US5679152A
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Method of making a single crystals Ga*N article
Assignee: Wolfspeed Inc
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Filing: 1994-01-27
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Granted: 1997-10-21
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Expires: 2014-01-27
Abstract
Abstract A method of making a single crystal Ga*N article, including the steps of: providing a substrate of crystalline material having a surface which is epitaxially compatible with Ga*N; depositing a layer of single crystal Ga*N over the surface of the substrate; and etchably removing the substrate from the layer of single crystal Ga*N, to yield the layer of single crystal Ga*N as said single crystal Ga*N article. The invention in an article aspect relates to bulk single crystal Ga*N articles, such as are suitable for use as a substrate for the fabrication of microelectronic structures thereon, and to microelectronic devices comprising bulk single crystal Ga*N substrates, and their precursor structures.
Inventors
- 👤 Michael A. Tischler
- 👤 Thomas F. Kuech
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 00:53
CPC Classifications
C; C30; C30B; C30B33/00; B; B82; B82Y; B82Y15/00; C30B23/00; C30B23/02; C30B25/00; C30B25/02; C30B25/18; C30B29/00; C30B29/10; C30B29/36; C30B29/40; C30B29/403; C30B29/406; H; H10; H10H; H10H20/00; H10H20/01; H10H20/011; H10H20/013; H10H20/0133; H10H20/01335; H10H20/0137; H10P; H10P14/00; H10P14/20; H10P14/24; H10P14/29; H10P14/2901; H10P14/2902; H10P14/2905; H10P14/2921; H10P14/32; H10P14/3202; H10P14/3204; H10P14/3211; H10P14/3214; H10P14/3216; H10P14/3242; H10P14/3244; H10P14/3251; H10P14/3252; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3408; H10P14/3414; H10P14/3416; H10P14/3438; H10P14/3441; H10P14/3442; H10P14/3444; H10P14/3446; H10P14/38; H10H20/018; Y; Y10; Y10S; Y10S117/00; Y10S117/915; Y10T; Y10T428/00; Y10T428/13; Y10T428/21
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
91 words
A method of making a single crystal Ga*N article, including the steps of: providing a sacrificial base of crystalline material different from, and having a surface which is epitaxially compatible with, Ga*N; depositing a layer of single crystal Ga*N over a surface of the sacrificial base substrate; and etching away the sacrificial base from the layer of single crystal Ga*N while the crystal is close to the growth temperature, to recover the layer of single crystal Ga*N as a single crystal Ga*N article from which the sacrificial base has been removed.
Claim 2
Independent Claim
91 words
A method of making a single crystal Ga*N article, including the steps of: providing a sacrificial base of crystalline material different from, and having a surface which is epitaxially compatible with, Ga*N; depositing a layer of single crystal Ga*N over a surface of the sacrificial base substrate; and etching away the sacrificial base from the layer of single crystal Ga*N while the crystal is close to the growth temperature, to recover the layer of single crystal Ga*N as a single crystal Ga*N article from which the sacrificial base has been removed.
Claim 3
Dependent Claim
31 words
A method according to claim 1, wherein the sacrificial base of crystalline material is formed of a material selected from the group consisting of silicon, silicon carbide, gallium arsenide, and sapphire.
Claim 4
Dependent Claim
75 words
A method according to claim 1, wherein the sacrificial base of crystalline material is formed of a material selected from the group consisting of silicon, silicon carbide, and gallium arsenide, and the substrate is etched away from the layer of single crystal Ga*N at or near the growth temperature, by etching away of the sacrificial base using a gas which etches away the sacrificial base material but does not etch the single crystal Ga*N material.
Claim 5
Dependent Claim
85 words
A method according to claim 1, wherein the sacrificial base of crystalline material is formed of a material selected from the group consisting of silicon, silicon carbide, and gallium arsenide, and carbide, and gallium arsenide, and the sacrificial base is etched away from the layer of single crystal Ga*N at or near the growth temperature, by etching away of the sacrificial base using a gas which etches away the sacrificial base material at a more rapid rate than it etches the single crystal Ga*N material.
Claim 6
Dependent Claim
24 words
A method according to claim 1, wherein the layer of single crystal Ga*N is deposited directly on said surface of the crystalline sacrificial base.
Claim 7
Dependent Claim
44 words
A method according to claim 1, wherein an intermediate layer of epitaxially related crystalline material is deposited directly on said surface of the crystalline sacrificial base, and the layer of single crystal Ga*N is deposited directly on an upper surface of the intermediate layer.
Claim 8
Dependent Claim
35 words
A method according to claim 6, wherein the sacrificial base crystalline material comprises silicon, the intermediate layer of epitaxially related crystalline material comprises silicon, and the layer of single crystal Ga*N comprises a GaN layer.
Claim 9
Dependent Claim
20 words
A method according to claim 6, wherein the intermediate layer of epitaxially related crystalline material comprises a strained layer superlattice.
Claim 10
Dependent Claim
42 words
A method according to claim 8, wherein the strained superlattice comprises from 5 to 100 alternating monolayers of two materials selected from the group consisting of AIN, InN, GaN and alloys of SiC with one or more of AIN, InN, and GaN.
Claim 11
Dependent Claim
52 words
A method according to claim 1 wherein the sacrificial base crystalline material or a component of the sacrificial base crystalline material is diffused out of the sacrificial base into the Ga*N layer, for incorporation of the sacrificial base crystalline material or a component thereof in the Ga*N layer as a dopant thereof.
Claim 12
Dependent Claim
43 words
A method according to claim 10, wherein the sacrificial base crystalline material comprises silicon and wherein the silicon sacrificial base is etched away with HCl gas to yield the Ga*N layer having a silicon-doped Ga*N surface region for formation of ohmic contacts thereon.
Claim 13
Dependent Claim
17 words
A method according to claim 1, wherein the layer of single crystal Ga*N comprises a GaN layer.
Claim 14
Dependent Claim
49 words
A method according to claim 1, wherein the layer of single crystal Ga*N comprises an MGaN layer, wherein M is a metal compatible with Ga and N in the composition MGaN, and the composition MGaN is stable at standard temperature and pressure (25° C. and 1 atmosphere pressure) conditions.
Claim 15
Dependent Claim
18 words
A method according to claim 13, wherein M is selected from the group consists of AI and In.
Claim 16
Dependent Claim
29 words
A method according to claim 1 where Ga*N is selected from the group consisting of SiC and alloys of SiC with one or more of AIN, GaN and InN.
Claim 17
Dependent Claim
24 words
A method according to claim 1 where the thickness of the sacrificial base is less than the thickness of the single crystal Ga*N layer.
Claim 18
Dependent Claim
29 words
A method according to claim 1, where the single crystal Ga*N layer comprises a compositionally graded ternary metal nitride selected from the group consisting of AIGaN, InGaN, and AIInN.
Claim 19
Dependent Claim
16 words
A method according to claim 1, where the single crystal Ga*N layer comprises varying dopant concentration.
References Cited (Backward Citations)
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