US4080267A
Expired / Lapsed
US
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Method for forming thick self-supporting masks
Assignee: International Business Machines Corp
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Filing: 1975-12-29
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Granted: 1978-03-21
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Expires: 1995-12-29
Abstract
Abstract A method of constructing a relatively thick, self-supporting mask suitable for electron beam projection processes. Thickness is achieved by multiple steps of coating with resist, exposure, development and plating. First an intermediate or lift off layer is deposited on a substrate. A plating or a cathode layer may then be deposited. Resist is then applied. A first mask layer comprises metal plated in accordance with the first pattern. For the second exposure a geometrically similar pattern is employed to generate larger apertures. Thus, if the first mask layer has 0.20 mil apertures, the second layer might have corresponding 0.21 mil to 0.22 mil apertures. For initial mask patterns of about 2 mil the second layer might be 2.02 mils. If desired, a third exposure can be employed with a third pattern, similar to the first two, but having larger apertures (by 0.02 to 0.03 mils) than the second pattern.
Inventors
- 👤 Eugene E. Castellani
- 👤 Patrick M. McCaffrey
- 👤 Aloysius T. Pfeiffer
- 👤 Lubomyr T. Romankiw
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 07:33
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/20; C; C23; C23F; C23F1/00; C23F1/02
Claims Analysis
Total Claims: 31
Claim 1
Independent Claim
231 words
A method of forming a thick self-supporting mask with aspect ratio greater than 1 suitable for electron beam projection processing comprising the steps of: (a) depositing, on a conformable substrate selected from glass, quartz, silicon and sapphire, a layer of material comprising a readily soluble polymer or a metal selected from Ti, Al, Cr, Zn, Hf, Nb, Ta and alloys or mixtures thereof which is selectively soluble in the presence of Au or Cu; (b) depositing on the product of step (a) a plating base of a readily platable more noble metal of thickness in the range of 300-3,000 angstroms; (c) coating the product of step (b) with a suitable radiation sensitive material to a predetermined thickness; (d) transferring a pattern to said material by exposing it to a pattern of radiation and developing said exposed material; (e) plating a metal selected from Au and Cu into said pattern to a thickness no greater than said predetermined thickness; (f) coating the product of step (e) with a second radiation sensitive material to a second predetermined thickness; (g) transferring a second pattern to said second material by exposing it to a second pattern of radiation and developing said exposed material wherein said second pattern is geometrically similar to said first pattern; and, (h) plating additional metal into said second pattern in said second material, said additional metal selected from Au or Cu.
Claim 2
Independent Claim
231 words
A method of forming a thick self-supporting mask with aspect ratio greater than 1 suitable for electron beam projection processing comprising the steps of: (a) depositing, on a conformable substrate selected from glass, quartz, silicon and sapphire, a layer of material comprising a readily soluble polymer or a metal selected from Ti, Al, Cr, Zn, Hf, Nb, Ta and alloys or mixtures thereof which is selectively soluble in the presence of Au or Cu; (b) depositing on the product of step (a) a plating base of a readily platable more noble metal of thickness in the range of 300-3,000 angstroms; (c) coating the product of step (b) with a suitable radiation sensitive material to a predetermined thickness; (d) transferring a pattern to said material by exposing it to a pattern of radiation and developing said exposed material; (e) plating a metal selected from Au and Cu into said pattern to a thickness no greater than said predetermined thickness; (f) coating the product of step (e) with a second radiation sensitive material to a second predetermined thickness; (g) transferring a second pattern to said second material by exposing it to a second pattern of radiation and developing said exposed material wherein said second pattern is geometrically similar to said first pattern; and, (h) plating additional metal into said second pattern in said second material, said additional metal selected from Au or Cu.
Claim 3
Dependent Claim
16 words
The method of claim 1 wherein said predetermined thickness is smaller than said second predetermined thickness.
Claim 4
Dependent Claim
14 words
The method of claim 1 wherein said predetermined thickness is up to 2.5 microns.
Claim 5
Dependent Claim
19 words
The method of claim 1 wherein said step (d) employs and E-beam controlled to generate said pattern of radiation.
Claim 6
Dependent Claim
27 words
The method of claim 1 wherein at least one of said transferring steps employs suitable forming mask to modulate said radiation to provide said pattern of radiation.
Claim 7
Dependent Claim
17 words
The method of claim 5 wherein said radiation of said at least one transferring step is X-rays.
Claim 8
Dependent Claim
25 words
The method of claim 5 wherein said radiation of said at least one transferring steps is U.V. light with wavelength in the range 3,000-4,000 angstroms.
Claim 9
Dependent Claim
20 words
The method of claim 1 which includes the additional step of providing, by plating, a suitable frame for support purposes.
Claim 10
Dependent Claim
77 words
The method of claim 1 which includes the additional steps of: (i) coating the product of step (h) with a third radiation sensitive material, (j) transferring a third pattern to said third material by exposing it to a third pattern of radiation and developing said exposed material to provide, in said third material said third pattern, and (k) plating further metal into said third pattern in said third material, said further metal selected from Au or Cu.
Claim 11
Dependent Claim
17 words
The method of claim 9 in which said third pattern is geometrically similar to said second pattern.
