US5674357A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor substrate cleaning process
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1995-08-30
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Granted: 1997-10-07
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Expires: 2015-08-30
Abstract
Abstract A method for removing particulate residues from semiconductor substrates. A semiconductor substrate is provided which has upon its surface a particulate residue. At minimum, either the semiconductor substrate or the particulate residue is susceptible to oxidation upon exposure to an oxygen containing plasma. The semiconductor substrate and the particulate residue are exposed to an oxygen plasma. The particulates are then rinsed from the surface of the semiconductor substrate with deionized water.
Inventors
- 👤 Yi-Lin Sun
- 👤 Ying-Chen Chao
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 23:54
CPC Classifications
H; H10; H10P; H10P70/00; H10P70/10; H10P70/18; H10P70/20; H10P70/27; H10P70/273
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
101 words
A method for removing particulate residues from semiconductor substrates comprising: providing a semiconductor substrate having a particulate residue formed thereover, the particulate residue being formed from a patterned layer also formed over the semiconductor substrate, a minimum of either the semiconductor substrate or the particulate residue being susceptible to oxidation in a plasma comprised of oxygen; exposing the semiconductor substrate and the particulate residue to the plasma comprised of oxygen; and rinsing the particulate residue from the semiconductor substrate with deionized water, where the particulate residue is rinsed from the semiconductor substrate while the patterned layer remains upon the semiconductor substrate.
Claim 2
Independent Claim
101 words
A method for removing particulate residues from semiconductor substrates comprising: providing a semiconductor substrate having a particulate residue formed thereover, the particulate residue being formed from a patterned layer also formed over the semiconductor substrate, a minimum of either the semiconductor substrate or the particulate residue being susceptible to oxidation in a plasma comprised of oxygen; exposing the semiconductor substrate and the particulate residue to the plasma comprised of oxygen; and rinsing the particulate residue from the semiconductor substrate with deionized water, where the particulate residue is rinsed from the semiconductor substrate while the patterned layer remains upon the semiconductor substrate.
Claim 3
Dependent Claim
15 words
The method of claim 1 wherein the particulate residue is formed from an organic material.
Claim 4
Dependent Claim
13 words
The method of claim 2 wherein the organic material is a photoresist material.
Claim 5
Dependent Claim
39 words
The method of claim 1 wherein the plasma comprised of oxygen is formed from an oxygen containing plasma chosen from the group of oxygen containing plasmas consisting of oxygen plasmas containing at least 50 percent oxygen and ozone plasmas.
Claim 6
Dependent Claim
17 words
The method of claim 1 wherein the plasma comprised of oxygen contains at least 50 percent oxygen.
Claim 7
Dependent Claim
23 words
The method of claim 1 wherein the plasma comprised of oxygen is formed at a radio frequency power of 300 to 700 watts.
Claim 8
Dependent Claim
31 words
The method of claim 6 wherein the semiconductor substrate and the particulate residue are exposed to the plasma comprise oxygen for a time period of about 3 to about 180 seconds.
Claim 9
Independent Claim
114 words
A method for removing an organic particulate residue from a semiconductor substrate comprising: providing a semiconductor substrate having formed thereover an organic particulate residue, the organic particulate residue being formed from a patterned organic material layer also formed over the semiconductor substrate, a minimum of either the semiconductor substrate or the organic particulate residue being susceptible to oxidation in a plasma comprised of oxygen; exposing the semiconductor substrate and the organic particulate residue to the plasma comprised of oxygen; and rinsing the organic particulate residue from the semiconductor substrate with deionized water, where the organic particulate residue is rinsed from the semiconductor substrate while the patterned organic material layer remains upon the semiconductor substrate.
Claim 10
Independent Claim
114 words
A method for removing an organic particulate residue from a semiconductor substrate comprising: providing a semiconductor substrate having formed thereover an organic particulate residue, the organic particulate residue being formed from a patterned organic material layer also formed over the semiconductor substrate, a minimum of either the semiconductor substrate or the organic particulate residue being susceptible to oxidation in a plasma comprised of oxygen; exposing the semiconductor substrate and the organic particulate residue to the plasma comprised of oxygen; and rinsing the organic particulate residue from the semiconductor substrate with deionized water, where the organic particulate residue is rinsed from the semiconductor substrate while the patterned organic material layer remains upon the semiconductor substrate.
Claim 11
Dependent Claim
50 words
The method of claim 8 wherein the plasma comprised of oxygen is formed from at least 50 percent oxygen at about 300 to 700 watts radio frequency power, the semiconductor substrate and the organic particulate residue being exposed to the oxygen containing plasma for about 3 to about 180 seconds.
Claim 12
Independent Claim
108 words
A method for removing a photoresist particulate residue from a patterned photoresist coated semiconductor substrate comprising: providing a semiconductor substrate having a patterned photoresist coating upon its surface and a photoresist particulate residue upon and within the patterns of the patterned photoresist coating, both the patterned photoresist coating and the photoresist particulate residue being susceptible to oxidation in a plasma comprised of oxygen; exposing the patterned photoresist coating and the photoresist particulate residue to the plasma comprised of oxygen; and rinsing the photoresist particulate residue from upon and within the patterns of the patterned photoresist coating with deionized water, the patterned photoresist coating remaining upon the semiconductor substrate.
Claim 13
Independent Claim
108 words
A method for removing a photoresist particulate residue from a patterned photoresist coated semiconductor substrate comprising: providing a semiconductor substrate having a patterned photoresist coating upon its surface and a photoresist particulate residue upon and within the patterns of the patterned photoresist coating, both the patterned photoresist coating and the photoresist particulate residue being susceptible to oxidation in a plasma comprised of oxygen; exposing the patterned photoresist coating and the photoresist particulate residue to the plasma comprised of oxygen; and rinsing the photoresist particulate residue from upon and within the patterns of the patterned photoresist coating with deionized water, the patterned photoresist coating remaining upon the semiconductor substrate.
Claim 14
Dependent Claim
50 words
The method of claim 10 wherein the plasma comprised of oxygen is formed from at least 50 percent oxygen at about 300 to 700 watts radio frequency power, and the patterned photoresist coating and the photoresist particulate residue are exposed to the oxygen containing plasma for 3 to 180 seconds.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-10-06 | 2001-04-07 | 2001-10-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-10-06 | 2005-04-07 | 2005-10-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-10-06 | 2009-04-07 | 2009-10-07 | $7700.00 | Window Closed / Lapsed |