Patent US5701645A successfully refreshed from Google Patents.
US5701645A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Acoustic wave device manufacturing method
Assignee: CTS Corp
•
Filing: 1995-06-02
•
Granted: 1997-12-30
•
Expires: 2015-06-02
Abstract
Abstract A method for making an acoustic wave device. The method has steps of providing a substrate suitable for acoustic wave devices and processing the substrate to provide a patterned metallization thereon. The patterned metallization includes an acoustic wave filter pattern. The method also has steps of measuring a sheet resistance associated with the acoustic wave filter pattern, determining a resistance of a test pattern associated with the acoustic wave filter pattern to provide a measured resistance and computing an estimated average linewidth for the acoustic wave filter pattern from the measured resistance and the sheet resistance.
Inventors
- 👤 Donald Eugene Allen
- 👤 Steven Ray Stringer
- 👤 Richard Dale Coyne, deceased
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 08:16
CPC Classifications
H; H03; H03H; H03H3/00; H03H3/007; H03H3/08; G; G01; G01R; G01R31/00; G01R31/28; G01R31/282; G01R31/2822; G01R31/2831; H10; H10P; H10P74/00; H10P74/27; H10P74/277; H10P74/20; H10P74/203; Y; Y10; Y10T; Y10T29/00; Y10T29/42; Y10T29/49; Y10T29/49002; Y10T29/49004; Y10T29/49016
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
116 words
A method for making an acoustic wave device, said method comprising steps of: (a) providing a substrate suitable for acoustic wave devices; (b) processing said substrate to provide a patterned metallization thereon, said patterned metallization including an acoustic wave filter pattern; (c) measuring a sheet resistance associated with the acoustic wave filter pattern; (d) determining a resistance of a first test pattern associated with said acoustic wave filter pattern to provide a measured resistance; (e) computing an estimated average linewidth for said acoustic wave filter pattern from said measured resistance and said sheet resistance; and (f) culling die for which the linewidth computed in said step (e) falls outside of a predetermined range of acceptable values.
Claim 2
Independent Claim
116 words
A method for making an acoustic wave device, said method comprising steps of: (a) providing a substrate suitable for acoustic wave devices; (b) processing said substrate to provide a patterned metallization thereon, said patterned metallization including an acoustic wave filter pattern; (c) measuring a sheet resistance associated with the acoustic wave filter pattern; (d) determining a resistance of a first test pattern associated with said acoustic wave filter pattern to provide a measured resistance; (e) computing an estimated average linewidth for said acoustic wave filter pattern from said measured resistance and said sheet resistance; and (f) culling die for which the linewidth computed in said step (e) falls outside of a predetermined range of acceptable values.
Claim 3
Dependent Claim
214 words
A method as claimed in claim 1, wherein said step (b) includes substeps of: processing said substrate to provide a second test structure including a bridge structure having first, second, third and fourth terminals, wherein said bridge structure comprises a first line having a first linewidth comparable to a linewidth of said acoustic wave device and wherein said first line is spaced apart from a second line having said first linewidth and disposed to a first side of said first line by a distance comparable to that separating said electrodes in said acoustic wave device and wherein said first line is spaced apart from a third line having said first linewidth and disposed to a second side of said first line by said distance, wherein said second and third lines extend along a length of said first line between said second and third terminals; and said step (d) includes substeps of: (i) sourcing a current of known magnitude into said first terminal; (ii) sinking said current from said fourth terminal; (iii) measuring a voltage between said second terminal and said third terminal to provide a measured voltage; and (iv) computing a resistance for a portion of said bridge structure between said second and third terminals by dividing said measured voltage by said known magnitude.
Claim 4
Independent Claim
179 words
A method for identifying which transducers are defective in a die for an acoustic wave device and for preventing pyroelectric fracture, said method comprising steps of: (a) providing a substrate suitable for acoustic wave devices; (b) processing said substrate to provide a patterned metallization thereon, said patterned metallization comprising a plurality of die each including an acoustic wave filter pattern, each said acoustic wave filter pattern comprising a plurality of N many interdigital acoustic wave transducers and a plurality of M many resistor patterns, wherein M≦N, and further wherein each of said M many resistor patterns includes a resistance greater by at least an order of magnitude than an end-to-end resistance of an electrode of any of said N many interdigital acoustic wave transducers; (c) measuring a resistance across a selected transducer pattern within each die of said plurality of die; (d) comparing the resistance thus measured to a table of predetermined resistance values, wherein selected values of resistance correspond to specific defects in the patterned metallization; and (e) identifying defective die on said substrate from said comparing step.
