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US5727685A Expired / Lapsed US ⏱️ 0.0 years remaining

Reticle container with corner holding

Assignee: ASML Holding NV
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Filing: 1996-07-24
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Granted: 1998-03-17
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Expires: 2016-07-24
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Abstract

Abstract A cassette or box for containing and holding a planar substrate such as a reticle having a clamp bar coupled to corner supports by a spring or flexure and a linkage. A clamp bar is pivotally attached to bottom corner supports and a spring or flexure and linked to a top corner support, such that movement of the load bar causes the corner supports to pivot away from a reticle being held only at the corners. An elevation bar is also used to preposition the reticle in one direction. The present invention greatly facilitates the positioning and handling of a reticle as used in photolithography to manufacture semiconductor devices. Additionally, the present invention greatly reduces particulate contamination.

Inventors

  • 👤 Joseph Laganza
  • 👤 Hoon-Yeng Yap
  • 👤 Teodorico A. Cruz
  • 👤 Erik Magnussen
  • 👤 Craig S. Dunning

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-31 20:25
CPC Classifications
H; H10; H10P; H10P76/00; H10P72/00; H10P72/10; H10P72/19; H10P72/1902; G; G03; G03F; G03F1/00; G03F1/66; G03F7/00; G03F7/70; G03F7/70691; H10P72/1906; H10P72/1911; H10P72/1912; H10P72/1914; H10P72/1921

