US5714006A
Expired / Lapsed
US
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Method of growing compound semiconductor layer
Assignee: Mitsubishi Electric Corp
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Filing: 1995-12-18
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Granted: 1998-02-03
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Expires: 2015-12-18
Abstract
Abstract A method of growing a compound semiconductor layer includes epitaxially growing a III-V compound semiconductor layer including nitrogen (N) for as the Group V element on a front surface of a semiconductor substrate of cadmium telluride (CdTe). Therefore, the atoms of the crystal lattice of the III-V compound semiconductor layer are periodically lattice-matched with the atoms of the crystal lattice of the CdTe semiconductor substrate, whereby the III-V compound semiconductor layer is epitaxially grown with high crystalline quality.
Inventors
- 👤 Hirotaka Kizuki
- 👤 Yasutomo Kajikawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 17:32
CPC Classifications
H; H10; H10H; H10H20/00; H10H20/01; H10H20/011; H10H20/013; H10H20/0133; H10H20/01335; H10P; H10P14/00; H10P14/20; H10P14/24; H10P14/29; H10P14/2901; H10P14/2913; H10P14/2917; H10P14/2926; H10P14/34; H10P14/3402; H10P14/3414; H10P14/3416; Y; Y10; Y10S; Y10S117/00; Y10S117/901
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
38 words
A method of growing a compound semiconductor layer including epitaxially growing a layer of a III-V semiconductor layer that includes nitrogen as the Group V element on a front surface of a semiconductor substrate comprising cadmium telluride (CdTe).
Claim 2
Independent Claim
38 words
A method of growing a compound semiconductor layer including epitaxially growing a layer of a III-V semiconductor layer that includes nitrogen as the Group V element on a front surface of a semiconductor substrate comprising cadmium telluride (CdTe).
Claim 3
Dependent Claim
34 words
The method of claim 1 further including, before epitaxially growing the III-V semiconductor layer, forming a thin buffer layer comprising the III-V semiconductor that includes nitrogen on the semiconductor substrate at a low temperature.
Claim 4
Dependent Claim
31 words
The method of claim 1 wherein the III-V semiconductor layer including nitrogen is selected from the group consisting of GaN, AlN, InN, and mixtures of at least two of these materials.
Claim 5
Dependent Claim
37 words
The method of claim 1 including growing the III-V semiconductor layer by one of metal organic chemical vapor deposition, molecular beam epitaxy, gas source molecular beam epitaxy, chemical beam epitaxy, vapor phase epitaxy, and atomic layer epitaxy.
Claim 6
Independent Claim
82 words
A method of growing a compound semiconductor layer including growing a compound semiconductor layer on a front surface of a semiconductor substrate so that a lattice arrangement direction of the semiconductor layer in a plane parallel to a {100} plane is inclined by an angle with respect to a lattice arrangement direction of the semiconductor substrate in a plane parallel to the {100} plane, thereby making some atoms of the compound semiconductor layer periodically match with some atoms of the semiconductor substrate.
Claim 7
Independent Claim
82 words
A method of growing a compound semiconductor layer including growing a compound semiconductor layer on a front surface of a semiconductor substrate so that a lattice arrangement direction of the semiconductor layer in a plane parallel to a {100} plane is inclined by an angle with respect to a lattice arrangement direction of the semiconductor substrate in a plane parallel to the {100} plane, thereby making some atoms of the compound semiconductor layer periodically match with some atoms of the semiconductor substrate.
Claim 8
Dependent Claim
68 words
The method of claim 5 wherein the front surface of the semiconductor substrate is inclined by an angle that provides an atomic step on the front surface of a substrate, in the direction perpendicular to the lattice arrangement direction of the compound semiconductor layer in the plane parallel to the {100} plane of the compound semiconductor layer, and including growing the compound semiconductor layer by step flow growth.
Claim 9
Dependent Claim
61 words
The method of claim 5 wherein: the semiconductor substrate is CdTe; the compound semiconductor layer is a III-V compound semiconductor including nitrogen as the Group V element; and the angle of the lattice arrangement direction of the compound semiconductor layer with respect to the lattice arrangement direction of the semiconductor substrate in the plane parallel to the {100} plane is 45°.
Claim 10
Dependent Claim
34 words
The method of claim 7 including growing the compound semiconductor layer on the front surface of the semiconductor substrate inclined in the <011> direction with respect to the {100} plane by step flow growth.
Claim 11
Dependent Claim
29 words
The method of claim 7 wherein the compound semiconductor layer is selected from the Group consisting of GaN, AlN, InN, and mixtures of at least two of these materials.
Claim 12
Dependent Claim
39 words
The method of claim 5 wherein the angle of the lattice arrangement direction of the compound semiconductor layer with respect to the lattice arrangement direction of the semiconductor substrate in the plane parallel to the {100} plane is 26.56°.
Claim 13
Dependent Claim
38 words
The method of claim 10 including growing atoms of the compound semiconductor layer on the front surface of the semiconductor substrate which is inclined in the <012> direction with respect to the {100} plane by step flow growth.
Claim 14
Dependent Claim
37 words
The method of claim 5 including growing the compound semiconductor layer by one of metal organic chemical vapor deposition, molecular beam epitaxy, gas source molecular beam epitaxy, chemical beam epitaxy, vapor phase epitaxy, and atomic layer epitaxy.
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