Patent US4262380A successfully refreshed from Google Patents.
Patent US5690998A successfully refreshed from Google Patents.
US5690998A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of coating a conductive probe needle
Assignee: Tokyo Electron Ltd
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Filing: 1996-03-29
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Granted: 1997-11-25
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Expires: 2016-03-29
Abstract
Abstract The present invention relates to a probe needle wherein a conductive film is formed over a first insulating film formed around the outer periphery of a rod-like member through which a signal current flows, a second insulating film is formed over the outer periphery of the conductive film, and the conductive film is grounded. Since the rod-like member through which a signal current flows is thereby shielded, it is not affected by noise, and mutual crosstalk between signal currents is also prevented. Moreover, since ill effects caused by mutual contact with other probe needles is prevented by the second insulating film, reliable and stable measurement is possible. The coating of the probe needle is implemented by covering non-coating portions of the probe needle by a melted thermally liquefiable wax, hardening the thermally liquefiable wax covering the non-coating portions at room temperature, applying a coating to the probe needle by vacuum deposition, heating the thermally liquefiable wax once again, and then removing the thermally liquefiable wax from the probe needle. As a result, a probe needle is obtained wherein a non-coating portion is reliably delimited from a coating portion by a masking boundary. When the coating process is completed, the probe needle could be subjected to washing to completely remove any remaining wax.
Inventors
- 👤 Yasushi Nagasawa
- 👤 Satoru Yamashita
- 👤 Masahiko Matsudo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 07:26
CPC Classifications
G; G01; G01R; G01R1/00; G01R1/02; G01R1/06; G01R1/067; G01R1/073; G01R1/07307; G01R1/07357; G01R1/06711; G01R1/06755; G01R1/06761; G01R1/06772; G01R3/00; G01R1/06733; G01R1/0675; Y; Y10; Y10T; Y10T137/00; Y10T137/5762
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
143 words
A method of coating a probe needle comprising the steps of: covering a portion of said probe needle with a melted thermally liquefiable wax to form a masked portion by positioning the portion of said probe needle within a tank such that melted thermally liquefiable wax within said tank comes in contact with said portion; hardening at room temperature said thermally liquefiable wax that covers said masked portion; implementing a coating of poly-para-xylene by vacuum deposition over said probe needle provided in said tank while said probe needle and said tank are in a vacuum chamber under a vacuum condition; heating said thermally liquefiable wax following the vacuum deposition of the poly-para-xylene to place said thermally liquefiable wax in a molten state; and removing said probe needle from the heated molten wax by pulling out said probe needle in an axial direction thereof.
Claim 2
Independent Claim
143 words
A method of coating a probe needle comprising the steps of: covering a portion of said probe needle with a melted thermally liquefiable wax to form a masked portion by positioning the portion of said probe needle within a tank such that melted thermally liquefiable wax within said tank comes in contact with said portion; hardening at room temperature said thermally liquefiable wax that covers said masked portion; implementing a coating of poly-para-xylene by vacuum deposition over said probe needle provided in said tank while said probe needle and said tank are in a vacuum chamber under a vacuum condition; heating said thermally liquefiable wax following the vacuum deposition of the poly-para-xylene to place said thermally liquefiable wax in a molten state; and removing said probe needle from the heated molten wax by pulling out said probe needle in an axial direction thereof.
Claim 3
Dependent Claim
37 words
The method of coating a probe needle of claim 1, further comprising a step of, after said probe needle has been removed from the molten wax, washing said probe needle in alcohol to remove any remaining wax.
Claim 4
Dependent Claim
55 words
The method of coating a probe needle of claim 1, wherein, when said masked portion is being covered with said melted thermally liquefiable wax, a waxing boundary is formed between said masked portion and a coating portion to which poly-para-xylene is to be vacuum deposited by the stickiness and surface tension inherent to said wax.
Claim 5
Independent Claim
105 words
A method of coating a probe needle comprising: forming a tank and probe needle combination by (i) positioning a to-be-masked portion of the probe needle so as to come into contact with liquified wax contained in the tank, and (ii) allowing the liquified wax to harden about the portion of the probe needle so as to form a masked probe needle portion; vacuum depositing poly-para-xylene over said tank and probe needle of said tank and probe needle combination so as to coat the probe needle and tank; and separating said probe needle from the wax contained in said tank following the vacuum depositing of poly-para-xylene.
