Photomask and method of forming resist pattern using the same

Claim 1

A method of forming a line and space resist pattern by projection exposure of a positive type resist, comprising the steps of: providing a photomask including a mask substrate comprising light-transmissive material; an array of opaque stripes having spaces therebetween formed on said substrate, said opaque stripes being arranged on said substrate at a given pitch and having widths which are greater than the spaces between adjacent opaque stripes; and phase shifters formed on said substrate in the spaces between every other opaque stripe; and performing projection exposure on said positive resist using said photomask in a single step for enough time to prevent transfer of edges of said phase shifters onto said resist pattern and to enable a line and a space of said resist pattern to have substantially the same width.

Claim 2

A method of forming a line and space resist pattern by projection exposure of a positive type resist, comprising the steps of: providing a photomask including a mask substrate comprising light-transmissive material; an array of opaque stripes having spaces therebetween formed on said substrate, said opaque stripes being arranged on said substrate at a given pitch and having widths which are greater than the spaces between adjacent opaque stripes; and phase shifters formed on said substrate in the spaces between every other opaque stripe; and performing projection exposure on said positive resist using said photomask in a single step for enough time to prevent transfer of edges of said phase shifters onto said resist pattern and to enable a line and a space of said resist pattern to have substantially the same width.

Claim 5

A method of forming a line and space resist pattern by projection exposure of a positive type resist comprising the steps of: providing a photomask including a mask substrate comprising light-transmissive material; opaque stripes having spaces therebetween formed on said substrate, said opaque stripes being arranged on said substrate at a given pitch, each of said opaque stripes having a first width; and phase shifters having edges thereon, said phase shifters being formed on light transmissive areas of said substrate in the spaces between every other opaque stripe, said spaces having second widths, the first widths of said opaque stripes being larger than said second widths; and performing projection exposure on said positive resist using said photomask in one step for enough time to prevent transfer of the edges of said phase shifters onto said resist pattern and to enable a line and a space of said resist pattern to have substantially the same width.

Claim 6

A method of forming a line and space resist pattern by projection exposure of a positive type resist comprising the steps of: providing a photomask including a mask substrate comprising light-transmissive material; opaque stripes having spaces therebetween formed on said substrate, said opaque stripes being arranged on said substrate at a given pitch, each of said opaque stripes having a first width; and phase shifters having edges thereon, said phase shifters being formed on light transmissive areas of said substrate in the spaces between every other opaque stripe, said spaces having second widths, the first widths of said opaque stripes being larger than said second widths; and performing projection exposure on said positive resist using said photomask in one step for enough time to prevent transfer of the edges of said phase shifters onto said resist pattern and to enable a line and a space of said resist pattern to have substantially the same width.

Claim 7

A method of forming a line and space resist pattern by projection exposure of a positive type resist, the line and the space of said resist pattern having substantially the same width, comprising the steps of: providing a photomask including a mask substrate comprising light-transmissive material; an array of opaque stripes having spaces therebetween formed on said substrate, said opaque stripes being arranged on said substrate at a given pitch, each opaque stripe having a width which is greater than the spaces between adjacent opaque stripes and greater than the widths of the lines and spaces of said resist pattern; and phase shifters formed on said substrate in the spaces between alternate opaque stripes, each of said phase shifters having an edge contiguous with the light-transmissive material of said mask substrate; and performing projection exposure on said positive resist using said photomask in a single step for enough time to prevent transfer of the edges of said phase shifters onto said resist pattern and to enable a line and a space of said resist pattern to have substantially the same width.

Claim 8

A method of forming a line and space resist pattern by projection exposure of a positive type resist, the line and the space of said resist pattern having substantially the same width, comprising the steps of: providing a photomask including a mask substrate comprising light-transmissive material; an array of opaque stripes having spaces therebetween formed on said substrate, said opaque stripes being arranged on said substrate at a given pitch, each opaque stripe having a width which is greater than the spaces between adjacent opaque stripes and greater than the widths of the lines and spaces of said resist pattern; and phase shifters formed on said substrate in the spaces between alternate opaque stripes, each of said phase shifters having an edge contiguous with the light-transmissive material of said mask substrate; and performing projection exposure on said positive resist using said photomask in a single step for enough time to prevent transfer of the edges of said phase shifters onto said resist pattern and to enable a line and a space of said resist pattern to have substantially the same width.