Bellows clamp actuator

Claim 2

Apparatus for accurately securing a work station within an enclosed container, comprising: said enclosed container; said work station disposed within said enclosed container; an extendible member having substantially opposing end portions, one said end portion of said extendible member for contacting and securing said work station and a second end portion of said extendible member attached to the interior of said container; and means responsive to a predetermined pressure difference between the interior and the exterior of said enclosed container for extending said extendible member to cause said extendible member to engage the work station with sufficient force to compensate for any deformation of the work station to maintain the work station in the desired precise position.

Claim 3

The apparatus for securing a work station of claim 1, wherein the work station comprises a semiconductor slice cassette and wherein said cassette is positioned to enable precise positioning of semiconductor slices within.

Claim 4

The apparatus for securing a work station of claim 1, wherein said extendable member comprises a bellows and wherein said means for extending said bellows comprises a cylinder with an extendable piston secured at a first end to a clamp and at a second end to said enclosed container.

Claim 5

Apparatus for accurately securing a work station within an enclosed container, comprising: an extendible member attached at one end to a clamp for contacting the work station; said extendable member attached at a second end to the interior of the container; and means for extending said member and said clamp to engage the work station with sufficient force to compensate for any deformation of the work station to maintain the work station in the desired precise position; wherein a pressure difference is created between the interior of the enclosed container and the exterior of the enclosed container; wherein said extendable member comprises a bellows and said means for extending said bellows comprises: a support structure attached to the container; said clamp, said bellows and said support structure forming an internal chamber; and means for communicating between said internal chamber and the exterior of the container, so that said pressure difference will exert a force within said internal chamber to cause said bellows to extend and secure the work station.

Claim 6

Apparatus for accurately securing a work station within an enclosed container, comprising: an extendible member attached at one end to a clamp for contacting the work station; said extendable member attached at a second end to the interior of the container; and means for extending said member and said clamp to engage the work station with sufficient force to compensate for any deformation of the work station to maintain the work station in the desired precise position; wherein a pressure difference is created between the interior of the enclosed container and the exterior of the enclosed container; wherein said extendable member comprises a bellows and said means for extending said bellows comprises: a support structure attached to the container; said clamp, said bellows and said support structure forming an internal chamber; and means for communicating between said internal chamber and the exterior of the container, so that said pressure difference will exert a force within said internal chamber to cause said bellows to extend and secure the work station.

Claim 7

The apparatus of claim 4 and further comprising; seals positioned within said internal chamber to make the chamber airtight.

Claim 8

The apparatus of claim 4, wherein said means for communicating comprises a hole formed through said container into said internal chamber.

Claim 9

Apparatus for securing and precisely positioning a semiconductor slice cassette in a vacuum container, comprising: a clamp constructed and arranged to substantially conform to the shape of a surface portion of said cassette; a hollow bellows having first and second end portions at opposite ends thereof, said bellows being attached at said first end portion thereof to said clamp; a cover enclosing said cassette and forming said vacuum container; said bellows attached at said second end portion thereof to said cover; and means responsive to a predetermined pressure difference between the interior of said container and the exterior thereof for extending said bellows and said clamp into intimate contact with the cassette to compensate for nonuniformities in the cassette.

Claim 10

Apparatus for securing and precisely positioning a semiconductor slice cassette in a vacuum container, comprising: a clamp constructed and arranged to substantially conform to the shape of a surface portion of said cassette; a hollow bellows having first and second end portions at opposite ends thereof, said bellows being attached at said first end portion thereof to said clamp; a cover enclosing said cassette and forming said vacuum container; said bellows attached at said second end portion thereof to said cover; and means responsive to a predetermined pressure difference between the interior of said container and the exterior thereof for extending said bellows and said clamp into intimate contact with the cassette to compensate for nonuniformities in the cassette.

Claim 11

Apparatus for securing and precisely positioning a semiconductor slice cassette in a vacuum container, comprising: a hollow bellows attached at one end to a clamp which is constructed and arranged to match with the cassette; a cover enclosing the cassette and forming the vacuum container; said bellows attached at a second end to said cover; means for extending said bellows and said clamp into intimate contact with the cassette and to compensate for nonuniformities in the cassette; wherein said clamp includes a cutout shaped to match with a portion of the cassette.

