US5670410A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of forming integrated CMP stopper and analog capacitor
Assignee: GlobalFoundries Singapore Pte Ltd
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Filing: 1996-09-25
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Granted: 1997-09-23
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Expires: 2016-09-25
Abstract
Abstract An analog capacitor is formed as part of an integrated circuit, using normal manufacturing methods, and then the upper electrode of this capacitor is used as part of the end point detection scheme during chem.-mech. polishing (CMP). Said upper electrode is formed from polysilicon and as soon as its upper surface is exposed as a result of the CMP, the presence of silicon particles in the removed material is readily detected by one of several possible methods.
Inventors
- 👤 Yang Pan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 07:31
CPC Classifications
H; H10; H10P; H10P95/00; H10P95/06; H10P95/062; B; B24; B24B; B24B37/00; B24B37/005; B24B37/013; B24B49/00; B24B49/14; H10D; H10D1/00; H10D1/60; H10D1/68; H10P74/00; H10P74/23; H10P74/238; H10P74/27; H10P74/277; Y; Y10; Y10S; Y10S148/00; Y10S148/014
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
146 words
A method for end point detection during CMP, including manufacture of an analog capacitor, comprising: providing an integrated circuit having active devices electrically isolated from one another by a region of field oxide; depositing a first layer of polysilicon on the field oxide; patterning and etching said first polysilicon layer to form a lower electrode and a connector thereto; depositing a first insulating layer over said first polysilicon layer; depositing a second polysilicon layer of a first thickness over said first insulating layer; patterning and etching said second polysilicon layer to form an upper electrode that overlies the lower electrode, thereby forming an analog capacitor; depositing a second insulating layer over said second polysilicon layer to a thickness greater than said first thickness; and using a polishing head, applying CMP to the second insulating layer until the presence of polysilicon in the removed material is detected.
Claim 2
Independent Claim
146 words
A method for end point detection during CMP, including manufacture of an analog capacitor, comprising: providing an integrated circuit having active devices electrically isolated from one another by a region of field oxide; depositing a first layer of polysilicon on the field oxide; patterning and etching said first polysilicon layer to form a lower electrode and a connector thereto; depositing a first insulating layer over said first polysilicon layer; depositing a second polysilicon layer of a first thickness over said first insulating layer; patterning and etching said second polysilicon layer to form an upper electrode that overlies the lower electrode, thereby forming an analog capacitor; depositing a second insulating layer over said second polysilicon layer to a thickness greater than said first thickness; and using a polishing head, applying CMP to the second insulating layer until the presence of polysilicon in the removed material is detected.
Claim 3
Dependent Claim
20 words
The method of claim 1 wherein the first and second polysilicon layers are deposited by Low Pressure Chemical Vapor Deposition.
Claim 4
Dependent Claim
20 words
The method of claim 1 wherein the thickness of the first polysilicon layer is between about 0.2 and 0.5 microns.
Claim 5
Dependent Claim
20 words
The method of claim 1 wherein the resistivity of the first polysilicon layer is between about 0.1 and 5 ohm-cms.
Claim 6
Dependent Claim
13 words
The method of claim 1 wherein the first insulating layer comprises tetra-ethyl orthosilicate.
Claim 7
Dependent Claim
20 words
The method of claim 1 wherein the thickness of the first insulating layer is between about 0.02 and 0.15 microns.
Claim 8
Dependent Claim
20 words
The method of claim 1 wherein the thickness of the second polysilicon layer is between about 0.2 and 0.6 microns.
Claim 9
Dependent Claim
20 words
The method of claim 1 wherein the resistivity of the second polysilicon layer is between about 0.1 and 5 ohm-cms.
Claim 10
Dependent Claim
23 words
The method of claim 1 wherein the second insulating layer is taken from the group consisting of BPSG, BPTEOS, BSG, PSG, and TEOS.
Claim 11
Dependent Claim
20 words
The method of claim 1 wherein the thickness of the second insulating layer is between about 0.5 and 1.5 microns.
Claim 12
Dependent Claim
41 words
The method of claim 1 further comprising: following CMP, depositing a layer of conductive material over said upper electrode and field oxide; and etching said layer of conductive material to form a pattern that includes a connector to said upper electrode.
Claim 13
Dependent Claim
28 words
The method of claim 1 wherein the detection of the presence of polysilicon in the removed material further comprises sensing a change in load by the polishing head.
Claim 14
Dependent Claim
29 words
The method of claim 1 wherein the detection of the presence of polysilicon in the removed material further comprises sensing a change in the temperature of the polishing head.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-09-22 | 2001-03-24 | 2001-09-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-09-22 | 2005-03-24 | 2005-09-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-09-22 | 2009-03-24 | 2009-09-23 | $7700.00 | Window Closed / Lapsed |