US5369489A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Time division multiplexed microscopy
Assignee: BTG International Ltd
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Filing: 1993-02-19
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Granted: 1994-11-29
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Expires: 2013-02-19
Abstract
Abstract Optical apparatus for measuring the topographic properties of a surface uses a beam of coherent radiation which is split by a beam splitter (2) into a reference beam and a probe beam. The probe beam at is modulated by a Bragg cell which is switched at two frequencies (ω 1 ,ω 2 ). A detector (6) recombines the components of the probe beam after reflection to produce a plurality of tone bursts the phase differences of which correspond to variations in the surface topography.
Inventors
- 👤 Michael G. Somekh
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 06:08
CPC Classifications
G; G01; G01B; G01B9/00; G01B9/02; G01B9/02015; G01B9/02027; G01B9/02028; G01B11/00; G01B11/02; G01B11/06; G01B11/0608; G01B9/02001; G01B9/02002; G01B9/02003
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
95 words
An optical apparatus for measuring the topographic properties of a surface comprising: a source of coherent radiation, means for splitting a beam of radiation from said source into a reference beam and a probe beam comprising a plurality of component beams, means for successively modulating said component beams at at least two frequencies, means for successively recombining said component beams after reflection with said reference beam to create an interference pattern, and detector means for detecting said interference pattern and for producing a plurality of tone bursts corresponding to successive variations in said interference pattern.
Claim 2
Dependent Claim
95 words
An optical apparatus for measuring the topographic properties of a surface comprising: a source of coherent radiation, means for splitting a beam of radiation from said source into a reference beam and a probe beam comprising a plurality of component beams, means for successively modulating said component beams at at least two frequencies, means for successively recombining said component beams after reflection with said reference beam to create an interference pattern, and detector means for detecting said interference pattern and for producing a plurality of tone bursts corresponding to successive variations in said interference pattern.
Claim 3
Dependent Claim
44 words
An optical apparatus for measuring the topographic properties of a surface as claimed in claim 1 wherein said means for modulating said component beams comprises an acousto-optic Bragg cell adapted to deflect said component beams through an angle dependent on an applied modulating frequency.
Claim 4
Dependent Claim
37 words
An optical apparatus for measuring the topographic properties of a surface as claimed in claim 1 or 2 wherein said detector means includes mixer means for mixing signals corresponding to said tone bursts to a common frequency.
Claim 5
Dependent Claim
32 words
An optical apparatus for measuring the topographic properties of a surface as claimed in claim 3 further including filter means for converting respective ones of said signals to substantially continuous wave signals.
Claim 6
Dependent Claim
37 words
An optical apparatus for measuring the topographic properties of a surface as claimed in claim 4 wherein said detector means includes a second mixer means and a second filter means for producing output signals for phase comparison.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-11-28 | 1998-05-30 | 1998-11-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-11-28 | 2002-05-30 | 2002-11-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-11-28 | 2006-05-30 | 2006-11-29 | $7700.00 | Window Closed / Lapsed |