Claim 12

Apparatus for securing and precisely positioning a semiconductor slice cassette in a vacuum container, comprising: a hollow bellows attached at one end to a clamp which is constructed and arranged to match with the cassette; a cover enclosing the cassette and forming the vacuum container; said bellows attached at a second end to said cover; means for extending said bellows and said clamp into intimate contact with the cassette and to compensate for nonuniformities in the cassette; wherein said clamp includes a cutout shaped to match with a portion of the cassette.

Claim 13

The apparatus of claim 7 wherein said means for extending said bellows includes a cylinder with an extendable piston secured at a first end to said clamp and secured at a second end to said cover.

Claim 14

Apparatus for securing and precisely positioning a semiconductor slice cassette in a vacuum container, comprising: a hollow bellows attached at one end to a clamp which is constructed and arranged to match with the cassette; a cover enclosing the cassette and forming the vacuum container; said bellows attached at a second end to said cover; means for extending said bellows and said clamp into intimate contact with the cassette and to compensate for nonuniformities in the cassette; wherein said means for extending said bellows and said clamp comprises: means for creating a lower pressure inside said container than outside said container; a hole formed through said cover to communicate said higher pressure with the interior of said hollow bellows; and said higher outside pressure causing said bellows and said clamp to extend and match with the cassette to secure the cassette.

Claim 15

Apparatus for securing and precisely positioning a semiconductor slice cassette in a vacuum container, comprising: a hollow bellows attached at one end to a clamp which is constructed and arranged to match with the cassette; a cover enclosing the cassette and forming the vacuum container; said bellows attached at a second end to said cover; means for extending said bellows and said clamp into intimate contact with the cassette and to compensate for nonuniformities in the cassette; wherein said means for extending said bellows and said clamp comprises: means for creating a lower pressure inside said container than outside said container; a hole formed through said cover to communicate said higher pressure with the interior of said hollow bellows; and said higher outside pressure causing said bellows and said clamp to extend and match with the cassette to secure the cassette.

Claim 16

Apparatus for securing and precisely positioning a semiconductor slice cassette in a vacuum container, comprising: a hollow bellows attached at one end to a clamp which is constructed and arranged to match with the cassette; a cover enclosing the cassette and forming the vacuum container; said bellows attached at a second end to said cover; means for extending said bellows and said clamp into intimate contact with the cassette and to compensate for nonuniformities in the cassette; wherein said clamp further includes a protrusion passing through the hollow bellows and having a device attached so as to limit the extension of the bellows.

Claim 17

Apparatus for securing and precisely positioning a semiconductor slice cassette in a vacuum container, comprising: a hollow bellows attached at one end to a clamp which is constructed and arranged to match with the cassette; a cover enclosing the cassette and forming the vacuum container; said bellows attached at a second end to said cover; means for extending said bellows and said clamp into intimate contact with the cassette and to compensate for nonuniformities in the cassette; wherein said clamp further includes a protrusion passing through the hollow bellows and having a device attached so as to limit the extension of the bellows.

Claim 18

Apparatus for securing and precisely positioning a semiconductor slice cassette in a vacuum container, comprising: a hollow bellows attached at one end to a clamp which is constructed and arranged to match with the cassette; a cover enclosing the cassette and forming the vacuum container; said bellows attached at a second end to said cover; means for extending said bellows and said clamp into intimate contact with the cassette and to compensate for nonuniformities in the cassette; wherein said bellows further includes a portion within said bellows for limiting cross-extension motion.

Claim 19

Apparatus for securing and precisely positioning a semiconductor slice cassette in a vacuum container, comprising: a hollow bellows attached at one end to a clamp which is constructed and arranged to match with the cassette; a cover enclosing the cassette and forming the vacuum container; said bellows attached at a second end to said cover; means for extending said bellows and said clamp into intimate contact with the cassette and to compensate for nonuniformities in the cassette; wherein said bellows further includes a portion within said bellows for limiting cross-extension motion.

Claim 20

Apparatus for accurately positioning a semiconductor slice cassette in a vacuum container so that a semiconductor slice may be removed by an automatic device, comprising: a plurality of vertical guide posts constructed and arranged within the container to match with a left and a right vertical front edge of the cassette and to define an opening through which semiconductor slices can be removed from the cassette; a clamp sealingly attached to a hollow bellows, said clamp constructed and arranged to engage an upper rear edge of the cassette; and means for extending the bellows to match the clamp with the cassette to force the cassette into the vertical posts and accurately position the cassette.

