Patent US5688719A successfully refreshed from Google Patents.
US5688719A
Expired / Lapsed
US
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Method for plasma hardening of patterned photoresist layers
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1996-06-07
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Granted: 1997-11-18
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Expires: 2016-06-07
Abstract
Abstract A method for plasma hardening a patterned photoresist layer. There is first provided a semiconductor substrate which has formed upon its surface a patterned photoresist layer. The patterned photoresist layer is then exposed to a hydrogen containing plasma for a time sufficient to harden the patterned photoresist layer against a Reactive Ion Etch (RIE) etch plasma to which the patterned photoresist layer is later exposed. A blanket layer residing beneath the plasma hardened photoresist layer may then be patterned through the Reactive Ion Etch (RIE) etch plasma without softening, erosion and/or consumption of the plasma hardened patterned photoresist layer.
Inventors
- 👤 Chia-Shiung Tsai
- 👤 Sung-Mu Hsu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 22:36
CPC Classifications
H; H10; H10P; H10P76/00; H10P76/20; H10P76/204; G; G03; G03F; G03F7/00; G03F7/26; G03F7/40; H10P50/00; H10P50/20; H10P50/24; H10P50/242; H10P50/69; H10P50/691; H10P50/693; H10P50/695; Y; Y10; Y10S; Y10S438/00; Y10S438/942; Y10S438/948; Y10S438/949
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
52 words
A method for plasma hardening a patterned photoresist layer comprising: providing a semiconductor substrate; forming over the semiconductor substrate a patterned photoresist layer; and treating the patterned photoresist layer with a helium-hydrogen plasma, without baking the patterned photoresist layer, to form from the patterned photoresist layer a plasma hardened patterned photoresist layer.
Claim 2
Independent Claim
52 words
A method for plasma hardening a patterned photoresist layer comprising: providing a semiconductor substrate; forming over the semiconductor substrate a patterned photoresist layer; and treating the patterned photoresist layer with a helium-hydrogen plasma, without baking the patterned photoresist layer, to form from the patterned photoresist layer a plasma hardened patterned photoresist layer.
Claim 3
Dependent Claim
19 words
The method of claim 1 wherein the patterned photoresist layer is from about 16500 to about 20000 angstroms thick.
Claim 4
Dependent Claim
36 words
The method of claim 1 wherein the patterned photoresist layer is formed from a photoresist material selected from the group of photoresist materials consisting of novolak photoresist materials and Poly Methyl Meth Acrylate (PMMA) photoresist materials.
Claim 5
Dependent Claim
19 words
The method of claim 1 wherein the helium-hydrogen plasma contains about 5 to about 20 percent hydrogen by volume.
Claim 6
Dependent Claim
41 words
The method of claim 4 wherein the patterned photoresist layer is exposed to the helium-hydrogen plasma at a radio frequency power of from about 300 to about 600 watts for a time period of from about 60 to about 120 seconds.
Claim 7
Independent Claim
89 words
A method for patterning a blanket layer within an integrated circuit comprising: providing a semiconductor substrate; forming over the semiconductor substrate a blanket layer; forming upon the blanket layer a patterned photoresist layer; exposing the patterned photoresist layer to a helium-hydrogen plasma, without baking the patterned photoresist layer, to form from the patterned photoresist layer a plasma hardened patterned photoresist layer; and etching through a Reactive Ion Etch (RIE) etch plasma portions of the blanket layer exposed through the plasma hardened patterned photoresist layer to form a patterned layer.
Claim 8
Independent Claim
89 words
A method for patterning a blanket layer within an integrated circuit comprising: providing a semiconductor substrate; forming over the semiconductor substrate a blanket layer; forming upon the blanket layer a patterned photoresist layer; exposing the patterned photoresist layer to a helium-hydrogen plasma, without baking the patterned photoresist layer, to form from the patterned photoresist layer a plasma hardened patterned photoresist layer; and etching through a Reactive Ion Etch (RIE) etch plasma portions of the blanket layer exposed through the plasma hardened patterned photoresist layer to form a patterned layer.
