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US5677089A
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Photomask for forming T-gate electrode of the semiconductor device
Assignee: Electronics and Telecommunications Research Institute
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Filing: 1995-11-01
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Granted: 1997-10-14
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Expires: 2015-11-01
Abstract
Abstract A photomask according to the present invention for forming a T-gate electrode for Metal Semiconductor Field Effect Transistor and High Electron Mobility Transistor by performing each of the exposing process and the developing process once is disclosed. The photomask is composed of a primary mask positioned at the top surface of the transparent substrate made of Silica glass and a secondary mask positioned at the top surface of the transparent substrate for enhancing the resolution of the primary mask. The primary mask includes an opaque layer in which a material for mask pattern of, for example, Cr or Fe 2 O 3 , or other opaque materials is deposited at the bottom surface of the transparent substrate, thereby preventing the light radiated from being transmitted, and a first and second patterns for forming the leg portion and the head portion of the T-gate electrode by simultaneously radiating the light into the exposed portion of the transparent substrate. The secondary mask includes a phase shifting part for shifting the phase of the light so radiated to effect the diffraction and interference phenomenon of the light transmitted through the predetermined portion of the top surface of the transparent substrate, which is etched to a predetermined extent, and an optical transmissive part for transmitting the light as it is, without shifting the phase of the light. According to the present invention, a simplified photoresist pattern for forming a T-gate electrode of the semiconductor device can be obtained by applying the exposing process and the developing process once onto a single layer of the resist, using the photolithography. The superior resolution ability can also be achieved by controlling the diffraction and interference phenomenon of the light transmitted through the phase shifting part and the transmissive part of the secondary.
Inventors
- 👤 Byung-Sun Park
- 👤 Yong-Ho Oh
- 👤 Sang-Soo Choi
- 👤 Hyung-Joun Yoo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 05:21
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/26; G03F1/29; G03F1/50
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
195 words
A photomask for forming T-gate electrode of the semiconductor device having a wide head portion and a narrow leg portion comprises: a transparent substrate having a top surface and a bottom surface; and a primary mask for forming a first pattern for said leg portion and a second pattern for said head portion formed by depositing an opaque layer at a predetermined portion of the bottom surface of said transparent substrate, so as not to permit light radiated onto the top surface to be transmitted, such that said first pattern is formed in stripe shape in a longitudinal direction to expose a portion of the bottom surface of said transparent substrate at which said opaque layer is not deposited, and said second pattern is formed in stripe shape at the both sides of said first pattern in parallel to said first pattern, with said second pattern being spaced apart from said opaque layer at a predetermined distance, whereby a line-width of said first and second pattern is controlled by increasing the intensity of the light being transmitted into said first pattern as compared to that into said second pattern, when exposing to a preselected light.
Claim 2
Dependent Claim
195 words
A photomask for forming T-gate electrode of the semiconductor device having a wide head portion and a narrow leg portion comprises: a transparent substrate having a top surface and a bottom surface; and a primary mask for forming a first pattern for said leg portion and a second pattern for said head portion formed by depositing an opaque layer at a predetermined portion of the bottom surface of said transparent substrate, so as not to permit light radiated onto the top surface to be transmitted, such that said first pattern is formed in stripe shape in a longitudinal direction to expose a portion of the bottom surface of said transparent substrate at which said opaque layer is not deposited, and said second pattern is formed in stripe shape at the both sides of said first pattern in parallel to said first pattern, with said second pattern being spaced apart from said opaque layer at a predetermined distance, whereby a line-width of said first and second pattern is controlled by increasing the intensity of the light being transmitted into said first pattern as compared to that into said second pattern, when exposing to a preselected light.
Claim 3
Dependent Claim
21 words
A photomask for forming T-gate electrode of the semiconductor device of claim 1 wherein said transparent substrate is a Silica glass.
Claim 4
Dependent Claim
38 words
A photomask for forming T-gate electrode of the semiconductor device of claim 1 wherein said opaque layer is one selected from the group consisting of Cr and Fe 2 O 3 at a predetermined thickness of 500-1500 Angstrom.
Claim 5
Dependent Claim
36 words
A photomask for forming T-gate electrode of the semiconductor device of claim 1 wherein said first pattern has a predetermined thickness of 0.24-0.28 micrometer, and said second pattern has a predetermined thickness of 0.22-0.26 micrometer, respectively.
Claim 6
Dependent Claim
36 words
A photomask for forming T-gate electrode of the semiconductor device of claim 4 wherein said first second pattern and said second pattern are spaced apart from each other as much width as said second pattern has.
Claim 7
Dependent Claim
24 words
A photomask for forming T-gate electrode of the semiconductor device of claim 5 wherein said secondary mask is formed integrally with said transparent substrate.
Claim 8
Dependent Claim
24 words
A photomask for forming T-gate electrode of the semiconductor device of claim 6 wherein said secondary mask is formed separately from said transparent substrate.