Claims Analysis

Total Claims: 25
Claim 1
Independent Claim 67 words
A reticle box comprising: a body; a clamp bar; a plurality of corner supports attached to said clamp bar, said plurality of corner supports arranged to hold a planar substrate; and a spring attached at one end to at least one of said plurality of corner supports and at another end to a support, whereby when said clamp bar is moved, said plurality of corner supports move.
Claim 2
Dependent Claim 67 words
A reticle box comprising: a body; a clamp bar; a plurality of corner supports attached to said clamp bar, said plurality of corner supports arranged to hold a planar substrate; and a spring attached at one end to at least one of said plurality of corner supports and at another end to a support, whereby when said clamp bar is moved, said plurality of corner supports move.
Claim 3
Dependent Claim 13 words
A reticle box as in claim 1 wherein: said spring is a flexure.
Claim 4
Dependent Claim 38 words
A reticle box as in claim 1 further comprising: an elevation bar movably connected to said body; and reticle supports attached to said elevation bar, whereby the reticle can be located in a predetermined position in one direction.
Claim 5
Dependent Claim 86 words
A reticle box comprising: a body; a clamp bar; a plurality of corner supports attached to said clamp bar, two of said plurality of corner supports pivotally attached directly to said clamp bar and one of said plurality of corner supports attached through a linkage to said clamp bar; and a spring attached at one end to at least one of said plurality of corner supports and at another end to a support, whereby when said clamp bar is moved, said plurality of corner supports move.
Claim 6
Dependent Claim 86 words
A reticle box comprising: a body; a clamp bar; a plurality of corner supports attached to said clamp bar, two of said plurality of corner supports pivotally attached directly to said clamp bar and one of said plurality of corner supports attached through a linkage to said clamp bar; and a spring attached at one end to at least one of said plurality of corner supports and at another end to a support, whereby when said clamp bar is moved, said plurality of corner supports move.
Claim 7
Dependent Claim 97 words
A container for holding a planar substrate comprising: a body; a clamp bar having a first and second arm; a first corner support mounted on the first arm; a second corner support mounted on the second arm; a third corner support; a linkage connecting said clamp bar to said third corner support; and a spring coupled to said clamp bar biasing said first, second, and third corner supports into a predetermined position, whereby when said clamp bar is moved against said spring, said first, second, and third corner supports move away from corners of a planar substrate.
Claim 8
Dependent Claim 97 words
A container for holding a planar substrate comprising: a body; a clamp bar having a first and second arm; a first corner support mounted on the first arm; a second corner support mounted on the second arm; a third corner support; a linkage connecting said clamp bar to said third corner support; and a spring coupled to said clamp bar biasing said first, second, and third corner supports into a predetermined position, whereby when said clamp bar is moved against said spring, said first, second, and third corner supports move away from corners of a planar substrate.
Claim 9
Dependent Claim 17 words
A container for holding a planar substrate as in claim 5 wherein: said spring is a flexure.
Claim 10
Dependent Claim 44 words
A container for holding a planar substrate as in claim 5 wherein: said linkage includes a lever attached to said clamp bar; a connector attached to said lever; and an actuator attached to said connector, said actuator being connected to said third corner support.
Claim 11
Dependent Claim 42 words
A container for holding a planar substrate as in claim 5 further comprising: an elevation bar movably connected to said body; and reticle supports attached to said elevation bar, whereby a reticle can be located in a predetermined position in one direction.
Claim 12
Dependent Claim 23 words
A container for holding a planar substrate as in claim 8 wherein: said elevation bar is connected to said body by a flexure.
Claim 13
Dependent Claim 26 words
A container for holding a planar substrate as in claim 5 further comprising: a cover attached to said body; and a latch attached to said cover.
Claim 14
Dependent Claim 253 words
A reticle box comprising: a body; a clamp bar having a first and second arm; a first corner support mounted on the first arm; a first flexure having a first end and a second end, the first end of said first flexure attached to said first corner support and the second end of said first flexure attached to a support, whereby when said clamp bar is pulled away from said body, said first corner support moves against a biasing force provided by said first flexure; a second corner support mounted on the second arm; a second flexure having a first end and a second end, the first end of said second flexure attached to said second corner support and the second end of said second flexure attached to a support, whereby when said clamp bar is pulled away from said body, said second corner support moves against a biasing force provided by said second flexure; a lever attached to the second arm; a connector attached to said lever; an actuator pivotally connected at one end to said body, and to said connector at another end; a support arm pivotally connected at one end to said body, and to said actuator; a third corner support attached to a distal end of said support arm; and a cover attached to said body, whereby when said clamp bar is moved away from said body the first, second, and third corner supports are caused to move away from corners of a reticle placed within the reticle box.
Claim 15
Dependent Claim 253 words
A reticle box comprising: a body; a clamp bar having a first and second arm; a first corner support mounted on the first arm; a first flexure having a first end and a second end, the first end of said first flexure attached to said first corner support and the second end of said first flexure attached to a support, whereby when said clamp bar is pulled away from said body, said first corner support moves against a biasing force provided by said first flexure; a second corner support mounted on the second arm; a second flexure having a first end and a second end, the first end of said second flexure attached to said second corner support and the second end of said second flexure attached to a support, whereby when said clamp bar is pulled away from said body, said second corner support moves against a biasing force provided by said second flexure; a lever attached to the second arm; a connector attached to said lever; an actuator pivotally connected at one end to said body, and to said connector at another end; a support arm pivotally connected at one end to said body, and to said actuator; a third corner support attached to a distal end of said support arm; and a cover attached to said body, whereby when said clamp bar is moved away from said body the first, second, and third corner supports are caused to move away from corners of a reticle placed within the reticle box.
Claim 16
Dependent Claim 38 words
A reticle box as in claim 11 further comprising: an elevation bar movably connected to said body; and reticle supports attached to said elevation bar, whereby a reticle can be located in a predetermined position in one direction.
Claim 17
Dependent Claim 19 words
A reticle box as in claim 12 wherein: said elevation bar is connected to said body by a flexure.
Claim 18
Dependent Claim 15 words
A reticle box as in claim 11 further comprising: a latch attached to said cover.
Claim 19
Dependent Claim 84 words
A reticle box comprising: a body; a clamp bar; a plurality of corner supports coupled to said clamp bar; a spring biasing said plurality of corner supports into a predetermined position; and a locking mechanism coupled to at least one of said plurality of corner supports, said locking mechanism preventing movement of the at least one of said plurality of corner supports until being released, whereby when said locking mechanism is released and said clamp bar is moved, said plurality of corner supports move.
Claim 20
Dependent Claim 84 words
A reticle box comprising: a body; a clamp bar; a plurality of corner supports coupled to said clamp bar; a spring biasing said plurality of corner supports into a predetermined position; and a locking mechanism coupled to at least one of said plurality of corner supports, said locking mechanism preventing movement of the at least one of said plurality of corner supports until being released, whereby when said locking mechanism is released and said clamp bar is moved, said plurality of corner supports move.
Claim 21
Dependent Claim 15 words
A reticle box as in claim 15 wherein: said locking mechanism is a spring tab.
Claim 22
Dependent Claim 30 words
A reticle box as in claim 15 wherein: said locking mechanism is a linkage coupled to said clamp bar and the at least one of said plurality of corner supports.
Claim 23
Dependent Claim 19 words
A reticle box as in claim 15 wherein: said locking mechanism is released by the opening of a door.
Claim 24
Dependent Claim 99 words
A reticle box comprising: a body; a clamp bar; a plurality of corner supports coupled to said clamp bar; a spring biasing said plurality of corner supports into a predetermined position; locking means, coupled to at least one of said plurality of corner supports, for preventing movement of the at least one of said plurality of corner supports until being released; a door attached to said body, said door capable of releasing said locking means when said door is opened, whereby when said locking means is released and said clamp bar is moved, said plurality of corner supports move.
Claim 25
Dependent Claim 99 words
A reticle box comprising: a body; a clamp bar; a plurality of corner supports coupled to said clamp bar; a spring biasing said plurality of corner supports into a predetermined position; locking means, coupled to at least one of said plurality of corner supports, for preventing movement of the at least one of said plurality of corner supports until being released; a door attached to said body, said door capable of releasing said locking means when said door is opened, whereby when said locking means is released and said clamp bar is moved, said plurality of corner supports move.

References Cited (Backward Citations)

US3615006A Cited
US4422547A Cited
US4776462A Cited
US4886169A Cited
US5154380A Cited
US5161789A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2001-03-16 2001-09-15 2002-03-17 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2005-03-16 2005-09-15 2006-03-17 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2009-03-16 2009-09-15 2010-03-17 $7700.00 Window Closed / Lapsed

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