US5116126A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Interferometer requiring no critical component alignment
Assignee: Optodyne Inc
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Filing: 1991-01-07
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Granted: 1992-05-26
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Expires: 2011-01-07
Abstract
Abstract A Michelson-type self-aligning interferometer utilizes a laser to produce an output beam of light that is split into signal and reference beams. The signal beam is directed through a Bragg-cell, for heterodyne detection, and a beam expander, for facilitating target acquisition, toward a retroreflector located on a target body. The signal beam is thereby reflected back through the beam expander and Bragg-cell toward the resonance mirror of the laser, and is now shifted in frequency by 2Ω. The returning signal beam remains co-linear with the output beam since it returns over the same path and through the same optical elements, especially the laser resonance mirror. Thus, the interferometer can accommodate a significant amount of component misalignment without loss of operation. The signal beam, once reflected from the resonance mirror of the laser and partially reflected by the beam splitter, is co-linear with the reference beam. The signal beam and reference beam are directed into a detector to produce an electrical signal. A frequency divider and a phase demodulator extract the phase of the electrical signal through heterodyne detection, the phase being proportional to the position of the retroreflector and, hence, the target body.
Inventors
- 👤 Charles C. P. Wang
- 👤 Joe S. B. Zhou
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 19:13
CPC Classifications
G; G01; G01B; G01B9/00; G01B9/02; G01B9/02092; G01B9/02001; G01B9/02002
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
235 words
An interferometer requiring no critical component alignment, comprising: a gas laser for producing an output light beam, the laser having an output mirror; means for splitting the output light beam into two spatially separated components, the components being a first beam and a second beam; means for detecting the first and the second beams, the first beam being directed by the splitting means directly to the detector for use as a reference; means for frequency and direction shifting, the second beam being directed by the splitting means to the shifting means, and therein being frequency and direction shifted; means for reflecting, the second beam being directed by the shifting means to the reflecting means, such that the second beam is reflected back to the shifting means and therein being frequency shifted a second time and direction shifted such that the second beam is directed along the path of the output light beam, being colinear thereto, so that the reflected second beam impinges the laser source output mirror and is reflected therefrom toward the splitter, a portion of the twice reflected second beam being colinear with the first beam and directed to the detector therewith, the reflected second light beam, being frequency shifted from the laser frequency therefore not destabilizing the laser upon entry through the output mirror, whereby the stability of the splitter position is not highly critical to the proper operation of the interferometer.
Claim 2
Dependent Claim
235 words
An interferometer requiring no critical component alignment, comprising: a gas laser for producing an output light beam, the laser having an output mirror; means for splitting the output light beam into two spatially separated components, the components being a first beam and a second beam; means for detecting the first and the second beams, the first beam being directed by the splitting means directly to the detector for use as a reference; means for frequency and direction shifting, the second beam being directed by the splitting means to the shifting means, and therein being frequency and direction shifted; means for reflecting, the second beam being directed by the shifting means to the reflecting means, such that the second beam is reflected back to the shifting means and therein being frequency shifted a second time and direction shifted such that the second beam is directed along the path of the output light beam, being colinear thereto, so that the reflected second beam impinges the laser source output mirror and is reflected therefrom toward the splitter, a portion of the twice reflected second beam being colinear with the first beam and directed to the detector therewith, the reflected second light beam, being frequency shifted from the laser frequency therefore not destabilizing the laser upon entry through the output mirror, whereby the stability of the splitter position is not highly critical to the proper operation of the interferometer.
Claim 3
Dependent Claim
34 words
The interferometer of claim 1 further including a phase demodulator for receiving an electrical signal, the signal corresponding to the detected light beams, for phase demodulating the signal to produce beam path length information.
Claim 4
Dependent Claim
33 words
The interferometer of claim 1 further including a beam expander for broadening and improving collimation of the second beam such that the acquisition of the second beam by the reflecting means is improved.
Claim 5
Dependent Claim
25 words
The interferometer of claim 1 wherein the reflecting means is a retroreflector, so that the alignment stability of the shifting means is not highly critical.
Claim 6
Dependent Claim
16 words
The interferometer of claim 1 wherein the means for frequency and direction shifting is a Bragg-cell.
Claim 7
Dependent Claim
13 words
The interometer of claim 1 wherein the means for detecting is a photo-detector.
Claim 8
Dependent Claim
14 words
The interferometer of claim 1 wherein the means for detecting is an array detector.
Claim 9
Dependent Claim
14 words
The interferometer of claim 1 wherein the means for detecting is a television camera.
Claim 10
Independent Claim
160 words
A method for interferometric measurement in which the alignment stability of the elements of apparatus is not highly critical, comprising the steps: providing a gas laser having an output mirror, a beam splitter, a means for frequency and direction shifting, a retroreflector target, a means for detecting, and a means for phase demodulation; producing an output light beam from the laser; splitting the output light beam into a first and a second beams at the beam splitter; detecting the first beam at the detecting means; frequency and direction shifting the second beam at the shifting means; reflecting the second beam at the retroreflector back to the shifting means; frequency and direction shifting the second beam at the shifting means for a second time; reflecting the second beam at the output mirror back to the beam splitter; detecting the second beam at the detecting means for producing a corresponding electrical signal; phase demodulating the electrical signal to acquire path length information.
Claim 11
Independent Claim
160 words
A method for interferometric measurement in which the alignment stability of the elements of apparatus is not highly critical, comprising the steps: providing a gas laser having an output mirror, a beam splitter, a means for frequency and direction shifting, a retroreflector target, a means for detecting, and a means for phase demodulation; producing an output light beam from the laser; splitting the output light beam into a first and a second beams at the beam splitter; detecting the first beam at the detecting means; frequency and direction shifting the second beam at the shifting means; reflecting the second beam at the retroreflector back to the shifting means; frequency and direction shifting the second beam at the shifting means for a second time; reflecting the second beam at the output mirror back to the beam splitter; detecting the second beam at the detecting means for producing a corresponding electrical signal; phase demodulating the electrical signal to acquire path length information.
References Cited (Backward Citations)
US3796495A
Cited
US4466738A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-05-26 | 1995-11-25 | 1996-05-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-05-26 | 1999-11-25 | 2000-05-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-05-26 | 2003-11-25 | 2004-05-26 | $7700.00 | Window Closed / Lapsed |