closing signal to perform a closing operation so that said radiation path is closed; and (c) power control means for causing said supply means to supply a first power to said mercury-vapor lamp in response to said opening operation and for causing said supply means to supply a second power, which is lower than said first power, to said mercury-vapor lamp in response to said closing operation, said power control means controlling said supply means so that said first power is more than a rated input power of said mercury-vapor lamp.

Claim 9

An apparatus according to claim 5, wherein said power control means controls said supply means so that an average power supplied to said mercury-vapor lamp over a whole cycle, including an exposure period in which said first power is supplied to said mercury-vapor lamp and an interval between said exposure periods in which said second power is supplied to said lamp, attains a predetermined value.

Claim 10

An apparatus according to claim 6, wherein said predetermined value is not less than said rated input power and is less than a maximum allowable instantaneous input power of said mercury-vapor lamp.

Claim 11

An apparatus according to claim 7, wherein said second power is not less than a minimum instantaneous input power of said mercury-vapor lamp.

Claim 12

An apparatus according to claim 5, wherein said power control means sets said first power and said second power so that an average power supplied to said mercury-vapor lamp over a whole cycle, including an exposure period in which said first power is supplied to said mercury-vapor lamp an interval between which said second power is supplied to said mercury-vapor lamp, attains a predetermined value.

Claim 13

An exposure control apparatus provided with a mercury-vapor lamp for projecting radiation onto an object to be exposed, and shutter means for opening and closing a radiation path between said mercury-vapor lamp and said object to control an amount of radiation to which said object is exposed, said apparatus comprising: (a) supply means for supplying power to said mercury-vapor lamp, said mercury-vapor lamp projecting radiation of an intensity corresponding to the power supplied thereto by said supply means; (b) shutter control means for generating an opening signal and closing signal, said shutter means being responsive to said opening signal to perform an opening operation so that said radiation path is opened and being responsive to said closing signal to perform a closing operation so that said radiation path is closed; and (c) power control means for causing said supply means to supply a first power to said mercury-vapor lamp in response to said opening operation and for causing said supply means to supply a second power, which is lower than said first power to said mercury-vapor lamp in response to said closing operation; (d) said power control means setting said first power and said second power so than an average power supplied to said mercury-vapor lamp over a whole cycle, including an exposure period in which said first power is supplied to said mercury-vapor lamp and an interval between said exposure periods in which said second power is supplied to said mercury-vapor lamp, attains a predetermined value.

Claim 14

An exposure control apparatus provided with a mercury-vapor lamp for projecting radiation onto an object to be exposed, and shutter means for opening and closing a radiation path between said mercury-vapor lamp and said object to control an amount of radiation to which said object is exposed, said apparatus comprising: (a) supply means for supplying power to said mercury-vapor lamp, said mercury-vapor lamp projecting radiation of an intensity corresponding to the power supplied thereto by said supply means; (b) shutter control means for generating an opening signal and closing signal, said shutter means being responsive to said opening signal to perform an opening operation so that said radiation path is opened and being responsive to said closing signal to perform a closing operation so that said radiation path is closed; and (c) power control means for causing said supply means to supply a first power to said mercury-vapor lamp in response to said opening operation and for causing said supply means to supply a second power, which is lower than said first power to said mercury-vapor lamp in response to said closing operation; (d) said power control means setting said first power and said second power so than an average power supplied to said mercury-vapor lamp over a whole cycle, including an exposure period in which said first power is supplied to said mercury-vapor lamp and an interval between said exposure periods in which said second power is supplied to said mercury-vapor lamp, attains a predetermined value.

Claim 15

An exposure control apparatus provided with a mercury-vapor lamp for projecting radiation onto an object to be exposed, and shutter means for opening and closing a radiation path between said mercury-vapor lamp and said object to control an amount of radiation to which said object is exposed, said apparatus comprising: (a) supply means for supplying power to said mercury-vapor lamp, said mercury-vapor lamp projecting radiation of an intensity corresponding to the power supplied thereto by said supply means; (b) shutter control means for generating an opening signal and a closing signal, said shutter means being responsive to said opening signal to perform an opening operation so that said radiation path is opened and being responsive to said closing signal to perform a closing operation so that said radiation path is closed; and (c) power control means for causing said supply means to supply a first power to said mercury-vapor lamp in response to said opening operation and for causing said supply means to supply a second power, which is lower than said first power, to said mercury-vapor lamp in response to said closing operation, said power control means controlling said supply means so that said second power is more than a minimum allowable input power of said mercury-vapor lamp.

Claim 16

An exposure control apparatus provided with a mercury-vapor lamp for projecting radiation onto an object to be exposed, and shutter means for opening and closing a radiation path between said mercury-vapor lamp and said object to control an amount of radiation to which said object is exposed, said apparatus comprising: (a) supply means for supplying power to said mercury-vapor lamp, said mercury-vapor lamp projecting radiation of an intensity corresponding to the power supplied thereto by said supply means; (b) shutter control means for generating an opening signal and a closing signal, said shutter means being responsive to said opening signal to perform an opening operation so that said radiation path is opened and being responsive to said closing signal to perform a closing operation so that said radiation path is closed; and (c) power control means for causing said supply means to supply a first power to said mercury-vapor lamp in response to said opening operation and for causing said supply means to supply a second power, which is lower than said first power, to said mercury-vapor lamp in response to said closing operation, said power control means controlling said supply means so that said second power is more than a minimum allowable input power of said mercury-vapor lamp.