Claim 12
Dependent Claim
24 words
The method of claim 9 in which said third pattern results in a third plated layer having a plurality of reinforcing ribs or areas.
Claim 13
Dependent Claim
61 words
The method of claim 1 which includes the further steps of lifting said mask off said substrate by: (i) dissolving said intermediate layer in a suitable solvent if a soluble polymer, or (ii) etching said intermediate layer with an etchant which will selectively attack said intermediate layer in the presence of Au or Cu, if said intermediate layer is a metal.
Claim 14
Dependent Claim
14 words
The method of claim 1 wherein step (i) employs acetone as said suitable solvent.
Claim 15
Dependent Claim
25 words
The method of claim 1 wherein step (ii) said etchant is a 5-25% HF solution in water for a Ti material deposited in step (b).
Claim 16
Independent Claim
185 words
A method of forming a thick self-supporting mask with aspect ratio greater than 1 suitable for electron beam projection processing comprising the steps of: (a) depositing on a conformable substrate of glass, quartz, silicon or sapphire a layer of material selected from Ni, Cu, Fe, Zn, Co, Cd, Sn or alloy and mixtures thereof: (b) coating the product of step (a) with a suitable radiation sensitive material to a predetermined thickness; (c) transferring a pattern to said material by exposing it to a pattern of radiation and developing said exposed material; (d) plating a metal selected from Au and Cu into said pattern to a thickness no greater than said predetermined thickness; (e) coating the product of step (d) with a second radiation sensitive material to a second predetermined thickness; (f) transferring a second pattern to said second material by exposing it to a second pattern of radiation and developing said exposed material wherein said second pattern is geometrically similar to said first pattern; and, (g) plating additional metal into said second pattern in said second material, said additional metal selected from Au or Cu.
Claim 17
Independent Claim
185 words
A method of forming a thick self-supporting mask with aspect ratio greater than 1 suitable for electron beam projection processing comprising the steps of: (a) depositing on a conformable substrate of glass, quartz, silicon or sapphire a layer of material selected from Ni, Cu, Fe, Zn, Co, Cd, Sn or alloy and mixtures thereof: (b) coating the product of step (a) with a suitable radiation sensitive material to a predetermined thickness; (c) transferring a pattern to said material by exposing it to a pattern of radiation and developing said exposed material; (d) plating a metal selected from Au and Cu into said pattern to a thickness no greater than said predetermined thickness; (e) coating the product of step (d) with a second radiation sensitive material to a second predetermined thickness; (f) transferring a second pattern to said second material by exposing it to a second pattern of radiation and developing said exposed material wherein said second pattern is geometrically similar to said first pattern; and, (g) plating additional metal into said second pattern in said second material, said additional metal selected from Au or Cu.
Claim 18
Dependent Claim
16 words
The method of claim 15 wherein said predetermined thickness is smaller than said second predetermined thickness.
Claim 19
Dependent Claim
14 words
The method of claim 15 wherein said predetermined thickness is up to 2.5 microns.
Claim 20
Dependent Claim
19 words
The method of claim 15 wherein said step (c) employs an E-beam controlled to generate said pattern of radiation.
Claim 21
Dependent Claim
28 words
The method of claim 15 wherein at least one of said transferring steps employ a suitable forming mask to modulate said radiation to provide said pattern of radiation.
Claim 22
Dependent Claim
17 words
The method of claim 19 wherein said radiation of said at least one transferring step is X-rays.
Claim 23
Dependent Claim
26 words
The method of claim 19 wherein said radiation of said at least one transferring step is U.V. light with wavelength in the range of 3,000-4,000 angstroms.
Claim 24
Dependent Claim
20 words
The method of claim 15 which includes the additional steps of providing, by plating, a suitable frame for support purposes.
Claim 25
Dependent Claim
77 words
The method of claim 15 which includes the additional steps of: (i) coating the product of step (h) with a third radiation sensitive material, (j) transferring a third pattern to said third material by exposing it to a third pattern of radiation and developing said exposed material to provide, in said third material said third pattern, and (k) plating further metal into said third pattern in said third material, said further metal selected from Au or Cu.
Claim 26
Dependent Claim
17 words
The method of claim 23 in which said third pattern is geometrically similar to said second pattern.
Claim 27
Dependent Claim
24 words
The method of claim 23 in which said third pattern results in a third plated layer having a plurality of reinforcing ribs or areas.
Claim 28
Dependent Claim
46 words
The method of claim 15 which includes the further steps of lifting said mask off said substrate by: etching said intermediate layer with an etchant which will selectively attack said intermediate layer in the presence of Au or Cu, if said intermediate layer is a metal.
Claim 29
Dependent Claim
25 words
The method of claim 26 in which said etchant is selected from FeCl 3 , HNO 3 + H 2 O 2 and ammonium persulfate.
Claim 30
Dependent Claim
9 words
The product produced by the method of claim 1.
Claim 31
Dependent Claim
9 words
The product produced by the process of claim 15.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1981-03-20 | 1981-09-19 | 1982-03-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1985-03-20 | 1985-09-19 | 1986-03-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1989-03-20 | 1989-09-19 | 1990-03-21 | $7700.00 | Window Closed / Lapsed |