Claim 9
Dependent Claim
168 words
A photomask for forming T-gate electrode of the semiconductor device of claim 1 further comprises: a secondary mask formed on the top surface of said transparent substrate for enhancing the resolution ability of said primary mask, said secondary mask further including: a plurality of phase shifting parts, each having a predetermined thickness, formed by etching predetermined portions of the top surface of said transparent substrate to a predetermined depth, for shifting the phase of light to be transmitted, whereby the remaining portions of said transparent substrate being not etched define a plurality of optical transmissive parts, each having a predetermined thickness, for permitting the light to be transmitted without shifting the phase of light, with said plurality of optical transmissive parts and phase shifting parts being sequentially and alternately arranged in stripe shape in parallel direction with those of said first and second patterns, such that the light passing therethrough of said secondary mask has a phase difference therebetween, thereby enhancing the resolution ability of said primary mask.
Claim 10
Dependent Claim
58 words
A photomask for forming T-gate electrode of the semiconductor device of claim 8 wherein the difference in thickness (d) between said optical transmissive part and said phase shifting part is expressed by the equation as follow: d=λ/2(n-1) (1) (wherein n is the refraction rate of said phase shifting part, and λ is the wavelength of the light, respectively).
Claim 11
Dependent Claim
38 words
A photomask for forming T-gate electrode of the semiconductor device of claim 9 wherein said light transmissive part and said phase shifting part have a width which is twice that of said first pattern of said primary mask.
Claim 12
Dependent Claim
339 words
A photomask for forming T-gate electrode of the semiconductor device having a head portion and a leg portion comprises: a transparent substrate having a top surface and a bottom surface; a primary mask for forming a first pattern for said leg portion and a second pattern for said head portion formed by depositing an opaque layer at a predetermined portion of the bottom surface of said transparent substrate, so as not to permit light radiated onto the top surface to be transmitted, such that said first pattern is formed in stripe shape in a longitudinal direction to expose a portion of the bottom surface of said transparent substrate at which said opaque layer is not deposited, and said second pattern is formed in stripe shape at the both sides of said first pattern in parallel direction with that of said first pattern, with said second pattern being spaced apart from said opaque layer at a predetermined distance, whereby a line-width of said first and second pattern is controlled by increasing the intensity of the light being transmitted into said first pattern as compared to that into said second pattern, when exposing to a preselected light, and a secondary mask formed on the top surface of said transparent substrate for enhancing the resolution ability of said primary mask, said secondary mask further including: a plurality of phase shifting parts formed by etching predetermined portions of the top surface of said transparent substrate to a predetermined depth for shifting the phase of light to be transmitted, whereby the remaining portions of said transparent substrate being not etched define a plurality of optical transmissive parts for permitting the light to be transmitted without shifting the phase of light, with said plurality of optical transmissive parts and phase shifting parts being sequentially and alternately arranged in stripe shape in parallel direction with those of said first and second patterns, such that the light passing therethrough of said secondary mask has a phase difference therebetween, thereby enhancing the resolution ability of said primary mask.
Claim 13
Dependent Claim
339 words
A photomask for forming T-gate electrode of the semiconductor device having a head portion and a leg portion comprises: a transparent substrate having a top surface and a bottom surface; a primary mask for forming a first pattern for said leg portion and a second pattern for said head portion formed by depositing an opaque layer at a predetermined portion of the bottom surface of said transparent substrate, so as not to permit light radiated onto the top surface to be transmitted, such that said first pattern is formed in stripe shape in a longitudinal direction to expose a portion of the bottom surface of said transparent substrate at which said opaque layer is not deposited, and said second pattern is formed in stripe shape at the both sides of said first pattern in parallel direction with that of said first pattern, with said second pattern being spaced apart from said opaque layer at a predetermined distance, whereby a line-width of said first and second pattern is controlled by increasing the intensity of the light being transmitted into said first pattern as compared to that into said second pattern, when exposing to a preselected light, and a secondary mask formed on the top surface of said transparent substrate for enhancing the resolution ability of said primary mask, said secondary mask further including: a plurality of phase shifting parts formed by etching predetermined portions of the top surface of said transparent substrate to a predetermined depth for shifting the phase of light to be transmitted, whereby the remaining portions of said transparent substrate being not etched define a plurality of optical transmissive parts for permitting the light to be transmitted without shifting the phase of light, with said plurality of optical transmissive parts and phase shifting parts being sequentially and alternately arranged in stripe shape in parallel direction with those of said first and second patterns, such that the light passing therethrough of said secondary mask has a phase difference therebetween, thereby enhancing the resolution ability of said primary mask.
Claim 14
Dependent Claim
24 words
A photomask for forming T-gate electrode of the semiconductor device of claim 11 wherein said secondary mask is formed integrally with said transparent substrate.
Claim 15
Dependent Claim
24 words
A photomask for forming T-gate electrode of the semiconductor device of claim 11 wherein said secondary mask is formed separately from said transparent substrate.
