Patent US5707765A successfully refreshed from Google Patents.
US5707765A
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Photolithography mask using serifs and method thereof
Assignee: ASML Netherlands BV
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Filing: 1996-05-28
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Granted: 1998-01-13
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Expires: 2016-05-28
Abstract
Abstract There is disclosed a photolithography mask and method of making the same that utilizes serifs to increase the correspondence between an actual circuit design and the final circuit pattern on a semiconductor wafer. The mask uses a plurality of serifs having a size determined by a resolution limit of the optical exposure tool used during the fabrication process. The serifs are positioned on the corner regions of the mask such that a portion of surface area for each of the serifs overlaps the corner regions of the mask. The size of the serifs is about one-third the resolution limit of said optical exposure tool. About 33 to about 40 percent of the total surface area of the serifs overlap the corner regions of the mask.
Inventors
- 👤 J. Fung Chen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 06:29
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/36; G03F7/00; G03F7/70; G03F7/70425; G03F7/70433
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
94 words
A method for making a mask for optically transferring a lithographic pattern corresponding to an integrated circuit from said mask onto a semiconductor substrate by use of an optical exposure tool, said method comprising the steps of: a. creating said mask having said lithographic pattern corresponding to said integrated circuit, said mask having a plurality of corner regions; and b. positioning serifs on the corner regions of said mask, wherein said serifs are positioned such that a predetermined portion of surface area for each of said serifs overlaps the corner regions of said mask.
Claim 2
Independent Claim
94 words
A method for making a mask for optically transferring a lithographic pattern corresponding to an integrated circuit from said mask onto a semiconductor substrate by use of an optical exposure tool, said method comprising the steps of: a. creating said mask having said lithographic pattern corresponding to said integrated circuit, said mask having a plurality of corner regions; and b. positioning serifs on the corner regions of said mask, wherein said serifs are positioned such that a predetermined portion of surface area for each of said serifs overlaps the corner regions of said mask.
Claim 3
Dependent Claim
26 words
The method of claim 1 wherein said serifs have a predetermined size, said predetermined size being set by a resolution value of said optical exposure tool.
Claim 4
Dependent Claim
23 words
The method of claim 2 wherein said predetermined size of said serifs is about one-third the resolution value of said optical exposure tool.
Claim 5
Dependent Claim
24 words
The method of claim 1 wherein the predetermined portion of surface area for each of said serifs is about 33 to about 40 percent.
Claim 6
Dependent Claim
26 words
The method of claim 4 wherein said serifs have a predetermined size, said predetermined size being set by a resolution value of said optical exposure tool.
Claim 7
Dependent Claim
23 words
The method of claim 5 wherein said predetermined size of said serifs is about one-third the resolution value of said optical exposure tool.
Claim 8
Independent Claim
121 words
A method for making a mask for optically transferring a lithographic pattern corresponding to an integrated circuit from said mask onto a semiconductor substrate by use of an optical exposure tool, said method comprising the steps of: a. creating said mask having said lithographic pattern corresponding to said integrated circuit, said mask having a plurality of corner regions; b. determining a resolution limit of said optical exposure tool; c. creating serifs having a size determined by the resolution limit of said optical exposure tool; and d. positioning said serifs on the corner regions of said mask, wherein said serifs are positioned such that a predetermined portion of surface area for each of said serifs overlaps the corner regions of said mask.
Claim 9
Independent Claim
121 words
A method for making a mask for optically transferring a lithographic pattern corresponding to an integrated circuit from said mask onto a semiconductor substrate by use of an optical exposure tool, said method comprising the steps of: a. creating said mask having said lithographic pattern corresponding to said integrated circuit, said mask having a plurality of corner regions; b. determining a resolution limit of said optical exposure tool; c. creating serifs having a size determined by the resolution limit of said optical exposure tool; and d. positioning said serifs on the corner regions of said mask, wherein said serifs are positioned such that a predetermined portion of surface area for each of said serifs overlaps the corner regions of said mask.
Claim 10
Dependent Claim
22 words
The method of claim 7 wherein the size of said serifs is about one-third the resolution limit of said optical exposure tool.
Claim 11
Dependent Claim
24 words
The method of claim 7 wherein the predetermined portion of surface area for each of said serifs is about 33 to about 40 percent.
Claim 12
Dependent Claim
22 words
The method of claim 9 wherein the size of said serifs is about one-third the resolution limit of said optical exposure tool.
Claim 13
Dependent Claim
85 words
A photolithography mask having a plurality of corner regions for optically transferring a lithographic pattern corresponding to an integrated circuit from said mask onto a semiconductor substrate by use of an optical exposure tool, said mask comprising a plurality of serifs of a size determined by a resolution limit of said optical exposure tool, said serifs being positioned on said corner regions of said mask such that a predetermined portion of surface area for each of said serifs overlaps the corner regions of said mask.
Claim 14
Dependent Claim
85 words
A photolithography mask having a plurality of corner regions for optically transferring a lithographic pattern corresponding to an integrated circuit from said mask onto a semiconductor substrate by use of an optical exposure tool, said mask comprising a plurality of serifs of a size determined by a resolution limit of said optical exposure tool, said serifs being positioned on said corner regions of said mask such that a predetermined portion of surface area for each of said serifs overlaps the corner regions of said mask.
Claim 15
Dependent Claim
23 words
The photolithography mask of claim 11 wherein the size of said serifs is about one-third the resolution limit of said optical exposure tool.
Claim 16
Dependent Claim
25 words
The photolithography mask of claim 11 wherein the predetermined portion of surface area for each of said serifs is about 33 to about 40 percent.
Claim 17
Dependent Claim
23 words
The photolithography mask of claim 13 wherein the size of said serifs is about one-third the resolution limit of said optical exposure tool.
Claim 18
Dependent Claim
110 words
An integrated circuit on a semiconductor substrate made by the method of: a. creating a photolithography mask having a lithographic pattern corresponding to said integrated circuit, said mask having a plurality of corner regions; b. determining a resolution limit of an optical exposure tool used in transferring the lithographic pattern of said mask to said semiconductor substrate; c. creating serifs having a size determined by the resolution limit of said optical exposure tool; and d. positioning said serifs on the corner regions of said mask, wherein said serifs are positioned such that a predetermined portion of surface area for each of said serifs overlaps the corner regions of said mask.
Claim 19
Dependent Claim
110 words
An integrated circuit on a semiconductor substrate made by the method of: a. creating a photolithography mask having a lithographic pattern corresponding to said integrated circuit, said mask having a plurality of corner regions; b. determining a resolution limit of an optical exposure tool used in transferring the lithographic pattern of said mask to said semiconductor substrate; c. creating serifs having a size determined by the resolution limit of said optical exposure tool; and d. positioning said serifs on the corner regions of said mask, wherein said serifs are positioned such that a predetermined portion of surface area for each of said serifs overlaps the corner regions of said mask.
Claim 20
Dependent Claim
23 words
The integrated circuit of claim 15 wherein the size of said serifs is about one-third the resolution limit of said optical exposure tool.
Claim 21
Dependent Claim
25 words
The integrated circuit of claim 15 wherein the predetermined portion of surface area for each of said serifs is about 33 to about 40 percent.
Claim 22
Dependent Claim
23 words
The integrated circuit of claim 17 wherein the size of said serifs is about one-third the resolution limit of said optical exposure tool.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-01-12 | 2001-07-14 | 2002-01-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-01-12 | 2005-07-14 | 2006-01-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-01-12 | 2009-07-14 | 2010-01-13 | $7700.00 | Window Closed / Lapsed |