US5672543A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Volcano defect-free tungsten plug
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1996-04-29
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Granted: 1997-09-30
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Expires: 2016-04-29
Abstract
Abstract A new method of metallization using a tungsten plug is described. Semiconductor device structures are provided in and on a semiconductor substrate. An insulating layer covers the semiconductor device structures wherein a contact opening is made through the insulating layer to the semiconductor substrate. A barrier layer is deposited conformally over the surface of the insulating layer and within the contact opening. A stress buffer layer is deposited overlying the barrier layer wherein the stress buffer layer prevents volcano defects. A tungsten plug is formed within the contact opening to complete the formation of the tungsten plug metallization without volcano defects in the fabrication of an integrated circuit device.
Inventors
- 👤 Chaur Rong Chang
- 👤 Po-Tao Chu
- 👤 Tzu-Min Peng
- 👤 Kuang-Hui Chang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 01:09
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/032; H10W20/033; H10W20/056; Y; Y10; Y10S; Y10S438/00; Y10S438/937
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
134 words
A method of forming tungsten plug metallization without volcano defects in the fabrication of integrated circuits comprising: providing semiconductor device structures in and on a semiconductor substrate; providing an insulating layer covering said semiconductor device structures wherein a contact opening is made through said insulating layer to said semiconductor substrate; depositing a barrier layer conformally over the surface of said insulating layer and within said contact opening; depositing a stress buffer layer comprising one of the group containing titanium silicide, and cobalt silicide and having a thickness of between about 500 and 1500 Angstroms overlying said barrier layer wherein said stress buffer layer prevents volcano defects; and forming a tungsten plug within said contact opening to complete said formation of said tungsten plug metallization without volcano defects in said fabrication of said integrated circuit.
Claim 2
Independent Claim
134 words
A method of forming tungsten plug metallization without volcano defects in the fabrication of integrated circuits comprising: providing semiconductor device structures in and on a semiconductor substrate; providing an insulating layer covering said semiconductor device structures wherein a contact opening is made through said insulating layer to said semiconductor substrate; depositing a barrier layer conformally over the surface of said insulating layer and within said contact opening; depositing a stress buffer layer comprising one of the group containing titanium silicide, and cobalt silicide and having a thickness of between about 500 and 1500 Angstroms overlying said barrier layer wherein said stress buffer layer prevents volcano defects; and forming a tungsten plug within said contact opening to complete said formation of said tungsten plug metallization without volcano defects in said fabrication of said integrated circuit.
Claim 3
Dependent Claim
45 words
The method according to claim 1 wherein said barrier layer is composed of a first layer of titanium having a thickness of between about 500 and 1000 Angstroms and a second layer of titanium nitride having a thickness of between about 500 and 1500 Angstroms.
Claim 4
Dependent Claim
78 words
The method according to claim 1 wherein said tungsten plug is deposited using WF 6 gas as a precursor and wherein the presence of said stress buffer layer prevents the formation of stress cracks in said underlying barrier layer and wherein the prevention of said stress cracks prevents the penetration of said WF 6 gas into said barrier layer and wherein said prevention of said penetration of said WF 6 gas prevents the formation of said volcano defects.
Claim 5
Independent Claim
143 words
A method of forming tungsten plug metallization without volcano defects in the fabrication of integrated circuits comprising: providing semiconductor device structures in and on a semiconductor substrate; providing an insulating layer covering said semiconductor device structures wherein a contact opening is made through said insulating layer to said semiconductor substrate; depositing a glue layer conformally over the surface of said insulating layer and within said contact opening; depositing a barrier layer conformally over said glue layer; depositing a stress buffer layer comprising one of the group containing titanium silicide and cobalt silicide and having a thickness of between about 500 and 1500 Angstroms overlying said barrier layer wherein said stress buffer layer prevents volcano defects; and forming a tungsten plug within said contact opening to complete said formation of said tungsten plug metallization without volcano defects in said fabrication of said integrated circuit.