Claim 9
Dependent Claim
14 words
The method of claim 6 wherein the blanket layer is a blanket conductor layer.
Claim 10
Dependent Claim
21 words
The method of claim 7 wherein the thickness of the blanket conductor layer is from about 6000 to about 10000 angstroms.
Claim 11
Dependent Claim
19 words
The method of claim 6 wherein the patterned photoresist layer is from about 16500 to about 20000 angstroms thick.
Claim 12
Dependent Claim
36 words
The method of claim 6 wherein the patterned photoresist layer is formed from a photoresist material selected from the group of photoresist materials consisting of novolak photoresist materials and Poly Methyl Meth Acrylate (PMMA) photoresist materials.
Claim 13
Dependent Claim
19 words
The method of claim 6 wherein the helium-hydrogen plasma contains about 5 to about 20 percent hydrogen by volume.
Claim 14
Dependent Claim
41 words
The method of claim 11 wherein the patterned photoresist layer is exposed to the helium-hydrogen plasma at a radio frequency power of from about 300 to about 600 watts for a time period of from about 60 to about 120 seconds.
Claim 15
Independent Claim
102 words
A method for patterning a blanket aluminum containing conductor layer within an integrated circuit comprising: providing a semiconductor substrate; forming over the semiconductor substrate a blanket aluminum containing conductor layer; forming upon the blanket aluminum containing conductor layer a patterned photoresist layer; exposing the patterned photoresist layer to a helium-hydrogen plasma, without baking the patterned photoresist layer, to form from the patterned photoresist layer a plasma hardened patterned photoresist layer; and etching through a Reactive Ion Etch (RIE) etch plasma portions of the blanket aluminum containing conductor layer exposed through the patterned photoresist layer to form a patterned aluminum containing conductor layer.
Claim 16
Independent Claim
102 words
A method for patterning a blanket aluminum containing conductor layer within an integrated circuit comprising: providing a semiconductor substrate; forming over the semiconductor substrate a blanket aluminum containing conductor layer; forming upon the blanket aluminum containing conductor layer a patterned photoresist layer; exposing the patterned photoresist layer to a helium-hydrogen plasma, without baking the patterned photoresist layer, to form from the patterned photoresist layer a plasma hardened patterned photoresist layer; and etching through a Reactive Ion Etch (RIE) etch plasma portions of the blanket aluminum containing conductor layer exposed through the patterned photoresist layer to form a patterned aluminum containing conductor layer.
Claim 17
Dependent Claim
23 words
The method of claim 13 wherein the thickness of the blanket aluminum containing conductor layer is from about 6000 to about 10000 angstroms.
Claim 18
Dependent Claim
19 words
The method of claim 13 wherein the patterned photoresist layer is from about 16500 to about 20000 angstroms thick.
Claim 19
Dependent Claim
36 words
The method of claim 13 wherein the patterned photoresist layer is formed from a photoresist material selected from the group of photoresist materials consisting of novolak photoresist materials and Poly Methyl Meth Acrylate (PMMA) photoresist materials.
Claim 20
Dependent Claim
19 words
The method of claim 13 wherein the helium-hydrogen plasma contains about 5 to about 20 percent hydrogen by volume.
Claim 21
Dependent Claim
41 words
The method of claim 17 wherein the patterned photoresist layer is exposed to the helium-hydrogen plasma at a radio frequency power of from about 300 to about 600 watts for a time period of from about 60 to about 120 seconds.
Claim 22
Dependent Claim
20 words
The method of claim 13 wherein the Reactive Ion Etch (RIE) etch plasma is formed of a chlorine containing plasma.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-11-17 | 2001-05-19 | 2001-11-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-11-17 | 2005-05-19 | 2005-11-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-11-17 | 2009-05-19 | 2009-11-18 | $7700.00 | Window Closed / Lapsed |