Claim 5
Independent Claim
179 words
A method for identifying which transducers are defective in a die for an acoustic wave device and for preventing pyroelectric fracture, said method comprising steps of: (a) providing a substrate suitable for acoustic wave devices; (b) processing said substrate to provide a patterned metallization thereon, said patterned metallization comprising a plurality of die each including an acoustic wave filter pattern, each said acoustic wave filter pattern comprising a plurality of N many interdigital acoustic wave transducers and a plurality of M many resistor patterns, wherein M≦N, and further wherein each of said M many resistor patterns includes a resistance greater by at least an order of magnitude than an end-to-end resistance of an electrode of any of said N many interdigital acoustic wave transducers; (c) measuring a resistance across a selected transducer pattern within each die of said plurality of die; (d) comparing the resistance thus measured to a table of predetermined resistance values, wherein selected values of resistance correspond to specific defects in the patterned metallization; and (e) identifying defective die on said substrate from said comparing step.
Claim 6
Dependent Claim
21 words
A method as claimed in claim 3, further including a step (f) of culling defective die identified in said identifying step.
Claim 7
Dependent Claim
62 words
A method as claimed in claim 3, wherein said step (b) includes a substep (i) of processing said substrate to provide said M many resistor patterns, said M many resistor patterns disposed in such a fashion that all of said N many transducer patterns are provided with a DC connection from one bus bar to another bus bar of said transducer patterns.
Claim 8
Dependent Claim
36 words
A method as claimed in claim 3, further including a step (f) of separating said die from each other and severing each of said M many resistor patterns when said die are separated from each other.
Claim 9
Dependent Claim
42 words
A method as claimed in claim 3, wherein said step (b) includes a substep (i) of processing said substrate to provide said M many resistor patterns, each of said M many resistor patterns corresponding to one of M many unique resistor values.
Claim 10
Dependent Claim
51 words
A method as claimed in claim 3, wherein said step (b) includes a substep (i) of processing said substrate to provide said M many unique resistor values, wherein each of said M many unique resistor values is chosen to be different from each other of said M many unique resistor values.
Claim 11
Dependent Claim
52 words
A method as claimed in claim 3, wherein said step (b) includes a substep (i) of processing said substrate to provide said M many unique resistor values each of said M many unique values chosen to be different from the sum of any two other of said M many unique resistor values.
Claim 12
Dependent Claim
49 words
A method as claimed in claim 3, wherein said step (b) includes a substep (i) of processing said substrate to provide said M many unique resistor values, each of said M many unique resistor values chosen to be different from a sum of M-1 many other unique resistance values.
Claim 13
Dependent Claim
21 words
A method as claimed in claim 3, further including a step (f) of culling defective die identified in said identifying step.
Claim 14
Dependent Claim
36 words
A method as claimed in claim 11, further including a step (g) of separating said die from each other and severing each of said M many resistor patterns when said die are separated from each other.
Claim 15
Independent Claim
228 words
A method for identifying which transducers are defective in a die for an acoustic wave device and for preventing pyroelectric fracture, said method comprising steps of: (a) providing a substrate suitable for acoustic wave devices; (b) processing said substrate to provide a patterned metallization thereon, said patterned metallization comprising a plurality of die each including an acoustic wave filter pattern, each said acoustic wave filter pattern comprising a plurality of N many interdigital acoustic wave transducers and a plurality of M many resistor patterns, wherein M≦N; (c) measuring a sheet resistance associated with the acoustic wave filter pattern; (d) determining a resistance of a test pattern associated with said acoustic wave filter pattern to provide a measured resistance; (e) computing an estimated average linewidth for said acoustic wave filter pattern from said measured resistance and said sheet resistance; (f) comparing the estimated average linewidth thus measured to a table of predetermined linewidth values, wherein selected values of linewidth correspond to acceptable linewidths; (g) identifying defective die on said substrate from said step (f); (h) measuring a resistance across a selected transducer pattern within each die of said plurality of die; (i) comparing the resistance thus measured to a table of predetermined resistance values, wherein selected values of resistance correspond to specific defects in the patterned metallization; and (j) identifying defective die on said substrate from said step (i).
