Inductively coupled RF plasma reactor with floating coil antenna for reduced capacitive coupling

Claim 2

An inductively coupled plasma reactor for use with a plasma source power RF generator having an RF frequency F, said reactor comprising: a reactor chamber adapted to admit a processing gas into said chamber and a pedestal for supporting a semiconductor substrate inside said chamber; an inductively coupled antenna adjacent said chamber for producing a plasma from said gas by inductive coupling of RF power; a plasma source power RF generator coupled to said antenna having a fundamental RF frequency F; and an isolation transformer coupling said RF generator to said inductive antenna, said isolation transformer being coreless and having an air gap between said primary and secondary windings.

Claim 3

The reactor of claim 1 wherein said isolation transformer comprises a primary winding coupled to said RF generator and a secondary winding coupled to said inductive antenna.

Claim 4

The reactor of claim 1 further comprising an RF impedance match network connected between said generator and said isolation transformer.

Claim 5

The reactor of claim 3 wherein said isolation transformer comprises a primary winding connected to said RF impedance match network and a secondary winding connected to said inductive antenna.

Claim 6

The reactor of claim 4 wherein said inductive antenna comprises a coiled conductor having a pair of ends, said coiled conductor being wound over a portion of said chamber and wherein said secondary winding is connected across said pair of ends of said coiled conductor.

Claim 7

The reactor of claim 1 wherein said secondary winding comprises a pair of successive turns and said primary winding comprises a turn disposed between said pair of successive turns of said secondary winding.

Claim 8

The reactor of claim 1 further comprising instrumentation for quantitatively measuring a capacitively coupled component of current from said plasma to said pedestal.

Claim 9

The reactor of claim 7 wherein said instrumentation comprises: a conductor connected between said pedestal and ground; a current probe adjacent said conductor; and means for observing a component of current through said conductor at a frequency equal to said fundamental frequency.

Claim 10

The reactor of claim 1 further comprising a bias RF generator connected between said pedestal and ground.

Claim 11

An inductively coupled plasma reactor for use with a plasma source power RF generator having an RF frequency F, said reactor comprising: a reactor chamber with a gas inlet for introducing a processing gas into said chamber and a pedestal for supporting a semiconductor substrate inside said chamber; an inductively coupled antenna adjacent said chamber for producing a plasma from said gas by inductive coupling of RF power, said inductively coupled antenna comprising a coiled conductor wound over a portion of said chamber, said coil conductor being terminated at a pair of ends; a plasma source power RF generator coupled to said antenna having a fundamental RF frequency F; an RF impedance match network having an input connected to an output of said RF generator; and an isolation transformer coupling said RF generator to said inductive antenna and having a primary winding connected to an output of said RF impedance match network and a secondary winding, said pair of ends being connected across said secondary winding, and wherein said isolation transformer is coreless and has an air gap between said primary and secondary windings.

Claim 12

An inductively coupled plasma reactor for use with a plasma source power RF generator having an RF frequency F, said reactor comprising: a reactor chamber with a gas inlet for introducing a processing gas into said chamber and a pedestal for supporting a semiconductor substrate inside said chamber; an inductively coupled antenna adjacent said chamber for producing a plasma from said gas by inductive coupling of RF power, said inductively coupled antenna comprising a coiled conductor wound over a portion of said chamber, said coil conductor being terminated at a pair of ends; a plasma source power RF generator coupled to said antenna having a fundamental RF frequency F; an RF impedance match network having an input connected to an output of said RF generator; and an isolation transformer coupling said RF generator to said inductive antenna and having a primary winding connected to an output of said RF impedance match network and a secondary winding, said pair of ends being connected across said secondary winding, and wherein said isolation transformer is coreless and has an air gap between said primary and secondary windings.

Claim 13

The reactor of claim 10 wherein said secondary winding comprises a pair of successive turns and said primary winding comprises a turn disposed between said pair of successive turns of said secondary winding.

Claim 14

The reactor of claim 10 further comprising a measurer for quantitatively measuring a capacitively coupled component of current from said plasma to said pedestal.

Claim 15

The reactor of claim 12 wherein said measurer comprises: a conductor connected between said pedestal and ground; a current probe adjacent said conductor; and means for observing a component of current through said conductor at a frequency equal to said fundamental frequency.

Claim 16

The reactor of claim 10 further comprising a bias RF generator connected between said pedestal and ground.

Claim 17

An inductively coupled plasma reactor for use with a plasma source power RF generator having an RF frequency F, said reactor comprising: a reactor chamber adapted to admit a processing gas into said chamber and a pedestal for supporting a semiconductor substrate inside said chamber; an inductively coupled antenna adjacent said chamber for producing a plasma from said gas by inductive coupling of RF power; a plasma source power RF generator coupled to said antenna having a fundamental RF frequency F; and an isolation transformer coupling said RF generator to said inductive antenna, said isolation transformer having a primary winding and a secondary winding wherein said primary winding is wound around a first portion of a ferrite core and the secondary winding is wound around a separate second portion of the ferrite core.

Claim 18

An inductively coupled plasma reactor for use with a plasma source power RF generator having an RF frequency F, said reactor comprising: a reactor chamber adapted to admit a processing gas into said chamber and a pedestal for supporting a semiconductor substrate inside said chamber; an inductively coupled antenna adjacent said chamber for producing a plasma from said gas by inductive coupling of RF power; a plasma source power RF generator coupled to said antenna having a fundamental RF frequency F; and an isolation transformer coupling said RF generator to said inductive antenna, said isolation transformer having a primary winding and a secondary winding wherein said primary winding is wound around a first portion of a ferrite core and the secondary winding is wound around a separate second portion of the ferrite core.

Claim 19

The reactor of claim 15 wherein the primary winding is coupled to said RF generator and the secondary winding coupled to said inductive antenna.

Claim 20

The reactor of claim 15 further comprising an RF impedance match network connected between said generator and said isolation transformer.

Claim 21

The reactor of claim 17 wherein the primary winding is connected to said RF impedance match network and the secondary winding connected to said inductive antenna.

Claim 22

The reactor of claim 18 wherein said inductive antenna comprises a coiled conductor having a pair of ends, said coiled conductor being wound over a portion of said chamber and wherein said secondary winding is connected across said pair of ends of said coiled conductor.

Claim 23

The reactor of claim 15 wherein said ferrite core has a quadrangular shape.

Claim 24

The reactor of claim 15 wherein said ferrite core has a circular shape.

Claim 25

The reactor of claim 21 wherein said ferrite core has a diameter of between about three and five inches.

Claim 26

The reactor of claim 15 wherein the primary winding and secondary winding each have between about five to ten turns.

Claim 27

The reactor of claim 15 further comprising instrumentation for quantitatively measuring a capacitively coupled component of current from said plasma to said pedestal.

Claim 28

The reactor of claim 24 wherein said instrumentation comprises: a conductor connected between said pedestal and ground; a current probe adjacent said conductor; and means for observing a component of current through said conductor at a frequency equal to said fundamental frequency.

Claim 29

The reactor of claim 15 further comprising a bias RF generator connected between said pedestal and ground.

Claim 30

The reactor of claim 6 wherein each turn of the secondary winding and the turn of the primary winding are circular and have a diameter of about two inches.

Claim 31

The reactor of claim 6 wherein each turn of the secondary winding is separated from the turn of the primary winding by 0.5 inches.