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Process for preparing group Ib-IIIa-VIa semiconducting films

Assignee: University of Delaware
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Filing: 1995-11-30
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Granted: 1997-10-07
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Expires: 2015-11-30
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Abstract

Abstract Methods are provided for the production of supported monophasic group I-III-VI semiconductor films. In the subject methods, a substrate is coated with group I and III elements and then contacted with a reactive group VI element containing atmosphere under conditions sufficient to produce a substrate coated with a composite of at least two different group I-III-IV alloys. The resultant composite coated substrate is then annealed in an inert atmosphere under conditions sufficient to convert the composite coating to a monophasic group I-III-VI semiconductor film. The resultant supported semiconductor films find use in photovoltaic applications, particularly as absorber layers in solar cells.

Inventors

  • 👤 Robert W. Birkmire
  • 👤 Jerold M. Schultz
  • 👤 Matheswaran Marudachalam
  • 👤 Habib Hichri

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-06 06:30
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/20; H10P14/34; H10P14/3402; H10P14/3436; H10F; H10F77/00; H10F77/10; H10F77/12; H10F77/126; H10P14/203; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y02E10/541; Y10; Y10S; Y10S438/00; Y10S438/93

Claims Analysis

Total Claims: 14
Claim 1
Independent Claim 95 words
A method for producing supported group Ib-IIIa-VIa semiconductor films, comprising the steps of: a) coating a substrate with group Ib and IIIa elements to produce a coated substrate; b) heating said coated substrate in the presence of a reactive group VIa element containing atmosphere under conditions sufficient to produce a composite coated substrate, wherein said composite comprises at least two different group Ib-IIIa-VIa alloys; c) annealing said composite coated substrate in an inert atmosphere to convert said composite coating to a monophasic group Ib-III-VIa semiconductor film; whereby a supported group Ib-IIIa-VIa semiconductor film is produced.
Claim 2
Independent Claim 95 words
A method for producing supported group Ib-IIIa-VIa semiconductor films, comprising the steps of: a) coating a substrate with group Ib and IIIa elements to produce a coated substrate; b) heating said coated substrate in the presence of a reactive group VIa element containing atmosphere under conditions sufficient to produce a composite coated substrate, wherein said composite comprises at least two different group Ib-IIIa-VIa alloys; c) annealing said composite coated substrate in an inert atmosphere to convert said composite coating to a monophasic group Ib-III-VIa semiconductor film; whereby a supported group Ib-IIIa-VIa semiconductor film is produced.
Claim 3
Dependent Claim 21 words
The method according to claim 1, wherein said group IIIa element comprises Ga in combination with an additional group IIIa element.
Claim 4
Dependent Claim 39 words
The method according to claim 1, wherein said method further comprises contacting said supported semiconductor film with a reactive group VIa element containing atmosphere under conditions sufficient to increase the group VIa element content of said supported semiconductor film.
Claim 5
Independent Claim 122 words
A method for producing a group Ib-Ga-IIIa-Se semiconductor film, comprising the steps of: a) coating a substrate with Ga, a group Ib, and an additional group IIIa element to produce a coated substrate; b) heating said coated substrate in the presence of a selenium containing atmosphere at a temperature ranging from about 400° to 450° C. for about 80 to 100 min to produce a composite coated substrate, wherein said composite comprises at least two different group Ib-IIIa-Se alloys; c) annealing said composite coated substrate in an inert atmosphere at a temperature ranging from about 500° to 600° C. for about 60 to 120 min to produce a monophasic group Ib-Ga-IIIa-Se semiconductor film; whereby a supported group Ib-Ga-IIIa-Se semiconductor film is produced.
Claim 6
Independent Claim 122 words
A method for producing a group Ib-Ga-IIIa-Se semiconductor film, comprising the steps of: a) coating a substrate with Ga, a group Ib, and an additional group IIIa element to produce a coated substrate; b) heating said coated substrate in the presence of a selenium containing atmosphere at a temperature ranging from about 400° to 450° C. for about 80 to 100 min to produce a composite coated substrate, wherein said composite comprises at least two different group Ib-IIIa-Se alloys; c) annealing said composite coated substrate in an inert atmosphere at a temperature ranging from about 500° to 600° C. for about 60 to 120 min to produce a monophasic group Ib-Ga-IIIa-Se semiconductor film; whereby a supported group Ib-Ga-IIIa-Se semiconductor film is produced.
Claim 7
Dependent Claim 35 words
The method according to claim 4, wherein said method further comprises contacting said supported semiconductor film with a reactive selenium containing atmosphere under conditions sufficient to increase the selenium content of said supported semiconductor film.
Claim 8
Dependent Claim 22 words
The method according to claim 4, wherein said group lb element is selected from the group consisting of Cu, Ag, and Au.
Claim 9
Dependent Claim 23 words
The method according to claim 4, wherein said additional group IIIa element is selected from the group consisting of In, Al, and Tl.
Claim 10
Dependent Claim 20 words
The method according to claim 4, wherein said Se containing atmosphere comprises at least one of H2Se and elemental Se.
Claim 11
Independent Claim 135 words
A method for producing a supported CuIn 1-x Ga x Se 2 semiconductor film, wherein x ranges from 0.1 to 0.9 comprising the steps of: a) coating a substrate with Cu, In, and Ga to produce a coated substrate; b) heating said coated substrate in the presence of a reactive selenium containing atmosphere at a temperature ranging from about 400°to 450° C. for about 80 to 100 min to produce a composite coated substrate, where said composite comprises CuInSe 2 and CuGaSe 2 alloys; c) annealing said composite coated substrate in an inert atmosphere at a temperature ranging from about 500° to 650° C. for about 60 to 120 min to produce a monophasie group CuIn 1-x Ga x Se 2 layer; whereby a supported CuIn 1-x Ga x Se 2 semiconductor film is produced.
Claim 12
Independent Claim 135 words
A method for producing a supported CuIn 1-x Ga x Se 2 semiconductor film, wherein x ranges from 0.1 to 0.9 comprising the steps of: a) coating a substrate with Cu, In, and Ga to produce a coated substrate; b) heating said coated substrate in the presence of a reactive selenium containing atmosphere at a temperature ranging from about 400°to 450° C. for about 80 to 100 min to produce a composite coated substrate, where said composite comprises CuInSe 2 and CuGaSe 2 alloys; c) annealing said composite coated substrate in an inert atmosphere at a temperature ranging from about 500° to 650° C. for about 60 to 120 min to produce a monophasie group CuIn 1-x Ga x Se 2 layer; whereby a supported CuIn 1-x Ga x Se 2 semiconductor film is produced.
Claim 13
Dependent Claim 35 words
The method according to claim 9 wherein said method further comprises contacting said supported semiconductor film with a reactive selenium containing atmosphere under conditions sufficient to increase the selenium content of said supported semiconductor film.
Claim 14
Dependent Claim 22 words
The method according to claim 10, wherein said Se containing atmosphere comprises at least one of H 2 Se and elemental Se.

References Cited (Backward Citations)

EP0318315A2 Cited
US4915745A Cited
US4915745B1 Cited
US5028274A Cited
US5356839A Cited
US5436204A Cited

USPTO Annuity & Maintenance Windows

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