Claims Analysis
Total Claims: 32
Claim 1
Independent Claim
237 words
A reflective optical interferometric scanner comprising means for supplying coherent light; means for splitting said coherent light into a first beam and a second beam; a first acousto-optical device having a first channel for selectively deflecting a first portion of said first beam in accordance with a first frequency in a first direction and a second channel for selectively deflecting a first portion of said second beam in accordance with a second frequency in first direction wherein the difference between the first and second frequencies is fixed and a second portion of said first and second beams are not deflected by said first acousto-optical device; a second acousto-optical device for deflecting a test beam, said test beam being part of said first portion of said first beam, and a reference beam, said reference beam being part of said second portion of said second beam, in a second direction substantially perpendicular to said first direction; a test medium an area through which said test beam passes in a two dimensional scanning pattern; a reflective element which is positioned to reflect said test beam and said reference beam back through said first and said second acousto-optic devices; detector means for detecting said test beam and for detecting said reference beam; and signal processing means for generating an intermediate frequency signal from said test and reference beams, said intermediate frequency signal bearing phase and amplitude information of said test medium.
Claim 2
Dependent Claim
237 words
A reflective optical interferometric scanner comprising means for supplying coherent light; means for splitting said coherent light into a first beam and a second beam; a first acousto-optical device having a first channel for selectively deflecting a first portion of said first beam in accordance with a first frequency in a first direction and a second channel for selectively deflecting a first portion of said second beam in accordance with a second frequency in first direction wherein the difference between the first and second frequencies is fixed and a second portion of said first and second beams are not deflected by said first acousto-optical device; a second acousto-optical device for deflecting a test beam, said test beam being part of said first portion of said first beam, and a reference beam, said reference beam being part of said second portion of said second beam, in a second direction substantially perpendicular to said first direction; a test medium an area through which said test beam passes in a two dimensional scanning pattern; a reflective element which is positioned to reflect said test beam and said reference beam back through said first and said second acousto-optic devices; detector means for detecting said test beam and for detecting said reference beam; and signal processing means for generating an intermediate frequency signal from said test and reference beams, said intermediate frequency signal bearing phase and amplitude information of said test medium.
Claim 3
Dependent Claim
34 words
A reflective optical interferometer scanner in accordance with claim 1, further comprising a polarizing beam splitter to separate said reflected test beam and reference beam from said first beam and said second beam, respectively.
Claim 4
Dependent Claim
21 words
A reflective optical interferometer according to claim 1, further comprising a calibration plate in a light path of said reference beam.
Claim 5
Dependent Claim
21 words
A reflective optical interferometer according to claim 1, further comprising imaging optics between said second acousto-optic device and said reflective element.
Claim 6
Dependent Claim
21 words
A reflective optical interferometer according to claim 2, further comprising imaging optics between said polarizing beam splitter and said detecting means.
Claim 7
Dependent Claim
30 words
A reflective optical interferometer according to claim 1, wherein said detecting means includes two point detectors, one detecting said reflected test beam and the other detecting said reflected reference beam.
Claim 8
Dependent Claim
18 words
A reflective optical interferometer according to claim 6, wherein said point detectors are fixed at a given location.
Claim 9
Dependent Claim
224 words
A scanning spot heterodyne optical interferometer comprising: means for providing a first coherent light beam and a second coherent light beam having a frequency different from said first coherent light beam; light combining means for combining said first and said second light beams into a collinear beam composed of two wavelengths; first means for splitting said collinear light beam into fixed beams unaffected by said first means and test beams varying in spatial position in a first direction in accordance with a signal input to said first means and producing a frequency shift in said test beams relative to the fixed beams; a first light deflector for deflecting said fixed and test beams in a second direction perpendicular to said first direction; a test medium onto which said test beams impinge as they vary in spatial position in said first and said second directions perpendicular to an optical axis of said interferometer, said test medium imparting a further frequency shift onto said test beams; second means for recombining said fixed beams and said test beams from said first means and providing said test beams with a further frequency shift relative to said fixed beams, wherein said fixed beams and said test beams are collinear and unmoving in at least said first direction; and means for detecting test medium phase information from said test beam.