Claim 21

Apparatus for accurately positioning a semiconductor slice cassette in a vacuum container so that a semiconductor slice may be removed by an automatic device, comprising: a plurality of vertical guide posts constructed and arranged within the container to match with a left and a right vertical front edge of the cassette and to define an opening through which semiconductor slices can be removed from the cassette; a clamp sealingly attached to a hollow bellows, said clamp constructed and arranged to engage an upper rear edge of the cassette; and means for extending the bellows to match the clamp with the cassette to force the cassette into the vertical posts and accurately position the cassette.

Claim 22

The apparatus of claim 13, wherein said vertical posts have notches which match said left and right vertical front edges of the cassette.

Claim 23

The apparatus of claim 13, wherein said clamp includes a V-shaped portion shaped to match said upper rear edge of the cassette.

Claim 24

The apparatus of claim 13, wherein said clamp further includes means passing through said bellows into the mounting device and having a limiting ring attached to prevent said bellows from overextending.

Claim 25

The apparatus of claim 13, wherein said bellows includes a device for limiting extension of said bellows in a cross-extension direction.

Claim 26

The apparatus of claim 13, wherein said means for extending said bellows to match said clamp with the cassette comprises a two-way cylinder attached to said cover internal the vacuum container and including a piston passing through said bellows to attach to said clamp.

Claim 27

The apparatus of claim 13, wherein a reduced pressure is formed within said chamber and wherein said means for extending said bellows to match said clamp with the cassette comprises: a chamber formed within said hollow bellows and communicating external the container, such that said bellows and said clamp are extended to force the cassette into said vertical posts and level the cassette.

Claim 28

Apparatus for securing a work station within a container, comprising: a container; an extendable member within said container attached at a first end thereof to said container; and extender means responsive to a pressure lower within said container than external to said container for causing said extendable member to extend to secure the work station; wherein said extender means includes a passageway therein extending to the exterior of the container and hermetically sealed from the interior of said container.

Claim 29

Apparatus for securing a work station within a container, comprising: a container; an extendable member within said container attached at a first end thereof to said container; and extender means responsive to a pressure lower within said container than external to said container for causing said extendable member to extend to secure the work station; wherein said extender means includes a passageway therein extending to the exterior of the container and hermetically sealed from the interior of said container.

Claim 30

The apparatus of claim 20, further comprising a clamp attached to a second end of said extendable member, for contacting the work station.

Claim 31

The apparatus of claim 20, wherein said extender means includes: a passageway to the outside of the container.

Claim 32

Apparatus for securing a work station within a container, comprising: an extendable member within the container and attached at a first end to the container; and extender means for causing said extendable member to extend to secure the work station, in response to a pressure lower inside the container than outside the container; wherein said extender means includes a passageway to the outside of the container; wherein said extender means includes: a chamber sealed from the inside of the container, and in communication with said passageway.

Claim 33

Apparatus for securing a work station within a container, comprising: an extendable member within the container and attached at a first end to the container; and extender means for causing said extendable member to extend to secure the work station, in response to a pressure lower inside the container than outside the container; wherein said extender means includes a passageway to the outside of the container; wherein said extender means includes: a chamber sealed from the inside of the container, and in communication with said passageway.

Claim 34

The apparatus of claim 23, wherein said extender means includes: chamber walls extendable by pressure higher within said chamber than within the inside of the container.

Claim 35

The apparatus of claim 24, wherein said chamber walls comprise: a bellows.

Claim 36

The Apparatus of claim 20, wherein the work station comprises: a cassette for semiconductor slices.

Claim 37

Apparatus for exerting force on a work station within a container, comprising: an extendable member within the container and attached at a first end to the container; and wherein said extendable member includes a chamber having walls expandable by a positive pressure within said chamber, wherein said chamber is in communication with the outside of the container and sealed from the inside of the container.

Claim 38

Apparatus for exerting force on a work station within a container, comprising: an extendable member within the container and attached at a first end to the container; and wherein said extendable member includes a chamber having walls expandable by a positive pressure within said chamber, wherein said chamber is in communication with the outside of the container and sealed from the inside of the container.