Claim 16
Independent Claim
228 words
A method for identifying which transducers are defective in a die for an acoustic wave device and for preventing pyroelectric fracture, said method comprising steps of: (a) providing a substrate suitable for acoustic wave devices; (b) processing said substrate to provide a patterned metallization thereon, said patterned metallization comprising a plurality of die each including an acoustic wave filter pattern, each said acoustic wave filter pattern comprising a plurality of N many interdigital acoustic wave transducers and a plurality of M many resistor patterns, wherein M≦N; (c) measuring a sheet resistance associated with the acoustic wave filter pattern; (d) determining a resistance of a test pattern associated with said acoustic wave filter pattern to provide a measured resistance; (e) computing an estimated average linewidth for said acoustic wave filter pattern from said measured resistance and said sheet resistance; (f) comparing the estimated average linewidth thus measured to a table of predetermined linewidth values, wherein selected values of linewidth correspond to acceptable linewidths; (g) identifying defective die on said substrate from said step (f); (h) measuring a resistance across a selected transducer pattern within each die of said plurality of die; (i) comparing the resistance thus measured to a table of predetermined resistance values, wherein selected values of resistance correspond to specific defects in the patterned metallization; and (j) identifying defective die on said substrate from said step (i).
Claim 17
Independent Claim
215 words
A method for identifying which transducers are defective in a die for an acoustic wave device and for preventing pyroelectric fracture, said method comprising steps of: (a) providing a substrate suitable for acoustic wave devices; (b) processing said substrate to provide a patterned metallization thereon, said patterned metallization comprising a plurality of die each including an acoustic wave filter pattern, each said acoustic wave filter pattern comprising a plurality of N many interdigital acoustic wave transducers and a plurality of M many resistor patterns, wherein M≦N, and further wherein each of said M many resistor patterns includes a resistance greater by at least an order of magnitude than an end-to-end resistance of an electrode of any of said N many interdigital acoustic wave transducers, said M many resistor patterns disposed in such a fashion that all of said N many transducer patterns are provided with a DC connection from one bus bar to another bus bar of said transducer patterns; (c) measuring a resistance across a selected transducer pattern within each die of said plurality of die; (d) comparing the resistance thus measured to a table of predetermined resistance values, wherein selected values of resistance correspond to specific defects in the patterned metallization; and (e) identifying defective die on said substrate from said comparing step.
Claim 18
Independent Claim
215 words
A method for identifying which transducers are defective in a die for an acoustic wave device and for preventing pyroelectric fracture, said method comprising steps of: (a) providing a substrate suitable for acoustic wave devices; (b) processing said substrate to provide a patterned metallization thereon, said patterned metallization comprising a plurality of die each including an acoustic wave filter pattern, each said acoustic wave filter pattern comprising a plurality of N many interdigital acoustic wave transducers and a plurality of M many resistor patterns, wherein M≦N, and further wherein each of said M many resistor patterns includes a resistance greater by at least an order of magnitude than an end-to-end resistance of an electrode of any of said N many interdigital acoustic wave transducers, said M many resistor patterns disposed in such a fashion that all of said N many transducer patterns are provided with a DC connection from one bus bar to another bus bar of said transducer patterns; (c) measuring a resistance across a selected transducer pattern within each die of said plurality of die; (d) comparing the resistance thus measured to a table of predetermined resistance values, wherein selected values of resistance correspond to specific defects in the patterned metallization; and (e) identifying defective die on said substrate from said comparing step.
Claim 19
Dependent Claim
42 words
A method as claimed in claim 14, wherein said step (b) includes a substep (i) of processing said substrate to provide said M many resistor patterns, each of said M many resistor patterns corresponding to one of M many unique resistor values.
Claim 20
Dependent Claim
51 words
A method as claimed in claim 15, wherein said step (b) includes a substep (ii) of processing said substrate to provide said M many unique resistor values, wherein each of said M many unique resistor values is chosen to be different from each other of said M many unique resistor values.
Claim 21
Dependent Claim
52 words
A method as claimed in claim 16, wherein said step (b) includes a substep (iii) of processing said substrate to provide said M many unique resistor values, each of said M many unique values chosen to be different from the sum of any two other of said M many unique resistor values.
Claim 22
Dependent Claim
49 words
A method as claimed in claim 17, wherein said step (b) includes a substep (iv) of processing said substrate to provide said M many unique resistor values, each of said M many unique resistor values chosen to be different from a sum of M-1 many other unique resistance values.
References Cited (Backward Citations)
US4314393A
Cited
US4364016A
Cited
US4448805A
Cited
US4628222A
Cited
US4516071A
Cited
US4890369A
Cited
US5039126A
Cited
US5243249A
Cited
US5162689A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-12-29 | 2001-06-30 | 2001-12-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-12-29 | 2005-06-30 | 2005-12-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-12-29 | 2009-06-30 | 2009-12-30 | $7700.00 | Window Closed / Lapsed |