Claim 10
Dependent Claim
224 words
A scanning spot heterodyne optical interferometer comprising: means for providing a first coherent light beam and a second coherent light beam having a frequency different from said first coherent light beam; light combining means for combining said first and said second light beams into a collinear beam composed of two wavelengths; first means for splitting said collinear light beam into fixed beams unaffected by said first means and test beams varying in spatial position in a first direction in accordance with a signal input to said first means and producing a frequency shift in said test beams relative to the fixed beams; a first light deflector for deflecting said fixed and test beams in a second direction perpendicular to said first direction; a test medium onto which said test beams impinge as they vary in spatial position in said first and said second directions perpendicular to an optical axis of said interferometer, said test medium imparting a further frequency shift onto said test beams; second means for recombining said fixed beams and said test beams from said first means and providing said test beams with a further frequency shift relative to said fixed beams, wherein said fixed beams and said test beams are collinear and unmoving in at least said first direction; and means for detecting test medium phase information from said test beam.
Claim 11
Dependent Claim
32 words
A scanning spot heterodyne optical interferometer according to claim 8, wherein said means for providing said first and second coherent light beams includes two separate lasers, one of which is frequency tunable.
Claim 12
Dependent Claim
20 words
A scanning spot heterodyne optical interferometer according to claim 8, wherein said beam combining means is a dichroic beam splitter.
Claim 13
Dependent Claim
20 words
A scanning spot heterodyne optical interferometer according to claim 8, wherein said first beam splitting means includes an acousto-optic device.
Claim 14
Dependent Claim
19 words
A scanning spot heterodyne optical interferometer according to claim 8, wherein said first light deflector includes a programmable grating.
Claim 15
Dependent Claim
36 words
A scanning spot heterodyne optical interferometer according to claim 8, wherein said second means for recombining includes a second light deflector for deflecting said fixed and test beams in said second direction and an acousto-optic device.
Claim 16
Dependent Claim
51 words
A scanning spot heterodyne optical interferometer according to claim 8, wherein said detecting means includes a second dichroic beam splitter separating said first and said second coherent beams, and a first and a second photodetector for respectively detecting double defracted light beam components of said first and said second coherent beams.
Claim 17
Dependent Claim
184 words
A scanning heterodyne optical interferometer comprising: means for providing a coherent light beam; first means for splitting said coherent light beam into a fixed beam unaffected by said first means and a test beam varying in spatial position in accordance with a signal input to said first means and producing a frequency shift in said test beam relative to the fixed beam; a test medium onto which a first part of said test beam impinges as it varies in spatial position in a first direction perpendicular to an optical axis of said interferometer, said test medium imparting a further frequency shift onto said first part of said test beam but not a second part of said test beam; second means for recombining said fixed beam from said first means and said test beam and providing said test beam with a further frequency shift relative to said fixed beam, wherein said fixed beam and said test beam are collinear and unmoving in at least said first direction; and means for detecting test medium phase information from said first and second parts of said test beam.
Claim 18
Dependent Claim
184 words
A scanning heterodyne optical interferometer comprising: means for providing a coherent light beam; first means for splitting said coherent light beam into a fixed beam unaffected by said first means and a test beam varying in spatial position in accordance with a signal input to said first means and producing a frequency shift in said test beam relative to the fixed beam; a test medium onto which a first part of said test beam impinges as it varies in spatial position in a first direction perpendicular to an optical axis of said interferometer, said test medium imparting a further frequency shift onto said first part of said test beam but not a second part of said test beam; second means for recombining said fixed beam from said first means and said test beam and providing said test beam with a further frequency shift relative to said fixed beam, wherein said fixed beam and said test beam are collinear and unmoving in at least said first direction; and means for detecting test medium phase information from said first and second parts of said test beam.