Claim 6
Independent Claim
143 words
A method of forming tungsten plug metallization without volcano defects in the fabrication of integrated circuits comprising: providing semiconductor device structures in and on a semiconductor substrate; providing an insulating layer covering said semiconductor device structures wherein a contact opening is made through said insulating layer to said semiconductor substrate; depositing a glue layer conformally over the surface of said insulating layer and within said contact opening; depositing a barrier layer conformally over said glue layer; depositing a stress buffer layer comprising one of the group containing titanium silicide and cobalt silicide and having a thickness of between about 500 and 1500 Angstroms overlying said barrier layer wherein said stress buffer layer prevents volcano defects; and forming a tungsten plug within said contact opening to complete said formation of said tungsten plug metallization without volcano defects in said fabrication of said integrated circuit.
Claim 7
Dependent Claim
24 words
The method according to claim 4 wherein said glue layer is composed of titanium having a thickness of between about 500 and 1000 Angstroms.
Claim 8
Dependent Claim
25 words
The method according to claim 4 wherein said barrier layer is composed of titanium nitride having a thickness of between about 500 and 1500 Angstroms.
Claim 9
Dependent Claim
82 words
The method according to claim 4 wherein said tungsten plug is deposited using WF 6 gas as a precursor and wherein the presence of said stress buffer layer prevents the formation of stress cracks in said underlying barrier layer and wherein the prevention of said stress cracks prevents the penetration of said WF 6 gas through said barrier layer to said glue layer and wherein said prevention of said penetration of said WF 6 gas prevents the formation of said volcano defects.
Claim 10
Independent Claim
202 words
A method of forming tungsten plug metallization without volcano defects in the fabrication of integrated circuits comprising: providing semiconductor device structures in and on a semiconductor substrate; providing an insulating layer covering said semiconductor device structures wherein a contact opening is made through said insulating layer to said semiconductor substrate; depositing a titanium layer conformally over the surface of said insulating layer and within said contact opening; forming a titanium nitride layer overlying said titanium layer; depositing a stress buffer layer comprising one of the group containing tungsten silicide, and cobalt silicide and having a thickness of between about 500 and 1500 Angstroms overlying said titanium nitride layer wherein said stress buffer layer prevents the formation of stress cracks in said titanium nitride layer; and forming a tungsten plug within said contact opening using WF 6 gas as a precursor wherein said prevention of said stress cracks prevents the penetration of said WF 6 gas through said titanium nitride layer to said titanium layer and wherein said prevention of said penetration of said WF 6 gas prevents the formation of said volcano defects to complete said formation of said tungsten plug metallization without volcano defects in said fabrication of said integrated circuit.
Claim 11
Independent Claim
202 words
A method of forming tungsten plug metallization without volcano defects in the fabrication of integrated circuits comprising: providing semiconductor device structures in and on a semiconductor substrate; providing an insulating layer covering said semiconductor device structures wherein a contact opening is made through said insulating layer to said semiconductor substrate; depositing a titanium layer conformally over the surface of said insulating layer and within said contact opening; forming a titanium nitride layer overlying said titanium layer; depositing a stress buffer layer comprising one of the group containing tungsten silicide, and cobalt silicide and having a thickness of between about 500 and 1500 Angstroms overlying said titanium nitride layer wherein said stress buffer layer prevents the formation of stress cracks in said titanium nitride layer; and forming a tungsten plug within said contact opening using WF 6 gas as a precursor wherein said prevention of said stress cracks prevents the penetration of said WF 6 gas through said titanium nitride layer to said titanium layer and wherein said prevention of said penetration of said WF 6 gas prevents the formation of said volcano defects to complete said formation of said tungsten plug metallization without volcano defects in said fabrication of said integrated circuit.
Claim 12
Dependent Claim
20 words
The method according to claim 8 wherein said titanium layer has a thickness of between about 500 and 1000 Angstroms.
Claim 13
Dependent Claim
21 words
The method according to claim 8 wherein said titanium nitride layer has a thickness of between about 500 and 1500 Angstroms.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-09-29 | 2001-03-31 | 2001-09-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-09-29 | 2005-03-31 | 2005-09-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-09-29 | 2009-03-31 | 2009-09-30 | $7700.00 | Window Closed / Lapsed |