Claim 17

An apparatus according to claim 11, wherein said power control means sets said first power and said second power so that an average power supplied to said mercury-vapor lamp over a whole cycle, including an exposure period in which said first power is supplied to said mercury-vapor lamp and an interval between said exposure periods in which said second power is supplied to said mercury-vapor lamp, attains a predetermined value.

Claim 18

An exposure control apparatus for projecting a predetermined pattern, which is represented by radiation from a radiation source, onto each of a plurality of areas of a substrate, said apparatus comprising: (a) shutter means for opening and closing a radiation path between said radiation source and said substrate to control an amount of radiation to which said substrate is exposed; (b) supply means for supplying power to said radiation source, said radiation source projecting radiation of an intensity corresponding to the power supplied thereto by said supply means; (c) shutter control means for generating an opening signal and a closing signal, said shutter means being responsive to said opening signal to perform an opening operation so that said radiation path is opened and being responsive to said closing signal to perform a closing operation so that said radiation path is closed; (d) moving means responsive to said closing operation for moving a projected area onto which is projected said predetermined pattern from one of said plurality of areas to another of said plurality of areas; and (e) power control means for causing said supply means to supply a first power to said radiation source in response to said opening operation and for causing said supply means to supply a second power, which is lower than said first power, to said radiation source in response to said closing operation.

Claim 19

An exposure control apparatus for projecting a predetermined pattern, which is represented by radiation from a radiation source, onto each of a plurality of areas of a substrate, said apparatus comprising: (a) shutter means for opening and closing a radiation path between said radiation source and said substrate to control an amount of radiation to which said substrate is exposed; (b) supply means for supplying power to said radiation source, said radiation source projecting radiation of an intensity corresponding to the power supplied thereto by said supply means; (c) shutter control means for generating an opening signal and a closing signal, said shutter means being responsive to said opening signal to perform an opening operation so that said radiation path is opened and being responsive to said closing signal to perform a closing operation so that said radiation path is closed; (d) moving means responsive to said closing operation for moving a projected area onto which is projected said predetermined pattern from one of said plurality of areas to another of said plurality of areas; and (e) power control means for causing said supply means to supply a first power to said radiation source in response to said opening operation and for causing said supply means to supply a second power, which is lower than said first power, to said radiation source in response to said closing operation.

Claim 20

An apparatus according to claim 13, wherein said moving means moves said projected area in said interval.

Claim 21

An apparatus according to claim 14, wherein said power control means controls said supply means so that an average power supplied to said radiation source over a whole cycle, including an exposure period in which said first power is supplied to said radiation source and an interval between said exposure periods in which said second power is supplied to said lamp, attains a predetermined value.

Claim 22

An apparatus according to claim 14, wherein said radiation source has a mercury-vapor lamp, said power control means controlling said supply means so that said first power is more than a rated input power of said mercury-vapor lamp.

Claim 23

An apparatus according to claim 14, wherein said power control means sets said first power and said second power so that an average power supplied to said radiation source over a whole cycle, including an exposure in which said first power is supplied to said radiation source and an interval between said exposure periods in which said second power is supplied to said radiation source, attains a predetermined value.

Claim 24

An exposure control apparatus provided with a radiation source for projecting radiation onto an object to be exposed, and shutter means for opening and closing a radiation path between said radiation source and said object to control an amount of radiation to which said object is exposed, said apparatus comprising: (a) supply means for supplying power to said radiation source, said radiation source projecting radiation of an intensity corresponding to the power supplied thereto by said supply means; (b) shutter control means for generating an opening signal and a closing signal, said shutter means being responsive to said opening signal to perform an opening operation so that said radiation path is opened and being responsive to said closing signal to perform a closing operation so that said radiation path is closed; and (c) power control means for causing said supply means to supply a first power to said radiation source prior to the opening of said shutter means and for causing said supply means to supply a second power, which is lower than said first power, to said radiation source following a termination of the closing of said shutter means, said power control means controlling said supply means so that said second power is more than a minimum power which permits said radiation source to maintain projecting radiation.

Claim 25

An exposure control apparatus provided with a radiation source for projecting radiation onto an object to be exposed, and shutter means for opening and closing a radiation path between said radiation source and said object to control an amount of radiation to which said object is exposed, said apparatus comprising: (a) supply means for supplying power to said radiation source, said radiation source projecting radiation of an intensity corresponding to the power supplied thereto by said supply means; (b) shutter control means for generating an opening signal and a closing signal, said shutter means being responsive to said opening signal to perform an opening operation so that said radiation path is opened and being responsive to said closing signal to perform a closing operation so that said radiation path is closed; and (c) power control means for causing said supply means to supply a first power to said radiation source prior to the opening of said shutter means and for causing said supply means to supply a second power, which is lower than said first power, to said radiation source following a termination of the closing of said shutter means, said power control means controlling said supply means so that said second power is more than a minimum power which permits said radiation source to maintain projecting radiation.

Claim 26

An apparatus according to claim 18, wherein said power control means controls said supply means so that an average power supplied to said radiation source over a whole cycle, including an exposure period in which said first power is supplied to said radiation source and an interval between said exposure periods in which said second power is supplied to said lamp, attains a predetermined value.

Claim 27

An apparatus according to claim 19 wherein said predetermined value is less than a maximum which permits said radiation source to maintain projecting radiation.

Claim 28

An apparatus according to claim 18, wherein said power control means sets said first power and said second power so that an average power supplied to said mercury-vapor lamp over a whole cycle, including an exposure period in which said first power is supplied to said radiation source and an interval between which said second power is supplied to said radiation source, attains a predetermined value.