Claim 6
Independent Claim
105 words
A method of coating a probe needle comprising: forming a tank and probe needle combination by (i) positioning a to-be-masked portion of the probe needle so as to come into contact with liquified wax contained in the tank, and (ii) allowing the liquified wax to harden about the portion of the probe needle so as to form a masked probe needle portion; vacuum depositing poly-para-xylene over said tank and probe needle of said tank and probe needle combination so as to coat the probe needle and tank; and separating said probe needle from the wax contained in said tank following the vacuum depositing of poly-para-xylene.
Claim 7
Dependent Claim
73 words
The method of claim 4, wherein forming the tank and probe needle combination includes placing an end of the probe needle, which represents the to-be-masked portion of said probe needle, into a slot formed in said tank, which slot is sized such that the liquified wax extends out of the tank along said probe needle to form a projection of hardened wax, external to said tank, about said probe needle upon wax hardening.
Claim 8
Dependent Claim
13 words
The method of claim 4, wherein the wax is hardened at room temperature.
Claim 9
Dependent Claim
22 words
The method of claim 6, wherein separating said probe needle from the tank includes heating the hardened wax contained in the tank.
Claim 10
Dependent Claim
30 words
The method of claim 5, wherein separating said probe needle from the tank includes pulling the probe needle, along an axial direction of the probe needle, out of the slot.
Claim 11
Dependent Claim
32 words
The method of claim 7, wherein, following separation of the probe needle from the tank, said end of the probe needle is washed in a solvent to remove any wax remaining thereon.
Claim 12
Dependent Claim
38 words
The method of claim 4, wherein, following the wax hardening and prior to the vacuum depositing step, the tank and probe needle combination is positioned within a vacuum depositing chamber wherein the vacuum depositing step is carried out.
Claim 13
Independent Claim
182 words
A method of coating a probe needle, comprising: placing a first end of the probe needle in a slot formed in a first tank such that the first end extends into said first tank; placing a second end of the probe needle in a slot formed in a second tank such that the second end extends into the second tank, and an intermediate portion extends between said first and second tanks; covering said first end with liquified wax contained in said first tank; covering said second end with liquified wax contained in said second tank; allowing the wax in said first tank and the wax in said second tank to harden about the respective first and second ends of said probe needle; positioning said first and second tanks with hardened wax covering the ends of said probe needle within a vacuum depositing chamber; vacuum depositing poly-para-xylene over said tanks and probe needle so as to coat the intermediate portion of said probe needle and tanks; and separating said probe needle from the wax contained in said tanks following the vacuum depositing step.
Claim 14
Independent Claim
182 words
A method of coating a probe needle, comprising: placing a first end of the probe needle in a slot formed in a first tank such that the first end extends into said first tank; placing a second end of the probe needle in a slot formed in a second tank such that the second end extends into the second tank, and an intermediate portion extends between said first and second tanks; covering said first end with liquified wax contained in said first tank; covering said second end with liquified wax contained in said second tank; allowing the wax in said first tank and the wax in said second tank to harden about the respective first and second ends of said probe needle; positioning said first and second tanks with hardened wax covering the ends of said probe needle within a vacuum depositing chamber; vacuum depositing poly-para-xylene over said tanks and probe needle so as to coat the intermediate portion of said probe needle and tanks; and separating said probe needle from the wax contained in said tanks following the vacuum depositing step.
Claim 15
Dependent Claim
13 words
The method of claim 11, wherein the wax is hardened at room temperature.
Claim 16
Dependent Claim
22 words
The method of claim 11, wherein separating said probe needle from the tanks includes heating the hardened wax contained in the tanks.
Claim 17
Dependent Claim
30 words
The method of claim 11, wherein separating said probe needle from the tanks includes pulling the probe needle, along an axial direction of the probe needle, out of the slots.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-11-24 | 2001-05-26 | 2001-11-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-11-24 | 2005-05-26 | 2005-11-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-11-24 | 2009-05-26 | 2009-11-25 | $7700.00 | Window Closed / Lapsed |