Claim 16
Dependent Claim
196 words
A photomask for forming T-gate electrode of the semiconductor device having a head portion and a leg portion comprises: a transparent substrate having a top surface and a bottom surface; and a primary mask for forming a mask pattern formed in stripe shape for passing the light without reducing the intensity of the light, said mask pattern being formed by depositing an opaque layer at predetermined portions of the bottom surface of said transparent substrate, so as not to permit light radiated onto the top surface to be transmitted, and a semitransparent layer formed between said predetermined portions, at which said opaque layer is deposited, for permitting the light to be passed by reducing the intensity of the light transmitted, such that said mask pattern is defined in a longitudinal direction at a portion at which said opaque layer and said semitransparent layer are not deposited to expose a portion of the bottom surface of said transparent substrate, whereby a line-width of said first and second pattern is controlled by increasing the intensity of the light being transmitted into said first pattern as compared to that into said second pattern, when exposing to a preselected light.
Claim 17
Dependent Claim
196 words
A photomask for forming T-gate electrode of the semiconductor device having a head portion and a leg portion comprises: a transparent substrate having a top surface and a bottom surface; and a primary mask for forming a mask pattern formed in stripe shape for passing the light without reducing the intensity of the light, said mask pattern being formed by depositing an opaque layer at predetermined portions of the bottom surface of said transparent substrate, so as not to permit light radiated onto the top surface to be transmitted, and a semitransparent layer formed between said predetermined portions, at which said opaque layer is deposited, for permitting the light to be passed by reducing the intensity of the light transmitted, such that said mask pattern is defined in a longitudinal direction at a portion at which said opaque layer and said semitransparent layer are not deposited to expose a portion of the bottom surface of said transparent substrate, whereby a line-width of said first and second pattern is controlled by increasing the intensity of the light being transmitted into said first pattern as compared to that into said second pattern, when exposing to a preselected light.
Claim 18
Dependent Claim
161 words
A photomask for forming T-gate electrode of the semiconductor device of claim 14 further include said a secondary mask formed on the top surface of said transparent substrate for enhancing the resolution ability of said primary mask, said secondary mask further comprises: a plurality of phase shifting parts formed by etching predetermined portions of the top surface of said transparent substrate to a predetermined depth for shifting the phase of light to be transmitted, whereby the remaining portions of said transparent substrate being not etched define a plurality of optical transmissive parts for permitting the light to be transmitted without shifting the phase of light, with said plurality of optical transmissive parts and phase shifting parts being sequentially and alternately arranged in stripe shape in parallel direction with that of said mask pattern of said primary pattern, such that the light passing therethrough of said secondary mask has a phase difference therebetween, thereby enhancing the resolution ability of said primary mask.
Claim 19
Dependent Claim
24 words
A photomask for forming T-gate electrode of the semiconductor device of claim 15 wherein said secondary mask is formed integrally with said transparent substrate.
Claim 20
Dependent Claim
24 words
A photomask for forming T-gate electrode of the semiconductor device of claim 15 wherein said secondary mask is formed separately from said transparent substrate.
Claim 21
Dependent Claim
38 words
A photomask for forming T-gate electrode of the semiconductor device of claim 14 wherein said opaque layer is one selected from the group consisting of Cr and Fe 2 O 3 at a predetermined thickness of 500-1500 Angstrom.
Claim 22
Dependent Claim
38 words
A photomask for forming T-gate electrode of the semiconductor device of claim 14 wherein said semitransparent layer is one selected from the group consisting of Cr and Fe 2 O 3 at a predetermined thickness of 100-300 Angstrom.
Claim 23
Dependent Claim
53 words
A photomask for forming T-gate electrode of the semiconductor device of claim 14 further comprises: a phase shifting layer having a predetermined thickness formed on the surface of said opaque layer and said semitransparent layer except for said mask pattern of said primary mask for shifting the phase of light to be transmitted.
Claim 24
Dependent Claim
25 words
A photomask for forming T-gate electrode of the semiconductor device of claim 20 wherein said phase shifting layer is made of SiO 2 or photoresist.
Claim 25
Dependent Claim
52 words
A photomask for forming T-gate electrode of the semiconductor device of claim 21 wherein the thickness (d2) of said phase shifting layer is expressed by the equation (2) as follow: d2=λ/2(n1-1) (2) (where n is the refraction rate of said phase shifting layer, and λ is the wavelength of the light, respectively).
Claim 26
Dependent Claim
28 words
A photomask for forming T-gate electrode of the semiconductor device of claim 14 wherein the level of said mask pattern is lower than that of said transparent substrate.
References Cited (Backward Citations)
US5480746A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-10-13 | 2001-04-14 | 2001-10-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-10-13 | 2005-04-14 | 2005-10-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-10-13 | 2009-04-14 | 2009-10-14 | $7700.00 | Window Closed / Lapsed |