Claim 19
Dependent Claim
18 words
A scanning heterodyne optical interferometer according to claim 15, wherein said first and second means are acousto-optic devices.
Claim 20
Dependent Claim
18 words
A scanning heterodyne optical interferometer according to claim 15, wherein said first and second means are Bragg cells.
Claim 21
Dependent Claim
20 words
A scanning heterodyne optical interferometer according to claim 15, wherein said first and second means are driven by identical frequencies.
Claim 22
Dependent Claim
41 words
A scanning heterodyne optical interferometer according to claim 15, wherein, after being recombined with said fixed beam, said second part of said test beam is used as a reference to determine phase shift of said first part of said scanning beam.
Claim 23
Dependent Claim
25 words
A scanning heterodyne optical interferometer according to claim 15, further comprising 1:1 optics between said first and second means, said test medium being interposed therebetween.
Claim 24
Dependent Claim
17 words
A scanning heterodyne optical interferometer according to claim 15, wherein said detecting means is a point detector.
Claim 25
Dependent Claim
17 words
A scanning heterodyne optical interferometer according to claim 15, wherein said detecting means is a detector array.
Claim 26
Dependent Claim
41 words
A scanning heterodyne optical interferometer according to claim 15, further comprising first and second deflectors associated with said first and second means, respectively, for deflecting said fixed and said test beams in a second direction substantially perpendicular to said first direction.
Claim 27
Dependent Claim
87 words
A scanning heterodyne optical interferometer according to claim 15, wherein said second means splits off a portion of said fixed beam unaffected by said first means into a first scanning beam and frequency shifted by said test material and wherein said second means splits of a portion of said test beam, said portions of said fixed beam and said test beam forming a second output beam which is collinear and moving in said first direction, said second output beam being detected by a high speed sensor array.
Claim 28
Dependent Claim
169 words
A scanning heterodyne optical interferometer comprising: means for providing a coherent light beam; first means for splitting said coherent light beam into a fixed beam unaffected by said first means and a first scanning beam shifting in spatial position and frequency; second means for splitting said first fixed beam into a second fixed beam unaffected by either first or second means and a second scanning beam shifting in spatial position and frequency, and for splitting said first scanning beam into a third scanning beam shifting in spatial position and a third fixed beam unaffected by said second means, said second and third fixed beams being collinear and said second and third scanning beams being collinear; first and second polarizing beam splitters for splitting polarized light components of said collinear second and third fixed beams and said second and third scanning beams, components of each passing through a test medium and the other components of which acts as a reference; and detecting means for determining phase differences between respective components.
Claim 29
Dependent Claim
169 words
A scanning heterodyne optical interferometer comprising: means for providing a coherent light beam; first means for splitting said coherent light beam into a fixed beam unaffected by said first means and a first scanning beam shifting in spatial position and frequency; second means for splitting said first fixed beam into a second fixed beam unaffected by either first or second means and a second scanning beam shifting in spatial position and frequency, and for splitting said first scanning beam into a third scanning beam shifting in spatial position and a third fixed beam unaffected by said second means, said second and third fixed beams being collinear and said second and third scanning beams being collinear; first and second polarizing beam splitters for splitting polarized light components of said collinear second and third fixed beams and said second and third scanning beams, components of each passing through a test medium and the other components of which acts as a reference; and detecting means for determining phase differences between respective components.
Claim 30
Dependent Claim
19 words
A scanning heterodyne optical interferometer according to claim 25, wherein said detecting means is a pair of CCD detectors.
Claim 31
Dependent Claim
30 words
A scanning heterodyne optical interferometer according to claim 25, wherein said detecting means includes a 2-D array for detecting said a phase difference in said second and third scanning beams.
Claim 32
Dependent Claim
28 words
A scanning heterodyne optical interferometer according to claim 25, wherein said detecting means includes point detector for detecting a phase difference in said second and third fixed beams.